JP5085814B2 - 透明基材のための積層体 - Google Patents
透明基材のための積層体 Download PDFInfo
- Publication number
- JP5085814B2 JP5085814B2 JP2000578259A JP2000578259A JP5085814B2 JP 5085814 B2 JP5085814 B2 JP 5085814B2 JP 2000578259 A JP2000578259 A JP 2000578259A JP 2000578259 A JP2000578259 A JP 2000578259A JP 5085814 B2 JP5085814 B2 JP 5085814B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- laminate
- metal oxide
- composite metal
- sno
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 19
- 239000010410 layer Substances 0.000 claims abstract description 131
- 239000002131 composite material Substances 0.000 claims abstract description 27
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 24
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 239000011521 glass Substances 0.000 claims abstract description 20
- 238000004544 sputter deposition Methods 0.000 claims abstract description 18
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 15
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 14
- 239000002346 layers by function Substances 0.000 claims abstract description 12
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 6
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 5
- 229910052796 boron Inorganic materials 0.000 claims abstract description 5
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 5
- 229910052738 indium Inorganic materials 0.000 claims abstract description 5
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 5
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 5
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 5
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 5
- 238000009792 diffusion process Methods 0.000 claims abstract description 4
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 4
- 230000004888 barrier function Effects 0.000 claims abstract 2
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 18
- 229910045601 alloy Inorganic materials 0.000 claims description 13
- 239000000956 alloy Substances 0.000 claims description 13
- 229910052718 tin Inorganic materials 0.000 claims description 12
- 229910052725 zinc Inorganic materials 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 6
- 229910007717 ZnSnO Inorganic materials 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 5
- 238000005546 reactive sputtering Methods 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 229910052596 spinel Inorganic materials 0.000 claims description 4
- 239000011029 spinel Substances 0.000 claims description 4
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910001120 nichrome Inorganic materials 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 229910008322 ZrN Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 abstract description 15
- 238000000576 coating method Methods 0.000 abstract description 15
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052709 silver Inorganic materials 0.000 abstract description 7
- 239000004332 silver Substances 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 description 36
- 239000011701 zinc Substances 0.000 description 31
- 238000000034 method Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 7
- 229910001128 Sn alloy Inorganic materials 0.000 description 6
- 239000005329 float glass Substances 0.000 description 6
- 229910001297 Zn alloy Inorganic materials 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000002386 leaching Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910007657 ZnSb Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2453—Coating containing SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/211—SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/216—ZnO
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
- C03C2217/242—Doped oxides with rare earth metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12896—Ag-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848751.7 | 1998-10-22 | ||
| DE19848751A DE19848751C1 (de) | 1998-10-22 | 1998-10-22 | Schichtsystem für transparente Substrate |
| PCT/FR1999/002548 WO2000024686A1 (fr) | 1998-10-22 | 1999-10-20 | Empilement de couches pour substrats transparents |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002528372A JP2002528372A (ja) | 2002-09-03 |
| JP2002528372A5 JP2002528372A5 (enExample) | 2006-11-30 |
| JP5085814B2 true JP5085814B2 (ja) | 2012-11-28 |
Family
ID=7885313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000578259A Expired - Fee Related JP5085814B2 (ja) | 1998-10-22 | 1999-10-20 | 透明基材のための積層体 |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US6541133B1 (enExample) |
| EP (1) | EP1042247B1 (enExample) |
| JP (1) | JP5085814B2 (enExample) |
| AT (1) | ATE457961T1 (enExample) |
| CA (1) | CA2315917C (enExample) |
| DE (2) | DE19848751C1 (enExample) |
| ES (1) | ES2341405T3 (enExample) |
| PL (1) | PL200034B1 (enExample) |
| PT (1) | PT1042247E (enExample) |
| WO (1) | WO2000024686A1 (enExample) |
Families Citing this family (73)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2353506A1 (en) | 1998-11-02 | 2000-05-11 | 3M Innovative Properties Company | Transparent conductive oxides for plastic flat panel displays |
| US7976916B2 (en) | 1999-05-25 | 2011-07-12 | Saint-Gobain Vitrage | Refrigerated display case having a transparent insulating glazing unit |
| FR2810118B1 (fr) * | 2000-06-07 | 2005-01-21 | Saint Gobain Vitrage | Substrat transparent comportant un revetement antireflet |
| FR2827855B1 (fr) | 2001-07-25 | 2004-07-02 | Saint Gobain | Vitrage muni d'un empilement de couches minces reflechissant les infrarouges et/ou le rayonnement solaire |
| DE10152211C1 (de) * | 2001-10-23 | 2003-05-15 | Saint Gobain | Schichtsystem für transparente Substrate |
| US6748264B2 (en) * | 2002-02-04 | 2004-06-08 | Fook Tin Technologies Limited | Body fat analyzer with integral analog measurement electrodes |
| FR2856678B1 (fr) * | 2003-06-26 | 2005-08-26 | Saint Gobain | Vitrage muni d'un empilement de couches minces reflechissant les infrarouges et/ou le rayonnement solaire |
| FR2856627B1 (fr) | 2003-06-26 | 2006-08-11 | Saint Gobain | Substrat transparent muni d'un revetement avec proprietes de resistance mecanique |
| DE10333619B3 (de) * | 2003-07-24 | 2004-12-16 | Saint-Gobain Glass Deutschland Gmbh | Schichtsystem für transparente Substrate |
| DE10351616A1 (de) | 2003-11-05 | 2005-06-16 | Arcon Ii Flachglasveredelung Gmbh & Co Kg | Thermisch hoch belastbares Low-E Schichtsystem, Verfahren zur Herstellung und Verwendung der mit dem Schichtsystems beschichteten Substrate |
| FR2862961B1 (fr) | 2003-11-28 | 2006-02-17 | Saint Gobain | Substrat transparent utilisable alternativement ou cumulativement pour le controle thermique, le blindage electromagnetique et le vitrage chauffant. |
| DE50312424D1 (de) * | 2003-12-02 | 2010-04-01 | Scheuten Glasgroep Bv | Temperbares Low-e-Schichtsystem; Verfahren zur Herstellung und Low-e-Glasprodukt mit Schichtsystem |
| FR2865420B1 (fr) * | 2004-01-28 | 2007-09-14 | Saint Gobain | Procede de nettoyage d'un substrat |
| EP1833768B1 (fr) | 2004-12-21 | 2012-06-13 | AGC Glass Europe | Feuille de verre portant un empilage multi-couches |
| US7393584B2 (en) * | 2005-01-14 | 2008-07-01 | Solutia Incorporated | Multiple layer laminate with moisture barrier |
| US7628896B2 (en) | 2005-07-05 | 2009-12-08 | Guardian Industries Corp. | Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same |
| US20070071983A1 (en) * | 2005-09-23 | 2007-03-29 | Solutia, Inc. | Multiple layer glazing bilayer |
| US7342716B2 (en) | 2005-10-11 | 2008-03-11 | Cardinal Cg Company | Multiple cavity low-emissivity coatings |
| FR2898123B1 (fr) * | 2006-03-06 | 2008-12-05 | Saint Gobain | Substrat muni d'un empilement a proprietes thermiques |
| US7695785B2 (en) * | 2006-07-14 | 2010-04-13 | Guardian Industries Corp. | Coated article with oxides and/or oxynitrides of antimony and/or zinc dielectric layer(s) and corresponding method |
| BRPI0721299B1 (pt) * | 2006-12-28 | 2018-07-24 | 3M Innovative Properties Company. | Método para formação de um filme condutivo em um suporte de polímero flexível, filme condutivo e método para a fabricação de um artigo de vitrificação |
| FR2911130B1 (fr) | 2007-01-05 | 2009-11-27 | Saint Gobain | Procede de depot de couche mince et produit obtenu |
| US8334452B2 (en) * | 2007-01-08 | 2012-12-18 | Guardian Industries Corp. | Zinc oxide based front electrode doped with yttrium for use in photovoltaic device or the like |
| DE202008018513U1 (de) | 2008-01-04 | 2014-10-31 | Saint-Gobain Glass France | Dispositif |
| GB0803702D0 (en) * | 2008-02-28 | 2008-04-09 | Isis Innovation | Transparent conducting oxides |
| FR2928461B1 (fr) * | 2008-03-10 | 2011-04-01 | Saint Gobain | Substrat transparent comportant un revetement antireflet |
| US20090260678A1 (en) * | 2008-04-16 | 2009-10-22 | Agc Flat Glass Europe S.A. | Glass substrate bearing an electrode |
| US8350451B2 (en) * | 2008-06-05 | 2013-01-08 | 3M Innovative Properties Company | Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer |
| KR102054782B1 (ko) | 2009-08-03 | 2019-12-11 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 광학적으로 투명한 전도성 금속 또는 금속 합금 박막의 형성 방법 및 그에 의해 제조된 필름 |
| KR20110033769A (ko) * | 2009-09-25 | 2011-03-31 | (주)엘지하우시스 | 저방사 유리 및 이의 제조방법 |
| US10654747B2 (en) * | 2010-03-29 | 2020-05-19 | Vitro Flat Glass Llc | Solar control coatings with subcritical copper |
| US9932267B2 (en) | 2010-03-29 | 2018-04-03 | Vitro, S.A.B. De C.V. | Solar control coatings with discontinuous metal layer |
| US10654748B2 (en) | 2010-03-29 | 2020-05-19 | Vitro Flat Glass Llc | Solar control coatings providing increased absorption or tint |
| BE1019346A3 (fr) * | 2010-05-25 | 2012-06-05 | Agc Glass Europe | Vitrage de controle solaire. |
| US8808882B2 (en) * | 2010-09-17 | 2014-08-19 | Guardian Industries Corp. | Coated article having boron doped zinc oxide based seed layer with enhanced durability under functional layer and method of making the same |
| US8815420B2 (en) * | 2010-09-17 | 2014-08-26 | Guardian Industries Corp. | Coated article having zinc oxide seed layer with reduced stress under functional layer and method of making the same |
| EP2444381A1 (de) | 2010-10-19 | 2012-04-25 | Saint-Gobain Glass France | Transparente Scheibe |
| CN102617050A (zh) * | 2011-01-28 | 2012-08-01 | 鸿富锦精密工业（深圳）有限公司 | 镀膜玻璃及其制备方法 |
| DE102011000800A1 (de) * | 2011-02-17 | 2012-08-23 | Glas Trösch Holding AG | Beschichtungsverfahren, Schichtsystem sowie Verglasungselement |
| US8557391B2 (en) | 2011-02-24 | 2013-10-15 | Guardian Industries Corp. | Coated article including low-emissivity coating, insulating glass unit including coated article, and/or methods of making the same |
| US8679633B2 (en) | 2011-03-03 | 2014-03-25 | Guardian Industries Corp. | Barrier layers comprising NI-inclusive alloys and/or other metallic alloys, double barrier layers, coated articles including double barrier layers, and methods of making the same |
| US8709604B2 (en) | 2011-03-03 | 2014-04-29 | Guardian Industries Corp. | Barrier layers comprising Ni-inclusive ternary alloys, coated articles including barrier layers, and methods of making the same |
| US8679634B2 (en) | 2011-03-03 | 2014-03-25 | Guardian Industries Corp. | Functional layers comprising Ni-inclusive ternary alloys and methods of making the same |
| US8790783B2 (en) | 2011-03-03 | 2014-07-29 | Guardian Industries Corp. | Barrier layers comprising Ni and/or Ti, coated articles including barrier layers, and methods of making the same |
| CN102350834B (zh) * | 2011-07-20 | 2013-09-25 | 福耀玻璃工业集团股份有限公司 | 一种低辐射镀膜玻璃 |
| US9011969B2 (en) * | 2011-12-27 | 2015-04-21 | Intermolecular, Inc. | Low-E panel with improved dielectric layer and method for forming the same |
| US9045363B2 (en) * | 2011-12-27 | 2015-06-02 | Intermolecular, Inc. | Low-E panels with ternary metal oxide dielectric layer and method for forming the same |
| CN102527370B (zh) * | 2011-12-30 | 2013-07-24 | 洛阳理工学院 | 一种纳米锌掺杂氧化锡/锡酸锌异质结的合成方法 |
| MX2014008319A (es) | 2012-01-10 | 2014-08-21 | Saint Gobain | Panel transparente con recubrimiento electricamente conductor. |
| ES2621478T3 (es) | 2012-01-10 | 2017-07-04 | Saint-Gobain Glass France | Luna transparente con recubrimiento conductor de electricidad |
| US8900729B2 (en) | 2012-11-19 | 2014-12-02 | Guardian Industries Corp. | Coated article with low-E coating including zinc oxide inclusive layer(s) with additional metal(s) |
| EP2928838A1 (de) | 2012-12-06 | 2015-10-14 | Saint-Gobain Glass France | Glasscheibe mit mindestens einer schutzschicht, die zinn-zinkoxid enthält |
| JP6310935B2 (ja) | 2012-12-06 | 2018-04-11 | サン−ゴバン グラス フランス | 耐火板ガラスおよび耐火グレージングアセンブリ |
| US20140170422A1 (en) * | 2012-12-14 | 2014-06-19 | Intermolecular Inc. | Low emissivity coating with optimal base layer material and layer stack |
| KR101767796B1 (ko) | 2012-12-17 | 2017-08-11 | 쌩-고벵 글래스 프랑스 | 전기 전도성 코팅을 갖는 투명 판유리 |
| CN105189394A (zh) * | 2013-03-12 | 2015-12-23 | Ppg工业俄亥俄公司 | 提供增加的吸光度或色彩的阳光控制涂层 |
| US9499899B2 (en) | 2013-03-13 | 2016-11-22 | Intermolecular, Inc. | Systems, methods, and apparatus for production coatings of low-emissivity glass including a ternary alloy |
| FR3017128A1 (fr) | 2014-01-31 | 2015-08-07 | Saint Gobain | Vitrage facile a nettoyer comprenant une couche externe a base d'oxyde d'etain et de zinc |
| CN103897696B (zh) * | 2014-03-31 | 2016-05-04 | 华南理工大学 | 一种Cr掺杂的纳米近红外长余辉材料及其制备方法 |
| EP2949463A1 (de) | 2014-05-28 | 2015-12-02 | Saint-Gobain Glass France | Brandschutzscheibe und Brandschutzverglasung |
| JP6251122B2 (ja) * | 2014-05-29 | 2017-12-20 | 積水化学工業株式会社 | バリアフィルム、積層バリアフィルム及びそれらの製造方法 |
| US9416049B2 (en) * | 2014-06-23 | 2016-08-16 | Intermolecular, Inc. | Low-e panels and methods for forming the same |
| WO2016017649A1 (ja) * | 2014-08-01 | 2016-02-04 | 旭硝子株式会社 | ガラス積層体、無機層付き支持基板、電子デバイスの製造方法及び、無機層付き支持基板の製造方法 |
| US9745792B2 (en) | 2015-03-20 | 2017-08-29 | Cardinal Cg Company | Nickel-aluminum blocker film multiple cavity controlled transmission coating |
| WO2017021590A1 (fr) | 2015-07-31 | 2017-02-09 | Saint-Gobain Glass France | Vitrage de salle de bain |
| US10214956B2 (en) * | 2017-01-05 | 2019-02-26 | Guardian Glass, LLC | Heat treatable coated article having titanium nitride and nickel chrome based IR reflecting layers |
| US10179946B2 (en) * | 2017-03-03 | 2019-01-15 | Guardian Glass, LLC | Coated article having low-E coating with IR reflecting layer(s) and niobium bismuth based high index layer and method of making same |
| US11078718B2 (en) | 2018-02-05 | 2021-08-03 | Vitro Flat Glass Llc | Solar control coatings with quadruple metallic layers |
| GB201805065D0 (en) * | 2018-03-28 | 2018-05-09 | Pilkington Group Ltd | Coated glass pane |
| DE202019104357U1 (de) | 2019-08-08 | 2019-08-14 | Saint-Gobain Sekurit Deutschland Gmbh & Co. Kg | Verbesserte Widerstandsfähigkeit von PDLC-Folien gegen Strahlung durch IR- und UV-reflektierende Beschichtungen auf Seite II einer Verbundscheibe |
| GB201916515D0 (en) | 2019-11-13 | 2019-12-25 | Pilkington Group Ltd | Coated glass substrate |
| EP4214050B1 (de) | 2020-09-21 | 2024-07-17 | Saint-Gobain Glass France | Projektionsanordnung für ein head-up-display (hud) mit p-polarisierter strahlung |
| EP4562620A1 (de) | 2022-07-29 | 2025-06-04 | Saint-Gobain Glass France | Anordnung für fahrerassistenzsystem |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU561315B2 (en) * | 1984-10-29 | 1987-05-07 | Ppg Industries Ohio, Inc. | Sputtering films of metal alloy oxide |
| US4716086A (en) * | 1984-12-19 | 1987-12-29 | Ppg Industries, Inc. | Protective overcoat for low emissivity coated article |
| US4859532A (en) * | 1986-11-27 | 1989-08-22 | Asahi Glass Company Ltd. | Transparent laminated product |
| GB2256282A (en) * | 1991-04-02 | 1992-12-02 | Elmwood Sensors | Electrochromic device. |
| US5296302A (en) * | 1992-03-27 | 1994-03-22 | Cardinal Ig Company | Abrasion-resistant overcoat for coated substrates |
| JPH06318406A (ja) * | 1992-12-16 | 1994-11-15 | Idemitsu Kosan Co Ltd | 導電性透明基材およびその製造方法 |
| JP3373898B2 (ja) * | 1993-07-30 | 2003-02-04 | 出光興産株式会社 | 透明導電膜およびその製造方法 |
| US5397920A (en) * | 1994-03-24 | 1995-03-14 | Minnesota Mining And Manufacturing Company | Light transmissive, electrically-conductive, oxide film and methods of production |
| JPH08277112A (ja) * | 1995-04-06 | 1996-10-22 | Central Glass Co Ltd | 透明導電性酸化物材料 |
| CA2179853C (en) * | 1995-06-26 | 2007-05-22 | Susumu Suzuki | Laminate |
| JPH0985893A (ja) * | 1995-06-26 | 1997-03-31 | Asahi Glass Co Ltd | 積層体 |
| JP3804698B2 (ja) * | 1996-02-16 | 2006-08-02 | 三井化学株式会社 | 積層体及びその製造方法 |
| DE69825398T3 (de) * | 1997-12-11 | 2008-07-31 | Saint-Gobain Glass France | Durchsichtiges Substrat mit einem Dünnschichtaufbau mit Infrarot reflektierenden Eigenschaften |
| DE19852358C1 (de) * | 1998-11-13 | 2000-05-25 | Ver Glaswerke Gmbh | Thermisch hoch belastbares Low-E-Schichtsystem |
-
1998
- 1998-10-22 DE DE19848751A patent/DE19848751C1/de not_active Expired - Fee Related
-
1999
- 1999-10-20 CA CA2315917A patent/CA2315917C/fr not_active Expired - Fee Related
- 1999-10-20 EP EP99949079A patent/EP1042247B1/fr not_active Expired - Lifetime
- 1999-10-20 WO PCT/FR1999/002548 patent/WO2000024686A1/fr not_active Ceased
- 1999-10-20 DE DE69942018T patent/DE69942018D1/de not_active Expired - Lifetime
- 1999-10-20 PT PT99949079T patent/PT1042247E/pt unknown
- 1999-10-20 AT AT99949079T patent/ATE457961T1/de active
- 1999-10-20 PL PL341644A patent/PL200034B1/pl not_active IP Right Cessation
- 1999-10-20 ES ES99949079T patent/ES2341405T3/es not_active Expired - Lifetime
- 1999-10-20 US US09/582,077 patent/US6541133B1/en not_active Expired - Lifetime
- 1999-10-20 JP JP2000578259A patent/JP5085814B2/ja not_active Expired - Fee Related
-
2003
- 2003-01-30 US US10/354,132 patent/US6783876B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20030143435A1 (en) | 2003-07-31 |
| ATE457961T1 (de) | 2010-03-15 |
| PL200034B1 (pl) | 2008-11-28 |
| DE69942018D1 (de) | 2010-04-01 |
| DE19848751C1 (de) | 1999-12-16 |
| ES2341405T3 (es) | 2010-06-18 |
| JP2002528372A (ja) | 2002-09-03 |
| EP1042247A1 (fr) | 2000-10-11 |
| EP1042247B1 (fr) | 2010-02-17 |
| CA2315917A1 (fr) | 2000-05-04 |
| WO2000024686A1 (fr) | 2000-05-04 |
| PL341644A1 (en) | 2001-04-23 |
| US6783876B2 (en) | 2004-08-31 |
| CA2315917C (fr) | 2012-12-18 |
| US6541133B1 (en) | 2003-04-01 |
| PT1042247E (pt) | 2010-05-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5085814B2 (ja) | 透明基材のための積層体 | |
| US6159621A (en) | Glass substrate provided with a thin-film stack having reflective properties in the infrared and/or in the region of solar radiation | |
| US6432545B1 (en) | Glazing provided with a low-emissivity multilayer stack | |
| US8043707B2 (en) | Highly heat-resistant low-emissivity multilayer system for transparent substrates | |
| CA2046161C (en) | Low emissivity film | |
| EP0226993B1 (en) | Durable sputtered films of metal alloy oxides | |
| EP2817432B1 (en) | Coated article with low-e coating having multilayer overcoat and method of making same | |
| US6833194B1 (en) | Protective layers for sputter coated article | |
| US5506037A (en) | Heat-reflecting and/or electrically heatable laminated glass pane | |
| US9017821B2 (en) | Coated article with low-E coating having multilayer overcoat and method of making same | |
| EP0343695B1 (en) | Sputtered films for metal alloy oxides | |
| EP1150928B1 (en) | Glazing panel | |
| US7981516B2 (en) | Transparent substrate which is covered with a stack of thin layers having reflection properties in infrared and/or solar radiation | |
| EP3004015B1 (en) | Low-emissivity glazing | |
| AU764332B2 (en) | Protective layers for sputter coated article | |
| US6020077A (en) | Transparent substrate provided with a thin-film stack with properties in the infrared | |
| US20060240266A1 (en) | Transparent substrate comprising a coating with mechanical strength properties | |
| JPS63183164A (ja) | 高透過率、低輻射率の耐熱性の窓又はウインドシールド | |
| JPH05221692A (ja) | 可視スペクトル領域内で高い透過特性を有し、かつ熱放射に対して高い反射特性を有する板ガラスの製法及びその板ガラス | |
| EP3589592B1 (en) | Coated article with low-e coating having ir reflecting system with silver and zinc based barrier layer(s) | |
| SE469523B (sv) | Belagt foerglasningsmaterial och saett foer dess framstaellning | |
| JP2003034828A (ja) | 電磁波シールド用のＡｇ合金膜、電磁波シールド用Ａｇ合金膜形成体及び電磁波シールド用Ａｇ合金スパッタリングターゲット | |
| JP3997177B2 (ja) | 電磁波シールド用Ａｇ合金膜、電磁波シールド用Ａｇ合金膜形成体および電磁波シールド用Ａｇ合金膜の形成用のＡｇ合金スパッタリングターゲット | |
| JPH03187735A (ja) | 選択透過膜付きガラスの製造方法 | |
| JP2006505482A (ja) | 透明基材のための層システム及びコーティングされた基材 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061010 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061010 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090818 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20091117 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20091125 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100217 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110222 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110520 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110527 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110819 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120515 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120604 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120807 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120906 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150914 Year of fee payment: 3 |
|
| LAPS | Cancellation because of no payment of annual fees |