JP5019767B2 - 光学素子および光照射装置 - Google Patents

光学素子および光照射装置 Download PDF

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JP5019767B2
JP5019767B2 JP2006077987A JP2006077987A JP5019767B2 JP 5019767 B2 JP5019767 B2 JP 5019767B2 JP 2006077987 A JP2006077987 A JP 2006077987A JP 2006077987 A JP2006077987 A JP 2006077987A JP 5019767 B2 JP5019767 B2 JP 5019767B2
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optical element
entrance
exit
reflectors
film
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JP2006310802A5 (enExample
JP2006310802A (ja
Inventor
幸一郎 田中
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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JP2006077987A 2005-03-31 2006-03-22 光学素子および光照射装置 Expired - Fee Related JP5019767B2 (ja)

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JP2006077987A JP5019767B2 (ja) 2005-03-31 2006-03-22 光学素子および光照射装置

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JP2005102316 2005-03-31
JP2005102316 2005-03-31
JP2006077987A JP5019767B2 (ja) 2005-03-31 2006-03-22 光学素子および光照射装置

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JP2006310802A JP2006310802A (ja) 2006-11-09
JP2006310802A5 JP2006310802A5 (enExample) 2009-04-30
JP5019767B2 true JP5019767B2 (ja) 2012-09-05

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2239084A1 (en) * 2009-04-07 2010-10-13 Excico France Method of and apparatus for irradiating a semiconductor material surface by laser energy
JP4834790B1 (ja) * 2011-01-25 2011-12-14 株式会社エタンデュ目白 光照射装置
DE102014219112A1 (de) * 2014-09-23 2016-03-24 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie sowie Hohlwellenleiter-Komponente hierfür

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848013A (ja) * 1981-09-18 1983-03-19 Toshiba Corp レ−ザ装置
US5224200A (en) * 1991-11-27 1993-06-29 The United States Of America As Represented By The Department Of Energy Coherence delay augmented laser beam homogenizer
JP3793295B2 (ja) * 1996-11-08 2006-07-05 東洋製罐株式会社 易引裂き性包装袋の製造法

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