JP5003890B2 - 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置 - Google Patents

基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置 Download PDF

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Publication number
JP5003890B2
JP5003890B2 JP2007230877A JP2007230877A JP5003890B2 JP 5003890 B2 JP5003890 B2 JP 5003890B2 JP 2007230877 A JP2007230877 A JP 2007230877A JP 2007230877 A JP2007230877 A JP 2007230877A JP 5003890 B2 JP5003890 B2 JP 5003890B2
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substrate
transfer robot
substrate transfer
teaching
transport
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JP2009061542A (ja
JP2009061542A5 (enExample
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吉希 木村
英成 尾野
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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JP2007230877A 2007-09-06 2007-09-06 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置 Active JP5003890B2 (ja)

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JP2007230877A JP5003890B2 (ja) 2007-09-06 2007-09-06 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置

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JP2007230877A JP5003890B2 (ja) 2007-09-06 2007-09-06 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置

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JP2009061542A JP2009061542A (ja) 2009-03-26
JP2009061542A5 JP2009061542A5 (enExample) 2011-10-20
JP5003890B2 true JP5003890B2 (ja) 2012-08-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010184333A (ja) * 2009-02-13 2010-08-26 Yaskawa Electric Corp 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011077546A1 (de) * 2011-06-15 2012-12-20 Technische Universität Berlin Verfahren zum Betreiben eines Roboters, Roboter und Robotersystem
JP5911299B2 (ja) * 2011-12-27 2016-04-27 キヤノン株式会社 情報処理装置、情報処理装置の制御方法およびプログラム

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06302667A (ja) * 1993-04-15 1994-10-28 Hitachi Ltd チャンバシステム
JP4238388B2 (ja) * 1998-09-01 2009-03-18 株式会社ニコン ステージ付き顕微鏡
JP4709436B2 (ja) * 2001-07-13 2011-06-22 株式会社ダイヘン ワーク搬送用ロボット
JP2003103481A (ja) * 2001-09-28 2003-04-08 Honda Motor Co Ltd 多関節ロボットの姿勢適正化方法および適正化装置
WO2004067232A2 (en) * 2003-01-31 2004-08-12 Thermo Crs Ltd. Syntactic inferential motion planning method for robotic systems
JP4506255B2 (ja) * 2004-04-19 2010-07-21 株式会社安川電機 ウェハ位置教示方法およびそのロボット
JP4451725B2 (ja) * 2004-06-09 2010-04-14 川崎重工業株式会社 ロボット動作計画方法、ロボット動作計画装置、プログラムおよび記録媒体
JP4196911B2 (ja) * 2004-09-06 2008-12-17 セイコーエプソン株式会社 軌道決定システムおよび軌道決定方法
JP4841183B2 (ja) * 2005-06-28 2011-12-21 東京エレクトロン株式会社 基板処理装置，搬送装置，搬送装置の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010184333A (ja) * 2009-02-13 2010-08-26 Yaskawa Electric Corp 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置

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