JP5050512B2 - 固体撮像装置の製造方法および半導体装置の製造方法 - Google Patents

固体撮像装置の製造方法および半導体装置の製造方法 Download PDF

Info

Publication number
JP5050512B2
JP5050512B2 JP2006328683A JP2006328683A JP5050512B2 JP 5050512 B2 JP5050512 B2 JP 5050512B2 JP 2006328683 A JP2006328683 A JP 2006328683A JP 2006328683 A JP2006328683 A JP 2006328683A JP 5050512 B2 JP5050512 B2 JP 5050512B2
Authority
JP
Japan
Prior art keywords
region
type
transistor
channel
channel region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006328683A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008141138A5 (enExample
JP2008141138A (ja
Inventor
総一郎 糸長
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2006328683A priority Critical patent/JP5050512B2/ja
Publication of JP2008141138A publication Critical patent/JP2008141138A/ja
Publication of JP2008141138A5 publication Critical patent/JP2008141138A5/ja
Application granted granted Critical
Publication of JP5050512B2 publication Critical patent/JP5050512B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2006328683A 2006-12-05 2006-12-05 固体撮像装置の製造方法および半導体装置の製造方法 Expired - Fee Related JP5050512B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006328683A JP5050512B2 (ja) 2006-12-05 2006-12-05 固体撮像装置の製造方法および半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006328683A JP5050512B2 (ja) 2006-12-05 2006-12-05 固体撮像装置の製造方法および半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2008141138A JP2008141138A (ja) 2008-06-19
JP2008141138A5 JP2008141138A5 (enExample) 2010-01-21
JP5050512B2 true JP5050512B2 (ja) 2012-10-17

Family

ID=39602264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006328683A Expired - Fee Related JP5050512B2 (ja) 2006-12-05 2006-12-05 固体撮像装置の製造方法および半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP5050512B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4715931B2 (ja) * 2009-02-10 2011-07-06 ソニー株式会社 電荷検出装置及び電荷検出方法、並びに固体撮像装置及びその駆動方法、並びに撮像装置
FR2959013B1 (fr) * 2010-04-16 2012-05-11 Commissariat Energie Atomique Dispositif de detection de rayonnement electromagnetique a sensibilite reduite au bruit spacial
JPWO2013027524A1 (ja) * 2011-08-24 2015-03-19 シャープ株式会社 固体撮像素子
US11094733B2 (en) 2018-10-18 2021-08-17 Canon Kabushiki Kaisha Semiconductor device, semiconductor memory, photoelectric conversion device, moving unit, manufacturing method of photoelectric conversion device, and manufacturing method of semiconductor memory
CN111524922A (zh) * 2020-05-29 2020-08-11 上海华力微电子有限公司 源极跟随管及cmos传感器的形成方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332892A (ja) * 2002-05-14 2003-11-21 Seiko Instruments Inc ラッチ回路及び半導体集積回路装置
JP4513497B2 (ja) * 2004-10-19 2010-07-28 ソニー株式会社 固体撮像装置

Also Published As

Publication number Publication date
JP2008141138A (ja) 2008-06-19

Similar Documents

Publication Publication Date Title
US10115761B2 (en) Solid-state imaging device and manufacturing method thereof
CN101488512B (zh) 固态图像拾取装置
US8426287B2 (en) Method of manufacturing semiconductor device, solid-state imaging device, and solid-state imaging apparatus
JP4513497B2 (ja) 固体撮像装置
US20160360126A1 (en) Solid-state image sensor and camera
US20140191290A1 (en) Solid-state imaging element
US7718498B2 (en) Semiconductor device and method of producing same
TW201310628A (zh) 固態成像裝置，製造固態成像裝置之方法，及電子裝置
CN100557808C (zh) 用于减小暗电流的图像传感器及其制造方法
KR20070007666A (ko) 이미지 센서 및 그 제조방법들
CN101222587A (zh) 固态成像器件和电子装置
JP5050512B2 (ja) 固体撮像装置の製造方法および半導体装置の製造方法
JP5274118B2 (ja) 固体撮像装置
JP2018125518A (ja) トランジスタ、製造方法
JP5267497B2 (ja) 固体撮像装置
US7671419B2 (en) Transistor having coupling-preventing electrode layer, fabricating method thereof, and image sensor having the same
JP5034598B2 (ja) 固体撮像素子及びその製造方法
JP4779575B2 (ja) 固体撮像素子
JP2018046089A (ja) 固体撮像装置及びその製造方法、並びに、電子機器
JP2005039219A (ja) 固体撮像装置
WO2018142970A1 (ja) トランジスタ、製造方法
JP2012124515A (ja) 固体撮像装置およびその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091130

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091130

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120307

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120403

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120521

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120626

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120709

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150803

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees