JP5008170B2 - オゾン発生装置用放電セル - Google Patents
オゾン発生装置用放電セル Download PDFInfo
- Publication number
- JP5008170B2 JP5008170B2 JP2006076576A JP2006076576A JP5008170B2 JP 5008170 B2 JP5008170 B2 JP 5008170B2 JP 2006076576 A JP2006076576 A JP 2006076576A JP 2006076576 A JP2006076576 A JP 2006076576A JP 5008170 B2 JP5008170 B2 JP 5008170B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- voltage electrode
- discharge
- dielectric
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims description 77
- 239000003989 dielectric material Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 26
- 239000003507 refrigerant Substances 0.000 claims description 24
- 238000010030 laminating Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 47
- 239000010410 layer Substances 0.000 description 45
- 238000001816 cooling Methods 0.000 description 34
- 239000000498 cooling water Substances 0.000 description 20
- 230000007423 decrease Effects 0.000 description 20
- 239000000919 ceramic Substances 0.000 description 17
- 239000011521 glass Substances 0.000 description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 230000003749 cleanliness Effects 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Description
11,12 貫通孔
13 ガス流路
14 セラミック層
15 電極層
16 端子部
20 絶縁板
21,22 貫通孔
30 スリット板
31 貫通孔
33 スリット
40 蓋板
41 ガス孔
42 冷媒孔
50 ガラス接合層
60 棒状リード
70 放電空隙
80 縦向きガス流路
100 エンドプレート
110 トッププレート
120 低圧側の冷却板を兼ねる低圧電極
130 誘電板
140 高圧電極
150 高圧絶縁板
160 高圧側の冷却板
170 タイロッド
180 固定具
190 スペーサー
200 カバー
Claims (6)
- 所定の交流電圧が印加される高圧電極と低圧電極の間に放電空隙を形成するべく少なくとも一方の電極に接して電極間に誘電体が配置されており、且つ放電空隙を両面側から冷却するべく両電極の外側に冷媒流路が形成されると共に、高圧側の冷媒流路を高圧電極から絶縁するために両者の間に高圧絶縁板が配置されたオゾン発生装置用放電セルにおいて、高圧絶縁板の板厚が、高圧電極と低圧電極の間に配置された誘電体の総厚の0.5倍以上、2倍以下であるオゾン発生装置用放電セル。
- 高圧電極と低圧電極の間に両電極に接して一対の誘電体が配置されており、一対の誘電体の間に放電空隙が形成されている請求項1に記載のオゾン発生装置用放電セル。
- 高圧電極と低圧電極の間に、高圧電極のみに接して1枚の誘電体が配置されており、該誘電体と前記低圧電極の間に放電空隙が形成されている請求項1に記載のオゾン発生装置用放電セル。
- 高圧絶縁板の板厚が、高圧電極と低圧電極の間に配置された誘電体の総厚の0.5倍以上、2倍以下であり、且つ1mm以下である請求項1〜3の何れかに記載のオゾン発生装置用放電セル。
- 複数枚の板材を板厚方向に一体的に積層したブロック一体構造である請求項1〜4の何れかに記載のオゾン発生装置用放電セル。
- 請求項1〜5の何れかに記載のオゾン発生装置用放電セルを単位セルとして、これを複数段に積層してなるオゾン発生装置用放電セル。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006076576A JP5008170B2 (ja) | 2005-11-29 | 2006-03-20 | オゾン発生装置用放電セル |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005343891 | 2005-11-29 | ||
JP2005343891 | 2005-11-29 | ||
JP2006076576A JP5008170B2 (ja) | 2005-11-29 | 2006-03-20 | オゾン発生装置用放電セル |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012087460A Division JP5545776B2 (ja) | 2005-11-29 | 2012-04-06 | オゾン発生装置用放電セル |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007176779A JP2007176779A (ja) | 2007-07-12 |
JP5008170B2 true JP5008170B2 (ja) | 2012-08-22 |
Family
ID=38302316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006076576A Active JP5008170B2 (ja) | 2005-11-29 | 2006-03-20 | オゾン発生装置用放電セル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5008170B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100944700B1 (ko) | 2009-05-19 | 2010-02-26 | 한국기계연구원 | 고농도 오존가스 생성장치 |
US9039985B2 (en) * | 2011-06-06 | 2015-05-26 | Mks Instruments, Inc. | Ozone generator |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10245206A (ja) * | 1997-03-05 | 1998-09-14 | Sumitomo Precision Prod Co Ltd | オゾン発生装置用放電セル |
JP2000178011A (ja) * | 1998-12-11 | 2000-06-27 | Tokyo Electron Ltd | オゾン発生装置及びこれを用いた熱処理システム |
JP4180179B2 (ja) * | 1999-02-26 | 2008-11-12 | 住友精密工業株式会社 | オゾン発生装置用放電セル |
JP3607890B2 (ja) * | 2001-11-22 | 2005-01-05 | 東芝三菱電機産業システム株式会社 | オゾン発生器 |
-
2006
- 2006-03-20 JP JP2006076576A patent/JP5008170B2/ja active Active
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JP2007176779A (ja) | 2007-07-12 |
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