JP5073968B2 - 化合物半導体エピタキシャル基板およびその製造方法 - Google Patents
化合物半導体エピタキシャル基板およびその製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 92
- 239000004065 semiconductor Substances 0.000 title claims description 48
- 150000001875 compounds Chemical class 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 13
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 10
- 239000010410 layer Substances 0.000 description 218
- 238000000034 method Methods 0.000 description 29
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 25
- 239000013078 crystal Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 13
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 12
- 239000002994 raw material Substances 0.000 description 12
- 125000006850 spacer group Chemical group 0.000 description 8
- 229910052733 gallium Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 150000004678 hydrides Chemical class 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 230000005533 two-dimensional electron gas Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical group [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QORIDDWXQPAYGJ-UHFFFAOYSA-N [AsH3].[AsH3] Chemical compound [AsH3].[AsH3] QORIDDWXQPAYGJ-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
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- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/205—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
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Description
電子情報通信学会、2006年総合大会講演論文集、CT-1-3「化合物半導体高周波デバイス用エピタキシャル成長技術」、2006年3月25日、国士舘大学
バック側p型キ フロント側p型 (cm2 / ガス濃度
ャリア濃度総量 キャリア濃度総 Vsec) (/cm2 )
A(/cm2 ) 量B(/cm2 )
1.3 ×1011 8.2×1010 1.5 9230 2.58×1012
1.9 ×1011 8.2×1010 2.3 9100 2.56×1012
5.6 ×1011 8.2×1010 6.9 8850 2.43×1012
2.08×1012 8.2×1010 25.3 8410 1.93×1012
2 バッファー層
3 下部活性層
4 チャネル層
5 上部活性層
6 コンタクト層
11 基板
12、13 バッファー層
14 バック側電子供給層
15、16 バック側スペーサー層
17 チャネル層
18、19 フロント側スペーサー層
20 フロント側電子供給層
21 ショットキー層
31 半絶縁性GaAs基板
32 p型キャリア濃度測定層
Claims (4)
- 電子が走行するチャネル層を有するプレーナデバイス用の3−5族化合物半導体エピタキシャル基板において、
前記チャネル層よりバック側にあるエピタキシャル層における単位面積当たりのp型キャリア濃度総量をA/cm2、前記チャネル層よりフロント側にあるエピタキシャル層における単位面積当たりのp型キャリア濃度総量をB/cm2としたとき、1.5≦A/B≦3.5であることを特徴とする3−5族化合物半導体エピタキシャル基板。 - 前記p型キャリア濃度総量A/cm2が、(前記チャネル層よりバック側にあるエピタキシャル層に含まれる活性状態のアクセプタ不純物による全てのp型キャリア濃度)×(前記バック側にある該当するエピタキシャル層の全ての膜厚)から計算した単位面積当たりのp型キャリア濃度総量値であり、前記p型キャリア濃度総量B/cm2が、(前記チャネル層よりフロント側にあるエピタキシャル層に含まれる活性状態のアクセプタ不純物による全てのp型キャリア濃度)×(前記フロント側にある該当するエピタキシャル層の全ての膜厚)から計算した単位面積当たりのp型キャリア濃度総量値である請求項1に記載の3−5族化合物半導体エピタキシャル基板。
- 前記チャネル層としてInGaAs層を有し、前記InGaAs層の室温(300K)での電子移動度が9000cm2/Vs以上であることを特徴とする請求項1または2に記載の3−5族化合物半導体エピタキシャル基板。
- 請求項1から3のいずれか一項に記載の化合物半導体エピタキシャル基板の製造方法において、MOCVD法により製造することを特徴とする3−5族化合物半導体エピタキシャル基板の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006150768A JP5073968B2 (ja) | 2006-05-31 | 2006-05-31 | 化合物半導体エピタキシャル基板およびその製造方法 |
TW096118921A TWI408265B (zh) | 2006-05-31 | 2007-05-28 | 化合物半導體磊晶基板及其製造方法 |
CN2007800251864A CN101484986B (zh) | 2006-05-31 | 2007-05-28 | 化合物半导体外延基板 |
KR1020087029999A KR20090026144A (ko) | 2006-05-31 | 2007-05-28 | 화합물 반도체 에피택셜 기판 및 그 제조 방법 |
US12/227,794 US7935984B2 (en) | 2006-05-31 | 2007-05-28 | Compound semiconductor epitaxial substrate and method for producing the same |
PCT/JP2007/061236 WO2007139218A1 (ja) | 2006-05-31 | 2007-05-28 | 化合物半導体エピタキシャル基板およびその製造方法 |
GB0821002A GB2452177A (en) | 2006-05-31 | 2007-05-28 | Compound semiconductor epitaxial substrate and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2006150768A JP5073968B2 (ja) | 2006-05-31 | 2006-05-31 | 化合物半導体エピタキシャル基板およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007324247A JP2007324247A (ja) | 2007-12-13 |
JP5073968B2 true JP5073968B2 (ja) | 2012-11-14 |
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JP2006150768A Expired - Fee Related JP5073968B2 (ja) | 2006-05-31 | 2006-05-31 | 化合物半導体エピタキシャル基板およびその製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7935984B2 (ja) |
JP (1) | JP5073968B2 (ja) |
KR (1) | KR20090026144A (ja) |
CN (1) | CN101484986B (ja) |
GB (1) | GB2452177A (ja) |
TW (1) | TWI408265B (ja) |
WO (1) | WO2007139218A1 (ja) |
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WO2011065210A1 (en) * | 2009-11-28 | 2011-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device |
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JP2708863B2 (ja) | 1989-03-20 | 1998-02-04 | 三洋電機株式会社 | エピタキシヤルウエハ及びその製造方法 |
JP3135939B2 (ja) * | 1991-06-20 | 2001-02-19 | 富士通株式会社 | Hemt型半導体装置 |
JPH0621106A (ja) | 1992-07-02 | 1994-01-28 | Hitachi Cable Ltd | 化合物半導体エピタキシャルウェハ |
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JP3177951B2 (ja) | 1997-09-29 | 2001-06-18 | 日本電気株式会社 | 電界効果トランジスタおよびその製造方法 |
US6198116B1 (en) * | 1998-04-14 | 2001-03-06 | The United States Of America As Represented By The Secretary Of The Air Force | Complementary heterostructure integrated single metal transistor fabrication method |
JP2001111038A (ja) * | 1999-10-12 | 2001-04-20 | Murata Mfg Co Ltd | 半導体装置 |
KR100438895B1 (ko) * | 2001-12-28 | 2004-07-02 | 한국전자통신연구원 | 고전자 이동도 트랜지스터 전력 소자 및 그 제조 방법 |
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WO2004040638A1 (ja) * | 2002-10-29 | 2004-05-13 | Matsushita Electric Industrial Co., Ltd. | 窒化砒化ガリウムインジウム系ヘテロ電界効果トランジスタ及びその製造方法並びにそれを用いた送受信装置 |
JP2004165314A (ja) | 2002-11-12 | 2004-06-10 | Toshiba Corp | 半導体装置およびその製造方法 |
JP4672959B2 (ja) * | 2002-12-25 | 2011-04-20 | 住友化学株式会社 | 化合物半導体エピタキシャル基板 |
JP4635444B2 (ja) * | 2004-01-27 | 2011-02-23 | 日立電線株式会社 | 電界効果トランジスタ用エピタキシャルウエハ |
JP2006012915A (ja) * | 2004-06-22 | 2006-01-12 | Hitachi Cable Ltd | Iii−v族化合物半導体装置及びその製造方法 |
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WO2007139218A1 (ja) | 2007-12-06 |
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US7935984B2 (en) | 2011-05-03 |
US20090166642A1 (en) | 2009-07-02 |
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