JP5079330B2 - 液晶表示装置の製造方法 - Google Patents
液晶表示装置の製造方法 Download PDFInfo
- Publication number
- JP5079330B2 JP5079330B2 JP2006526793A JP2006526793A JP5079330B2 JP 5079330 B2 JP5079330 B2 JP 5079330B2 JP 2006526793 A JP2006526793 A JP 2006526793A JP 2006526793 A JP2006526793 A JP 2006526793A JP 5079330 B2 JP5079330 B2 JP 5079330B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- display device
- crystal display
- film
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133504—Diffusing, scattering, diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
- G02F1/133555—Transflectors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
- G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Saccharide Compounds (AREA)
- Compounds Of Unknown Constitution (AREA)
- Polysaccharides And Polysaccharide Derivatives (AREA)
Description
本実施の形態においては、反射電極とソース・ドレイン電極(下地電極)とがコンタクトホールを介して接続される場合について説明する。
本実施の形態においては、パネル外の端子形成位置に本発明が適用される場合について説明する。図7及び図8は、本発明の実施の形態2に係る液晶表示装置の製造方法の工程を説明するための断面図である。図7及び図8中、破線よりも左側がパネル領域であり、破線よりも右側(シール領域の外側)が端子形成領域Yである。
Claims (8)
- アクティブマトリクス型液晶表示装置の薄膜トランジスタにおける下地電極上の絶縁膜上にフォトエンボッシング材料を用いて凹凸を有する有機膜を形成する工程と、前記有機膜に非選択性のドライエッチングを施して前記有機膜の膜厚を減少させてコンタクトホール形成領域の前記絶縁膜を露出させる工程と、露出した前記絶縁膜にドライエッチングを施してコンタクトホールを形成する工程とを含み、前記有機膜の形成から前記コンタクトホールの形成までをドライプロセスで行うことを特徴とする液晶表示装置の製造方法。
- 前記コンタクトホールを形成する際に前記下地電極を露出させる工程と、得られた構造上に反射電極を形成して、露出した前記下地電極と前記反射電極とを接続する工程と、を含む請求項1記載の液晶表示装置の製造方法。
- 前記フォトエンボッシング材料は、露光及びベーキングでパターニングを行うことができる材料である請求項1又は請求項2記載の液晶表示装置の製造方法。
- 前記有機膜を形成する工程において、前記フォトエンボッシング材料に露光及びベーキングを施すことにより前記有機膜を形成する請求項3記載の液晶表示装置の製造方法。
- 前記露光の際に、ハーフトーンマスク又は回折マスクを用いる請求項4記載の液晶表示装置の製造方法。
- 前記絶縁膜を露出させる工程と前記コンタクトホールを形成する工程とを同一装置内で行う請求項1から請求項5のいずれか一項に記載の液晶表示装置の製造方法。
- 前記絶縁膜を露出させる工程におけるドライエッチングは、誘導結合型プラズマモード又は反応性イオンエッチングモードで行われる請求項1から請求項6のいずれか一項記載の液晶表示装置の製造方法。
- 前記液晶表示装置は、反射型液晶表示装置又は半透過型液晶表示装置である請求項1から請求項7のいずれか一項記載の液晶表示装置の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IBPCT/IB03/04248 | 2003-09-22 | ||
IB0304248 | 2003-09-22 | ||
PCT/IB2004/051784 WO2005029169A1 (en) | 2003-09-22 | 2004-09-17 | Method of manufacturing liquid crystal display device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007506134A JP2007506134A (ja) | 2007-03-15 |
JP5079330B2 true JP5079330B2 (ja) | 2012-11-21 |
Family
ID=34362336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006526793A Expired - Fee Related JP5079330B2 (ja) | 2003-09-22 | 2004-09-17 | 液晶表示装置の製造方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7518675B2 (ja) |
EP (1) | EP1668406B1 (ja) |
JP (1) | JP5079330B2 (ja) |
KR (1) | KR101027979B1 (ja) |
CN (1) | CN100468156C (ja) |
AT (1) | ATE503204T1 (ja) |
DE (1) | DE602004031959D1 (ja) |
TW (1) | TWI364575B (ja) |
WO (1) | WO2005029169A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005048774B4 (de) * | 2005-10-07 | 2009-04-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Substrat, das zumindest bereichsweise an einer Oberfläche mit einer Beschichtung eines Metalls versehen ist, sowie dessen Verwendung |
EP2492780B1 (en) * | 2009-11-26 | 2014-07-02 | Sharp Kabushiki Kaisha | A touch panel manufacturing method, and a method for manufacturing a display device provided with a touch panel |
GB2489940A (en) | 2011-04-11 | 2012-10-17 | Plastic Logic Ltd | Reflective pixel element for reflective display devices |
TWI435152B (zh) | 2011-08-16 | 2014-04-21 | Chunghwa Picture Tubes Ltd | 形成接觸窗的方法 |
KR20140094188A (ko) * | 2013-01-21 | 2014-07-30 | 삼성디스플레이 주식회사 | 액정 표시 장치 및 이의 제조 방법 |
JP6422991B2 (ja) * | 2014-03-21 | 2018-11-14 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | Cmutデバイス及び製造方法 |
CN107515498B (zh) | 2017-09-18 | 2020-06-05 | 上海天马微电子有限公司 | 阵列基板和显示面板 |
CN110941126B (zh) * | 2019-12-27 | 2021-04-27 | Tcl华星光电技术有限公司 | 阵列基板及其制作方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW409194B (en) * | 1995-11-28 | 2000-10-21 | Sharp Kk | Active matrix substrate and liquid crystal display apparatus and method for producing the same |
JP2000349301A (ja) * | 1999-04-01 | 2000-12-15 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2000353649A (ja) * | 1999-06-09 | 2000-12-19 | Tokyo Electron Ltd | 基板処理装置および基板処理方法 |
JP2001194662A (ja) * | 2000-01-14 | 2001-07-19 | Nec Corp | 反射型液晶表示装置及びその製造方法 |
JP4632522B2 (ja) | 2000-11-30 | 2011-02-16 | Nec液晶テクノロジー株式会社 | 反射型液晶表示装置の製造方法 |
JP4651826B2 (ja) * | 2001-01-31 | 2011-03-16 | Nec液晶テクノロジー株式会社 | 反射型表示装置及びその製造方法 |
JP3908552B2 (ja) * | 2001-03-29 | 2007-04-25 | Nec液晶テクノロジー株式会社 | 液晶表示装置及びその製造方法 |
JP2002328396A (ja) * | 2001-04-26 | 2002-11-15 | Nec Corp | 液晶表示装置及びその製造方法 |
TW490858B (en) * | 2001-04-26 | 2002-06-11 | Samsung Electronics Co Ltd | Polycrystalline thin film transistor for liquid crystal device(LCD) and method of manufacturing the same |
US7342622B2 (en) * | 2001-10-22 | 2008-03-11 | Samsung Electronics Co., Ltd. | Liquid crystal display for enhancing reflection and method of manufacturing the same |
-
2004
- 2004-09-17 US US10/572,839 patent/US7518675B2/en not_active Expired - Fee Related
- 2004-09-17 EP EP04770022A patent/EP1668406B1/en not_active Expired - Lifetime
- 2004-09-17 JP JP2006526793A patent/JP5079330B2/ja not_active Expired - Fee Related
- 2004-09-17 WO PCT/IB2004/051784 patent/WO2005029169A1/en active Application Filing
- 2004-09-17 DE DE602004031959T patent/DE602004031959D1/de not_active Expired - Lifetime
- 2004-09-17 KR KR1020067005432A patent/KR101027979B1/ko not_active IP Right Cessation
- 2004-09-17 CN CNB2004800272797A patent/CN100468156C/zh not_active Expired - Fee Related
- 2004-09-17 AT AT04770022T patent/ATE503204T1/de not_active IP Right Cessation
- 2004-09-22 TW TW093128718A patent/TWI364575B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1856731A (zh) | 2006-11-01 |
EP1668406B1 (en) | 2011-03-23 |
TW200515047A (en) | 2005-05-01 |
DE602004031959D1 (de) | 2011-05-05 |
US7518675B2 (en) | 2009-04-14 |
JP2007506134A (ja) | 2007-03-15 |
CN100468156C (zh) | 2009-03-11 |
US20070052885A1 (en) | 2007-03-08 |
KR101027979B1 (ko) | 2011-04-13 |
TWI364575B (en) | 2012-05-21 |
KR20070017467A (ko) | 2007-02-12 |
EP1668406A1 (en) | 2006-06-14 |
ATE503204T1 (de) | 2011-04-15 |
WO2005029169A1 (en) | 2005-03-31 |
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