JP5080172B2 - 画像検出装置 - Google Patents
画像検出装置 Download PDFInfo
- Publication number
- JP5080172B2 JP5080172B2 JP2007216980A JP2007216980A JP5080172B2 JP 5080172 B2 JP5080172 B2 JP 5080172B2 JP 2007216980 A JP2007216980 A JP 2007216980A JP 2007216980 A JP2007216980 A JP 2007216980A JP 5080172 B2 JP5080172 B2 JP 5080172B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- data
- scan
- protection
- diode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims description 49
- 239000000758 substrate Substances 0.000 claims description 84
- 238000003860 storage Methods 0.000 claims description 57
- 230000002457 bidirectional effect Effects 0.000 claims description 48
- 239000011159 matrix material Substances 0.000 claims description 41
- 230000001681 protective effect Effects 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 30
- 230000005669 field effect Effects 0.000 claims description 24
- 238000009825 accumulation Methods 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 52
- 239000003990 capacitor Substances 0.000 description 46
- 239000010410 layer Substances 0.000 description 42
- 238000004519 manufacturing process Methods 0.000 description 22
- 230000005611 electricity Effects 0.000 description 19
- 230000003068 static effect Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 12
- 239000011521 glass Substances 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14676—X-ray, gamma-ray or corpuscular radiation imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14692—Thin film technologies, e.g. amorphous, poly, micro- or nanocrystalline silicon
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/30—Transforming light or analogous information into electric information
- H04N5/32—Transforming X-rays
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Thin Film Transistor (AREA)
- Light Receiving Elements (AREA)
- Liquid Crystal (AREA)
- Control Of El Displays (AREA)
Description
図1には、本発明の実施の形態に係る放射線画像検出装置100の全体構成が示されている。
その他、本実施の形態で説明した放射線画像検出装置100の構成(図1参照。)及びTFTアクティブマトリクス基板10の構成(図2〜図7、及び図9)は一例であり、本発明の主旨を逸脱しない範囲内において適宜変更可能であることは言うまでもない。
5 電荷蓄積容量(蓄積部)
10 アクティブマトリクス基板(基板)
11 電荷収集電極
20 バックゲート電極
30 各双方向ダイオード(第1保護回路)
100 放射線画像検出装置
101 スキャン配線
103 画像センサ部
104 スキャン信号制御装置(電圧印加回路)
105 信号検出回路(検出回路)
110 共通配線(第1保護配線)
111A 共通配線(第2保護配線)
111B 共通配線(第2保護配線)
112 保護回路(第2保護回路)
Claims (10)
- 照射された、検出対象とする画像を示す電磁波によって発生する電荷が蓄積される複数の蓄積部、当該複数の蓄積部に各々個別に接続された複数のデータ配線、過大電圧から回路を保護するための第1保護配線、及び前記複数のデータ配線と前記第1保護配線とを各々個別に接続し、当該データ配線と第1保護配線との間の電位差が所定の第1許容レベル以上となると電流が流れる複数の第1保護回路を有する基板と、
前記複数のデータ配線に接続され、前記複数の蓄積部に各々蓄積された電荷を取り出して前記画像を構成する各画素の情報として電荷量を検出する検出回路であって、過大電圧から回路を保護するための第2保護配線、及び前記複数のデータ配線と前記第2保護配線とを各々個別に接続し、当該データ配線と第2保護配線との間の電位差が所定の第2許容レベル以上となると電流が流れる複数の第2保護回路を有する検出回路と、を備え、
前記複数の第1保護回路は、前記第1許容レベルが前記第2保護回路の第2許容レベルよりも高くなるように構成されたことを特徴とする画像検出装置。 - 前記第1保護回路は、2個のダイオードが並列に互いのアノードとカソードが各々接続されて構成された双方向ダイオードである
請求項1記載の画像検出装置。 - 前記ダイオードは、バックゲート型の電界効果トランジスタのゲートとドレインが電気的に接続されて構成されたものであり、
前記蓄積部に蓄積された電荷を取り出す際に、前記複数の第1保護回路を構成する各電界効果トランジスタのゲートに対して当該電界効果トランジスタをオフ状態とする電圧を印加する電圧印加回路をさらに備えた
請求項2記載の画像検出装置。 - 前記基板は、前記複数のデータ配線が平行に設けられ、当該複数のデータ配線と交差して複数のスキャン配線が平行にさらに設けられると共に、前記データ配線と前記スキャン配線との各交差部にそれぞれ前記蓄積部及び当該前記蓄積部からの蓄積された電荷の取り出しを制御する前記電界効果トランジスタが2次元状に多数設けられ、前記複数のスキャン配線に各々印加される電圧によって当該電界効果トランジスタのオン・オフ状態が制御され、
前記複数の第1保護回路を構成する各電界効果トランジスタのゲートは何れか1本のスキャン配線に接続された
請求項3記載の画像検出装置。 - 前記複数の第1保護回路を構成する各電界効果トランジスタのゲートは平行に設けられた前記複数のスキャン配線のうちの最も端に位置するスキャン配線に接続された
請求項4記載の画像検出装置。 - 前記複数のスキャン配線は、各々前記第1保護配線と、ダイオード又は所定値以上の抵抗値を有する部材によって接続された
請求項4又は請求項5記載の画像検出装置。 - 前記基板は、複数の層が積層されて形成されたTFTアクティブマトリクス基板であり、
前記基板の前記電界効果トランジスタのバックゲート電極は、絶縁膜を介して半導体層上層に、ゲート電極と対向配置された請求項3〜請求項6の何れか1項記載の画像検出装置。 - 前記基板の前記電界効果トランジスタのバックゲート電極は、前記データ配線と同一の部材によって形成された
請求項7記載の画像検出装置。 - 前記バックゲート電極は、前記蓄積部の発生した電荷を収集する電荷収集電極となる層と同じ層に形成された
請求項7記載の画像検出装置。 - 前記基板は、前記スキャン配線と接続されたスキャン配線用の前記第1保護配線、前記データ配線と接続されたデータ配線用の前記第1保護配線、及び前記スキャン配線用の前記第1保護配線と前記データ配線用の前記第1保護配線とを接続する第3保護回路をさらに有する
請求項4〜請求項9の何れか1項記載の画像検出装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007216980A JP5080172B2 (ja) | 2007-08-23 | 2007-08-23 | 画像検出装置 |
US12/674,438 US8530813B2 (en) | 2007-08-23 | 2008-06-18 | Image detecting device |
PCT/JP2008/061129 WO2009025120A1 (ja) | 2007-08-23 | 2008-06-18 | 画像検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007216980A JP5080172B2 (ja) | 2007-08-23 | 2007-08-23 | 画像検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009054614A JP2009054614A (ja) | 2009-03-12 |
JP5080172B2 true JP5080172B2 (ja) | 2012-11-21 |
Family
ID=40378027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007216980A Active JP5080172B2 (ja) | 2007-08-23 | 2007-08-23 | 画像検出装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8530813B2 (ja) |
JP (1) | JP5080172B2 (ja) |
WO (1) | WO2009025120A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10353256B2 (en) | 2016-02-19 | 2019-07-16 | Mitsubishi Electric Corporation | Array substrate and liquid crystal display |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5174988B2 (ja) * | 2010-04-07 | 2013-04-03 | シャープ株式会社 | 回路基板および表示装置 |
WO2011135920A1 (ja) * | 2010-04-30 | 2011-11-03 | シャープ株式会社 | 回路基板、表示装置および回路基板の製造方法 |
JP5754171B2 (ja) * | 2011-02-28 | 2015-07-29 | コニカミノルタ株式会社 | 放射線画像撮影システムおよび放射線画像撮影装置 |
KR101804316B1 (ko) | 2011-04-13 | 2017-12-05 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
US8698137B2 (en) * | 2011-09-14 | 2014-04-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9619689B2 (en) * | 2012-02-06 | 2017-04-11 | Qualcomm Incorporated | System and method of using an electric field device |
US10325937B2 (en) | 2014-02-24 | 2019-06-18 | Lg Display Co., Ltd. | Thin film transistor substrate with intermediate insulating layer and display using the same |
US10985196B2 (en) | 2014-02-24 | 2021-04-20 | Lg Display Co., Ltd. | Thin film transistor substrate with intermediate insulating layer and display using the same |
US9214508B2 (en) | 2014-02-24 | 2015-12-15 | Lg Display Co., Ltd. | Thin film transistor substrate with intermediate insulating layer and display using the same |
US9881986B2 (en) * | 2014-02-24 | 2018-01-30 | Lg Display Co., Ltd. | Thin film transistor substrate and display using the same |
US9691799B2 (en) | 2014-02-24 | 2017-06-27 | Lg Display Co., Ltd. | Thin film transistor substrate and display using the same |
US9721973B2 (en) | 2014-02-24 | 2017-08-01 | Lg Display Co., Ltd. | Thin film transistor substrate and display using the same |
US10186528B2 (en) | 2014-02-24 | 2019-01-22 | Lg Display Co., Ltd. | Thin film transistor substrate and display using the same |
US10903246B2 (en) | 2014-02-24 | 2021-01-26 | Lg Display Co., Ltd. | Thin film transistor substrate and display using the same |
CN104218042B (zh) * | 2014-09-02 | 2017-06-09 | 合肥鑫晟光电科技有限公司 | 一种阵列基板及其制备方法、显示装置 |
JP7326518B2 (ja) * | 2018-03-20 | 2023-08-15 | 株式会社ジャパンディスプレイ | 光センサー装置 |
KR20210070780A (ko) * | 2019-12-05 | 2021-06-15 | 엘지디스플레이 주식회사 | 디지털 엑스레이 검출기용 박막 트랜지스터 어레이 기판과 디지털 엑스레이 검출기 및 그 제조 방법 |
KR20210079566A (ko) * | 2019-12-20 | 2021-06-30 | 엘지디스플레이 주식회사 | 디지털 엑스레이 검출기용 박막 트랜지스터 어레이 기판 및 이를 포함하는 디지털 엑스레이 검출기 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9226890D0 (en) * | 1992-12-23 | 1993-02-17 | Philips Electronics Uk Ltd | An imaging device |
JPH10177186A (ja) | 1996-12-19 | 1998-06-30 | Hitachi Ltd | 液晶表示装置 |
GB0119299D0 (en) * | 2001-08-08 | 2001-10-03 | Koninkl Philips Electronics Nv | Electrostatic discharge protection for pixellated electronic device |
JP2004311593A (ja) * | 2003-04-03 | 2004-11-04 | Sharp Corp | 電磁波検出器およびアクティブマトリクス基板 |
JP2005260263A (ja) * | 2005-04-18 | 2005-09-22 | Toshiba Corp | X線撮像装置 |
JP4142066B2 (ja) * | 2006-06-01 | 2008-08-27 | エプソンイメージングデバイス株式会社 | 電気光学装置および電子機器 |
JP4211805B2 (ja) * | 2006-06-01 | 2009-01-21 | エプソンイメージングデバイス株式会社 | 電気光学装置および電子機器 |
-
2007
- 2007-08-23 JP JP2007216980A patent/JP5080172B2/ja active Active
-
2008
- 2008-06-18 US US12/674,438 patent/US8530813B2/en active Active
- 2008-06-18 WO PCT/JP2008/061129 patent/WO2009025120A1/ja active Application Filing
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10353256B2 (en) | 2016-02-19 | 2019-07-16 | Mitsubishi Electric Corporation | Array substrate and liquid crystal display |
Also Published As
Publication number | Publication date |
---|---|
JP2009054614A (ja) | 2009-03-12 |
WO2009025120A1 (ja) | 2009-02-26 |
US20100276604A1 (en) | 2010-11-04 |
US8530813B2 (en) | 2013-09-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5080172B2 (ja) | 画像検出装置 | |
US8039809B2 (en) | Sensor panel and image detecting device | |
EP1593160B1 (en) | Semiconductor radiation image pickup apparatus | |
US7812313B2 (en) | Conversion apparatus, radiation detecting apparatus, and radiation detecting system | |
EP2869338B1 (en) | Esd protecting system and x ray flat plate detector | |
US7804071B2 (en) | Image detection device | |
WO2011102030A1 (ja) | アクティブマトリクス基板、ガラス基板、液晶パネル、および液晶表示装置 | |
US9357143B2 (en) | Image pickup unit and image pickup display system | |
CN109427837B (zh) | 用于数字x射线检测器的阵列基板及其制造方法 | |
CN103066083A (zh) | 检测设备和检测系统 | |
JP5398564B2 (ja) | 放射線検出素子 | |
JP2008148090A (ja) | 画像信号読出方法および装置並びに画像信号読出システム | |
JP5479188B2 (ja) | 電子装置 | |
CN104396017B (zh) | 制造x射线平板检测器的方法和x射线平板检测器tft阵列基板 | |
US7705282B2 (en) | EDS protection for an image detecting device | |
KR102583562B1 (ko) | 디지털 엑스레이 검출기용 어레이 기판과 이를 포함하는 엑스레이 검출기 | |
EP3041049A1 (en) | Array substrate, radiation detector, and wiring substrate | |
KR100514108B1 (ko) | 2차원 화상검출기 | |
JP2010003766A (ja) | 電磁波検出素子 | |
JP2004311593A (ja) | 電磁波検出器およびアクティブマトリクス基板 | |
JP2011075327A (ja) | 放射線撮影装置 | |
CN111381272A (zh) | 数字x射线检测器 | |
JP2009272452A (ja) | 固体撮像装置 | |
JP2009290171A (ja) | 固体撮像装置 | |
US11335706B2 (en) | Thin film transistor array substrate for high-resolution digital X-ray detector and high-resolution digital X-ray detector including the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100218 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120731 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120830 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150907 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5080172 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |