JP4966707B2 - Thermoelectric module - Google Patents

Thermoelectric module Download PDF

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JP4966707B2
JP4966707B2 JP2007084185A JP2007084185A JP4966707B2 JP 4966707 B2 JP4966707 B2 JP 4966707B2 JP 2007084185 A JP2007084185 A JP 2007084185A JP 2007084185 A JP2007084185 A JP 2007084185A JP 4966707 B2 JP4966707 B2 JP 4966707B2
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thermoelectric module
covering member
thermoelectric
module according
terminal electrode
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JP2008244239A (en
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浩治 徳永
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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Description

本発明は、例えば、空調機、冷温庫、半導体等の発熱体の冷却等に好適に使用される熱電モジュールに関する。   The present invention relates to a thermoelectric module suitably used for cooling a heating element such as an air conditioner, a cold / hot storage, and a semiconductor.

従来より、ペルチェ効果を利用した熱電素子は、電流を流すことにより一端が発熱するとともに他端が吸熱するため、冷却用の熱電素子として用いられている。特に、熱電モジュールとしてレーザーダイオードの温度制御、小型で構造が簡単でありフロンレスの冷却装置、冷蔵庫、恒温槽、光検出素子、半導体製造装置等の電子冷却素子、レーザーダイオードの温度調節等への幅広い利用が期待されている。   Conventionally, a thermoelectric element using the Peltier effect has been used as a thermoelectric element for cooling because one end generates heat and the other end absorbs heat when an electric current is passed. In particular, temperature control of laser diodes as thermoelectric modules, small size and simple structure, cooling devices without refrigerators, refrigerators, thermostats, photodetectors, electronic cooling elements such as semiconductor manufacturing equipment, temperature control of laser diodes, etc. Use is expected.

この熱電素子を利用した熱電モジュールは、一対の支持基板の間に複数の熱電素子が直列に接続されることにより構成されており、支持基板に形成された端子電極を介して熱電素子に通電することにより、一方の支持基板側が発熱部となり、他方の支持基板側が冷却部となる。このことを利用して、熱電モジュールは、冷却素子又は発熱素子として利用される。   The thermoelectric module using this thermoelectric element is configured by connecting a plurality of thermoelectric elements in series between a pair of support substrates, and energizes the thermoelectric elements via terminal electrodes formed on the support substrate. Thus, one support substrate side becomes a heat generating portion, and the other support substrate side becomes a cooling portion. By utilizing this, the thermoelectric module is used as a cooling element or a heating element.

このように、熱電素子を利用した熱電モジュールは、発熱部と冷却部が存在することから結露し易く端子電極を腐食させる原因になる。したがって、通常、端子電極部分は樹脂によって保護されている(例えば、特許文献1の段落0017及び特許文献1に添付された図1)。
特開2000−22224号公報
As described above, the thermoelectric module using the thermoelectric element easily heats up due to the existence of the heat generating portion and the cooling portion, and causes the terminal electrode to corrode. Therefore, the terminal electrode portion is usually protected by resin (for example, paragraph 0017 of Patent Document 1 and FIG. 1 attached to Patent Document 1).
JP 2000-22224 A

しかしながら、従来の熱電モジュールにおいて、端子電極を覆う樹脂被覆部材が支持基板から剥がれるという問題があった。   However, the conventional thermoelectric module has a problem that the resin-coated member covering the terminal electrode is peeled off from the support substrate.

そこで、本発明は、端子電極を覆う被覆部材が支持基板から剥がれるのを抑制でき、信頼性の高い熱電モジュールを提供することを目的とする。   Then, this invention can suppress that the coating | coated member which covers a terminal electrode peels from a support substrate, and it aims at providing a highly reliable thermoelectric module.

以上の目的を達成するために、本発明に係る熱電モジュールは、対向して配置された一対の支持基板と、前記一対の支持基板間に配置された複数の熱電素子とを備え、前記一対の支持基板の対向面にそれぞれ形成された接続電極によって前記熱電素子が接続されてなる熱電モジュールであって、少なくとも一方の支持基板の対向面には、前記接続電極に導通する端子電極が設けられ、その端子電極が該対向面から当該支持基板の少なくとも1つの側面まで延在して形成された被覆部材によって覆われていることを特徴とする。   In order to achieve the above object, a thermoelectric module according to the present invention includes a pair of support substrates disposed opposite to each other, and a plurality of thermoelectric elements disposed between the pair of support substrates. A thermoelectric module in which the thermoelectric elements are connected by connection electrodes respectively formed on opposing surfaces of a support substrate, and at least one of the support substrates is provided with a terminal electrode that is electrically connected to the connection electrode, The terminal electrode is covered with a covering member formed to extend from the facing surface to at least one side surface of the support substrate.

本発明に係る熱電モジュールにおいて、前記被覆部材は、前記1つの側面を超えてさらに裏面まで延在して形成されていることが好ましい。   In the thermoelectric module according to the present invention, the covering member is preferably formed so as to extend beyond the one side surface to the back surface.

本発明に係る熱電モジュールにおいて、前記被覆部材は、前記1つの側面の両側にある2つの側面の一方又は両方の側面にも延在して形成されていることがさらに好ましい。   In the thermoelectric module according to the present invention, it is more preferable that the covering member is formed to extend to one or both of the two side surfaces on both sides of the one side surface.

本発明に係る熱電モジュールにおいて、前記端子電極には、リード線が接続材により接続されており、前記端子電極、接続材及びリード線が前記被覆部材により被覆されていてもよい。   In the thermoelectric module according to the present invention, a lead wire may be connected to the terminal electrode by a connecting material, and the terminal electrode, the connecting material, and the lead wire may be covered by the covering member.

本発明に係る熱電モジュールにおいて、前記リード線は、導体がその先端部を除いて絶縁部材により被覆されてなり、前記導体の先端部で前記端子電極と接続されており、前記被覆部材は前記絶縁部材を覆うように形成されていることが好ましい。   In the thermoelectric module according to the present invention, the lead wire is formed by covering a conductor with an insulating member except for a tip portion thereof, and is connected to the terminal electrode at the tip portion of the conductor, and the covering member is formed of the insulating member. It is preferable to be formed so as to cover the member.

本発明に係る熱電モジュールにおいて、前記被覆部材は前記絶縁部材を覆う部分が前記1つの側面から突出していることが好ましい。   In the thermoelectric module according to the present invention, it is preferable that a portion of the covering member that covers the insulating member protrudes from the one side surface.

本発明に係る熱電モジュールにおいて、前記被覆部材は、前記接続材の一部を露出させていてもよい。   In the thermoelectric module according to the present invention, the covering member may expose a part of the connecting material.

本発明に係る熱電モジュールにおいて、前記被覆部材は、シリコン樹脂からなることが好ましい。   In the thermoelectric module according to the present invention, the covering member is preferably made of a silicon resin.

本発明に係る熱電モジュールにおいて、前記被覆部材は、他方の支持基板まで延びて前記一対の支持基板の間に密閉空間を形成し、前記複数の熱電素子の少なくとも一部は前記密閉空間内に配置されていてもよい。   In the thermoelectric module according to the present invention, the covering member extends to the other support substrate to form a sealed space between the pair of support substrates, and at least some of the plurality of thermoelectric elements are disposed in the sealed space. May be.

本発明に係る熱電モジュールにおいて、前記一対の支持基板間に、密閉空間を形成する第2被覆部材をさらに含み、前記複数の熱電素子の少なくとも一部は前記密閉空間内に配置されていてもよい。   The thermoelectric module according to the present invention may further include a second covering member that forms a sealed space between the pair of support substrates, and at least some of the plurality of thermoelectric elements may be disposed in the sealed space. .

本発明に係る熱電モジュールにおいて、前記被覆部材の一部と前記第2被覆部材の一部とが上下に重なって形成されていることが好ましい。   In the thermoelectric module according to the present invention, it is preferable that a part of the covering member and a part of the second covering member overlap each other.

本発明に係る熱電モジュールにおいて、前記被覆部材が前記第2被覆部材の上に重なっていることが好ましい。   In the thermoelectric module according to the present invention, it is preferable that the covering member overlaps the second covering member.

本発明に係る熱電モジュールにおいて、前記被覆部材の硬度が、前記第2被覆部材の硬度よりも低いことが好ましい。   In the thermoelectric module according to the present invention, it is preferable that the hardness of the covering member is lower than the hardness of the second covering member.

本発明に係る熱電モジュールにおいて、前記第2被覆部材は、エポキシ樹脂からなることが好ましい。   In the thermoelectric module according to the present invention, it is preferable that the second covering member is made of an epoxy resin.

以上のように構成された本発明に係る熱電モジュールは、前記端子電極が前記対向面から支持基板の少なくとも1つの側面に延在して形成された被覆部材によって覆われているので、端子電極を覆う被覆部材が支持基板から剥がれるのを抑制でき、信頼性の高い熱電モジュールを提供することができる。   In the thermoelectric module according to the present invention configured as described above, the terminal electrode is covered with a covering member formed to extend from the facing surface to at least one side surface of the support substrate. It is possible to suppress peeling of the covering member to be covered from the support substrate, and it is possible to provide a highly reliable thermoelectric module.

以下、本発明に係る実施形態の熱電モジュールについて、図面を参照しながら説明する。尚、以下の図面において、同様な部材には同様な符号を付して示している。   Hereinafter, a thermoelectric module according to an embodiment of the present invention will be described with reference to the drawings. In the following drawings, similar members are denoted by the same reference numerals.

実施形態1.
本発明に係る実施形態の熱電モジュールは、対向して配置された一対の第1の支持基板1aと第2の支持基板1b間に複数の熱電素子3が配列されることにより構成されている。具体的には、本実施形態1の熱電モジュールは、図1及び図2に示すように、第1の支持基板1aと第2の支持基板1bの間に、N型熱電素子3aとP型熱電素子3bとが交互に配列されており、第1の支持基板1aの内面に形成された第1の接続電極2aと第2の支持基板1bの内面に形成された第2の接続電極2bによって隣接するN型熱電素子3aとP型熱電素子3b間が接続されている。
Embodiment 1. FIG.
The thermoelectric module of the embodiment according to the present invention is configured by arranging a plurality of thermoelectric elements 3 between a pair of first support substrate 1a and second support substrate 1b arranged to face each other. Specifically, as shown in FIGS. 1 and 2, the thermoelectric module of the first embodiment includes an N-type thermoelectric element 3a and a P-type thermoelectric element between a first support substrate 1a and a second support substrate 1b. The elements 3b are alternately arranged and are adjacent to each other by the first connection electrode 2a formed on the inner surface of the first support substrate 1a and the second connection electrode 2b formed on the inner surface of the second support substrate 1b. The N-type thermoelectric element 3a and the P-type thermoelectric element 3b are connected.

また、当該直列回路の一方の端に配置されたP型熱電素子3bの一端が第1の支持基板の内面に形成された端子電極10に接続され(図2に示す)、当該直列回路の他方の端に配置されたN型熱電素子3aの一端が第1の支持基板の内面に形成された端子電極に接続されている。尚、N型熱電素子3aの一端と第1の支持基板1aの内面に形成された端子電極の接続部分は、断面構造は図示していないが、P型熱電素子3bの一端と端子電極10の接続部分と同一側面側にあり、同様の構造になっている。   Also, one end of the P-type thermoelectric element 3b disposed at one end of the series circuit is connected to the terminal electrode 10 formed on the inner surface of the first support substrate (shown in FIG. 2), and the other end of the series circuit One end of the N-type thermoelectric element 3a disposed at the end of the first substrate is connected to a terminal electrode formed on the inner surface of the first support substrate. In addition, although the connection part of the terminal electrode formed in the inner surface of the 1st support substrate 1a and the end of the N-type thermoelectric element 3a is not illustrated, one end of the P-type thermoelectric element 3b and the terminal electrode 10 It is on the same side as the connecting part and has the same structure.

このようにして、第1の支持基板1aと第2の支持基板1b間に、N型熱電素子3aとP型熱電素子3bとが交互に接続された直列回路が形成される。そして、端子電極にはそれぞれリード線6がハンダ等の接合部材4によって接続される。   In this way, a series circuit in which the N-type thermoelectric elements 3a and the P-type thermoelectric elements 3b are alternately connected is formed between the first support substrate 1a and the second support substrate 1b. Then, lead wires 6 are connected to the terminal electrodes by a joining member 4 such as solder.

ここで、特に、実施形態1の熱電モジュールでは、その端子電極10が該対向面から側面に延在して(まわり込んで)形成された被覆部材5によって覆われていることを特徴としている。   Here, in particular, the thermoelectric module according to the first embodiment is characterized in that the terminal electrode 10 is covered with a covering member 5 that extends (around) from the opposing surface to the side surface.

以下、本実施形態1の熱電モジュールの特徴部分についてより具体的に説明するが、以下の説明において、N型熱電素子3aとP型熱電素子3bを区別しないでいうときには、単に熱電素子3という。また、第1の支持基板1aと第2の支持基板1bとを特に区別しないでいうときには、単に、支持基板1という。   Hereinafter, the characteristic part of the thermoelectric module of the first embodiment will be described more specifically. However, in the following description, when the N-type thermoelectric element 3a and the P-type thermoelectric element 3b are not distinguished from each other, they are simply referred to as the thermoelectric element 3. Further, when the first support substrate 1a and the second support substrate 1b are not particularly distinguished, they are simply referred to as the support substrate 1.

本実施形態1において、2つの端子電極10は、第1の支持基板1aの内面において、複数の熱電素子が配列された領域(素子領域)の外側の端子領域に設けられる。尚、本実施形態1では、端子領域は1つの側面に沿って設けられているが、本発明はこれに限定されるものではない。また、2つの端子電極10にはそれぞれ、リード線6が接続部材4によって固定されている。   In the first embodiment, the two terminal electrodes 10 are provided in the terminal region outside the region (element region) where a plurality of thermoelectric elements are arranged on the inner surface of the first support substrate 1a. In the first embodiment, the terminal region is provided along one side surface, but the present invention is not limited to this. Further, the lead wires 6 are fixed to the two terminal electrodes 10 by the connection members 4, respectively.

そして、被覆部材5が、2つの端子電極10、リード線6及び接続部材4を覆い、かつ第1の支持基板1aの内面における素子領域の外側にある端子領域から側面に延在して(まわり込んで)設けられる。ここで、被覆部材5はエポキシ樹脂、シリコン樹脂、ポリエステル樹脂、ポリイミド樹脂、ポリウレタン樹脂等の絶縁性の被覆膜を形成する材料から構成されていることが好ましく、中でもシリコン樹脂を用いて形成することが好ましい。   The covering member 5 covers the two terminal electrodes 10, the lead wires 6, and the connecting member 4 and extends from the terminal region outside the element region on the inner surface of the first support substrate 1a to the side surface (around Provided). Here, the covering member 5 is preferably made of a material that forms an insulating covering film, such as an epoxy resin, a silicon resin, a polyester resin, a polyimide resin, or a polyurethane resin, and is formed by using a silicon resin. It is preferable.

また、被覆部材5は、例えば、デイスペンサーによる塗布またはシート状に成形した樹脂の貼り付け、スパーテル等による塗布により形成できる。   The covering member 5 can be formed, for example, by application with a dispenser, application of a resin formed into a sheet shape, application with a spatula or the like.

以上のように構成された本発明に係る実施形態1の熱電モジュールでは、被覆部材5が、第1の支持基板1aの内面にある端子領域から側面に延在して設けられて、端子電極10、リード線6及び接続部材4を覆っているので、被覆部材5と基板の接触面積を大きくでき、被覆部材5が基板から剥がれにくくなる。これにより、結露等による端子電極及びその周りの腐食が抑制できるので、高い耐湿特性が得られる。   In the thermoelectric module according to the first embodiment of the present invention configured as described above, the covering member 5 is provided to extend from the terminal region on the inner surface of the first support substrate 1a to the side surface, and the terminal electrode 10 is provided. Since the lead wire 6 and the connecting member 4 are covered, the contact area between the covering member 5 and the substrate can be increased, and the covering member 5 is hardly peeled off from the substrate. Thereby, since the terminal electrode and the surrounding corrosion by dew condensation etc. can be suppressed, a high moisture resistance characteristic is acquired.

また、支持基板1の側面が端子電極が形成された内面より粗い面になっているときには、被覆部材5が回り込んだ側面で強固に固定されるので、より効果的に被覆部材5の基板からの剥がれを抑制でき、より高い耐湿特性が得られる。   Further, when the side surface of the support substrate 1 is rougher than the inner surface on which the terminal electrode is formed, the covering member 5 is firmly fixed on the side surface around which the covering member 5 is wound. Peeling can be suppressed, and higher moisture resistance can be obtained.

さらに、本実施形態1の熱電モジュールでは、被覆部材5が、端子電極10、リード線6及び接続部材4を覆っているので、端子電極10とともにリード線6及び接続部材4の腐食も抑制できる上さらに、端子電極10に接合されたリード線6及び接続部材4によって端子電極10上に形成された凹凸により、被覆部材5がより強固に固定されるので、より高い耐熱特性が得られる。   Furthermore, in the thermoelectric module of Embodiment 1, since the covering member 5 covers the terminal electrode 10, the lead wire 6, and the connection member 4, corrosion of the lead wire 6 and the connection member 4 can be suppressed together with the terminal electrode 10. Furthermore, since the covering member 5 is more firmly fixed by the concavities and convexities formed on the terminal electrode 10 by the lead wire 6 joined to the terminal electrode 10 and the connecting member 4, higher heat resistance characteristics can be obtained.

実施形態2.
本発明に係る実施形態2の熱電モジュールは、被覆部材5の形状が実施形態1の熱電モジュールとは異なっている以外は、実施形態1と同様に構成される。図3は、本発明に係る実施形態2の熱電モジュールの構成を示す斜視図であり、図4は、実施形態2の熱電モジュールの構成を示す断面図である。尚、図3及び図4において、図1及び図2と同様のものには同様の符号を示している。
Embodiment 2. FIG.
The thermoelectric module according to the second embodiment of the present invention is configured in the same manner as in the first embodiment except that the shape of the covering member 5 is different from the thermoelectric module according to the first embodiment. FIG. 3 is a perspective view illustrating the configuration of the thermoelectric module according to the second embodiment of the present invention, and FIG. 4 is a cross-sectional view illustrating the configuration of the thermoelectric module according to the second embodiment. 3 and 4, the same reference numerals are used for the same components as those in FIGS. 1 and 2.

実施形態2において、被覆部材5は、第1の支持基板1aの内面にある端子領域から側面に延在して端子電極10、リード線6及び接続部材4を覆っているが、その側面を超えてさらに第1の支持基板1aの内面の裏側にある裏面に延在して形成されている。   In the second embodiment, the covering member 5 extends from the terminal region on the inner surface of the first support substrate 1 a to the side surface to cover the terminal electrode 10, the lead wire 6, and the connecting member 4. Further, the first support substrate 1a is formed so as to extend to the back surface on the back side of the inner surface.

以上のように構成された実施形態2の熱電モジュールでは、被覆部材5は、第1の支持基板1a内面の端子領域及び側面に密着して固定された上さらに、第1の支持基板1aの裏面でも固定されるので、実施形態1の熱電モジュールに比較してより確実にかつ強固に固定される。したがって、本実施形態2の熱電モジュールは、実施形態1の熱電モジュールに比較してより高い耐湿特性が得られる。   In the thermoelectric module of Embodiment 2 configured as described above, the covering member 5 is fixed in close contact with the terminal region and the side surface of the inner surface of the first support substrate 1a, and further, the back surface of the first support substrate 1a. However, since it is fixed, it is more securely and firmly fixed as compared with the thermoelectric module of the first embodiment. Therefore, the thermoelectric module of the second embodiment can obtain higher moisture resistance than the thermoelectric module of the first embodiment.

また、実施形態2の熱電モジュールでは、より好ましい形態として、被覆部材5は、その被覆部材が回り込んだ1つの側面の両側にある2つの側面に側面にも回り込んで延在して形成されている。これにより、実施形態2の熱電モジュールでは、被覆部材5が3つの側面及び裏面でも密着して固定され、よりいっそう確実に強固に固定される。したがって、当該形態の熱電モジュールは、さらに高い耐湿特性が得られる。   Further, in the thermoelectric module of the second embodiment, as a more preferable form, the covering member 5 is formed so as to extend around the side surface to two side surfaces on both sides of the one side surface around which the covering member wraps around. ing. Thereby, in the thermoelectric module of Embodiment 2, the coating | coated member 5 is closely_contact | adhered and fixed also on three side surfaces and a back surface, and it fixes more firmly firmly. Therefore, the thermoelectric module of the said form can obtain a further higher moisture resistance characteristic.

変形例1.
本発明に係る変形例1の熱電モジュールは、被覆部材5の形状が実施形態1の熱電モジュールとは異なっている以外は、実施形態1と同様に構成される。図5は、本発明に係る変形例1の熱電モジュールの構成を示す断面図である。尚、図5において、図1及び図2と同様のものには同様の符号を示している。
Modification 1
The thermoelectric module of Modification 1 according to the present invention is configured in the same manner as in Embodiment 1 except that the shape of the covering member 5 is different from the thermoelectric module of Embodiment 1. FIG. 5 is a cross-sectional view showing the configuration of the thermoelectric module of Modification 1 according to the present invention. In FIG. 5, the same reference numerals are used for the same components as those in FIGS.

すなわち、変形例1の熱電モジュールでは、被覆部材5がリード線に沿って突出している点が、実施形態1の被覆部材5とは異なっている。具体的には、リード線6は、導体がその先端部を除いて絶縁部材により被覆されており、導体の先端部で前記端子電極と接続されている。そして、実施形態1では、図2に示すように、その導体を被覆する絶縁部材を覆うように被覆部材5を設けている。しかしながら、本変形例1では、被覆部材5をリード線6に沿って突出させて、導体を被覆する絶縁部材部分でリード線6を確実に覆うようにしている。これにより、実施形態1の熱電モジュールにおいて確実に高い耐湿特性が得られるようにしている。   That is, the thermoelectric module of Modification 1 is different from the covering member 5 of Embodiment 1 in that the covering member 5 protrudes along the lead wire. Specifically, the lead wire 6 has a conductor covered with an insulating member except for its tip, and is connected to the terminal electrode at the tip of the conductor. And in Embodiment 1, as shown in FIG. 2, the coating | coated member 5 is provided so that the insulating member which coat | covers the conductor may be covered. However, in the first modification, the covering member 5 is projected along the lead wire 6, and the lead wire 6 is reliably covered with the insulating member portion covering the conductor. Thereby, in the thermoelectric module of Embodiment 1, a high moisture resistance characteristic is surely obtained.

変形例2.
本発明に係る変形例2の熱電モジュールは、被覆部材5の形状が実施形態1の熱電モジュールとは異なっている以外は、実施形態1と同様に構成される。図6は、本発明に係る変形例2の熱電モジュールの構成を示す断面図である。尚、図6において、図1及び図2と同様のものには同様の符号を示している。
Modification 2
The thermoelectric module of Modification 2 according to the present invention is configured in the same manner as in Embodiment 1 except that the shape of the covering member 5 is different from the thermoelectric module of Embodiment 1. FIG. 6 is a cross-sectional view showing the configuration of the thermoelectric module of Modification 2 according to the present invention. In FIG. 6, the same reference numerals are used for the same components as those in FIGS.

具体的には、変形例2の熱電モジュールでは、被覆部材5はリード線を端子電極10に接続する接合部材の一部が露出するように設けられている。このように構成された変形例2の熱電モジュールでは、露出された接合部材4の表面から熱を放出でき、端子電極とリード線の接合部分の熱による劣化を抑制できる。   Specifically, in the thermoelectric module of Modification 2, the covering member 5 is provided so that a part of the joining member that connects the lead wire to the terminal electrode 10 is exposed. In the thermoelectric module of Modification 2 configured as described above, heat can be released from the exposed surface of the bonding member 4, and deterioration due to heat at the bonding portion between the terminal electrode and the lead wire can be suppressed.

変形例3.
本発明に係る変形例3の熱電モジュールは、実施形態1の熱電モジュールにおいて、被覆部材5を密閉空間が形成されるように素子領域に延在させてその密閉空間に熱電素子3を収容するようにした以外は、実施形態1と同様に構成される。図7には、変形例3の熱電モジュールの断面図を示し、図1及び図2と同様のものには同様の符号を示している。
Modification 3
The thermoelectric module of Modification 3 according to the present invention is the thermoelectric module of Embodiment 1 in which the covering member 5 is extended to the element region so as to form a sealed space, and the thermoelectric element 3 is accommodated in the sealed space. The configuration is the same as that of the first embodiment except for the above. FIG. 7 shows a cross-sectional view of the thermoelectric module of the third modification, and the same reference numerals are used for the same components as those in FIGS. 1 and 2.

以上のように構成された変形例3の熱電モジュールは、熱電素子3を保護することができると同時に、素子領域側からの端子電極への湿気の進入が抑制でき、端子電極周りの信頼性も向上させることができる。   The thermoelectric module of Modification 3 configured as described above can protect the thermoelectric element 3, and at the same time, can suppress moisture from entering the terminal electrode from the element region side, and also has reliability around the terminal electrode. Can be improved.

尚、変形例3では、素子領域に形成した密閉空間に熱電素子3を全て収容するようにしたが、本発明はこれに限られるものではなく、一部の熱電素子3を密閉空間に収容するようにしてもよい。   In Modification 3, all the thermoelectric elements 3 are accommodated in the sealed space formed in the element region. However, the present invention is not limited to this, and some thermoelectric elements 3 are accommodated in the sealed space. You may do it.

変形例4.
本発明に係る変形例4の熱電モジュールは、実施形態1の熱電モジュールにおいて、被覆部材5とは別に、素子領域に第2被覆部材7を形成して密閉空間を構成し、その被覆部材7に重ねて被覆部材5を形成するようにした以外は、実施形態1と同様に構成される。図8には、変形例4の熱電モジュールの断面図を示し、図1及び図2と同様のものには同様の符号を示している。
Modification 4
The thermoelectric module of Modification 4 according to the present invention is the same as the thermoelectric module of Embodiment 1 except that the second covering member 7 is formed in the element region separately from the covering member 5 to form a sealed space. The configuration is the same as that of the first embodiment except that the covering member 5 is formed in an overlapping manner. FIG. 8 shows a cross-sectional view of the thermoelectric module according to the modified example 4, and the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals.

以上のように構成された変形例4の熱電モジュールは、熱電素子3を保護することができると同時に、素子領域側からの端子電極への湿気の進入が抑制でき、端子電極周りの信頼性も向上させることができる。   The thermoelectric module according to the modified example 4 configured as described above can protect the thermoelectric element 3, and at the same time, can suppress the ingress of moisture from the element region side to the terminal electrode, and also has reliability around the terminal electrode. Can be improved.

また、本変形例4の熱電モジュールでは、第2被膜部材7の上に、被膜部材5が重なる2重構造になっているので、樹脂同士の接触界面で変形による応力を抑えることができる。さらに、2重構造になっているので、水分や外気の侵入を効果的に防ぎ、結露によるショートが発生しにくい。これにより、長時間駆動による破壊寿命をさらに向上させることができる。   Moreover, in the thermoelectric module of this modification 4, since it has the double structure where the film member 5 overlaps on the 2nd film member 7, the stress by deformation | transformation can be suppressed at the contact interface of resin. Furthermore, since it has a double structure, it can effectively prevent moisture and outside air from entering, and short-circuiting due to condensation is unlikely to occur. Thereby, the destruction life by long-time driving can be further improved.

また、本変形例4では、被覆部材5の硬度が、第2被覆部材7の硬度よりも低いことが好ましい。このようにすると、熱電モジュールを動作したときの冷熱サイクル時の被覆部材5と第2被覆部材の接触界面での応力を緩和することができ破壊寿命を向上させることができる。   In the fourth modification, the hardness of the covering member 5 is preferably lower than the hardness of the second covering member 7. If it does in this way, the stress in the contact interface of the coating | coated member 5 and the 2nd coating | coated member at the time of a cooling cycle when a thermoelectric module is operated can be relieve | moderated, and a fracture life can be improved.

また、本変形例4では、端子電極10の周りを被覆する被覆部材5をシリコン樹脂を用いて形成することが好ましい。このシリコン樹脂は、基板との濡れがよく、水分や外気の侵入を抑制することができ、かつ被覆部材5が基板からはがれなくなる。   Moreover, in this modification 4, it is preferable to form the coating | coated member 5 which coat | covers the circumference | surroundings of the terminal electrode 10 using a silicon resin. This silicon resin has good wettability with the substrate, can suppress intrusion of moisture and outside air, and the covering member 5 cannot be peeled off from the substrate.

端子電極10の周りを被覆する被覆部材5をシリコン樹脂とした場合、第2被覆部材7はシリコン樹脂との濡れ性がよいエポキシ樹脂により構成することが好ましい。このようにすると、シリコン樹脂とエポキシ樹脂との界面からの水分や外気の侵入を防ぐことができる。   When the covering member 5 covering the periphery of the terminal electrode 10 is made of a silicon resin, the second covering member 7 is preferably made of an epoxy resin having good wettability with the silicon resin. If it does in this way, the penetration | invasion of the water | moisture content and external air from the interface of a silicon resin and an epoxy resin can be prevented.

以上の変形例3及び変形例4では、密閉空間には、減圧又は乾燥ガスが封入されていることが好ましい。そうすることにより、低い温度で使用するときでも、結露を抑制できるため信頼性を向上できる。   In Modification 3 and Modification 4 described above, it is preferable that reduced pressure or dry gas is sealed in the sealed space. By doing so, dew condensation can be suppressed even when used at a low temperature, so that reliability can be improved.

以上、本発明に係る実施形態及び変形例について説明したが、本発明において、支持基板として、例えば、アルミナや窒化アルミなどのセラミック、エポキシ・ポリイミドなどの樹脂基板、またエポキシ・ポリイミドの樹脂にセラミックのフィラーを入れて熱伝導を向上させたものなどを用いることができる。   As mentioned above, although embodiment and the modification which concern on this invention were demonstrated, in this invention, as a support substrate, ceramics, such as a ceramics, such as an alumina and aluminum nitride, a resin substrate, such as an epoxy polyimide, and a ceramic to resin of an epoxy polyimide, for example It is possible to use a filler in which heat conduction is improved by adding a filler.

本発明に係る実施形態1の熱電モジュールの構成を示す斜視図である。It is a perspective view which shows the structure of the thermoelectric module of Embodiment 1 which concerns on this invention. 実施形態1の熱電モジュールの構成を示す断面図である。It is sectional drawing which shows the structure of the thermoelectric module of Embodiment 1. FIG. 本発明に係る実施形態2の熱電モジュールの構成を示す斜視図である。It is a perspective view which shows the structure of the thermoelectric module of Embodiment 2 which concerns on this invention. 実施形態2の熱電モジュールの構成を示す断面図である。It is sectional drawing which shows the structure of the thermoelectric module of Embodiment 2. FIG. 本発明に係る変形例1の熱電モジュールの構成を示す断面図である。It is sectional drawing which shows the structure of the thermoelectric module of the modification 1 which concerns on this invention. 本発明に係る変形例2の熱電モジュールの構成を示す断面図である。It is sectional drawing which shows the structure of the thermoelectric module of the modification 2 which concerns on this invention. 本発明に係る変形例3の熱電モジュールの構成を示す断面図である。It is sectional drawing which shows the structure of the thermoelectric module of the modification 3 which concerns on this invention. 本発明に係る変形例4の熱電モジュールの構成を示す断面図である。It is sectional drawing which shows the structure of the thermoelectric module of the modification 4 which concerns on this invention.

符号の説明Explanation of symbols

1 支持基板、1a 第1の支持基板、1b 第2の支持基板、2 接続電極、2a 第1の接続電極、2b 第2の接続電極、3 熱電素子、3a N型熱電素子、3b P型熱電素子、10 端子電極、4 接続部材、5 被覆部材、7 第2被覆部材。   DESCRIPTION OF SYMBOLS 1 Support substrate, 1a 1st support substrate, 1b 2nd support substrate, 2 connection electrode, 2a 1st connection electrode, 2b 2nd connection electrode, 3 thermoelectric element, 3a N type thermoelectric element, 3b P type thermoelectric Element, 10 terminal electrode, 4 connecting member, 5 covering member, 7 second covering member.

Claims (13)

対向して配置された一対の支持基板と、前記一対の支持基板間に配置された複数の熱電素子とを備え、前記一対の支持基板の対向面にそれぞれ形成された接続電極によって前記熱電素子が接続されてなる熱電モジュールであって、
少なくとも一方の支持基板の対向面には、前記接続電極に導通する端子電極が設けられ、その端子電極が該対向面から当該支持基板の少なくとも1つの側面まで延在して形成された被覆部材によって覆われており、
前記被覆部材は、他方の支持基板まで延びて前記一対の支持基板の間に密閉空間を形成し、前記複数の熱電素子の少なくとも一部は前記密閉空間内に配置され、かつ
前記密閉空間には減圧または乾燥ガスが封入されていることを特徴とする熱電モジュール。
The thermoelectric element includes a pair of support substrates disposed opposite to each other and a plurality of thermoelectric elements disposed between the pair of support substrates, and the thermoelectric elements are formed by connection electrodes respectively formed on opposing surfaces of the pair of support substrates. A thermoelectric module connected,
A terminal electrode that is electrically connected to the connection electrode is provided on the opposing surface of at least one of the support substrates, and the terminal electrode extends from the opposing surface to at least one side surface of the support substrate. Covered ,
The covering member extends to the other support substrate to form a sealed space between the pair of support substrates, and at least some of the plurality of thermoelectric elements are disposed in the sealed space; and
A thermoelectric module, wherein the sealed space is filled with reduced pressure or dry gas .
対向して配置された一対の支持基板と、前記一対の支持基板間に配置された複数の熱電素子とを備え、前記一対の支持基板の対向面にそれぞれ形成された接続電極によって前記熱電素子が接続されてなる熱電モジュールであって、
少なくとも一方の支持基板の対向面には、前記接続電極に導通する端子電極が設けられ、その端子電極が該対向面から当該支持基板の少なくとも1つの側面まで延在して形成された被覆部材によって覆われており、
前記一対の支持基板間に、密閉空間を形成する第2被覆部材をさらに含み、前記複数の熱電素子の少なくとも一部は前記密閉空間内に配置され、かつ
前記密閉空間には減圧または乾燥ガスが封入されていることを特徴とする熱電モジュール。
The thermoelectric element includes a pair of support substrates disposed opposite to each other and a plurality of thermoelectric elements disposed between the pair of support substrates, and the thermoelectric elements are formed by connection electrodes respectively formed on opposing surfaces of the pair of support substrates. A thermoelectric module connected,
A terminal electrode that is electrically connected to the connection electrode is provided on the opposing surface of at least one of the support substrates, and the terminal electrode extends from the opposing surface to at least one side surface of the support substrate. Covered ,
A second covering member that forms a sealed space between the pair of support substrates, wherein at least some of the plurality of thermoelectric elements are disposed in the sealed space; and
A thermoelectric module, wherein the sealed space is filled with reduced pressure or dry gas .
前記被覆部材の一部と前記第2被覆部材の一部とが上下に重なって形成されていることを特徴とする請求項に記載の熱電モジュール。 The thermoelectric module according to claim 2 , wherein a part of the covering member and a part of the second covering member overlap each other. 前記被覆部材が前記第2被覆部材の上に重なっていることを特徴とする請求項に記載の熱電モジュール。 The thermoelectric module according to claim 3 , wherein the covering member overlaps the second covering member. 前記被覆部材の硬度が、前記第2被覆部材の硬度よりも低いことを特徴とする請求項2〜4のうちのいずれか1つに記載の熱電モジュール。 The thermoelectric module according to any one of claims 2 to 4 , wherein the hardness of the covering member is lower than the hardness of the second covering member. 前記第2被覆部材は、エポキシ樹脂からなることを特徴とする請求項2〜5のうちのいずれか1つに記載の熱電モジュール。 The thermoelectric module according to claim 2 , wherein the second covering member is made of an epoxy resin. 前記被覆部材は、前記1つの側面を超えてさらに裏面まで延在して形成されていることを特徴とする請求項1〜6のうちのいずれか1つに記載の熱電モジュール。 The covering member, the thermoelectric module according to any one of claims 1 to 6, characterized in that it is formed to extend further to the rear surface beyond the one side. 前記被覆部材は、前記1つの側面の両側にある2つの側面の一方又は両方の側面にも延在して形成されている請求項1〜7のうちのいずれか1つに記載の熱電モジュール。 The thermoelectric module according to any one of claims 1 to 7, wherein the covering member is formed so as to extend to one or both of two side surfaces on both sides of the one side surface. 前記端子電極には、リード線が接続材により接続されており、
前記端子電極、接続材及びリード線が前記被覆部材により被覆されていることを特徴とする請求項1〜のうちのいずれか1つに記載の熱電モジュール。
A lead wire is connected to the terminal electrode by a connecting material,
The thermoelectric module according to any one of claims 1-8, wherein the terminal electrode, connection material and the lead wire is covered with the covering member.
前記リード線は、導体がその先端部を除いて絶縁部材により被覆されてなり、前記導体の先端部で前記端子電極と接続されており、前記被覆部材は前記絶縁部材を覆うように形成されている請求項に記載の熱電モジュール。 The lead wire is formed by covering a conductor with an insulating member except for a tip thereof, and being connected to the terminal electrode at the tip of the conductor, and the covering member is formed so as to cover the insulating member. The thermoelectric module according to claim 9 . 前記被覆部材は前記絶縁部材を覆う部分が前記1つの側面から突出している請求項10に記載の熱電モジュール。 The thermoelectric module according to claim 10 , wherein a portion of the covering member that covers the insulating member protrudes from the one side surface. 前記被覆部材は、前記接続材の一部を露出させている請求項9〜11のうちのいずれか1つに記載の熱電モジュール。   The thermoelectric module according to claim 9, wherein the covering member exposes a part of the connecting material. 前記被覆部材は、シリコン樹脂からなることを特徴とする請求項1〜12のうちのいずれか1つに記載の熱電モジュール。 The thermoelectric module according to any one of claims 1 to 12 , wherein the covering member is made of silicon resin.
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JP2003318455A (en) * 2002-04-19 2003-11-07 Da Vinch Co Ltd Peltier element and its manufacturing method
JP4901049B2 (en) * 2002-11-21 2012-03-21 株式会社東芝 Thermoelectric conversion unit

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