JP5049684B2 - Multilayer semiconductor device and manufacturing method thereof - Google Patents

Multilayer semiconductor device and manufacturing method thereof Download PDF

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Publication number
JP5049684B2
JP5049684B2 JP2007188915A JP2007188915A JP5049684B2 JP 5049684 B2 JP5049684 B2 JP 5049684B2 JP 2007188915 A JP2007188915 A JP 2007188915A JP 2007188915 A JP2007188915 A JP 2007188915A JP 5049684 B2 JP5049684 B2 JP 5049684B2
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Prior art keywords
semiconductor element
electrode terminal
semiconductor device
stacked
electrode
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Expired - Fee Related
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JP2007188915A
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Japanese (ja)
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JP2009026969A (en
Inventor
啓 村山
茂 水野
孝 栗原
晶紀 白石
光敏 東
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2007188915A priority Critical patent/JP5049684B2/en
Priority to KR1020080067370A priority patent/KR101541054B1/en
Priority to TW097126595A priority patent/TWI479637B/en
Priority to US12/175,689 priority patent/US7777349B2/en
Publication of JP2009026969A publication Critical patent/JP2009026969A/en
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Publication of JP5049684B2 publication Critical patent/JP5049684B2/en
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Abstract

A plurality of quadrilateral-shaped semiconductor elements are stacked on the one surface of a circuit substrate. A side surface wiring for making electrical connection between each of the electrode terminals of the semiconductor elements and a pad formed on the circuit substrate is formed by applying a conductive paste containing conductive particles. A metal wire whose one end is connected to the electrode terminal is extended along a tapered surface formed by cutting off an edge of the electrode terminal surface on which the electrode terminal is formed among edges formed along each of the sides of the semiconductor element. At least a part of the metal wire extended from each of the electrode terminals of the semiconductor elements to the tapered surface is electrically connected to the side surface wiring.

Description

本発明は積層型半導体装置及びその製造方法に関し、更に詳細には四角形状の複数の半導体素子が回路基板の一面側に積層されていると共に、前記半導体素子の各電極と回路基板に形成されたパッドとを電気的に接続する側面配線が形成された積層型半導体装置及びその製造方法に関する。   The present invention relates to a stacked semiconductor device and a manufacturing method thereof, and more specifically, a plurality of rectangular semiconductor elements are stacked on one surface side of a circuit board, and are formed on each electrode of the semiconductor element and the circuit board. The present invention relates to a stacked semiconductor device in which side wirings that electrically connect pads are formed and a method for manufacturing the same.

近年の半導体装置の大容量化、高密度化に伴い、図１１に示す積層型半導体装置の様に、半導体素子１００，１００を三次元に配置して高密度化を図ることが行われている。図１１に示す積層型半導体装置は、配線基板１０２の一面側に半導体素子１００，１００が接着層１０４，１０４を介して積層されており、半導体素子１００，１００の各周縁近傍に設けられた電極端子と配線基板１０２のパッドとは、金ワイヤ１０６，１０６・・でワイヤボンディングされて電気的に接続されている。
しかし、図１１に示す様に、半導体素子１００，１００の各周縁近傍に設けられた電極端子と配線基板１０２のパッドとをワイヤボンディングして電気的に接続することは、金ワイヤ１０６，１０６・・を保護すべく、金ワイヤ１０６，１０６・・等を樹脂封止することが必要となり、最終的に得られる積層型半導体装置が大型化する。
このため、複数の半導体素子を三次元に配置した積層型半導体装置の小型化を図るべく、下記特許文献１には、図１２に示す積層型半導体装置２００が提案されている。
図１２に示す積層型半導体装置２００は、配線基板２０２の一面側に積層した複数の半導体素子２０４，２０４・・の側面に、半導体素子２０４，２０４・・の各々の各電極端子と配線基板２０２のパッドとを電気的に接続する側面配線２０６，２０６・・が形成されている。
特開２００２−７６１６７号公報 With the recent increase in capacity and density of semiconductor devices, semiconductor elements 100 and 100 are arranged three-dimensionally to increase the density as in the stacked semiconductor device shown in FIG. . In the stacked semiconductor device shown in FIG. 11, semiconductor elements 100 and 100 are stacked on one surface side of the wiring substrate 102 via adhesive layers 104 and 104, and electrodes provided in the vicinity of the peripheral edges of the semiconductor elements 100 and 100. The terminals and the pads of the wiring board 102 are electrically connected by wire bonding with gold wires 106, 106.
However, as shown in FIG. 11, the electrode terminals provided in the vicinity of the peripheral edges of the semiconductor elements 100 and 100 and the pads of the wiring board 102 are electrically connected by wire bonding to the gold wires 106, 106. It is necessary to seal the gold wires 106, 106, etc. with a resin in order to protect the semiconductor device, and the stacked semiconductor device finally obtained becomes large.
For this reason, in order to reduce the size of a stacked semiconductor device in which a plurality of semiconductor elements are three-dimensionally arranged, the following Patent Document 1 proposes a stacked semiconductor device 200 shown in FIG.
12 includes, on the side surfaces of a plurality of semiconductor elements 204, 204,... Stacked on one surface side of the wiring board 202, each electrode terminal of each of the semiconductor elements 204, 204,. Side wirings 206, 206,... For electrically connecting the pads are formed.
JP 2002-76167 A

図１２に示す積層型半導体装置２００によれば、図１１に示す積層型半導体装置に比較して小型化を図ることができる。
しかしながら、図１２に示す積層型半導体装置２００を構成する半導体素子２０４，２０４・・としては、その側面側に電極端子が形成されている半導体素子を用いなければならず、一面側に電極端子が形成されている通常の半導体素子を用いることができない。
更に、図１２に示す積層型半導体装置２００の側面配線２０６，２０６・・は、半導体素子２０４，２０４・・を回路基板２０２の一面側に積層した後、半導体素子２０４，２０４・・の側面に蒸着法とリフトオフ法とを用いて形成しており、積層型半導体装置２００の製造工程を煩雑化している。
ところで、半導体素子２０４，２０４・・として、その一面側に電極端子が形成されている半導体素子を用いた場合、半導体素子の側面側に電極端子に一端が接続された再配線を引き出すことを要し、積層型半導体装置２００の製造工程を更に煩雑化する。
また、再配線に代えて、半導体素子の電極端子に一端を接続した金ワイヤを側面側に延出しようとしても、金ワイヤが半導体素子の角部で切断されてしまうことが判明した。金ワイヤの半導体素子の角部に相当する部分に、応力が集中され易いためと考えられる。
そこで、本発明の課題は、一面側に電極端子が形成されている通常の半導体素子を用いることができず、且つ半導体装置の製造工程を複雑化する、複数の半導体素子を積層した従来の積層型半導体装置及びその製造方法の課題を解決し、一面側に電極端子が形成されている通常の半導体素子を用いることができ、且つ積層型半導体装置の製造工程の複雑化を防止できる積層型半導体装置及びその製造方法を提供することにある。 The stacked semiconductor device 200 shown in FIG. 12 can be downsized as compared with the stacked semiconductor device shown in FIG.
However, as the semiconductor elements 204, 204,... Constituting the stacked semiconductor device 200 shown in FIG. 12, a semiconductor element having electrode terminals formed on the side surfaces thereof must be used. The formed normal semiconductor element cannot be used.
Further, the side wirings 206, 206,... Of the stacked semiconductor device 200 shown in FIG. 12 are formed on the side surfaces of the semiconductor elements 204, 204,. The deposition method and the lift-off method are used, and the manufacturing process of the stacked semiconductor device 200 is complicated.
However, when a semiconductor element having an electrode terminal formed on one side thereof is used as the semiconductor element 204, 204,..., It is necessary to draw out a rewiring having one end connected to the electrode terminal on the side surface side of the semiconductor element. In addition, the manufacturing process of the stacked semiconductor device 200 is further complicated.
Further, it has been found that even if an attempt is made to extend a gold wire having one end connected to the electrode terminal of the semiconductor element to the side surface instead of rewiring, the gold wire is cut at the corner of the semiconductor element. It is considered that stress is easily concentrated on a portion corresponding to the corner portion of the semiconductor element of the gold wire.
Accordingly, an object of the present invention is to provide a conventional lamination in which a plurality of semiconductor elements are laminated, which cannot use a normal semiconductor element having an electrode terminal formed on one side, and complicates the manufacturing process of a semiconductor device. Layered semiconductor device capable of solving the problems of the type semiconductor device and the manufacturing method thereof, using a normal semiconductor element having an electrode terminal formed on one side, and preventing the manufacturing process of the layered semiconductor device from becoming complicated It is to provide an apparatus and a manufacturing method thereof.

本発明者等は、前記課題を解決すべく検討した結果、半導体素子として、四角形状で且つ一面側に電極端子を形成した通常の半導体素子を用い、その各辺に沿って形成した角部のうち、電極端子を形成した電極端子面側の角部を面取りしたテーパ面に、その電極端子に一端を接続した金属ワイヤを延出した複数の半導体素子を、回路基板の一面側に積層した後、半導体素子の各電極と回路基板に形成されたパッドとを電気的に接続する側面配線を、各金属ワイヤの少なくとも一部と接触するように、金属粒子を含有する導電性ペーストを塗布して形成することによって、通常の半導体素子を用いた積層型半導体装置を容易に形成でき、且つ得られた積層型半導体装置の小型化も図ることができることを見出し、本発明に到達した。   As a result of studying to solve the above problems, the present inventors have used a normal semiconductor element having a rectangular shape and electrode terminals formed on one side as the semiconductor element, and the corner portions formed along each side thereof. After laminating a plurality of semiconductor elements on one surface side of a circuit board on a taper surface with chamfered corners on the electrode terminal surface side where the electrode terminals are formed, and extending metal wires with one ends connected to the electrode terminals Applying a conductive paste containing metal particles so that the side wiring that electrically connects each electrode of the semiconductor element and the pad formed on the circuit board is in contact with at least a part of each metal wire. It has been found that, by forming, a stacked semiconductor device using a normal semiconductor element can be easily formed, and the obtained stacked semiconductor device can be miniaturized, and the present invention has been achieved.

すなわち、本発明は、四角形状の複数の半導体素子が回路基板に積層されていると共に、前記半導体素子の各電極端子と回路基板に形成されたパッドとを電気的に接続する側面配線が形成された積層型半導体装置であって、前記半導体素子の各辺に沿って形成された角部のうち、少なくとも前記電極端子が形成された電極端子面側の角部が面取りされて形成されたテーパ面に、前記電極端子に一端が接続された金属ワイヤが延出され、且つ前記半導体素子の各々の電極端子からテーパ面に延出された金属ワイヤの少なくとも一部が、導電性粒子を含有する導電性ペーストを塗布して形成された側面配線に接触して電気的に接続されていることを特徴とする積層型半導体装置にある。
また、本発明は、四角形状の半導体素子であって、その各辺に沿って形成された角部のうち、少なくとも前記電極端子が形成された電極端子面側の角部が面取りされてテーパ面に形成された複数の半導体素子を用い、前記半導体素子の各々の各電極端子に一端を接続した金属ワイヤを、前記テーパ面に延出した後、前記半導体素子の各々を、その電極端子形成面が他の半導体素子との接着面又は露出面となるように回路基板の一面側に順次積層し、次いで、前記半導体素子の各テーパ面に延出されている金属ワイヤの少なくとも一部と接触するように、積層された複数の半導体素子の側面に導電性粒子を含有する導電性ペーストを塗布し、前記半導体素子の各電極と回路基板のパッドとを電気的に接続する側面配線を形成することを特徴とする積層型半導体装置の製造方法でもある。
かかる本発明において、金属ワイヤを、半導体素子のテーパ面を越えて側面側に延出することによって、金属ワイヤと側面配線との接合を向上できる。
また、半導体素子として、電極形成面側の辺に沿って形成された角部が面取りされてテーパ面に形成されていると共に、前記電極形成面に対して反対側の辺に沿って形成された角部も面取りされてテーパ面に形成されている半導体素子を用いることによって、積層された複数の半導体素子の側面に塗布した導電性ペーストがテーパ面に入り込み、金ワイヤと側面配線との接触を良好とすることができる。特に、金属ワイヤを、両テーパ面に延出することによって、金属ワイヤと側面配線との接合を更に一層向上できる。 That is, according to the present invention, a plurality of rectangular semiconductor elements are stacked on a circuit board, and side wirings that electrically connect each electrode terminal of the semiconductor element and a pad formed on the circuit board are formed. A taper surface formed by chamfering at least a corner on the electrode terminal surface side on which the electrode terminal is formed among corners formed along each side of the semiconductor element. Further, a metal wire having one end connected to the electrode terminal is extended, and at least a part of the metal wire extended from each electrode terminal of the semiconductor element to a tapered surface is conductive containing conductive particles. A laminated semiconductor device is characterized in that it is in contact with and electrically connected to a side wiring formed by applying a conductive paste.
In addition, the present invention is a rectangular semiconductor element, and of the corners formed along each side thereof, at least the corners on the electrode terminal surface side on which the electrode terminals are formed are chamfered to form a tapered surface. A plurality of semiconductor elements formed on the semiconductor element, a metal wire having one end connected to each electrode terminal of the semiconductor element is extended to the tapered surface, and each of the semiconductor elements is then connected to its electrode terminal forming surface. Are sequentially laminated on one surface side of the circuit board so as to be an adhesion surface or an exposed surface with another semiconductor element, and then contact at least a part of the metal wire extending to each tapered surface of the semiconductor element. As described above, a conductive paste containing conductive particles is applied to the side surfaces of a plurality of stacked semiconductor elements to form side wirings that electrically connect the electrodes of the semiconductor elements and the pads of the circuit board. Features It is also a method for manufacturing a stacked semiconductor device.
In the present invention, by extending the metal wire to the side surface beyond the tapered surface of the semiconductor element, the bonding between the metal wire and the side wiring can be improved.
Further, as a semiconductor element, a corner portion formed along the side on the electrode forming surface side is chamfered to be formed into a tapered surface, and is formed along the side opposite to the electrode forming surface. By using a semiconductor element whose corners are also chamfered and formed on a tapered surface, the conductive paste applied to the side surfaces of a plurality of stacked semiconductor elements enters the tapered surface, and makes contact between the gold wire and the side wiring. Can be good. In particular, by extending the metal wire to both tapered surfaces, the bonding between the metal wire and the side wiring can be further improved.

本発明に係る積層型半導体装置では、半導体素子の電極端子が形成された電極端子面側の角部が面取りされたテーパ面に延出した、電極端子に一端が接続された金属ワイヤの少なくとも一部が、金属粒子を含有する導電性ペーストを塗布して形成された側面配線と接触している。
この様に、本発明に係る積層型半導体装置では、半導体素子の電極端子に一端が接続された金属ワイヤを、半導体素子のテーパ面に延出しているため、半導体素子の一面側に電極端子が形成されている通常の半導体素子を用いることができる。
また、本発明に係る積層型半導体装置では、導電性粒子を含有する導電性ペーストを塗布して側面配線を形成するため、側面配線を蒸着法とリフトオフ法とを用いて形成する従来の半導体装置に比較して、その側面配線を容易に形成できる。
この様に、金属ワイヤと導電性ペーストとを接触した場合、金属ワイヤの導電性ペーストとの濡れ性が良好であるため、導電性ペーストが金属ワイヤの周面に集合され易く、隣接する側面配線との接触が避けられ、最終的に得られる積層型半導体装置の信頼性を向上できる。
しかも、積層した複数の半導体素子の側面には、半導体素子のテーパ面から成る開口部が開口されている。このため、積層した複数の半導体素子の側面に塗布した導電性ペーストの一部は開口部内に容易に進入でき、テーパ面に延出された金属リードと接触する。その結果、半導体素子の電極端子に一端が接続された金属リードは側面配線と確実に接触でき、積層型半導体装置の信頼性を更に向上できる。 In the stacked semiconductor device according to the present invention, at least one of the metal wires having one end connected to the electrode terminal extending to the tapered surface having the chamfered corner on the electrode terminal surface side where the electrode terminal of the semiconductor element is formed. The portion is in contact with a side wiring formed by applying a conductive paste containing metal particles.
As described above, in the stacked semiconductor device according to the present invention, the metal wire having one end connected to the electrode terminal of the semiconductor element extends to the tapered surface of the semiconductor element. A normal semiconductor element that is formed can be used.
Further, in the stacked semiconductor device according to the present invention, the side wiring is formed by using the vapor deposition method and the lift-off method in order to form the side wiring by applying the conductive paste containing conductive particles. Compared to this, the side wiring can be easily formed.
Thus, when the metal wire and the conductive paste are brought into contact with each other, the wettability of the metal wire with the conductive paste is good. And the reliability of the finally obtained stacked semiconductor device can be improved.
Moreover, an opening made of a tapered surface of the semiconductor element is opened on the side surface of the plurality of stacked semiconductor elements. For this reason, a part of the conductive paste applied to the side surfaces of the plurality of stacked semiconductor elements can easily enter the opening, and comes into contact with the metal lead extended to the tapered surface. As a result, the metal lead having one end connected to the electrode terminal of the semiconductor element can reliably contact the side wiring, and the reliability of the stacked semiconductor device can be further improved.

本発明に係る積層型半導体装置の一例を図１（ａ）（ｂ）に示す。図１（ａ）は積層型半導体装置１０の概略断面図であり、図１（ｂ）は積層型半導体装置１０の概略平面図である。図１に示す積層型半導体装置１０では、回路基板１２の一面側に、接着層１４，１４を介して半導体素子１６，１６が積層されている。
かかる半導体素子１６，１６の各々は、四角形状で且つ一面側に電極端子１８，１８・・を形成した半導体素子である。この半導体素子１６の各辺に沿って形成された角部のうち、電極端子１８，１８・・を形成した電極端子面側の角部が面取りされてテーパ面２０に形成されている。
更に、半導体素子１６，１６のテーパ面２０には、一端が電極端子１８に接続されている金属ワイヤとしての金ワイヤ２２が、テーパ面２０に延出されている。 An example of a stacked semiconductor device according to the present invention is shown in FIGS. FIG. 1A is a schematic cross-sectional view of the stacked semiconductor device 10, and FIG. 1B is a schematic plan view of the stacked semiconductor device 10. In the stacked semiconductor device 10 shown in FIG. 1, semiconductor elements 16 and 16 are stacked on one surface side of the circuit board 12 via adhesive layers 14 and 14.
Each of the semiconductor elements 16 and 16 is a semiconductor element having a quadrangular shape and electrode terminals 18, 18. Of the corners formed along each side of the semiconductor element 16, the corners on the electrode terminal surface side where the electrode terminals 18, 18... Are chamfered are formed on the tapered surface 20.
Further, a gold wire 22 as a metal wire, one end of which is connected to the electrode terminal 18, extends from the tapered surface 20 of the semiconductor elements 16, 16.

このテーパ面２０に延出された金ワイヤ２２は、回路基板１２の一面側に積層された半導体素子１６，１６の側面側に、銀粒子、銅粒子或いはカーボン粒子等の導電性粒子が含有された導電性ペーストを塗布して形成した側面配線２４と接触している。この側面配線は、回路基板１２の一面側に形成したパッド２６とも接触している。
この側面配線２４の一部は、図１（ａ）に示す様に、積層した複数の半導体素子１６，１６の側面に開口されている、テーパ面２０から成る凹溝の開口部内に進入し、テーパ面２０に延出した金ワイヤ２２と接触している。このため、半導体素子１６，１６の各々の電極端子１８に一端が接続された金ワイヤ２２は、側面配線２４と確実に接触できる。 The gold wire 22 extended to the tapered surface 20 contains conductive particles such as silver particles, copper particles, or carbon particles on the side surfaces of the semiconductor elements 16 and 16 laminated on one surface side of the circuit board 12. It is in contact with the side wiring 24 formed by applying a conductive paste. The side wiring is also in contact with a pad 26 formed on one side of the circuit board 12.
As shown in FIG. 1A, a part of the side wiring 24 enters into the opening of the concave groove formed of the tapered surface 20 that is opened on the side surfaces of the stacked semiconductor elements 16 and 16, It is in contact with a gold wire 22 extending on the tapered surface 20. Therefore, the gold wire 22 having one end connected to the electrode terminal 18 of each of the semiconductor elements 16 and 16 can reliably contact the side wiring 24.

図１に示す積層型半導体装置１０に用いる半導体素子１６は、図２（ａ）に示す様に、複数の半導体素子が造り込まれたウェーハ３０をダイシングする際に、ベベルカット用刃３２を用いて、ウェーハ３０にべベルカットを施し、図２（ｂ）に示す様に、ウェーハ３０の一面側にＶ字溝３３を形成する。このＶ字溝３３を形成したウェーハ３０の一面側は、半導体素子１６の電極端子１８，１８・・が形成されている電極端子形成面側である。
次いで、図２（ｂ）に示すＶ字溝３３の最深部を通り且つウェーハ３０の面に垂直な直線（点線３４で示す）上をダイシングブレードで切断し、テーパ面２０が一面側の角部に形成された半導体素子１６を得ることができる。 The semiconductor element 16 used in the stacked semiconductor device 10 shown in FIG. 1 uses a bevel cut blade 32 when dicing a wafer 30 in which a plurality of semiconductor elements are built, as shown in FIG. Then, the wafer 30 is bevel-cut to form a V-shaped groove 33 on one surface side of the wafer 30 as shown in FIG. The one surface side of the wafer 30 on which the V-shaped groove 33 is formed is the electrode terminal forming surface side on which the electrode terminals 18 of the semiconductor element 16 are formed.
Next, a straight line (shown by a dotted line 34) passing through the deepest portion of the V-shaped groove 33 shown in FIG. 2B and perpendicular to the surface of the wafer 30 is cut with a dicing blade, and the tapered surface 20 is a corner on one side. The semiconductor element 16 formed in the above can be obtained.

四角形状で且つ一面側に電極端子１８，１８・・を形成した半導体素子１６には、図３に示す様に、その電極端子１８に一端を接続した金ワイヤ２２を、テーパ面２０に延出する。
かかる金ワイヤ２２の半導体素子１６の電極端子１８への接続及び延出は、ワイヤボンダーを用いて行う。
先ず、図３（ａ）に示す様に、ワイヤボンダーのキャピラリー４０の先端から引き出した金ワイヤ２２の先端をトーチで溶融してボール２２ａを形成した後、ボール２２ａを電極端子１８上に圧着する。
更に、キャピラリー４０をテーパ面２０と反対方向に移動してキャピラリー４０から所定長さの金ワイヤ２２を引き出した後、図３（ｂ）に示す様に、キャピラリー４０をテーパ面２０の方向への移動を開始する。
引き続いて、図３（ｃ）に示す様に、キャピラリー４０をテーパ面２０に沿って、テーパ面２０の一端縁側から他端縁側方向に移動し、電極端子１８に一端が接続された金ワイヤ２２の他端がテーパ面２０の他端縁まで延出されたとき、図３（ｄ）に示す様に、キャピラリー４０によって金ワイヤ２２を引き千切る。 As shown in FIG. 3, a gold wire 22 having one end connected to the electrode terminal 18 is extended to the tapered surface 20 in the semiconductor element 16 having a rectangular shape and electrode terminals 18, 18. To do.
The connection and extension of the gold wire 22 to the electrode terminal 18 of the semiconductor element 16 are performed using a wire bonder.
First, as shown in FIG. 3A, after the tip of the gold wire 22 drawn from the tip of the capillary 40 of the wire bonder is melted with a torch to form the ball 22a, the ball 22a is crimped onto the electrode terminal 18. .
Further, after moving the capillary 40 in the direction opposite to the tapered surface 20 and pulling out the gold wire 22 having a predetermined length from the capillary 40, the capillary 40 is moved in the direction of the tapered surface 20 as shown in FIG. Start moving.
Subsequently, as shown in FIG. 3C, the capillary 40 is moved along the tapered surface 20 from the one end edge side of the tapered surface 20 toward the other end edge side, and the gold wire 22 having one end connected to the electrode terminal 18. When the other end is extended to the other end of the taper surface 20, the gold wire 22 is shredded by the capillary 40 as shown in FIG.

次いで、電極端子形成面に形成された電極端子１８に一端が接続された金ワイヤ２２がテーパ面２０に延出された半導体素子１６，１６は、図４に示す様に、回路基板１２の一面側（パッド２６が形成された面側）に接着層１４，１４を介して積層する。この際に、回路基板１２に直接搭載されている半導体素子１６は、その電極端子形成面が他の半導体素子１６の接着面となるように接着する。また、他の半導体素子１６は、その電極端子形成面が露出面となるように半導体素子１６上に積層する。
この様に、回路基板１２の一面側に積層された半導体素子１６，１６の側面には、図４に示す様に、銀粒子、銅粒子或いはカーボン粒子等の導電性粒子を含有する導電性ペースト２５を塗布する。この導電性ペースト２５は、塗布装置４２を構成する導電性ペーストが充填された充填槽４２ｂから窒素圧等の気体圧によってノズル４２ａから積層された半導体素子１６，１６の側面に吐出して塗布する。この際に、塗布装置４２を、積層された半導体素子１６，１６の下方から上方（図４に示す矢印方向）に移動することによって、導電性ペースト２５を半導体素子１６，１６の側面に帯状に形成できる。この帯状の導電性ペースト２５の一端は、回路基板１２のパッド２６と接触している。 Next, as shown in FIG. 4, the semiconductor elements 16, 16 in which the gold wire 22 having one end connected to the electrode terminal 18 formed on the electrode terminal formation surface is extended to the tapered surface 20, as shown in FIG. It is laminated on the side (surface side on which the pad 26 is formed) via the adhesive layers 14 and 14. At this time, the semiconductor element 16 directly mounted on the circuit board 12 is bonded so that the electrode terminal forming surface thereof becomes the bonding surface of the other semiconductor element 16. The other semiconductor element 16 is laminated on the semiconductor element 16 so that the electrode terminal formation surface is an exposed surface.
As shown in FIG. 4, a conductive paste containing conductive particles such as silver particles, copper particles, or carbon particles is formed on the side surfaces of the semiconductor elements 16 and 16 stacked on one side of the circuit board 12 as described above. 25 is applied. The conductive paste 25 is applied by discharging from a filling tank 42b filled with the conductive paste constituting the coating apparatus 42 to the side surfaces of the semiconductor elements 16 and 16 stacked from the nozzle 42a by a gas pressure such as nitrogen pressure. . At this time, the coating device 42 is moved from below the stacked semiconductor elements 16 and 16 upward (in the direction of the arrow shown in FIG. 4), so that the conductive paste 25 is banded on the side surfaces of the semiconductor elements 16 and 16. Can be formed. One end of the strip-shaped conductive paste 25 is in contact with the pad 26 of the circuit board 12.

更に、帯状の導電性ペースト２５は、積層した半導体素子１６，１６の側面に開口されている、テーパ面２０から成る凹溝の開口部内に容易に進入し、テーパ面２０に延出した金ワイヤ２２と接触する。
このため、回路基板及び半導体素子１６，１６を加熱炉に挿入して加熱処理することによって、半導体素子１６，１６の側面に側面配線２４を形成でき、半導体素子１６，１６各々の電極端子１８に一端が接続された金ワイヤ２２は、側面配線２４によって回路基板１２のパッド２６と電気的に接続できる。
ここで、導電性ペースト２５は、金ワイヤ２２との濡れ性が良好であるため、導電性ペースト２５は金ワイヤ２２の周面に集合し易く、隣接する金ワイヤ２２に塗布された導電性ペースト２２との接触を避けることができ、半導体素子１６，１６との電気的接続信頼性を向上できる。
図１〜図４に示す積層型半導体装置１０では、半導体素子１６の電極端子１８に一端が接続された金ワイヤ２２の他端がテーパ面２０に延出されていたが、図５に示す様に、金ワイヤ２２のテーパ面２０を越えて側面側に延出されていてもよい。
この場合、半導体素子１６の電極端子１８に一端が接続された金ワイヤ２２の延出を、図３に示す様に、ワイヤボンダーのキャピラリー４０を用いて行う。この際に、半導体素子１６の側面の途中で金ワイヤ２２を引き千切ってもよいが、図５に示す様に、半導体素子１６の下面側の角部を利用して金ワイヤ２２を引き千切ってもよい。
ここで、金ワイヤ２２の切断箇所に予めクランプ等によって傷を付けておくことによって、金ワイヤ２２を所定箇所で容易に引き千切ることができる。 Further, the strip-shaped conductive paste 25 easily enters the opening of the concave groove formed of the tapered surface 20 opened on the side surfaces of the stacked semiconductor elements 16, 16 and extends to the tapered surface 20. 22 is contacted.
Therefore, by inserting the circuit board and the semiconductor elements 16 and 16 into a heating furnace and performing the heat treatment, the side wiring 24 can be formed on the side surfaces of the semiconductor elements 16 and 16, and the electrode terminals 18 of the semiconductor elements 16 and 16 are respectively connected. The gold wire 22 to which one end is connected can be electrically connected to the pad 26 of the circuit board 12 by the side wiring 24.
Here, since the conductive paste 25 has good wettability with the gold wire 22, the conductive paste 25 tends to gather on the peripheral surface of the gold wire 22, and the conductive paste applied to the adjacent gold wire 22. 22 can be avoided, and the reliability of electrical connection with the semiconductor elements 16 and 16 can be improved.
In the stacked semiconductor device 10 shown in FIGS. 1 to 4, the other end of the gold wire 22 whose one end is connected to the electrode terminal 18 of the semiconductor element 16 extends to the tapered surface 20, but as shown in FIG. 5. In addition, the gold wire 22 may extend to the side surface beyond the tapered surface 20.
In this case, the gold wire 22 having one end connected to the electrode terminal 18 of the semiconductor element 16 is extended using a capillary 40 of a wire bonder as shown in FIG. At this time, the gold wire 22 may be cut off in the middle of the side surface of the semiconductor element 16, but as shown in FIG. 5, the gold wire 22 is pulled up using the corners on the lower surface side of the semiconductor element 16. You can cut it.
Here, the gold wire 22 can be easily torn at a predetermined location by previously scratching the cut location of the gold wire 22 with a clamp or the like.

図１〜図５に示す積層型半導体装置１０では、半導体素子１６として、電極端子形成面側の角部にテーパ面２０を形成した半導体素子を用いたが、図６に示す様に、電極端子形成面側の角部と電極端子形成面に対して反対側面側の角部との各々を面取りしてテーパ面２０，２０に形成された半導体素子１６を用いることができる。
かかる図６に示す半導体素子１６を用いた場合には、電極端子１８に一端が接続された金ワイヤ２２を、テーパ面２０，２０を横切るように延出することによって、回路基板１２の一面側に積層した半導体素子１６，１６の側面に形成される側面配線２４の一部がテーパ面２０，２０に進入し、側面配線２４と金ワイヤ２２との接触を更に向上できる。 In the stacked semiconductor device 10 shown in FIGS. 1 to 5, a semiconductor element having a tapered surface 20 formed at a corner on the electrode terminal forming surface side is used as the semiconductor element 16. However, as shown in FIG. The semiconductor element 16 formed on the tapered surfaces 20 and 20 by chamfering each of the corner portion on the forming surface side and the corner portion on the side surface opposite to the electrode terminal forming surface can be used.
When such a semiconductor element 16 shown in FIG. 6 is used, one surface side of the circuit board 12 is formed by extending a gold wire 22 having one end connected to the electrode terminal 18 so as to cross the tapered surfaces 20 and 20. A part of the side surface wiring 24 formed on the side surfaces of the semiconductor elements 16 and 16 stacked on the semiconductor element 16 enters the tapered surfaces 20 and 20, and the contact between the side surface wiring 24 and the gold wire 22 can be further improved.

図６に示す電極端子形成面側の角部と電極端子形成面に対して反対側面側の角部との各々にテーパ面２０，２０が形成された半導体素子１６は、図７（ａ）に示す様に、複数の半導体素子が造り込まれたウェーハ３０をダイシングする際に、ベベルカット用刃３２を用いて、ウェーハ３０の一面側にべベルカットを施してＶ字溝３３を形成する。
更に、図７（ｂ）に示す様に、ウェーハ３０の他面側にも、一面側に形成したＶ字溝３３に対応する箇所に、ベベルカット用刃３２によってＶ字溝３３を形成する。
次いで、ウェーハ３０の両面側に形成したＶ字溝３３，３３をダイシングブレードで切断することによって、電極端子形成面側の角部と電極端子形成面に対して反対側面側の角部との各々にテーパ面２０，２０が形成された半導体素子１６を形成できる。 The semiconductor element 16 in which the tapered surfaces 20 and 20 are formed in each of the corner portion on the electrode terminal forming surface side and the corner portion on the side surface opposite to the electrode terminal forming surface shown in FIG. As shown, when dicing a wafer 30 in which a plurality of semiconductor elements are built, a bevel cut is made on one surface side of the wafer 30 using a bevel cut blade 32 to form a V-shaped groove 33.
Further, as shown in FIG. 7B, the V-shaped groove 33 is formed on the other surface side of the wafer 30 by a bevel cutting blade 32 at a location corresponding to the V-shaped groove 33 formed on the one surface side.
Next, by cutting the V-shaped grooves 33 and 33 formed on both sides of the wafer 30 with a dicing blade, each of the corners on the electrode terminal forming surface side and the corners on the side surface opposite to the electrode terminal forming surface is provided. The semiconductor element 16 having the tapered surfaces 20 and 20 formed thereon can be formed.

半導体素子１６に形成されたテーパ面２０，２０を横切るように、電極端子１８に一端が接続された金ワイヤ２２を延出するには、図８，図９に示す方法が容易である。
先ず、図８に示す様に、吸着板５０上にアルミ箔等の金属箔５２を載置すると共に、金属箔５２に形成した貫通孔５４上に半導体素子１６を載置する。金属箔５２に載置された半導体素子１６は、その電極端子１８が形成された電極端子形成面が上面となるように載置される。
かかる金属箔５２及び半導体素子１６は、吸着板５０の吸着力の発現によって、吸着板５０の所定箇所に各々吸着固定される。この際に、半導体素子１６は、金属箔５２の貫通孔５４を介して吸着板５０の所定箇所に吸着固定される。
この様に、吸着板５０の吸着力で固定されている金属箔５２の半導体素子１６の近傍に、ワイヤボンダーによって金ワイヤ２２の一端を接続した後、金ワイヤ２２をキャピラリー４０から引き出して半導体素子１６の電極端子１８上に金ワイヤ２２の他端を接続して引き千切る。 The method shown in FIGS. 8 and 9 is easy for extending the gold wire 22 having one end connected to the electrode terminal 18 so as to cross the tapered surfaces 20 and 20 formed in the semiconductor element 16.
First, as shown in FIG. 8, a metal foil 52 such as an aluminum foil is placed on the suction plate 50, and the semiconductor element 16 is placed on a through hole 54 formed in the metal foil 52. The semiconductor element 16 placed on the metal foil 52 is placed such that the electrode terminal forming surface on which the electrode terminals 18 are formed is the upper surface.
The metal foil 52 and the semiconductor element 16 are each adsorbed and fixed at predetermined positions on the adsorbing plate 50 by expressing the adsorbing force of the adsorbing plate 50. At this time, the semiconductor element 16 is sucked and fixed to a predetermined portion of the suction plate 50 through the through hole 54 of the metal foil 52.
In this manner, after one end of the gold wire 22 is connected by the wire bonder to the vicinity of the semiconductor element 16 of the metal foil 52 fixed by the suction force of the suction plate 50, the gold wire 22 is pulled out from the capillary 40 and the semiconductor element. The other end of the gold wire 22 is connected to the sixteen electrode terminals 18 and chopped.

次いで、図９（ａ）に示す様に、吸着板５０の吸着を解除して、半導体素子１６及び金属箔５２を吸着板５０から取り出す。吸着板５０の吸着を解除したとき、半導体素子１６は移動可能となる。
このため、図９（ｂ）に示す様に、半導体素子１６を金ワイヤ２２の方向［図６（ｂ）の矢印方向］に移動し、金ワイヤ２２が半導体素子１６のテーパ面２０，２０を横切るように、半導体素子１６の側面を金ワイヤ２２に当接させる。
その後、図９（ｃ）に示す様に、金属箔５２の一部を折り曲げて、半導体素子１６の電極端子形成面に対して反対側面側に延出されている金ワイヤ２２を露出し、反対側面に形成されたテーパ面２０を超えて延出されている金ワイヤ２２の部分［図９（ｃ）の矢印で示す部分］をカッター等で切断することによって、電極端子１８に一端が接続された金ワイヤ２２がテーパ面２０，２０を横切るように延出された半導体素子１６を得ることができる。 Next, as shown in FIG. 9A, the suction of the suction plate 50 is released, and the semiconductor element 16 and the metal foil 52 are taken out from the suction plate 50. When the suction of the suction plate 50 is released, the semiconductor element 16 can move.
Therefore, as shown in FIG. 9B, the semiconductor element 16 is moved in the direction of the gold wire 22 [the direction of the arrow in FIG. 6B], and the gold wire 22 moves the tapered surfaces 20 and 20 of the semiconductor element 16. The side surface of the semiconductor element 16 is brought into contact with the gold wire 22 so as to cross.
Thereafter, as shown in FIG. 9 (c), a part of the metal foil 52 is bent to expose the gold wire 22 extending to the side opposite to the electrode terminal forming surface of the semiconductor element 16, and One end is connected to the electrode terminal 18 by cutting the portion of the gold wire 22 extending beyond the tapered surface 20 formed on the side surface (the portion indicated by the arrow in FIG. 9C) with a cutter or the like. In addition, the semiconductor element 16 in which the gold wire 22 extends so as to cross the tapered surfaces 20 and 20 can be obtained.

この様にして形成した、電極形成面側及びその反対側面の各角部に形成されたテーパ面２０，２０を横切るように、電極端子１８に一端が接続された金ワイヤ２２が延出されている複数の半導体素子１６，１６は、図４に示す様に、回路基板１２の一面側に接着層１４，１４を介して積層した後、その側面側に塗布装置４２を用いて、銀粒子、銅粒子或いはカーボン粒子等の導電性粒子が含有された導電性ペースト２５を塗布することによって、図６に示す側面配線２４を形成できる。
図６〜図９に示す半導体素子１６では、半導体素子１６の電極端子１８に一端を接続した金ワイヤ２２を、両テーパ面２０，２０を横切るように延出して、電極端子形成面に対して反対側面まで延出しているが、電極端子形成面側のテーパ面２０を越えて側面の下端又は途中まで金ワイヤ２２を延出してもよい（この場合、電極端子形成面に対して反対側面側のテーパ面２０には、金ワイヤ２０を延出しない）。 A gold wire 22 having one end connected to the electrode terminal 18 is extended so as to cross the tapered surfaces 20 and 20 formed at the corners of the electrode forming surface side and the opposite side surfaces formed in this way. As shown in FIG. 4, the plurality of semiconductor elements 16, 16 are stacked on one surface side of the circuit board 12 via the adhesive layers 14, 14, and then the silver particles, The side wiring 24 shown in FIG. 6 can be formed by applying a conductive paste 25 containing conductive particles such as copper particles or carbon particles.
In the semiconductor element 16 shown in FIGS. 6 to 9, a gold wire 22 having one end connected to the electrode terminal 18 of the semiconductor element 16 is extended so as to cross both the taper surfaces 20, 20, and with respect to the electrode terminal forming surface. Although it extends to the opposite side surface, the gold wire 22 may extend to the lower end of the side surface or halfway beyond the tapered surface 20 on the electrode terminal formation surface side (in this case, the opposite side surface side with respect to the electrode terminal formation surface) The gold wire 20 is not extended to the taper surface 20).

また、積層型半導体装置として、図１０に示す様に、電極形成面側のみにテーパ面２０が形成された半導体素子１６であって、その電極端子に一端が接続された金ワイヤ２２が、テーパ面２０を横切って電極形成面と反対側面まで延出されている半導体素子１６を用いて形成した積層型半導体装置であってもよい。
図１０に示す積層型半導体装置では、テーパ面２０によって形成された開口部内に、側面配線２４の一部が進入し、テーパ面２０を横切る金ワイヤ２２が側面配線２４と接触し、金ワイヤ２２と側面配線２４との接続を確実とすることができる。 Further, as shown in FIG. 10, a stacked semiconductor device is a semiconductor element 16 having a tapered surface 20 formed only on the electrode forming surface side, and a gold wire 22 having one end connected to the electrode terminal is tapered. A stacked semiconductor device formed using the semiconductor element 16 that extends across the surface 20 to the side opposite to the electrode formation surface may be used.
In the stacked semiconductor device shown in FIG. 10, a part of the side wiring 24 enters the opening formed by the tapered surface 20, the gold wire 22 crossing the tapered surface 20 contacts the side wiring 24, and the gold wire 22. And the side wiring 24 can be reliably connected.

図６及び図１０に示す積層型半導体装置を構成する半導体素子１６の様に、半導体素子１６の電極端子１８に一端に接続した金属ワイヤ２２を、電極端子１８が形成された電極端子形成面に対して反対側面まで延出する際に、図３に示す様に、ワイヤボンダーのキャピラリー４０を用いておこなってもよい。この際に、半導体素子１６の電極端子に一端が接続された金ワイヤ２２の切断箇所に予めクランプ等で傷を付けておくことによって、予定していた切断箇所で金ワイヤ２２を容易に引き千切ることができる。
また、図１〜図１０に示す積層型半導体装置では、半導体素子１６，１６の電極端子形成面が同一方向を向くように積層されているが、電極端子形成面が互いに対向するように半導体素子１６，１６を積層してもよい。 Like the semiconductor element 16 constituting the stacked semiconductor device shown in FIGS. 6 and 10, a metal wire 22 connected to one end of the electrode terminal 18 of the semiconductor element 16 is formed on the electrode terminal forming surface on which the electrode terminal 18 is formed. On the other hand, when extending to the opposite side, as shown in FIG. 3, a wire bonder capillary 40 may be used. At this time, the gold wire 22 can be easily pulled at the planned cutting location by scratching the gold wire 22 with one end connected to the electrode terminal of the semiconductor element 16 with a clamp or the like in advance. Can be cut.
In the stacked semiconductor device shown in FIGS. 1 to 10, the semiconductor elements 16 and 16 are stacked so that the electrode terminal formation surfaces face the same direction, but the semiconductor elements are arranged so that the electrode terminal formation surfaces face each other. 16 and 16 may be laminated.

本発明に係る積層型半導体装置の一例を説明する概略断面図及び概略平面図である。It is the schematic sectional drawing and schematic plan view explaining an example of the laminated type semiconductor device concerning the present invention. 図１に示す積層型半導体装置を形成する半導体素子のテーパ面を形成する方法を説明する工程図である。FIG. 3 is a process diagram illustrating a method for forming a tapered surface of a semiconductor element forming the stacked semiconductor device shown in FIG. 1. 図１に示す積層型半導体装置を形成する半導体素子の電極端子に一端が接続された金属ワイヤをテーパ面に延出する方法を説明する工程図である。It is process drawing explaining the method of extending the metal wire by which the end was connected to the electrode terminal of the semiconductor element which forms the laminated semiconductor device shown in FIG. 1 to a taper surface. 回路基板の一面側に積層した複数の半導体素子の側面に側面配線を形成する形成方法を説明する説明図である。It is explanatory drawing explaining the formation method which forms side wiring in the side surface of the several semiconductor element laminated | stacked on the one surface side of the circuit board. 本発明に係る積層型半導体装置に用いる半導体素子の他の例を説明する断面図である。It is sectional drawing explaining the other example of the semiconductor element used for the laminated semiconductor device which concerns on this invention. 本発明に係る積層型半導体装置の他の例を説明する概略断面図である。It is a schematic sectional drawing explaining the other example of the laminated semiconductor device which concerns on this invention. 図６に示す積層型半導体装置を形成する半導体素子のテーパ面を形成する方法を説明する工程図である。FIG. 7 is a process diagram illustrating a method for forming a tapered surface of a semiconductor element that forms the stacked semiconductor device shown in FIG. 6. 図６に示す積層型半導体装置を形成する半導体素子の電極端子に一端が接続された金属ワイヤを両テーパ面に延出する方法の最初の工程を説明する工程図の一部である。FIG. 7 is a part of a process diagram for explaining an initial process of a method of extending a metal wire having one end connected to an electrode terminal of a semiconductor element forming the stacked semiconductor device shown in FIG. 図６に示す積層型半導体装置を形成する半導体素子の電極端子に一端が接続された金属ワイヤを両テーパ面に延出する方法の残りの工程を説明する工程図である。FIG. 7 is a process diagram illustrating the remaining steps of a method of extending a metal wire having one end connected to an electrode terminal of a semiconductor element forming the stacked semiconductor device shown in FIG. 6 on both tapered surfaces. 本発明に係る積層型半導体装置の他の例を説明する概略断面図である。It is a schematic sectional drawing explaining the other example of the laminated semiconductor device which concerns on this invention. 従来の積層型半導体装置を説明する概略図である。It is the schematic explaining the conventional laminated semiconductor device. 改良された積層型半導体装置を説明する斜視図である。It is a perspective view explaining the improved laminated semiconductor device.

符号の説明Explanation of symbols

１０ 積層型半導体装置
１２ 回路基板
１４，１４ 接着層
１６ 半導体素子
１８ 電極端子
２０ テーパ面
２２ 金ワイヤ
２４ 側面配線
２５ 導電性ペースト
２６ パッド
３０ ウェーハ
３２ ベベルカット用刃
３３ Ｖ字溝
４０ キャピラリー
４２ 塗布装置
５０ 吸着板
５２ 金属箔
５４ 貫通孔 DESCRIPTION OF SYMBOLS 10 Stack type semiconductor device 12 Circuit board 14, 14 Adhesion layer 16 Semiconductor element 18 Electrode terminal 20 Tapered surface 22 Gold wire 24 Side wiring 25 Conductive paste 26 Pad 30 Wafer 32 Bevel cutting blade 33 V-shaped groove 40 Capillary 42 Coating device 50 Suction plate 52 Metal foil 54 Through hole

Claims (8)

四角形状の複数の半導体素子が回路基板に積層されていると共に、前記半導体素子の各電極端子と回路基板に形成されたパッドとを電気的に接続する側面配線が形成された積層型半導体装置であって、
前記半導体素子の各辺に沿って形成された角部のうち、少なくとも前記電極端子が形成された電極端子面側の角部が面取りされて形成されたテーパ面に、前記電極端子に一端が接続された金属ワイヤが延出され、
且つ前記半導体素子の各々の電極端子からテーパ面に延出された金属ワイヤの少なくとも一部が、導電性粒子を含有する導電性ペーストを塗布して形成された側面配線に接触して電気的に接続されていることを特徴とする積層型半導体装置。 A stacked semiconductor device in which a plurality of rectangular semiconductor elements are stacked on a circuit board, and side wirings are formed to electrically connect each electrode terminal of the semiconductor element and a pad formed on the circuit board. There,
Of the corners formed along each side of the semiconductor element, at least one end connected to the electrode terminal on a tapered surface formed by chamfering a corner on the electrode terminal surface side on which the electrode terminal is formed Extended metal wire,
In addition, at least a part of the metal wire extending from each electrode terminal of the semiconductor element to the taper surface is in contact with a side wiring formed by applying a conductive paste containing conductive particles to electrically A stacked semiconductor device which is connected. 金属ワイヤが、前記半導体素子のテーパ面を越えて側面側に延出されている請求項１記載の積層型半導体装置。   The stacked semiconductor device according to claim 1, wherein the metal wire extends to the side surface side beyond the tapered surface of the semiconductor element. 半導体素子が、電極形成面側の辺に沿って形成された角部が面取りされてテーパ面に形成されていると共に、前記電極形成面に対して反対側の辺に沿って形成された角部も面取りされてテーパ面に形成されている請求項１又は請求項２記載の積層型半導体装置。   The semiconductor element has a corner formed along the side on the electrode forming surface side that is chamfered to form a tapered surface, and a corner formed along the side opposite to the electrode forming surface. The stacked semiconductor device according to claim 1, wherein the laminated semiconductor device is also chamfered to form a tapered surface. 金属ワイヤが、両テーパ面に延出されている請求項３記載の積層型半導体装置。   The stacked semiconductor device according to claim 3, wherein the metal wire extends on both tapered surfaces. 四角形状の半導体素子であって、その各辺に沿って形成された角部のうち、少なくとも前記電極端子が形成された電極端子面側の角部が面取りされてテーパ面に形成された複数の半導体素子を用い、
前記半導体素子の各々の各電極端子に一端を接続した金属ワイヤを、前記テーパ面に延出した後、
前記半導体素子の各々を、その電極端子形成面が他の半導体素子との接着面又は露出面となるように回路基板の一面側に順次積層し、
次いで、前記半導体素子の各テーパ面に延出されている金属ワイヤの少なくとも一部と接触するように、積層された複数の半導体素子の側面に導電性粒子を含有する導電性ペーストを塗布し、前記半導体素子の各電極と回路基板のパッドとを電気的に接続する側面配線を形成することを特徴とする積層型半導体装置の製造方法。 A square-shaped semiconductor element, and a plurality of corner portions formed along each side of the square-shaped semiconductor element are chamfered by chamfering at least corner portions on the electrode terminal surface side on which the electrode terminals are formed. Using semiconductor elements,
After extending a metal wire having one end connected to each electrode terminal of each of the semiconductor elements to the tapered surface,
Each of the semiconductor elements is sequentially laminated on one surface side of the circuit board so that the electrode terminal formation surface is an adhesion surface or an exposed surface with another semiconductor element,
Next, a conductive paste containing conductive particles is applied to the side surfaces of the plurality of stacked semiconductor elements so as to be in contact with at least a part of the metal wires extending to the respective tapered surfaces of the semiconductor elements, A method of manufacturing a stacked semiconductor device, comprising forming a side wiring for electrically connecting each electrode of the semiconductor element and a pad of a circuit board. 金属ワイヤを、前記半導体素子のテーパ面を越えて側面側に延出する請求項５記載の積層型半導体装置の製造方法。   6. The method of manufacturing a stacked semiconductor device according to claim 5, wherein the metal wire extends beyond the tapered surface of the semiconductor element to the side surface side. 半導体素子として、電極形成面側の辺に沿って形成された角部が面取りされてテーパ面に形成されていると共に、前記電極形成面に対して反対側の辺に沿って形成された角部も面取りされてテーパ面に形成されている半導体素子を用いる請求項５又は請求項６記載の積層型半導体装置の製造方法。   As a semiconductor element, a corner formed along a side on the electrode forming surface side is chamfered to be formed into a tapered surface, and a corner formed along a side opposite to the electrode forming surface. 7. The method of manufacturing a stacked semiconductor device according to claim 5, wherein a semiconductor element that is also chamfered and has a tapered surface is used. 金属ワイヤを、両テーパに延出する請求項７記載の積層型半導体装置の製造方法。   8. The method of manufacturing a stacked semiconductor device according to claim 7, wherein the metal wire extends in both tapers.
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