JP4965518B2 - 透過電子顕微鏡3次元観察専用グリッドおよびその製造方法 - Google Patents
透過電子顕微鏡3次元観察専用グリッドおよびその製造方法 Download PDFInfo
- Publication number
- JP4965518B2 JP4965518B2 JP2008164666A JP2008164666A JP4965518B2 JP 4965518 B2 JP4965518 B2 JP 4965518B2 JP 2008164666 A JP2008164666 A JP 2008164666A JP 2008164666 A JP2008164666 A JP 2008164666A JP 4965518 B2 JP4965518 B2 JP 4965518B2
- Authority
- JP
- Japan
- Prior art keywords
- nanoparticles
- grid
- support film
- forming
- dedicated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 20
- 230000005540 biological transmission Effects 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000002105 nanoparticle Substances 0.000 claims description 60
- 238000003325 tomography Methods 0.000 claims description 48
- 239000011259 mixed solution Substances 0.000 claims description 25
- 239000011521 glass Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 239000011777 magnesium Substances 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 3
- 239000002178 crystalline material Substances 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 48
- 239000000523 sample Substances 0.000 description 39
- 239000000463 material Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 239000012153 distilled water Substances 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000006260 foam Substances 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000002591 computed tomography Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004627 transmission electron microscopy Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 230000005477 standard model Effects 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/419—Imaging computed tomograph
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20292—Means for position and/or orientation registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/22—Treatment of data
- H01J2237/226—Image reconstruction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2611—Stereoscopic measurements and/or imaging
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2617—Comparison or superposition of transmission images; Moiré
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pulmonology (AREA)
- Radiology & Medical Imaging (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Description
して支持膜にシートメッシュを積層させることによって3次元観察専用グリッドを形成する工程(工程5)とを含む、透過電子顕微鏡3次元観察専用グリッドの製造方法を提供する。
本発明の透過電子顕微鏡3次元観察専用グリッドは、上部構造を保護するシートメッシュと、シートメッシュ上に具備されてナノ粒子が分散している支持膜とを含むことができる。
本発明の製造方法は、支持膜形成用パウダとクロロホルムを混合して支持膜形成用混合溶液を製造する工程(工程1)と、前記混合溶液に一定量のナノ粒子を混合して超音波を使用して分散させる工程(工程2)と、ナノ粒子が分散した前記混合溶液にガラス基板を浸漬させる工程(工程3)と、前記混合溶液に沈積されたガラス基板を一定速度で引き上げた後に自然乾燥させることによって、基板ガラス表面にナノ粒子が分散した支持膜を形成する工程(工程4)と、および、前記支持膜をガラス基板から分離して支持膜にシートメッシュを積層させることによって3次元観察専用グリッドを形成する工程(工程5)とを含む。
されるだろう。明細書全体にわたって同一な参照番号は、同一構成要素を示している。
して、透過電子顕微鏡3次元観察専用グリッド100を透過電子顕微鏡に装入して多角度で観察すると、試料とナノ粒子130がそれぞれ試料イメージと標式によって表示される多数個の2次元イメージを獲得できる。よって標式を基準点にして、2次元イメージを3次元イメージに再構築できるようになる。
材250で切断して、一定の大きさの支持膜120を形成する。
110:シートメッシュ
120:支持膜
130:ナノ粒子
Claims (8)
- 上部構造を保護するシートメッシュと、
前記シートメッシュ上に具備されナノ粒子が分散している支持膜と
を備える透過電子顕微鏡3次元観察専用グリッドであって、
前記ナノ粒子は2次元イメージを3次元イメージに再構築する時の基準点になることを特徴とする、透過電子顕微鏡3次元観察専用グリッド。 - 前記ナノ粒子の平均粒径は3〜200nmである、請求項1に記載のグリッド。
- 前記ナノ粒子の形態は球形または多面体である、請求項1または2に記載のグリッド。
- 前記ナノ粒子は、マグネシウムの密度(1.783g/cm3)よりも大きな非晶質または結晶質物質である、請求項3に記載のグリッド。
- 請求項1に記載の透過電子顕微鏡3次元観察専用グリッドの製造方法であって、前記製造方法は、
支持膜形成用パウダとクロロホルムを混合して支持膜形成用混合溶液を製造する工程と、
前記支持膜形成用混合溶液に一定量のナノ粒子を混合して超音波を使用して分散させる工程と、
前記ナノ粒子が分散した前記支持膜形成用混合溶液にガラス基板を浸漬させる工程と、
前記支持膜形成用混合溶液に浸漬してナノ粒子が沈積したガラス基板を一定速度で引き上げた後、自然乾燥させることによって前記基板ガラスの表面に前記ナノ粒子が分散した支持膜を形成する工程と、および
前記支持膜を前記ガラス基板から分離して、前記支持膜にシートメッシュを積層させて3次元観察専用グリッドを形成する工程と
を備える、請求項1に記載の透過電子顕微鏡3次元観察専用グリッドの製造方法。 - 前記ナノ粒子の平均粒径は3〜200nmである、請求項5に記載の製造方法。
- 前記ナノ粒子の形態は球形または多面体である、請求項6に記載の製造方法。
- 前記ナノ粒子は、マグネシウムの密度(1.783g/cm3)よりも大きな非晶質または結晶質物質である、請求項6に記載の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2007-0092240 | 2007-09-11 | ||
KR1020070092240A KR100902403B1 (ko) | 2007-09-11 | 2007-09-11 | 투과전자현미경 3차원 관찰 전용 문 그리드 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009070806A JP2009070806A (ja) | 2009-04-02 |
JP4965518B2 true JP4965518B2 (ja) | 2012-07-04 |
Family
ID=40430835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008164666A Expired - Fee Related JP4965518B2 (ja) | 2007-09-11 | 2008-06-24 | 透過電子顕微鏡3次元観察専用グリッドおよびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7820982B2 (ja) |
JP (1) | JP4965518B2 (ja) |
KR (1) | KR100902403B1 (ja) |
WO (1) | WO2009035208A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1953789A1 (en) * | 2007-02-05 | 2008-08-06 | FEI Company | Method for thinning a sample and sample carrier for performing said method |
CN102236160B (zh) * | 2010-04-29 | 2013-05-01 | 武汉新芯集成电路制造有限公司 | 一种样品观测载网及其制造方法 |
KR101176544B1 (ko) | 2010-11-02 | 2012-08-23 | 강원대학교산학협력단 | 투과 전자 현미경 관찰용 그리드 구조체 및 이의 제조 방법 |
JP5555653B2 (ja) * | 2011-03-29 | 2014-07-23 | 日本電子株式会社 | 電子顕微鏡および3次元像構築方法 |
EP2584584A1 (en) * | 2011-10-19 | 2013-04-24 | FEI Company | Method for adjusting a STEM equipped with an aberration corrector |
WO2014190077A1 (en) * | 2013-05-21 | 2014-11-27 | Exogenesis Corporation | Film and methods of forming same |
US9466460B2 (en) * | 2013-05-30 | 2016-10-11 | Hitachi High-Technologies Corporation | Charged particle-beam device and specimen observation method |
EP2811288B1 (en) | 2013-06-06 | 2016-08-10 | Fei Company | Method for electron tomography |
US9449785B2 (en) * | 2013-11-11 | 2016-09-20 | Howard Hughes Medical Institute | Workpiece transport and positioning apparatus |
CZ2014852A3 (cs) * | 2014-12-03 | 2016-05-18 | Advacam S.R.O. | Způsob rentgenové nanoradiografie a nanotomografie a zařízení k provádění tohoto způsobu |
CN104865282B (zh) * | 2015-04-30 | 2017-07-04 | 安泰科技股份有限公司 | 一种表征非晶合金微观结构的方法 |
JP6640497B2 (ja) * | 2015-09-01 | 2020-02-05 | 株式会社日立ハイテクサイエンス | 試料ホルダ及び試料ホルダ群 |
CN106645243B (zh) * | 2016-12-23 | 2019-08-02 | 北京有色金属研究总院 | 一种大颗粒粉末透射电镜样品的制备方法 |
CN108181333B (zh) * | 2017-12-04 | 2020-04-21 | 南京腾元软磁有限公司 | 一种精制非晶态固体合金三维重构透射电镜样品的工艺方法及评价方法 |
JP7372081B2 (ja) * | 2019-08-27 | 2023-10-31 | 株式会社Subaru | 捕捉装置及び捕捉方法 |
JP7267315B2 (ja) * | 2021-01-07 | 2023-05-01 | 日本電子株式会社 | 試料の前処理方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR970067554A (ko) * | 1996-03-07 | 1997-10-13 | 김광호 | 투과 전자 현미경(tem) 시료 및 그 제조방법 |
DE10149556A1 (de) | 2001-10-08 | 2003-04-24 | Siemens Ag | Verfahren zur Erzeugung eines zweidimensionalen Bildes aus einem 3D-Datensatz eines Tomographie-Geräts und medizinisches Tomographie-Gerät |
US6778637B2 (en) | 2002-09-20 | 2004-08-17 | Koninklijke Philips Electronics, N.V. | Method and apparatus for alignment of anti-scatter grids for computed tomography detector arrays |
JP4451647B2 (ja) | 2002-12-11 | 2010-04-14 | エフ イー アイ カンパニ | 電子顕微鏡におけるチルト系列の自動配置決定方法 |
US7366279B2 (en) | 2004-07-29 | 2008-04-29 | General Electric Company | Scatter control system and method for computed tomography |
WO2006126749A1 (en) | 2005-05-23 | 2006-11-30 | Seoul National University Industry Foundation | Visualizing agent comprising a magnetic nanoparticle and visualizing method by using the same |
US7348570B2 (en) * | 2005-12-14 | 2008-03-25 | University Of Washington | Unsupported, electron transparent films and related methods |
-
2007
- 2007-09-11 KR KR1020070092240A patent/KR100902403B1/ko not_active IP Right Cessation
-
2008
- 2008-06-24 JP JP2008164666A patent/JP4965518B2/ja not_active Expired - Fee Related
- 2008-06-24 WO PCT/KR2008/003591 patent/WO2009035208A1/en active Application Filing
- 2008-07-10 US US12/170,670 patent/US7820982B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090065708A1 (en) | 2009-03-12 |
JP2009070806A (ja) | 2009-04-02 |
US7820982B2 (en) | 2010-10-26 |
WO2009035208A1 (en) | 2009-03-19 |
KR20090027062A (ko) | 2009-03-16 |
KR100902403B1 (ko) | 2009-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4965518B2 (ja) | 透過電子顕微鏡3次元観察専用グリッドおよびその製造方法 | |
Mori et al. | Determining the composition of gold nanoparticles: a compilation of shapes, sizes, and calculations using geometric considerations | |
Koch et al. | Structural analysis of wheat wax (Triticum aestivum, cv.‘Naturastar’L.): from the molecular level to three dimensional crystals | |
CN101988874B (zh) | 透射电镜试样制备方法 | |
Kammers et al. | Self-assembled nanoparticle surface patterning for improved digital image correlation in a scanning electron microscope | |
CN108459004B (zh) | 一种银和金纳米颗粒包覆氧化锌表面增强拉曼散射效应基底的制备方法 | |
JP5321918B2 (ja) | 電子顕微鏡用試料作製方法 | |
WO2019006044A1 (en) | QUASI-BIDIMENSIONAL ELECTRONIC MICROPARTICLES | |
US10714310B2 (en) | Methods and apparatus for high throughput SEM and AFM for characterization of nanostructured surfaces | |
Braun et al. | Self-assembly of Fmoc-diphenylalanine inside liquid marbles | |
Kwon et al. | Transmission electron microscopy and scanning transmission X-ray microscopy studies on the bioaccumulation and tissue level absorption of TiO2 nanoparticles in Daphnia magna | |
Wang et al. | Electrodeposition of vertically standing Ag nanoplates and nanowires on transparent conductive electrode using porous anodic aluminum oxide template | |
JP2012096962A (ja) | 鉛系圧電材料及びその製造方法 | |
US8821957B2 (en) | Method for depositing a nanometric thin film on a substrate | |
Huang et al. | Substrate surface roughness-dependent 3-D complex nanoarchitectures of gold particles from directed electrodeposition | |
TWI411572B (zh) | 透射電鏡微柵及其製備方法 | |
WITTBORN et al. | Nanoscale Similarities in the Substructure of the Exines ofFagusPollen Grains andLycopodiumSpores | |
Nonappa | Seeing the Supracolloidal Assemblies in 3D: Unraveling High-Resolution Structures Using Electron Tomography | |
CN105218852B (zh) | 一种自组装ps-cooh微球功能复合膜的制备方法 | |
US10663450B2 (en) | Amorphous, porous silicon materials and related methods | |
TWI329095B (en) | Transmission electron microscope grid and method for making same | |
Prosa et al. | Backside lift-out specimen preparation: Reversing the analysis direction in atom probe tomography | |
Gutiérrez-Medina et al. | Mechanical testing of particle streaming and intact extracellular mucilage nanofibers reveal a role of elastic force in diatom motility | |
Ahrenkiel et al. | Nanoparticle shape and configuration analysis by transmission electron tomography | |
Vida-Simiti et al. | Applications of scanning electron microscopy (SEM) in nanotechnology and nanoscience |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110405 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110530 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20120112 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120321 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120329 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150406 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |