JP5007648B2 - アクチュエータ、光スキャナおよび画像形成装置 - Google Patents
アクチュエータ、光スキャナおよび画像形成装置 Download PDFInfo
- Publication number
- JP5007648B2 JP5007648B2 JP2007266209A JP2007266209A JP5007648B2 JP 5007648 B2 JP5007648 B2 JP 5007648B2 JP 2007266209 A JP2007266209 A JP 2007266209A JP 2007266209 A JP2007266209 A JP 2007266209A JP 5007648 B2 JP5007648 B2 JP 5007648B2
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- Prior art keywords
- movable plate
- portions
- pair
- actuator
- rotation center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 26
- 238000001579 optical reflectometry Methods 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 29
- 238000000034 method Methods 0.000 description 14
- 230000007613 environmental effect Effects 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
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- 238000007747 plating Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 2
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- 238000001020 plasma etching Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000828 alnico Inorganic materials 0.000 description 1
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- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Landscapes
- Laser Beam Printer (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Facsimile Scanning Arrangements (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007266209A JP5007648B2 (ja) | 2007-10-12 | 2007-10-12 | アクチュエータ、光スキャナおよび画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007266209A JP5007648B2 (ja) | 2007-10-12 | 2007-10-12 | アクチュエータ、光スキャナおよび画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009093107A JP2009093107A (ja) | 2009-04-30 |
| JP2009093107A5 JP2009093107A5 (enExample) | 2010-10-28 |
| JP5007648B2 true JP5007648B2 (ja) | 2012-08-22 |
Family
ID=40665125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007266209A Expired - Fee Related JP5007648B2 (ja) | 2007-10-12 | 2007-10-12 | アクチュエータ、光スキャナおよび画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5007648B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5554895B2 (ja) * | 2008-02-20 | 2014-07-23 | キヤノン株式会社 | 揺動構造体、及び揺動構造体を用いた揺動体装置 |
| JP5627279B2 (ja) * | 2010-04-28 | 2014-11-19 | パナソニック株式会社 | 振動発電デバイスおよびその製造方法 |
| JP5846097B2 (ja) * | 2012-10-29 | 2016-01-20 | 株式会社デンソー | 光走査装置 |
| WO2023058226A1 (ja) * | 2021-10-08 | 2023-04-13 | Ｙｉｔｏａマイクロテクノロジー株式会社 | 反射体スキャナ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0744848B2 (ja) * | 1990-06-19 | 1995-05-15 | 松下電器産業株式会社 | 角度調節装置 |
| JP2003181800A (ja) * | 2001-12-19 | 2003-07-02 | Hitachi Ltd | 圧電型マイクロアクチュエータ及びこれを備えたマイクロミラー |
| JP3956933B2 (ja) * | 2002-11-26 | 2007-08-08 | ブラザー工業株式会社 | 光走査装置および画像形成装置 |
| US7485485B2 (en) * | 2004-02-09 | 2009-02-03 | Microvision, Inc. | Method and apparatus for making a MEMS scanner |
-
2007
- 2007-10-12 JP JP2007266209A patent/JP5007648B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009093107A (ja) | 2009-04-30 |
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