JP4989764B2 - 超高分解能走査光学測定装置 - Google Patents
超高分解能走査光学測定装置 Download PDFInfo
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- JP4989764B2 JP4989764B2 JP2010530914A JP2010530914A JP4989764B2 JP 4989764 B2 JP4989764 B2 JP 4989764B2 JP 2010530914 A JP2010530914 A JP 2010530914A JP 2010530914 A JP2010530914 A JP 2010530914A JP 4989764 B2 JP4989764 B2 JP 4989764B2
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- 230000003287 optical effect Effects 0.000 title claims description 87
- 239000000523 sample Substances 0.000 claims description 49
- 238000005259 measurement Methods 0.000 claims description 14
- 239000000126 substance Substances 0.000 description 16
- 239000013307 optical fiber Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N13/00—Investigating surface or boundary effects, e.g. wetting power; Investigating diffusion effects; Analysing materials by determining surface, boundary, or diffusion effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Biophysics (AREA)
- Biochemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
Claims (7)
- 光源と、
前記光源から照射された光を集束させる第1レンズと、
前記第1レンズの次に配される第1ピンホールと、
前記第1ピンホールを通過した光を発散させる第2レンズと、
前記第2レンズを通過した光を走査するためのスキャニング・ユニットと、
前記第2レンズとスキャニング・ユニットとの間に配された第1ビームスプリッタと、
前記スキャニング・ユニットを通過した光を被検体に集束するための対物レンズと、
前記被検体が置かれるスライドと、
前記光源から照射された後、前記被検体を通過した光を反射させる光学探針と、
前記スキャニング・ユニットと対物レンズとの間に配された第2ビームスプリッタと、
前記被検体から反射され、前記第1ビームスプリッタを経由した光を検出するための第1光検出器と、
前記第1ビームスプリッタと第1光検出器との間に配された第2ピンホールと、
前記被検体と前記光学探針とから反射され、前記第2ビームスプリッタを経由した光を検出するための第2光検出器とを含む走査光学測定装置。 - 前記スキャニング・ユニットは、ガルバノミラーを含むことを特徴とする請求項1に記載の走査光学測定装置。
- 前記第1ビームスプリッタと第2レンズとの間に配された第1ミラーと、
前記スキャニング・ユニットと第2ビームスプリッタとの間に配された第2ミラーと、
前記第1ミラーと第2ミラーとが装着され、第1ミラーと第2ミラーとを移動させることができるフリップ・マウントとを含むことを特徴とする請求項1に記載の走査光学測定装置。 - 前記光学探針は、被検体の近接場内に配されることを特徴とする請求項1ないし請求項3のうち、いずれか1項に記載の走査光学測定装置。
- 前記第2光検出器は、前記被検体の表面から反射された光と、前記光学探針から反射された光とが干渉を起こして生じた干渉光を検出することを特徴とする請求項1ないし請求項3のうち、いずれか1項に記載の走査光学測定装置。
- 前記被検体を通過した光が光学探針から反射される領域は、光源から照射される光の波長より小さいサイズを有することを特徴とする請求項1ないし請求項3のうち、いずれか1項に記載の走査光学測定装置。
- 前記スライドは、ナノスライドであることを特徴とする請求項1ないし請求項3のうち、いずれか1項に記載の走査光学測定装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070106744A KR100978600B1 (ko) | 2007-10-23 | 2007-10-23 | 초고분해능 주사 광학 측정 장치 |
KR10-2007-0106744 | 2007-10-23 | ||
PCT/KR2008/000939 WO2009054576A1 (en) | 2007-10-23 | 2008-02-18 | Scanning optical measurement apparatus having super resolution |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011501184A JP2011501184A (ja) | 2011-01-06 |
JP4989764B2 true JP4989764B2 (ja) | 2012-08-01 |
Family
ID=40579667
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Application Number | Title | Priority Date | Filing Date |
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JP2010530914A Active JP4989764B2 (ja) | 2007-10-23 | 2008-02-18 | 超高分解能走査光学測定装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8724116B2 (ja) |
JP (1) | JP4989764B2 (ja) |
KR (1) | KR100978600B1 (ja) |
WO (1) | WO2009054576A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101240146B1 (ko) * | 2011-08-31 | 2013-03-07 | 한국과학기술원 | 갈바노 미러를 이용한 파장 스캐닝 방식의 공초점 분광 현미경 |
CN109188669B (zh) * | 2018-10-09 | 2020-08-25 | 重庆大学 | 基于无衍射超分辨光束照明的非标记远场超分辨显微系统及方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2823970B2 (ja) * | 1991-04-05 | 1998-11-11 | 浜松ホトニクス株式会社 | 近接場走査光学顕微鏡 |
JP3411364B2 (ja) | 1994-03-09 | 2003-05-26 | シチズン時計株式会社 | 複合計測機能を有するレーザ走査顕微鏡 |
JPH10282120A (ja) | 1997-04-11 | 1998-10-23 | Seiko Instr Inc | 走査型近視野光学顕微鏡 |
JPH10293133A (ja) | 1997-04-18 | 1998-11-04 | Olympus Optical Co Ltd | 走査型近接場光学顕微鏡 |
JPH11316240A (ja) | 1998-05-01 | 1999-11-16 | Olympus Optical Co Ltd | 走査型近接場光学顕微鏡 |
DE19822869C2 (de) * | 1998-05-22 | 2001-05-10 | Zeiss Carl Jena Gmbh | Optisches Nahfeldmikroskop |
JP3210654B1 (ja) | 2001-05-02 | 2001-09-17 | レーザーテック株式会社 | 光学式走査装置及び欠陥検出装置 |
JP4062606B2 (ja) | 2003-01-20 | 2008-03-19 | フジノン株式会社 | 低可干渉測定/高可干渉測定共用干渉計装置およびその測定方法 |
KR100648406B1 (ko) * | 2004-04-09 | 2006-11-24 | 학교법인연세대학교 | 나노 탐침 반사를 이용한 근접장 파면 측정 간섭계 |
KR100549215B1 (ko) * | 2004-04-09 | 2006-02-02 | 학교법인연세대학교 | 광위상 측정용 근접장 주사 광학 현미경 |
JP4550488B2 (ja) | 2004-06-02 | 2010-09-22 | 株式会社日立ハイテクノロジーズ | 検出光学装置及び欠陥検査装置 |
JP2006214942A (ja) * | 2005-02-04 | 2006-08-17 | Ricoh Co Ltd | 光ファイバープローブ、光検出装置及び光検出方法 |
JP2006284435A (ja) | 2005-04-01 | 2006-10-19 | Lasertec Corp | プローブ保持装置及びそれを用いた測定装置、加工装置及び光学装置、並びに表面形状測定装置。 |
JP2007183111A (ja) | 2006-01-04 | 2007-07-19 | Nikon Corp | 光強度検出装置とこれを有する光学装置、顕微鏡 |
WO2007149534A2 (en) * | 2006-06-21 | 2007-12-27 | University Of Dayton | Methods of polarization engineering and their applications |
KR100829439B1 (ko) * | 2007-06-08 | 2008-05-15 | 한국표준과학연구원 | 적외선 사광파 혼합 편광 이미징 장치 |
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2007
- 2007-10-23 KR KR1020070106744A patent/KR100978600B1/ko active IP Right Grant
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2008
- 2008-02-18 JP JP2010530914A patent/JP4989764B2/ja active Active
- 2008-02-18 WO PCT/KR2008/000939 patent/WO2009054576A1/en active Application Filing
- 2008-02-18 US US12/739,266 patent/US8724116B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2011501184A (ja) | 2011-01-06 |
US20100296097A1 (en) | 2010-11-25 |
US8724116B2 (en) | 2014-05-13 |
KR20090041171A (ko) | 2009-04-28 |
KR100978600B1 (ko) | 2010-08-27 |
WO2009054576A1 (en) | 2009-04-30 |
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