JP4991843B2 - 電子コンポーネントにおけるエネルギー相互作用に対する感度の特徴づけのプロセスおよび装置 - Google Patents
電子コンポーネントにおけるエネルギー相互作用に対する感度の特徴づけのプロセスおよび装置 Download PDFInfo
- Publication number
- JP4991843B2 JP4991843B2 JP2009505942A JP2009505942A JP4991843B2 JP 4991843 B2 JP4991843 B2 JP 4991843B2 JP 2009505942 A JP2009505942 A JP 2009505942A JP 2009505942 A JP2009505942 A JP 2009505942A JP 4991843 B2 JP4991843 B2 JP 4991843B2
- Authority
- JP
- Japan
- Prior art keywords
- component
- laser
- energy
- zone
- interaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 34
- 230000035945 sensitivity Effects 0.000 title claims description 29
- 230000003993 interaction Effects 0.000 title claims description 25
- 230000008569 process Effects 0.000 title description 8
- 230000005855 radiation Effects 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 7
- 238000004088 simulation Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 4
- 238000005553 drilling Methods 0.000 claims 1
- 230000006870 function Effects 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000002245 particle Substances 0.000 description 12
- 239000013078 crystal Substances 0.000 description 10
- 230000015654 memory Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000013507 mapping Methods 0.000 description 8
- 230000003071 parasitic effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000004807 localization Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000004064 dysfunction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2881—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to environmental aspects other than temperature, e.g. humidity or vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
- G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2849—Environmental or reliability testing, e.g. burn-in or validation tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
Description
− 電子コンポーネントを起動させ、
− このように起動させた電子コンポーネントを、レーザー放射線を用いて励起させ、
− この励起に対応する起動された電子コンポーネントの機能不良を測定し、そして
− エネルギー相互作用が最も強いコンポーネント内の関心対象の位置特定マップを作成する、
というプロセスであって、
− コンポーネント内のさまざまな深さにレーザー放射線を集束させること、および
− これらのさまざまな深さについてエネルギー相互作用を測定すること、
を特徴とするプロセスである。
ω O=集束点(ここでz=zO)でのレーザービームの幅。
n=伝播媒質の屈折率。
IO=J/cm2における、半導体内に入る前の入射レーザーエネルギー密度
である。
ωosi=ωoair=ω0
zo=nsixzo’
h=プランク定数
c=光の速度
λ=レーザー波長
(1−R)Ilaser=半導体内に進入するレーザーエネルギー密度
α=半導体の吸収係数
η=量子効率≒1
2 半導体結晶
3 ケーシング
4 ウェル
5〜8 ゾーン
9 酸化ケイ素障壁
10 接続部
11 接続インターフェース
13 保護要素
14 レーザー源
15 放射線
17 制御装置
18 マイクロプロセッサ
19 バス
20 プログラムメモリ
21 データメモリ
22 比較器
23 プリセット入力端
29 レンズ
30 焦点
35 レーザーエネルギー減衰システム
Claims (9)
- 電子コンポーネント(1)内のエネルギー相互作用に対する感度の特徴づけの方法であって、該方法において、
− 電子コンポーネントを起動させ、
− かくして起動させた電子コンポーネントを、レーザー放射線(15)を用いて励起させ(14)、
− この励起に対応する起動された電子コンポーネントの機能不良を測定し(25)、
− これらの相互作用が最も強いコンポーネント内の関心対象の位置特定マップ(図5)を作成する、
という方法であって、
− コンポーネント内のさまざまな深度(31)にレーザー放射線を集束させる(29)こと、および
− これらのさまざまな深度についてエネルギー相互作用を測定すること、
を特徴とする方法。 - − 関心対象の位置特定(1〜4、5〜11)のため、コンポーネント内のさまざまな深度(31)にレーザー放射線を集束させる(29)こと、
を特徴とする、請求項1に記載の方法。 - − エネルギー相互作用測定を目的として、レーザーシミュレーション(36〜39)により、重イオンおよび/または陽子および/または中性子の相互作用を測定すること、
を特徴とする、請求項1または2に記載の方法。 - − 所与の深度について、好ましくはピッチ毎に、レーザーの出力を変動させる(35)こと、および、
− その値を超えると相互作用が臨界になる、臨界出力を決定すること、
を特徴とする、請求項1〜3のいずれか一つに記載の方法。 - − コンポーネントのスラブ(2)の一方の面(12)からこのコンポーネントを励起し、この面が好ましくは、不純物の埋め込みを行なう面とは反対側であること、
を特徴とする、請求項1〜4のいずれか一つに記載の方法。 - − コンポーネントのスラブの保護要素(13)内に小さな穴(16)をあけること、
− この小さい穴がコンポーネントのスラブの総表面積よりも小さい表面積をもつものであり、
− この小さい穴がコンポーネントへのレーザー放射線のインパクトの痕跡よりも大きい表面積をもつものであり、
− このインパクトの痕跡がコンポーネント内に埋め込まれた基本電子セルの表面積より大きい表面積をもつものであること、
を特徴とする、請求項5に記載の方法。 - − コンポーネントの出力信号を予想した値と比較することにより相互作用を測定すること、および
− この比較(22)がもはや一つの基準(23)に適合しなくなる条件を検出すること、
を特徴とする、請求項1〜6のいずれか一つに記載の方法。 - − レーザー源のレーザー光子エネルギーが半導体コンポーネントのバンドギャップの値を上回ること、
を特徴とする、請求項1〜7のいずれか一つに記載の方法。 - 請求項1〜8のいずれか一つに記載の方法を実施するための装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0651382A FR2900242B1 (fr) | 2006-04-19 | 2006-04-19 | Procede et dispositif de caracterisation de la sensibilite aux interactions energetiques dans un composant electronique |
FR0651382 | 2006-04-19 | ||
PCT/FR2007/051130 WO2007119030A2 (fr) | 2006-04-19 | 2007-04-18 | Procédé et dispositif de caractérisation de la sensibilité aux interactions énergétiques dans un composant électronique |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009534827A JP2009534827A (ja) | 2009-09-24 |
JP2009534827A5 JP2009534827A5 (ja) | 2012-01-26 |
JP4991843B2 true JP4991843B2 (ja) | 2012-08-01 |
Family
ID=37453082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009505942A Expired - Fee Related JP4991843B2 (ja) | 2006-04-19 | 2007-04-18 | 電子コンポーネントにおけるエネルギー相互作用に対する感度の特徴づけのプロセスおよび装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8289038B2 (ja) |
EP (1) | EP2008115B1 (ja) |
JP (1) | JP4991843B2 (ja) |
FR (1) | FR2900242B1 (ja) |
WO (1) | WO2007119030A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2923021B1 (fr) * | 2007-10-26 | 2010-02-19 | Eads Europ Aeronautic Defence | Procede de determination de la sensibilite des composants electroniques vis-a-vis des particules. |
FR2939964B1 (fr) | 2008-12-17 | 2010-12-10 | Eads Europ Aeronautic Defence | Dispositif de test de circuit integre et procede de mise en oeuvre |
CN105738936B (zh) * | 2016-02-25 | 2019-04-09 | 北京卫星环境工程研究所 | 空间辐射环境与效应组合探测结构 |
RU168496U1 (ru) * | 2016-09-12 | 2017-02-06 | федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский ядерный университет "МИФИ" (НИЯУ МИФИ) | Лазерная установка с перестраиваемой длиной волны для исследования радиационной стойкости интегральных схем на основе Si, GaAs, SiGe к воздействию отдельных заряженных частиц |
WO2021074001A1 (en) | 2019-10-16 | 2021-04-22 | Basf Coatings Gmbh | Super advanced controlled radical polymerization |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4786865A (en) * | 1986-03-03 | 1988-11-22 | The Boeing Company | Method and apparatus for testing integrated circuit susceptibility to cosmic rays |
GB2248965B (en) | 1990-10-17 | 1994-10-05 | Marconi Gec Ltd | Semiconductor testing method |
JPH04312942A (ja) * | 1991-03-25 | 1992-11-04 | Mitsubishi Electric Corp | Obic電流検出方法 |
US5966019A (en) * | 1996-04-24 | 1999-10-12 | Boxer Cross, Inc. | System and method for measuring properties of a semiconductor substrate in a fabrication line |
US6154477A (en) * | 1997-05-13 | 2000-11-28 | Berkeley Research Associates, Inc. | On-board laser-triggered multi-layer semiconductor power switch |
JP3698904B2 (ja) * | 1999-01-11 | 2005-09-21 | 沖電気工業株式会社 | 半導体評価方法及び欠陥位置特定装置 |
JP2002168798A (ja) * | 2000-11-30 | 2002-06-14 | Toshiba Corp | 不良解析装置 |
US6967491B2 (en) * | 2003-07-11 | 2005-11-22 | Credence Systems Corporation | Spatial and temporal selective laser assisted fault localization |
JP4631704B2 (ja) | 2003-08-29 | 2011-02-16 | アイシン精機株式会社 | 半導体デバイスの電界分布測定方法と装置 |
FR2876188B1 (fr) * | 2004-10-01 | 2007-01-26 | Cnes Epic | Procede et installation d'analyse d'un circuit integre |
US7872489B2 (en) * | 2008-04-28 | 2011-01-18 | Freescale Semiconductor, Inc. | Radiation induced fault analysis |
-
2006
- 2006-04-19 FR FR0651382A patent/FR2900242B1/fr not_active Expired - Fee Related
-
2007
- 2007-04-18 EP EP07731906.9A patent/EP2008115B1/fr not_active Expired - Fee Related
- 2007-04-18 US US12/297,743 patent/US8289038B2/en not_active Expired - Fee Related
- 2007-04-18 JP JP2009505942A patent/JP4991843B2/ja not_active Expired - Fee Related
- 2007-04-18 WO PCT/FR2007/051130 patent/WO2007119030A2/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2009534827A (ja) | 2009-09-24 |
FR2900242A1 (fr) | 2007-10-26 |
FR2900242B1 (fr) | 2008-08-22 |
EP2008115A2 (fr) | 2008-12-31 |
US20100148790A1 (en) | 2010-06-17 |
WO2007119030A3 (fr) | 2007-12-21 |
EP2008115B1 (fr) | 2016-08-03 |
WO2007119030A2 (fr) | 2007-10-25 |
US8289038B2 (en) | 2012-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101458299A (zh) | 现场可编程门阵列单粒子效应测试方法 | |
JP4991843B2 (ja) | 電子コンポーネントにおけるエネルギー相互作用に対する感度の特徴づけのプロセスおよび装置 | |
Melinger et al. | Pulsed laser-induced single event upset and charge collection measurements as a function of optical penetration depth | |
Richter et al. | Simulation of heavy charged particle tracks using focused laser beams | |
CN105593967A (zh) | 减小目标样品的厚度的方法 | |
WO2015128905A1 (ja) | 波形弁別装置、波形弁別方法及び波形弁別プログラム | |
US9506970B2 (en) | Method for characterizing the sensitivity of electronic components to destructive mechanisms | |
US7019311B1 (en) | Laser-based irradiation apparatus and methods for monitoring the dose-rate response of semiconductor devices | |
CN101910855B (zh) | 确定电子部件对粒子的敏感度的方法 | |
Champeix et al. | SEU sensitivity and modeling using pico-second pulsed laser stimulation of a D Flip-Flop in 40 nm CMOS technology | |
WO2014202618A2 (en) | Method for determining the configuration of a structure | |
Luu et al. | SEB characterization of commercial power MOSFETs with backside laser and heavy ions of different ranges | |
Pouget et al. | Laser cross section measurement for the evaluation of single-event effects in integrated circuits | |
JP5469677B2 (ja) | 集積回路の試験装置および試験方法 | |
Darracq et al. | Investigation on the single event burnout sensitive volume using two-photon absorption laser testing | |
CN110691979B (zh) | 软错误检查方法、软错误检查装置以及软错误检查系统 | |
Litvak et al. | Ground-based measurements with the ADRON active gamma-ray and neutron spectrometer designed for lunar and Martian landing missions | |
Colladant et al. | Charge collection studies of SOI diodes | |
Kim et al. | Diagnosis of NMOS DRAM functional performance as affected by a picosecond dye laser | |
Doyle et al. | Radiation effects microscopy | |
Horn et al. | Radiation Effects Microscopy and Charge Transport Simulations | |
Dodd et al. | Radiation-Induced Prompt Photocurrents in Microelectronics: Physics | |
Garda et al. | Design and implementation of a measurement unit for laser testing of semiconductor memories | |
Kotov et al. | Microwave Bremsstrahlung from air explosions | |
Cihangir et al. | Charge Collection E ciency in Double-Sided Silicon Microstrip Detectors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110819 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110830 |
|
A524 | Written submission of copy of amendment under section 19 (pct) |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20111130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120410 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120507 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4991843 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150511 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |