JP5013573B2 - 高耐熱性石英ガラス粉の製造方法、高耐熱性石英ガラス粉及びガラス体 - Google Patents
高耐熱性石英ガラス粉の製造方法、高耐熱性石英ガラス粉及びガラス体 Download PDFInfo
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- JP5013573B2 JP5013573B2 JP2005286246A JP2005286246A JP5013573B2 JP 5013573 B2 JP5013573 B2 JP 5013573B2 JP 2005286246 A JP2005286246 A JP 2005286246A JP 2005286246 A JP2005286246 A JP 2005286246A JP 5013573 B2 JP5013573 B2 JP 5013573B2
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- quartz glass
- glass powder
- high heat
- resistant quartz
- glass body
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 111
- 239000000843 powder Substances 0.000 title claims abstract description 70
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000011521 glass Substances 0.000 title description 10
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims description 20
- 239000012298 atmosphere Substances 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 15
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 6
- 150000003377 silicon compounds Chemical class 0.000 abstract description 3
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 14
- 239000010419 fine particle Substances 0.000 description 7
- 238000006467 substitution reaction Methods 0.000 description 7
- 230000000704 physical effect Effects 0.000 description 6
- -1 silicon halide Chemical class 0.000 description 6
- 239000000460 chlorine Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 229910007991 Si-N Inorganic materials 0.000 description 4
- 229910006294 Si—N Inorganic materials 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000003980 solgel method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000012948 isocyanate Substances 0.000 description 3
- 229910018540 Si C Inorganic materials 0.000 description 2
- 229910008045 Si-Si Inorganic materials 0.000 description 2
- 229910006411 Si—Si Inorganic materials 0.000 description 2
- DCFKHNIGBAHNSS-UHFFFAOYSA-N chloro(triethyl)silane Chemical compound CC[Si](Cl)(CC)CC DCFKHNIGBAHNSS-UHFFFAOYSA-N 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- BYLOHCRAPOSXLY-UHFFFAOYSA-N dichloro(diethyl)silane Chemical compound CC[Si](Cl)(Cl)CC BYLOHCRAPOSXLY-UHFFFAOYSA-N 0.000 description 2
- NEXSMEBSBIABKL-UHFFFAOYSA-N hexamethyldisilane Chemical compound C[Si](C)(C)[Si](C)(C)C NEXSMEBSBIABKL-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 150000002513 isocyanates Chemical class 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- XEJUFRSVJVTIFW-UHFFFAOYSA-N triethyl(triethylsilyl)silane Chemical compound CC[Si](CC)(CC)[Si](CC)(CC)CC XEJUFRSVJVTIFW-UHFFFAOYSA-N 0.000 description 2
- AQRLNPVMDITEJU-UHFFFAOYSA-N triethylsilane Chemical compound CC[SiH](CC)CC AQRLNPVMDITEJU-UHFFFAOYSA-N 0.000 description 2
- QHUNJMXHQHHWQP-UHFFFAOYSA-N trimethylsilyl acetate Chemical compound CC(=O)O[Si](C)(C)C QHUNJMXHQHHWQP-UHFFFAOYSA-N 0.000 description 2
- MHBOFSJQAKACCM-UHFFFAOYSA-N 1,1,2,2,3,3,4,4-octakis-phenyltetrasiletane Chemical compound C1=CC=CC=C1[Si]1(C=2C=CC=CC=2)[Si](C=2C=CC=CC=2)(C=2C=CC=CC=2)[Si](C=2C=CC=CC=2)(C=2C=CC=CC=2)[Si]1(C=1C=CC=CC=1)C1=CC=CC=C1 MHBOFSJQAKACCM-UHFFFAOYSA-N 0.000 description 1
- NMVVEFUHHZJTPM-UHFFFAOYSA-N 2,2,4,4,6,6,8,8-octaethyl-1,3,5,7,2,4,6,8-tetrazatetrasilocane Chemical compound CC[Si]1(CC)N[Si](CC)(CC)N[Si](CC)(CC)N[Si](CC)(CC)N1 NMVVEFUHHZJTPM-UHFFFAOYSA-N 0.000 description 1
- FIADVASZMLCQIF-UHFFFAOYSA-N 2,2,4,4,6,6,8,8-octamethyl-1,3,5,7,2,4,6,8-tetrazatetrasilocane Chemical compound C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N[Si](C)(C)N1 FIADVASZMLCQIF-UHFFFAOYSA-N 0.000 description 1
- BRFXWBKNYFOILR-UHFFFAOYSA-N 2,2,4,4,6,6-hexaethyl-1,3,5,2,4,6-trithiatrisilinane Chemical compound CC[Si]1(CC)S[Si](CC)(CC)S[Si](CC)(CC)S1 BRFXWBKNYFOILR-UHFFFAOYSA-N 0.000 description 1
- SHWQWXGIWFEYTA-UHFFFAOYSA-N 2,2,4,4,6,6-hexakis-phenyl-1,3,5,2,4,6-triazatrisilinane Chemical compound N1[Si](C=2C=CC=CC=2)(C=2C=CC=CC=2)N[Si](C=2C=CC=CC=2)(C=2C=CC=CC=2)N[Si]1(C=1C=CC=CC=1)C1=CC=CC=C1 SHWQWXGIWFEYTA-UHFFFAOYSA-N 0.000 description 1
- WGGNJZRNHUJNEM-UHFFFAOYSA-N 2,2,4,4,6,6-hexamethyl-1,3,5,2,4,6-triazatrisilinane Chemical compound C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N1 WGGNJZRNHUJNEM-UHFFFAOYSA-N 0.000 description 1
- JKIDFLDDCOVLDP-UHFFFAOYSA-N 2,2,4,4-tetramethyl-1,3,2,4-dithiadisiletane Chemical compound C[Si]1(C)S[Si](C)(C)S1 JKIDFLDDCOVLDP-UHFFFAOYSA-N 0.000 description 1
- METHJFKHAQHEGQ-UHFFFAOYSA-N 2-chloroethyl(difluoro)silane Chemical compound ClCC[SiH](F)F METHJFKHAQHEGQ-UHFFFAOYSA-N 0.000 description 1
- JDMMZVAKMAONFU-UHFFFAOYSA-N 2-trimethylsilylacetic acid Chemical compound C[Si](C)(C)CC(O)=O JDMMZVAKMAONFU-UHFFFAOYSA-N 0.000 description 1
- RCUIYBFQXUKLGM-UHFFFAOYSA-N 2-trimethylsilylbutanoic acid Chemical compound CCC(C(O)=O)[Si](C)(C)C RCUIYBFQXUKLGM-UHFFFAOYSA-N 0.000 description 1
- SGFRMCYUASSXKB-UHFFFAOYSA-N 3,3,3-trifluoropropylsilane Chemical compound FC(F)(F)CC[SiH3] SGFRMCYUASSXKB-UHFFFAOYSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- QGUDFEURWUSSRY-UHFFFAOYSA-N C(C)[Si](N=C=S)(N=C=S)N=C=S Chemical compound C(C)[Si](N=C=S)(N=C=S)N=C=S QGUDFEURWUSSRY-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 229910008051 Si-OH Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910006358 Si—OH Inorganic materials 0.000 description 1
- JQNJIBYLKBOSCM-UHFFFAOYSA-N [acetyloxy(diethyl)silyl] acetate Chemical compound CC(=O)O[Si](CC)(CC)OC(C)=O JQNJIBYLKBOSCM-UHFFFAOYSA-N 0.000 description 1
- RQVFGTYFBUVGOP-UHFFFAOYSA-N [acetyloxy(dimethyl)silyl] acetate Chemical compound CC(=O)O[Si](C)(C)OC(C)=O RQVFGTYFBUVGOP-UHFFFAOYSA-N 0.000 description 1
- KXJLGCBCRCSXQF-UHFFFAOYSA-N [diacetyloxy(ethyl)silyl] acetate Chemical compound CC(=O)O[Si](CC)(OC(C)=O)OC(C)=O KXJLGCBCRCSXQF-UHFFFAOYSA-N 0.000 description 1
- TVJPBVNWVPUZBM-UHFFFAOYSA-N [diacetyloxy(methyl)silyl] acetate Chemical compound CC(=O)O[Si](C)(OC(C)=O)OC(C)=O TVJPBVNWVPUZBM-UHFFFAOYSA-N 0.000 description 1
- APDDLLVYBXGBRF-UHFFFAOYSA-N [diethyl-(triethylsilylamino)silyl]ethane Chemical compound CC[Si](CC)(CC)N[Si](CC)(CC)CC APDDLLVYBXGBRF-UHFFFAOYSA-N 0.000 description 1
- TWSOFXCPBRATKD-UHFFFAOYSA-N [diphenyl-(triphenylsilylamino)silyl]benzene Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)N[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 TWSOFXCPBRATKD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- ULTOUJQISQHAJP-UHFFFAOYSA-N bis(triethylsilyl) sulfate Chemical compound CC[Si](CC)(CC)OS(=O)(=O)O[Si](CC)(CC)CC ULTOUJQISQHAJP-UHFFFAOYSA-N 0.000 description 1
- KRUQDZRWZXUUAD-UHFFFAOYSA-N bis(trimethylsilyl) sulfate Chemical compound C[Si](C)(C)OS(=O)(=O)O[Si](C)(C)C KRUQDZRWZXUUAD-UHFFFAOYSA-N 0.000 description 1
- RLECCBFNWDXKPK-UHFFFAOYSA-N bis(trimethylsilyl)sulfide Chemical compound C[Si](C)(C)S[Si](C)(C)C RLECCBFNWDXKPK-UHFFFAOYSA-N 0.000 description 1
- UCKORWKZRPKRQE-UHFFFAOYSA-N bromo(triethyl)silane Chemical compound CC[Si](Br)(CC)CC UCKORWKZRPKRQE-UHFFFAOYSA-N 0.000 description 1
- IYYIVELXUANFED-UHFFFAOYSA-N bromo(trimethyl)silane Chemical compound C[Si](C)(C)Br IYYIVELXUANFED-UHFFFAOYSA-N 0.000 description 1
- VSCMNSZBNLOXNR-UHFFFAOYSA-N bromo(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(Br)C1=CC=CC=C1 VSCMNSZBNLOXNR-UHFFFAOYSA-N 0.000 description 1
- ODVTYMXHGWDQQC-UHFFFAOYSA-N bromo(tripropyl)silane Chemical compound CCC[Si](Br)(CCC)CCC ODVTYMXHGWDQQC-UHFFFAOYSA-N 0.000 description 1
- 210000001217 buttock Anatomy 0.000 description 1
- OIFKIAJONVYURL-UHFFFAOYSA-N butyl(triisocyanato)silane Chemical compound CCCC[Si](N=C=O)(N=C=O)N=C=O OIFKIAJONVYURL-UHFFFAOYSA-N 0.000 description 1
- RWDSRWCKDGXMMN-UHFFFAOYSA-N chloro(difluoromethyl)silane Chemical compound Cl[SiH2]C(F)F RWDSRWCKDGXMMN-UHFFFAOYSA-N 0.000 description 1
- VTMOWGGHUAZESJ-UHFFFAOYSA-N chloro(diphenyl)silane Chemical compound C=1C=CC=CC=1[SiH](Cl)C1=CC=CC=C1 VTMOWGGHUAZESJ-UHFFFAOYSA-N 0.000 description 1
- MNKYQPOFRKPUAE-UHFFFAOYSA-N chloro(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(Cl)C1=CC=CC=C1 MNKYQPOFRKPUAE-UHFFFAOYSA-N 0.000 description 1
- WESKCBXZPOVFQO-UHFFFAOYSA-N chloro-difluoro-propylsilane Chemical compound CCC[Si](F)(F)Cl WESKCBXZPOVFQO-UHFFFAOYSA-N 0.000 description 1
- TXBTVTTZTSJFPF-UHFFFAOYSA-N chloro-fluoro-dimethylsilane Chemical compound C[Si](C)(F)Cl TXBTVTTZTSJFPF-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- LIQOCGKQCFXKLF-UHFFFAOYSA-N dibromo(dimethyl)silane Chemical compound C[Si](C)(Br)Br LIQOCGKQCFXKLF-UHFFFAOYSA-N 0.000 description 1
- DBUGVTOEUNNUHR-UHFFFAOYSA-N dibromo(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](Br)(Br)C1=CC=CC=C1 DBUGVTOEUNNUHR-UHFFFAOYSA-N 0.000 description 1
- OSXYHAQZDCICNX-UHFFFAOYSA-N dichloro(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](Cl)(Cl)C1=CC=CC=C1 OSXYHAQZDCICNX-UHFFFAOYSA-N 0.000 description 1
- JVVKTESAFQDOGW-UHFFFAOYSA-N dichloro-ethyl-fluorosilane Chemical compound CC[Si](F)(Cl)Cl JVVKTESAFQDOGW-UHFFFAOYSA-N 0.000 description 1
- QFHGBZXWBRWAQV-UHFFFAOYSA-N dichloro-ethyl-phenylsilane Chemical compound CC[Si](Cl)(Cl)C1=CC=CC=C1 QFHGBZXWBRWAQV-UHFFFAOYSA-N 0.000 description 1
- HAQCYFVZKUAIEU-UHFFFAOYSA-N dichloro-fluoro-methylsilane Chemical compound C[Si](F)(Cl)Cl HAQCYFVZKUAIEU-UHFFFAOYSA-N 0.000 description 1
- XXBCLUOZLDIRNL-UHFFFAOYSA-N dichloro-fluoro-propylsilane Chemical compound CCC[Si](F)(Cl)Cl XXBCLUOZLDIRNL-UHFFFAOYSA-N 0.000 description 1
- GNEPOXWQWFSSOU-UHFFFAOYSA-N dichloro-methyl-phenylsilane Chemical compound C[Si](Cl)(Cl)C1=CC=CC=C1 GNEPOXWQWFSSOU-UHFFFAOYSA-N 0.000 description 1
- ZMAPKOCENOWQRE-UHFFFAOYSA-N diethoxy(diethyl)silane Chemical compound CCO[Si](CC)(CC)OCC ZMAPKOCENOWQRE-UHFFFAOYSA-N 0.000 description 1
- OJBGGLLCYJYHPG-UHFFFAOYSA-N diethyl(difluoro)silane Chemical compound CC[Si](F)(F)CC OJBGGLLCYJYHPG-UHFFFAOYSA-N 0.000 description 1
- DAKRXZUXJUPCOF-UHFFFAOYSA-N diethyl(dihydroxy)silane Chemical compound CC[Si](O)(O)CC DAKRXZUXJUPCOF-UHFFFAOYSA-N 0.000 description 1
- HCVJLQDOMBWSFI-UHFFFAOYSA-N diethyl(diisothiocyanato)silane Chemical compound C(C)[Si](CC)(N=C=S)N=C=S HCVJLQDOMBWSFI-UHFFFAOYSA-N 0.000 description 1
- FJWRGPWPIXAPBJ-UHFFFAOYSA-N diethyl(dimethyl)silane Chemical compound CC[Si](C)(C)CC FJWRGPWPIXAPBJ-UHFFFAOYSA-N 0.000 description 1
- CTCMZLFWDKHYMJ-UHFFFAOYSA-N diethyl(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](CC)(CC)C1=CC=CC=C1 CTCMZLFWDKHYMJ-UHFFFAOYSA-N 0.000 description 1
- UCXUKTLCVSGCNR-UHFFFAOYSA-N diethylsilane Chemical compound CC[SiH2]CC UCXUKTLCVSGCNR-UHFFFAOYSA-N 0.000 description 1
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- BOMPXIHODLVNMC-UHFFFAOYSA-N difluoro(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](F)(F)C1=CC=CC=C1 BOMPXIHODLVNMC-UHFFFAOYSA-N 0.000 description 1
- OLLFKUHHDPMQFR-UHFFFAOYSA-N dihydroxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](O)(O)C1=CC=CC=C1 OLLFKUHHDPMQFR-UHFFFAOYSA-N 0.000 description 1
- BSNASBXELXDWSZ-UHFFFAOYSA-N dihydroxy(dipropyl)silane Chemical compound CCC[Si](O)(O)CCC BSNASBXELXDWSZ-UHFFFAOYSA-N 0.000 description 1
- ICFCQEJDICSLOV-UHFFFAOYSA-N diisocyanato(dimethyl)silane Chemical compound O=C=N[Si](C)(C)N=C=O ICFCQEJDICSLOV-UHFFFAOYSA-N 0.000 description 1
- TTZNCSDPSRUFNZ-UHFFFAOYSA-N diisocyanato(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](N=C=O)(N=C=O)C1=CC=CC=C1 TTZNCSDPSRUFNZ-UHFFFAOYSA-N 0.000 description 1
- WCCKEPKWCKHBLU-UHFFFAOYSA-N diisothiocyanato(dimethyl)silane Chemical compound S=C=N[Si](C)(C)N=C=S WCCKEPKWCKHBLU-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- DFJDZTPFNSXNAX-UHFFFAOYSA-N ethoxy(triethyl)silane Chemical compound CCO[Si](CC)(CC)CC DFJDZTPFNSXNAX-UHFFFAOYSA-N 0.000 description 1
- RSIHJDGMBDPTIM-UHFFFAOYSA-N ethoxy(trimethyl)silane Chemical compound CCO[Si](C)(C)C RSIHJDGMBDPTIM-UHFFFAOYSA-N 0.000 description 1
- NHOREJPMXSLGGR-UHFFFAOYSA-N ethyl(trifluoro)silane Chemical compound CC[Si](F)(F)F NHOREJPMXSLGGR-UHFFFAOYSA-N 0.000 description 1
- UKAJDOBPPOAZSS-UHFFFAOYSA-N ethyl(trimethyl)silane Chemical compound CC[Si](C)(C)C UKAJDOBPPOAZSS-UHFFFAOYSA-N 0.000 description 1
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- UBGXLEFOIVWVRP-UHFFFAOYSA-N fluoro(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(F)C1=CC=CC=C1 UBGXLEFOIVWVRP-UHFFFAOYSA-N 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 1
- IOANYFLVSWZRND-UHFFFAOYSA-N hydroxy(tripropyl)silane Chemical compound CCC[Si](O)(CCC)CCC IOANYFLVSWZRND-UHFFFAOYSA-N 0.000 description 1
- FDTBETCIPGWBHK-UHFFFAOYSA-N hydroxy-dimethyl-phenylsilane Chemical compound C[Si](C)(O)C1=CC=CC=C1 FDTBETCIPGWBHK-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- NIZHERJWXFHGGU-UHFFFAOYSA-N isocyanato(trimethyl)silane Chemical compound C[Si](C)(C)N=C=O NIZHERJWXFHGGU-UHFFFAOYSA-N 0.000 description 1
- JNFUJVWWFWBAFI-UHFFFAOYSA-N isocyanato(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(N=C=O)C1=CC=CC=C1 JNFUJVWWFWBAFI-UHFFFAOYSA-N 0.000 description 1
- 150000002540 isothiocyanates Chemical class 0.000 description 1
- XLTUPERVRFLGLJ-UHFFFAOYSA-N isothiocyanato(trimethyl)silane Chemical compound C[Si](C)(C)N=C=S XLTUPERVRFLGLJ-UHFFFAOYSA-N 0.000 description 1
- OLADAAIOVXNIIJ-UHFFFAOYSA-N isothiocyanato(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(N=C=S)C1=CC=CC=C1 OLADAAIOVXNIIJ-UHFFFAOYSA-N 0.000 description 1
- POPACFLNWGUDSR-UHFFFAOYSA-N methoxy(trimethyl)silane Chemical compound CO[Si](C)(C)C POPACFLNWGUDSR-UHFFFAOYSA-N 0.000 description 1
- GIGVICQLYWGMGW-UHFFFAOYSA-N methyl(triphenyl)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(C)C1=CC=CC=C1 GIGVICQLYWGMGW-UHFFFAOYSA-N 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000001367 organochlorosilanes Chemical class 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 150000001283 organosilanols Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 description 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 1
- JLAVCPKULITDHO-UHFFFAOYSA-N tetraphenylsilane Chemical compound C1=CC=CC=C1[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 JLAVCPKULITDHO-UHFFFAOYSA-N 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- AYEIDEXJQVEFRP-UHFFFAOYSA-N tribromomethylsilane Chemical compound [SiH3]C(Br)(Br)Br AYEIDEXJQVEFRP-UHFFFAOYSA-N 0.000 description 1
- ZOYFEXPFPVDYIS-UHFFFAOYSA-N trichloro(ethyl)silane Chemical compound CC[Si](Cl)(Cl)Cl ZOYFEXPFPVDYIS-UHFFFAOYSA-N 0.000 description 1
- ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 1
- DWAWYEUJUWLESO-UHFFFAOYSA-N trichloromethylsilane Chemical compound [SiH3]C(Cl)(Cl)Cl DWAWYEUJUWLESO-UHFFFAOYSA-N 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
- NKLYMYLJOXIVFB-UHFFFAOYSA-N triethoxymethylsilane Chemical compound CCOC([SiH3])(OCC)OCC NKLYMYLJOXIVFB-UHFFFAOYSA-N 0.000 description 1
- QVMRVWAOMIXFFW-UHFFFAOYSA-N triethyl(fluoro)silane Chemical compound CC[Si](F)(CC)CC QVMRVWAOMIXFFW-UHFFFAOYSA-N 0.000 description 1
- WVMSIBFANXCZKT-UHFFFAOYSA-N triethyl(hydroxy)silane Chemical compound CC[Si](O)(CC)CC WVMSIBFANXCZKT-UHFFFAOYSA-N 0.000 description 1
- DYLHASDTRVTZSY-UHFFFAOYSA-N triethyl(isothiocyanato)silane Chemical compound CC[Si](CC)(CC)N=C=S DYLHASDTRVTZSY-UHFFFAOYSA-N 0.000 description 1
- JCSVHJQZTMYYFL-UHFFFAOYSA-N triethyl(methyl)silane Chemical compound CC[Si](C)(CC)CC JCSVHJQZTMYYFL-UHFFFAOYSA-N 0.000 description 1
- CEAWWDXUKYZTJL-UHFFFAOYSA-N triethyl(phenyl)silane Chemical compound CC[Si](CC)(CC)C1=CC=CC=C1 CEAWWDXUKYZTJL-UHFFFAOYSA-N 0.000 description 1
- WILBTFWIBAOWLN-UHFFFAOYSA-N triethyl(triethylsilyloxy)silane Chemical compound CC[Si](CC)(CC)O[Si](CC)(CC)CC WILBTFWIBAOWLN-UHFFFAOYSA-N 0.000 description 1
- QPHQCJNOZBWLDN-UHFFFAOYSA-N triethyl(triethylsilylsulfanyl)silane Chemical compound CC[Si](CC)(CC)S[Si](CC)(CC)CC QPHQCJNOZBWLDN-UHFFFAOYSA-N 0.000 description 1
- AAURKQPZJJMXER-UHFFFAOYSA-N triethylsilyl acetate Chemical compound CC[Si](CC)(CC)OC(C)=O AAURKQPZJJMXER-UHFFFAOYSA-N 0.000 description 1
- MKMPBMJIGMMCPB-UHFFFAOYSA-N triethylsilylformonitrile Chemical compound CC[Si](CC)(CC)C#N MKMPBMJIGMMCPB-UHFFFAOYSA-N 0.000 description 1
- KGWNTHHPMKEAIK-UHFFFAOYSA-N trifluoro(phenyl)silane Chemical compound F[Si](F)(F)C1=CC=CC=C1 KGWNTHHPMKEAIK-UHFFFAOYSA-N 0.000 description 1
- KIEXGUUJAYEUSM-UHFFFAOYSA-N trifluoromethylsilane Chemical compound FC(F)(F)[SiH3] KIEXGUUJAYEUSM-UHFFFAOYSA-N 0.000 description 1
- DFJSZWHUOKADCX-UHFFFAOYSA-N triisocyanato(methyl)silane Chemical compound O=C=N[Si](C)(N=C=O)N=C=O DFJSZWHUOKADCX-UHFFFAOYSA-N 0.000 description 1
- NEDLSAOCQDLSHW-UHFFFAOYSA-N triisocyanato(phenyl)silane Chemical compound O=C=N[Si](N=C=O)(N=C=O)C1=CC=CC=C1 NEDLSAOCQDLSHW-UHFFFAOYSA-N 0.000 description 1
- VNFQTLSCNDKTRD-UHFFFAOYSA-N triisothiocyanato(methyl)silane Chemical compound S=C=N[Si](C)(N=C=S)N=C=S VNFQTLSCNDKTRD-UHFFFAOYSA-N 0.000 description 1
- TUQLLQQWSNWKCF-UHFFFAOYSA-N trimethoxymethylsilane Chemical compound COC([SiH3])(OC)OC TUQLLQQWSNWKCF-UHFFFAOYSA-N 0.000 description 1
- OJAJJFGMKAZGRZ-UHFFFAOYSA-N trimethyl(phenoxy)silane Chemical compound C[Si](C)(C)OC1=CC=CC=C1 OJAJJFGMKAZGRZ-UHFFFAOYSA-N 0.000 description 1
- KXFSUVJPEQYUGN-UHFFFAOYSA-N trimethyl(phenyl)silane Chemical compound C[Si](C)(C)C1=CC=CC=C1 KXFSUVJPEQYUGN-UHFFFAOYSA-N 0.000 description 1
- WNWMJFBAIXMNOF-UHFFFAOYSA-N trimethyl(propyl)silane Chemical compound CCC[Si](C)(C)C WNWMJFBAIXMNOF-UHFFFAOYSA-N 0.000 description 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 1
- AAPLIUHOKVUFCC-UHFFFAOYSA-N trimethylsilanol Chemical compound C[Si](C)(C)O AAPLIUHOKVUFCC-UHFFFAOYSA-N 0.000 description 1
- ZMHATUZXFSOVSC-UHFFFAOYSA-N triphenyl(triphenylsilyl)silane Chemical compound C1=CC=CC=C1[Si]([Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 ZMHATUZXFSOVSC-UHFFFAOYSA-N 0.000 description 1
- IVZTVZJLMIHPEY-UHFFFAOYSA-N triphenyl(triphenylsilyloxy)silane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)O[Si](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 IVZTVZJLMIHPEY-UHFFFAOYSA-N 0.000 description 1
- AKQNYQDSIDKVJZ-UHFFFAOYSA-N triphenylsilane Chemical compound C1=CC=CC=C1[SiH](C=1C=CC=CC=1)C1=CC=CC=C1 AKQNYQDSIDKVJZ-UHFFFAOYSA-N 0.000 description 1
- NLSXASIDNWDYMI-UHFFFAOYSA-N triphenylsilanol Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(O)C1=CC=CC=C1 NLSXASIDNWDYMI-UHFFFAOYSA-N 0.000 description 1
- KHQZLUVCZCAMFU-UHFFFAOYSA-N tripropyl(tripropylsilyloxy)silane Chemical compound CCC[Si](CCC)(CCC)O[Si](CCC)(CCC)CCC KHQZLUVCZCAMFU-UHFFFAOYSA-N 0.000 description 1
- SMGVPQGSJQUVMG-UHFFFAOYSA-N tripropyl(tripropylsilylsulfanyl)silane Chemical compound C(CC)[Si](CCC)(CCC)S[Si](CCC)(CCC)CCC SMGVPQGSJQUVMG-UHFFFAOYSA-N 0.000 description 1
- ZHOVAWFVVBWEGQ-UHFFFAOYSA-N tripropylsilane Chemical compound CCC[SiH](CCC)CCC ZHOVAWFVVBWEGQ-UHFFFAOYSA-N 0.000 description 1
- FNRQRIRGNYNSHU-UHFFFAOYSA-N tripropylsilyl acetate Chemical compound CCC[Si](CCC)(CCC)OC(C)=O FNRQRIRGNYNSHU-UHFFFAOYSA-N 0.000 description 1
- JLEXUIVKURIPFI-UHFFFAOYSA-N tris phosphate Chemical compound OP(O)(O)=O.OCC(N)(CO)CO JLEXUIVKURIPFI-UHFFFAOYSA-N 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
- C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Glass Melting And Manufacturing (AREA)
- Silicon Compounds (AREA)
Description
この方法で製造された石英ガラス粉を用いて、加熱燒結して作製された石英ガラス体は、天然石英ガラス体並かそれ以上の高耐熱性を有する。
次にヘキサメチルジシラザン蒸気を窒素ガスで希釈しながら流し、ガラス粉中に残留している水酸基とヘキサメチルジシラザンとを反応させる。このとき下記式(1)のような反応が起こると考えられる。
Si−OH + [(CH3)3Si]2NH →
Si−N−[(CH3)3Si]2 + H2O ・・・(1)
この反応は、100℃未満では、反応が充分に進まず、1000℃を超えると、反応の前に反応ガスが熱分解してしまい効果を得ることができない。
(実施例1)
ゾルゲル法によって作製された、粒度が50μm〜500μmの合成石英ガラス微粒子(OH基約300ppm含有)約1kgを、電気炉内に装着された石英ガラス製の炉心管(直径200mm)内にセットした。次いで、炉心管内を排気した後、500℃に加熱し、この温度で60分間予熱した。その後600℃まで昇温し、微粒子中のOH基と、反応ガスとしてヘキサメチルジシラザン蒸気1mol/HrをN2ガス1mol/Hrで希釈しながら供給し、反応させた。加熱は、表1に示した反応温度にて、1時間の間その温度にて保持して行った。
その後、微粒子をカーボン鋳型に充填し、加熱炉にセットし、1×10-3mmHg以下に減圧後、1500℃に昇温し、1時間保持した後、室温に冷却し、緻密化された透明石英ガラス体を得た。
表1に示した如く、4塩化珪素を火炎加水分解して作製された、粒度が0.05μm〜10μmの合成石英ガラス微粒子(OH基約300ppm含有)約1kgを使用する以外は実施例1と同様に行い、透明なガラス体を得た。得られた石英ガラス体の物性を表1に示す。得られた石英ガラス体の粘度は、1280℃のlogηで12.2であり、高い耐熱性を示した。
表1に示した如く、OH基を約200ppm含有する、粒度が5μm〜500μmの天然石英ガラス粉を使用する以外は実施例1と同様に行い、透明なガラス体を得た。得られた石英ガラス体の物性を表1に示す。得られた石英ガラス体の粘度は、1280℃のlogηで、12.4であり、極めて高い高耐熱性を示した。
表1に示した如く、シラザン雰囲気処理のかわりに、シロキサン雰囲気処理を行う以外は実施例1と同様に行い、透明なガラス体を得た。得られた石英ガラス体の物性を表1に示す。得られた石英ガラス体の粘度は、1280℃のlogηで、12.2であり、高い耐熱性を示した。
表1に示した如く、シラザン雰囲気処理とその後のArとH2の混合雰囲気での加熱処理のかわりに、窒素雰囲気で処理する以外は実施例1と同様に行った。得られた石英ガラス体の物性を表1に示す。得られた石英ガラス体の粘度は、1280℃のlogηで、11.3であった。
表1に示した如く、シラザン雰囲気処理とその後のArとH2の混合雰囲気での加熱処理のかわりに、塩素雰囲気で処理する以外は実施例1と同様に行った。得られた石英ガラス体の物性を表1に示す。得られた石英ガラス体の粘度は、1280℃のlogηで、11.6であった。
表1に示した如く、シラザン雰囲気処理とその後のArとH2の混合雰囲気での加熱処理のかわりに、窒素雰囲気で処理する以外は、実施例3と同様に行った。得られた石英ガラス体の物性を表1に示す。得られた石英ガラス体の粘度は、1280℃のlogηで、11.9であった。
Claims (3)
- OH基が50ppm以上の石英ガラス粉と有機珪素化合物ガスを100℃〜1000℃の反応温度で共存反応させる工程と、
前記共存反応の後に水素を含む雰囲気中で300℃〜1400℃の温度範囲で加熱処理を行う工程と、
を含む高耐熱性石英ガラス粉の製造方法であって、
前記高耐熱性石英ガラス粉で製造された高耐熱性石英ガラス体の粘度が、1280℃のlogηで12.2以上であることを特徴とする高耐熱性石英ガラス粉の製造方法。 - 前記OH基が50ppm以上の石英ガラス粉が、OH基が50ppm以上の合成石英ガラス粉であることを特徴とする請求項1記載の高耐熱性石英ガラス粉の製造方法。
- 請求項1又は2記載の方法で製造された高耐熱性石英ガラス粉。
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