JP5058845B2 - 変位検出装置及びそれを有する光学機器 - Google Patents

変位検出装置及びそれを有する光学機器 Download PDF

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Publication number
JP5058845B2
JP5058845B2 JP2008042754A JP2008042754A JP5058845B2 JP 5058845 B2 JP5058845 B2 JP 5058845B2 JP 2008042754 A JP2008042754 A JP 2008042754A JP 2008042754 A JP2008042754 A JP 2008042754A JP 5058845 B2 JP5058845 B2 JP 5058845B2
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Japan
Prior art keywords
light
reflecting
light beam
reflected
light receiving
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2008042754A
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English (en)
Japanese (ja)
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JP2009198434A5 (enExample
JP2009198434A (ja
Inventor
英法 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008042754A priority Critical patent/JP5058845B2/ja
Priority to US12/390,630 priority patent/US7830531B2/en
Priority to EP09002580.0A priority patent/EP2093542B1/en
Priority to CN2009100044600A priority patent/CN101520312B/zh
Publication of JP2009198434A publication Critical patent/JP2009198434A/ja
Publication of JP2009198434A5 publication Critical patent/JP2009198434A5/ja
Application granted granted Critical
Publication of JP5058845B2 publication Critical patent/JP5058845B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2008042754A 2008-02-25 2008-02-25 変位検出装置及びそれを有する光学機器 Expired - Fee Related JP5058845B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008042754A JP5058845B2 (ja) 2008-02-25 2008-02-25 変位検出装置及びそれを有する光学機器
US12/390,630 US7830531B2 (en) 2008-02-25 2009-02-23 Displacement detecting device and optical instrument having the same
EP09002580.0A EP2093542B1 (en) 2008-02-25 2009-02-24 Displacement detecting device and optical instrument having the same
CN2009100044600A CN101520312B (zh) 2008-02-25 2009-02-25 位移检测装置及具有该位移检测装置的光学仪器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008042754A JP5058845B2 (ja) 2008-02-25 2008-02-25 変位検出装置及びそれを有する光学機器

Publications (3)

Publication Number Publication Date
JP2009198434A JP2009198434A (ja) 2009-09-03
JP2009198434A5 JP2009198434A5 (enExample) 2011-03-31
JP5058845B2 true JP5058845B2 (ja) 2012-10-24

Family

ID=40810524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008042754A Expired - Fee Related JP5058845B2 (ja) 2008-02-25 2008-02-25 変位検出装置及びそれを有する光学機器

Country Status (4)

Country Link
US (1) US7830531B2 (enExample)
EP (1) EP2093542B1 (enExample)
JP (1) JP5058845B2 (enExample)
CN (1) CN101520312B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010181181A (ja) * 2009-02-03 2010-08-19 Canon Inc スケール、それを有する変位検出装置、及びそれを有する撮像装置
DE202010017994U1 (de) * 2010-12-20 2013-07-10 Binder Gmbh Messsystem zum Messen der CO2-Konzentration in einem Klimaschrank oder einem Inkubator
CN102506722A (zh) * 2011-11-21 2012-06-20 北京中煤矿山工程有限公司 一种冻结壁位移测试方法
US10648839B2 (en) * 2017-05-22 2020-05-12 Mitutoyo Corporation Photoelectric encoder
CN113280842B (zh) * 2021-04-21 2022-10-18 温州大学 反透射一体式光电传感器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2280259A (en) 1993-07-24 1995-01-25 British Aerospace Detecting angular displacement.
JP2001349750A (ja) * 2000-06-08 2001-12-21 Olympus Optical Co Ltd 光学式エンコーダ
EP1235054B1 (en) 2001-02-20 2011-09-21 Canon Kabushiki Kaisha Optical displacement detecting apparatus
JP2003139572A (ja) * 2001-11-06 2003-05-14 Ntt Electornics Corp エンコーダ
JP4208483B2 (ja) 2002-05-21 2009-01-14 キヤノン株式会社 光学式エンコーダ
JP2005265512A (ja) * 2004-03-17 2005-09-29 Canon Inc 光学式エンコーダ
JP2008028025A (ja) * 2006-07-19 2008-02-07 Canon Inc 反射型センサ
JP5046718B2 (ja) * 2007-04-12 2012-10-10 株式会社ミツトヨ 光学式測定装置

Also Published As

Publication number Publication date
US7830531B2 (en) 2010-11-09
EP2093542A1 (en) 2009-08-26
CN101520312A (zh) 2009-09-02
CN101520312B (zh) 2011-03-09
US20090213390A1 (en) 2009-08-27
EP2093542B1 (en) 2015-08-12
JP2009198434A (ja) 2009-09-03

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