JP5016811B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

Info

Publication number
JP5016811B2
JP5016811B2 JP2005345410A JP2005345410A JP5016811B2 JP 5016811 B2 JP5016811 B2 JP 5016811B2 JP 2005345410 A JP2005345410 A JP 2005345410A JP 2005345410 A JP2005345410 A JP 2005345410A JP 5016811 B2 JP5016811 B2 JP 5016811B2
Authority
JP
Japan
Prior art keywords
semiconductor chip
chip
pattern
semiconductor device
base substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005345410A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007150154A (ja
JP2007150154A5 (https=
Inventor
俊彦 秋葉
孝洋 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Electronics Corp
Original Assignee
Renesas Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Electronics Corp filed Critical Renesas Electronics Corp
Priority to JP2005345410A priority Critical patent/JP5016811B2/ja
Publication of JP2007150154A publication Critical patent/JP2007150154A/ja
Publication of JP2007150154A5 publication Critical patent/JP2007150154A5/ja
Application granted granted Critical
Publication of JP5016811B2 publication Critical patent/JP5016811B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/099Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/9413Dispositions of bond pads on encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/791Package configurations characterised by the relative positions of pads or connectors relative to package parts of direct-bonded pads
    • H10W90/792Package configurations characterised by the relative positions of pads or connectors relative to package parts of direct-bonded pads between multiple chips

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
JP2005345410A 2005-11-30 2005-11-30 半導体装置 Expired - Fee Related JP5016811B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005345410A JP5016811B2 (ja) 2005-11-30 2005-11-30 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005345410A JP5016811B2 (ja) 2005-11-30 2005-11-30 半導体装置

Publications (3)

Publication Number Publication Date
JP2007150154A JP2007150154A (ja) 2007-06-14
JP2007150154A5 JP2007150154A5 (https=) 2009-01-22
JP5016811B2 true JP5016811B2 (ja) 2012-09-05

Family

ID=38211157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005345410A Expired - Fee Related JP5016811B2 (ja) 2005-11-30 2005-11-30 半導体装置

Country Status (1)

Country Link
JP (1) JP5016811B2 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4571679B2 (ja) * 2008-01-18 2010-10-27 Okiセミコンダクタ株式会社 半導体装置
WO2011108308A1 (ja) 2010-03-04 2011-09-09 日本電気株式会社 半導体素子内蔵配線基板
WO2011125380A1 (ja) 2010-04-08 2011-10-13 日本電気株式会社 半導体素子内蔵配線基板
KR101145041B1 (ko) * 2010-10-19 2012-05-11 주식회사 네패스 반도체칩 패키지, 반도체 모듈 및 그 제조 방법
KR102205195B1 (ko) * 2018-01-23 2021-01-20 주식회사 네패스 반도체 칩 적층 패키지 및 그 제조 방법
KR102061850B1 (ko) * 2018-02-26 2020-01-02 삼성전자주식회사 팬-아웃 반도체 패키지
US11171115B2 (en) 2019-03-18 2021-11-09 Kepler Computing Inc. Artificial intelligence processor with three-dimensional stacked memory
US11836102B1 (en) 2019-03-20 2023-12-05 Kepler Computing Inc. Low latency and high bandwidth artificial intelligence processor
KR102436025B1 (ko) * 2019-04-10 2022-08-25 주식회사 네패스 안테나를 포함하는 반도체 패키지
US11152343B1 (en) 2019-05-31 2021-10-19 Kepler Computing, Inc. 3D integrated ultra high-bandwidth multi-stacked memory
US12086410B1 (en) 2019-05-31 2024-09-10 Kepler Computing Inc. Ferroelectric memory chiplet in a multi-dimensional packaging with I/O switch embedded in a substrate or interposer
US11844223B1 (en) 2019-05-31 2023-12-12 Kepler Computing Inc. Ferroelectric memory chiplet as unified memory in a multi-dimensional packaging
US11791233B1 (en) 2021-08-06 2023-10-17 Kepler Computing Inc. Ferroelectric or paraelectric memory and logic chiplet with thermal management in a multi-dimensional packaging

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4157829B2 (ja) * 2003-06-03 2008-10-01 カシオ計算機株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JP2007150154A (ja) 2007-06-14

Similar Documents

Publication Publication Date Title
US20250087550A1 (en) Semiconductor package and manufacturing method thereof
US6731009B1 (en) Multi-die assembly
CN101286492B (zh) 半导体封装及层叠型半导体封装
JP5259059B2 (ja) 半導体装置
JP5042591B2 (ja) 半導体パッケージおよび積層型半導体パッケージ
KR100891516B1 (ko) 적층 가능한 에프비지에이 타입 반도체 패키지와 이를이용한 적층 패키지
US7119427B2 (en) Stacked BGA packages
JP4340517B2 (ja) 半導体装置及びその製造方法
US7598617B2 (en) Stack package utilizing through vias and re-distribution lines
US8633587B2 (en) Package structure
KR101653856B1 (ko) 반도체 장치 및 그 제조방법
US12040304B2 (en) Semiconductor package and method of fabricating the same
TW201826461A (zh) 堆疊型晶片封裝結構
US7858520B2 (en) Semiconductor package with improved size, reliability, warpage prevention, and heat dissipation and method for manufacturing the same
US20080128888A1 (en) System-in-package (SiP) and method of manufacturing the same
JP5016811B2 (ja) 半導体装置
US7501707B2 (en) Multichip semiconductor package
US20040171193A1 (en) Semiconductor device and its manufacturing method
JP2015523740A (ja) 再構成されたウェハレベル超小型電子パッケージ
US7235870B2 (en) Microelectronic multi-chip module
JP2006165073A (ja) 半導体装置およびその製造方法
JP2002343930A (ja) 半導体装置
JP4339032B2 (ja) 半導体装置
KR100851108B1 (ko) 웨이퍼 레벨 시스템 인 패키지 및 그 제조 방법
JP2007266567A (ja) 高速及び高性能の半導体パッケージ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081127

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081127

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20100528

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110419

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110609

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111025

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111221

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120515

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120611

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150615

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees