JP5023706B2 - ボンディングワイヤとその製造方法 - Google Patents
ボンディングワイヤとその製造方法 Download PDFInfo
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- JP5023706B2 JP5023706B2 JP2007003584A JP2007003584A JP5023706B2 JP 5023706 B2 JP5023706 B2 JP 5023706B2 JP 2007003584 A JP2007003584 A JP 2007003584A JP 2007003584 A JP2007003584 A JP 2007003584A JP 5023706 B2 JP5023706 B2 JP 5023706B2
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- bonding wire
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- plasmon resonance
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- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L2224/45693—Material with a principal constituent of the material being a solid not provided for in groups H01L2224/456 - H01L2224/45691, e.g. allotropes of carbon, fullerene, graphite, carbon-nanotubes, diamond
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- H01L2924/20752—Diameter ranges larger or equal to 20 microns less than 30 microns
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- Wire Bonding (AREA)
Description
有機被膜形成材料として、市販のノニオン界面活性剤を用いた。かかるノニオン界面活性剤を溶媒である純水に投入し、濃度と表面張力の傾きが−330mN/m/%となる濃度40ppmのものを調製した。なお、表面張力については、表面張力測定装置(Kruss社製、K121)により測定を行った。
線径25μmの金(純度99.99%)のボンディングワイヤ(住友金属鉱山株式会社製)を使用し、エタノール洗浄を行った。次に、大気雰囲気で、500℃、0.5秒の条件で、ボンディングワイヤの熱処理を行なった。ボンディングワイヤの表面に存在する有機炭素の量を極微量炭素分析装置(堀場製作所製、EMIA−U511)で測定したところ、有機炭素の量は1400μg/m2であった。よって、ボンディングワイヤの表面から有機物が十分に除去されていることが確認された。
前記界面活性剤を、濃度と表面張力の傾きが+28mN/m/%となるように調製し(濃度0.010%、表面張力26.9mN/m)、かかる界面活性剤の溶液を浸漬に用いた以外は、実施例1と同様に各工程を行った。
Claims (4)
- 伸線加工工程後のボンディングワイヤを洗浄し、熱処理することにより、該ボンディングワイヤの表面に存在する有機炭素の量を1500μg/m2以下とし、その後、ボンディングワイヤを、濃度と表面張力の傾きが−1.00〜−40000mN/m/%の範囲内にある界面活性剤に浸漬することにより、該ボンディングワイヤの表面に、直接、界面活性剤を単分子で化学的に吸着させることを特徴とするボンディングワイヤの製造方法。
- 予め試験を行い、表面プラズモン共鳴分光法を用いて、前記浸漬後のボンディングワイヤの表面に存在する前記界面活性剤を分析した場合に、表面プラズモン共鳴角のみを示すような浸漬条件をさらに得て、前記浸漬を行うことを特徴とする請求項1に記載のボンディングワイヤの製造方法。
- 請求項1または2に記載のボンディングワイヤの製造方法により得られ、表面プラズモン共鳴分光法を用いて前記界面活性剤を分析した場合に、表面プラズモン共鳴角のみを示すことを特徴とするボンディングワイヤ。
- 表面プラズモン共鳴分光法を用いて前記界面活性剤の膜厚を測定した場合に、表面の洗浄前後において膜厚に変化がないことを特徴とする請求項3に記載のボンディングワイヤ。
Priority Applications (1)
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JP2007003584A JP5023706B2 (ja) | 2007-01-11 | 2007-01-11 | ボンディングワイヤとその製造方法 |
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JP2007003584A JP5023706B2 (ja) | 2007-01-11 | 2007-01-11 | ボンディングワイヤとその製造方法 |
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JP2008172009A JP2008172009A (ja) | 2008-07-24 |
JP5023706B2 true JP5023706B2 (ja) | 2012-09-12 |
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JP2007003584A Expired - Fee Related JP5023706B2 (ja) | 2007-01-11 | 2007-01-11 | ボンディングワイヤとその製造方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104835798A (zh) * | 2015-03-30 | 2015-08-12 | 山东科大鼎新电子科技有限公司 | 一种抗氧化键合铜丝及其制备方法 |
CN107462382A (zh) * | 2017-08-04 | 2017-12-12 | 中国航空工业集团公司西安飞机设计研究所 | 一种飞机金属机翼主盒段刚度测试的模型试验件设计方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4756659B2 (ja) * | 2009-08-10 | 2011-08-24 | 田中電子工業株式会社 | 超音波ボンディング用アルミニウムリボン |
JP4791571B2 (ja) * | 2009-11-26 | 2011-10-12 | 田中電子工業株式会社 | 超音波ボンディング用アルミニウムリボン |
JP2013172032A (ja) * | 2012-02-21 | 2013-09-02 | Nippon Micrometal Corp | ボンディングワイヤの製造方法 |
JP5507730B1 (ja) * | 2013-04-02 | 2014-05-28 | 田中電子工業株式会社 | ボールボンディング用貴金属希薄銀合金ワイヤ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2836692B2 (ja) * | 1988-09-30 | 1998-12-14 | 田中電子工業株式会社 | 半導体素子のボーディング用線 |
JPH04363036A (ja) * | 1991-01-31 | 1992-12-15 | Mitsubishi Materials Corp | 半導体装置用ボンディングワイヤおよびその製造方法 |
JPH09102513A (ja) * | 1995-10-02 | 1997-04-15 | Sumitomo Metal Mining Co Ltd | ボンディングワイヤ |
JP3350920B2 (ja) * | 1996-08-02 | 2002-11-25 | 住友金属鉱山株式会社 | ボンディングワイヤおよびその製造方法 |
-
2007
- 2007-01-11 JP JP2007003584A patent/JP5023706B2/ja not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104835798A (zh) * | 2015-03-30 | 2015-08-12 | 山东科大鼎新电子科技有限公司 | 一种抗氧化键合铜丝及其制备方法 |
CN104835798B (zh) * | 2015-03-30 | 2017-07-04 | 山东科大鼎新电子科技有限公司 | 一种抗氧化键合铜丝的制备方法 |
CN107462382A (zh) * | 2017-08-04 | 2017-12-12 | 中国航空工业集团公司西安飞机设计研究所 | 一种飞机金属机翼主盒段刚度测试的模型试验件设计方法 |
CN107462382B (zh) * | 2017-08-04 | 2019-10-29 | 中国航空工业集团公司西安飞机设计研究所 | 一种飞机金属机翼主盒段刚度测试的模型试验件设计方法 |
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