JP5090384B2 - 基板合着装置 - Google Patents
基板合着装置 Download PDFInfo
- Publication number
- JP5090384B2 JP5090384B2 JP2009015004A JP2009015004A JP5090384B2 JP 5090384 B2 JP5090384 B2 JP 5090384B2 JP 2009015004 A JP2009015004 A JP 2009015004A JP 2009015004 A JP2009015004 A JP 2009015004A JP 5090384 B2 JP5090384 B2 JP 5090384B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chuck
- surface plate
- chamber
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Display)等、多様な平板表示装置が開発された。
図1を参照すると、基板合着装置は、上部チャンバ(100)、下部チャンバ(200)及び駆動部(240)を含む。
force)を用いて基板を吸着することである。このような静電チャック(102)は、大きくポリイミド(polyimide)タイプの静電チャック(102)とセラミックタイプの静電チャック(102)に区分することができる。静電チャック(102)の製造方法は公知の技術であるため、詳細な説明は省略する。
101 上定盤
102 上部基板チャック
130 下部チャック
150 空気膨脹部
151 ベースブロック
152 膨脹部材
153 シリンダ
154 スライダ
155 段差
200 下部チャンバ
201 下定盤
202 下部チャック
220 基板乗降装置
230 照明装置
240 駆動部
250 シーリング部材
310、410 ベースプレート
311、411 設置部
320、420 粘着剤
321、421 入出口
322、422 段差部
323 支持突起
330、430 基板分離器
331、431 プッシャ
331a、431a 支え部
331b、431b 押し部
332 ダイアフラム
333、433 スプリング
431c Oリング
432 ピストン
432a ピストンロッド
432b カバー
432c 押し突起
S1 第1の基板
S2 第2の基板
Claims (2)
- 上部チャンバ;
上記上部チャンバに接して合着空間を形成する下部チャンバ;
上記上部チャンバの下面に配置され、板形状で形成された上定盤;
上記上定盤の下面に複数個が分散配置され、基板を付着して固定させる基板チャック;及び、
上記上定盤の下面に選択的に突出可能に設けられ、突出の際、上記基板を下側に押し出して、上記基板チャックから上記基板を離脱させるための基板分離器;を含み、
前記基板分離器は、内部に貫通孔が形成されるベースブロック、上記貫通孔の上側に空気を供給する空気供給部、及び上記貫通孔の下側に設けられて上記空気供給部から空気が供給されると下側に膨脹する膨脹部材を有し、前記膨張部材が上記基板に直接接して上記基板を離脱させる基板合着装置。 - 請求項1において、
上記膨脹部材は、上記上定盤の下面に沿って棒形状に備えられることを特徴とする基板合着装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080051493A KR100942304B1 (ko) | 2008-06-02 | 2008-06-02 | 기판척, 기판합착장치 |
KR10-2008-0051493 | 2008-06-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009294638A JP2009294638A (ja) | 2009-12-17 |
JP5090384B2 true JP5090384B2 (ja) | 2012-12-05 |
Family
ID=41542839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009015004A Expired - Fee Related JP5090384B2 (ja) | 2008-06-02 | 2009-01-27 | 基板合着装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5090384B2 (ja) |
KR (1) | KR100942304B1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101326016B1 (ko) * | 2010-10-06 | 2013-11-07 | 엘아이지에이디피 주식회사 | 기판분리모듈 및 기판분리장치 |
KR101349329B1 (ko) * | 2011-01-18 | 2014-01-10 | 엘아이지에이디피 주식회사 | 유기발광소자 밀봉 시스템 및 밀봉방법 |
JP5843130B2 (ja) * | 2011-05-17 | 2016-01-13 | 株式会社ブイ・テクノロジー | 基板への光学フィルム貼付装置 |
JP5923764B2 (ja) * | 2011-05-23 | 2016-05-25 | 株式会社ブイ・テクノロジー | フィルム貼付装置 |
JP5843133B2 (ja) * | 2011-05-30 | 2016-01-13 | 株式会社ブイ・テクノロジー | 基板への光学フィルム貼付装置 |
JP6398301B2 (ja) * | 2014-05-09 | 2018-10-03 | 藤倉化成株式会社 | 吸着離脱装置 |
KR101805821B1 (ko) * | 2015-06-30 | 2017-12-07 | 히라따기꼬오 가부시키가이샤 | 홀딩 유닛 및 본딩 방법 |
JP6181808B2 (ja) * | 2015-06-30 | 2017-08-16 | 平田機工株式会社 | 保持ユニット及び貼合方法 |
KR102296395B1 (ko) * | 2019-12-26 | 2021-09-01 | 주식회사 에스에프에이 | 정밀 합착장치 |
WO2023190247A1 (ja) * | 2022-03-29 | 2023-10-05 | 株式会社クリエイティブテクノロジー | ワーク吸着装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0914294A (ja) * | 1995-06-30 | 1997-01-14 | Jatco Corp | クラッチピストン装置 |
KR100895468B1 (ko) * | 2004-10-28 | 2009-05-06 | 신에츠 엔지니어링 가부시키가이샤 | 점착 척 장치 |
JP2006273578A (ja) * | 2005-03-03 | 2006-10-12 | Norio Kojima | 平板状パネルの保持装置 |
KR100898793B1 (ko) * | 2005-12-29 | 2009-05-20 | 엘지디스플레이 주식회사 | 액정표시소자용 기판 합착 장치 |
JP4449923B2 (ja) * | 2006-02-27 | 2010-04-14 | 株式会社日立プラントテクノロジー | 基板の組立方法およびその装置 |
JP2008034435A (ja) * | 2006-07-26 | 2008-02-14 | Shin-Etsu Engineering Co Ltd | 基板保持用チャック装置 |
-
2008
- 2008-06-02 KR KR1020080051493A patent/KR100942304B1/ko not_active IP Right Cessation
-
2009
- 2009-01-27 JP JP2009015004A patent/JP5090384B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20090125398A (ko) | 2009-12-07 |
JP2009294638A (ja) | 2009-12-17 |
KR100942304B1 (ko) | 2010-02-16 |
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