JP4956302B2 - Carbon adsorbent and method for producing the same - Google Patents

Description

  The present invention relates to a carbon adsorbent for sucking and holding an object and a method for manufacturing the same.

  In the semiconductor manufacturing process, it is necessary to fix and hold the semiconductor wafer in various aspects. For example, in a wafer mount device that attaches a protective tape to the wafer surface, a wafer pack grind device that polishes the wafer thinly, a wafer dicing device that cuts the wafer into chips, a vacuum suction device for fixing and holding a semiconductor wafer is used. An adsorbent called an adsorbing pad is used as the fixing jig.

  As this suction pad, a stainless steel or other iron-based material with a through hole has been used in the past. The drawback of increasing energy requirements has become a major problem.

  For this reason, suction pads using porous ceramics that are light and have a small coefficient of thermal expansion, good dimensional stability, and easy to increase in size have been used (Reference 1).

  However, the suction pads using porous ceramics have problems of not having electrical conductivity, large specific gravity, and large weight. By using porous carbon having a density of about 1/2 instead of porous ceramics, these disadvantages can be obtained. A suction pad that solves the above problem has been proposed by the present applicant (Reference 2).

JP-A-6-8086 JP-A-2005-347689

The porous carbon adsorption pad described above usually consists of an adsorbent that forms an adsorbing surface and a support that supports the adsorbent. However, the difference between the materials of the adsorbent and the support, and the synthesis that bonds the adsorbent and the support. Due to the difference in the material of the resin adhesive, etc., there is a problem that the adsorption surface is deformed due to thermal expansion. Further, the synthetic resin adhesive has problems such as inferior heat resistance, corrosion resistance, and water resistance.
The object of the present invention is to solve the problems of the prior art.

In order to achieve the above object, the present invention is a carbon adsorbent that is connected to suction means and sucks and holds an object, and is made of porous carbon having air permeability and sucks and holds the object. And a suction plate having a suction surface sucked by the suction means, a support made of carbon that supports the bottom and side surfaces of the suction plate, and provided on the bottom surface of the support, and does not contact the suction plate The firing adhesive part , comprising: a ventilation groove; a connection port connected to the suction means connected to the suction groove; and a firing adhesive part formed on the bottom surface and side surface of the suction plate in contact with the support. Is one of thermosetting resin among phenol resin, furan resin, epoxy resin, divinylbenzene resin, urea resin, melamine resin, unsaturated polyester resin, allyl resin, carbon black powder or Was added either 1 or one or more carbon material in the Kusu powder or graphite powder is obtained by carbonizing further adhesive was adjusted to a viscosity 35PaS~200PaS 600 ° C or higher temperature, and characterized by To do.
Further, the invention of claim 2 is a carbon adsorbent for sucking and holding an object connected to a suction means, comprising a porous carbon having air permeability, and a suction surface for sucking and holding the object; A suction plate having a suction surface sucked by a suction means; a non-breathable side surface; a support made of carbon that supports the bottom surface of the suction plate; and the support provided on the bottom surface of the suction plate, A non-contact ventilation groove, a connection port that communicates with the ventilation groove and is connected to suction means, and a fired adhesive part formed on a portion of the bottom surface of the suction plate that contacts the support , the fired adhesive part. Is a carbon black powder or coke to one thermosetting resin among phenol resin, furan resin, epoxy resin, divinylbenzene resin, urea resin, melamine resin, unsaturated polyester resin, allyl resin. It is characterized by carbonizing an adhesive adjusted to a viscosity of 35 PaS to 200 PaS by adding any one or one or more carbon materials in powder or graphite powder, and at a temperature of 600 ° C or higher. To do.
According to the above configuration, since the suction plate and the support are both made of carbon and further bonded by the fired bonding portion, deformation of the suction surface due to a difference in thermal expansion can be prevented. Further, since the fired bonded portion is excellent in heat resistance, corrosion resistance, and water resistance, there is an effect that the usable range is increased.

  According to the carbon adsorbent of the present invention, there is little deformation of the adsorption surface, and there is an effect that highly accurate adsorption can be obtained.

Embodiments of the present invention will be described below with reference to the drawings.
In FIG. 1, a suction pad A which is an adsorbent of the present invention has a porous carbon plate 1 and a support 2. The porous carbon plate 1 has a circular plate shape and is attached to the support 2. The surface of the porous carbon plate 1 is an adsorption surface 10 for adsorbing an object, and the back surface is an attraction surface 11.

The support 2 is a circular container, has an edge 20 and a bottom 21, contacts the suction surface 11 of the porous carbon plate 1 at the bottom 21, and the side circumferential surface of the porous carbon plate 1 at the edge 20 ( The porous carbon plate 1 is supported in close contact with the (thickness surface).
As will be described later, the porous carbon plate 1 has air permeability, and the support 2 has no air permeability or is less air permeable than the porous carbon plate 1, and the adsorption surface 10 of the porous carbon plate 1 is exposed, so that the porous carbon plate 1 is exposed. 1 side peripheral surface and a part of the suction surface 11 are configured to close and close.

  As shown in FIGS. 2 and 3, a plurality of ventilation grooves 4 are formed concentrically on the bottom 21 of the support 2, and each ventilation groove 4 communicates with each other by a communication groove 40 and is provided at the center. The connection port 9 is in communication. A flow path 50 is connected to the connection port 9, and a pump or the like is connected here.

A portion other than the ventilation groove 4 of the bottom portion 21 is an adhesion bottom portion 5, and is in close contact with the suction surface 11 of the porous carbon plate 1.
A portion of the suction surface 11 corresponding to the ventilation groove 4 is sucked by a pump or the like connected to the connection port 9 and sucked by the suction surface 10.

  As shown in FIG. 3, a fired bonded portion 3 is formed between the bonded bottom portion 5 and the corresponding portion of the suction surface 11. Similarly, a baked bonded portion 3 is formed between the side peripheral surface of the porous carbon plate 1 and the bonded side portion 6 on the inner peripheral side of the edge portion 20, and the porous carbon plate 1 and the support 2 are formed by these baked bonded portions 3. Are adhesively bonded.

FIG. 4 shows another embodiment.
In this embodiment, the support 2 is plate-shaped and is not a container, and has a configuration in which a porous carbon plate 1 is placed. The side surface of the porous carbon plate 1 is a non-ventilated side surface 15, and is configured not to vent from the non-ventilated side surface 15. The non-ventilated side surface 15 is formed by coating or the like.
According to this embodiment, it is not necessary to process the support body 2 into a container shape, and the manufacture becomes easy.

  In the embodiment of FIG. 4, the ventilation groove 4 is further formed on the bottom surface side of the porous carbon plate 1. By forming the ventilation groove 4 on the side of the porous carbon plate 1 that is relatively easy to process, there is an advantage that manufacture is facilitated. In addition, it is the same that the baking adhesion part 3 is formed between the said adhesion | attachment bottom part 5 and the corresponding part of the suction surface 11. FIG.

The porous carbon plate 1 is preferably made of self-sintering carbon and porous carbon having a porosity of 10 to 50 vol%.
For the support 2, it is desirable to use impermeable carbon that does not contain a resin because the suction capacity is small. However, even if it is not impervious, if the carbon has an extremely small air flow rate compared to the porous carbon plate 1. Thus, the air permeability of the porous carbon plate 1 is not hindered and a practically sufficient suction force can be secured. For example, when the porosity of the support 2 is ３ of the porosity of the porous carbon plate 1, the ventilation rate of the support 2 is about 1/200 of the porous carbon ventilation rate. At 1/4, the air flow is about 1/600, and the amount of leakage from the support 2 is at a level where there is no practical problem. Therefore, the carbon porosity of the support 2 is about ３ or less, preferably ¼ or less, of the carbon porosity of the porous carbon plate 1.

From the viewpoint of preventing dust generation, as a material of the porous carbon plate 1 and the support 2, a glassy carbon is coated around the skeleton of the porous carbon by thinly impregnating the porous carbon with a thermosetting resin and baking it. It is also possible to do.
It is also possible to perform a DLC coating on the adsorption surface 10 of the porous carbon plate 1 to prevent the particles on the surface from dropping off during adsorption and release.

The fired and bonded portion 3 is formed by baking a thermosetting resin having a high carbonization rate as an adhesive. As the thermosetting resin, a phenol resin or a furan resin is preferable, but an epoxy resin, a divinylbenzene resin, a urea resin, a melamine resin, an unsaturated polyester resin, an allyl resin, or the like can also be used. This adhesive is applied to the bonding bottom 5 and the bonding side 6, and after curing under an inert atmosphere such as nitrogen gas or argon gas, the temperature rising rate is 100 ° C. at a temperature of 600 ° C. or higher, preferably 900 ° C. or higher. The sintered bonded portion 3 is formed by firing at a rate of less than / hour and carbonization. If the temperature is less than 600 ° C., an uncarbon portion remains, and the flatness may vary greatly depending on the use conditions.
It is necessary to adjust the viscosity so that this adhesive does not penetrate into the porous carbon. Viscosity adjustment is performed by adding carbon black powder, coke powder, graphite powder or a mixture thereof to the thermosetting resin, and adjusting the viscosity to 35 PaS to 200 PaS. If it is 35 PaS or less, it penetrates into the porous carbon due to capillary action, and if it is 200 PaS or more, the adhesive is too hard to be applied to the coated surface.

  The above-mentioned fired and bonded portion 3 has a small difference in thermal expansion between the carbon porous carbon plate 1 and the support 2, can suppress the deformation and distortion of the adsorption surface 10, and can realize highly accurate planar adsorption. .

Further, the fired bonded portion 3 has the following advantages compared to a bonded portion using a synthetic resin adhesive such as a conventional epoxy resin.
Since the general heat resistance of synthetic resin adhesive is around 100 ° C., it cannot be used at higher temperatures, but the heat resistance of the fired bonded part 3 is equivalent to the heat resistance of the porous carbon plate 1 and the support 2. is there.
Further, when a corrosive liquid adheres to the object to be adsorbed, there is a risk of being corroded by a conventional synthetic resin adhesive, and the use environment is limited. 2 has the same corrosion resistance as that of No. 2, and the use limitation due to the fired bonded portion 3 can be prevented.
Further, a general synthetic resin adhesive is inferior in water resistance, and when an adsorption object wet with water is adsorbed, the adsorbing surface is deformed with time and accurate adsorption cannot be performed. Even if it is an adsorption object wet with water, it can be adsorbed with high accuracy.

1 is a schematic perspective view showing an embodiment of the present invention. The top view of the support body 2 of one Embodiment of this invention. Sectional drawing of one Embodiment of this invention. Sectional drawing of other embodiment of this invention.

Explanation of symbols

1: porous carbon plate, 2: support, 3: fired bonding portion, 4: ventilation groove, 5: bonding bottom portion, 6: bonding side portion, 9: connection port, 10: suction surface, 11: suction surface, 15: Non-venting side surface, 20: edge, 21: bottom, 40: communication groove, 50: flow path.

Claims (4)

A carbon adsorbent connected to the suction means for sucking and holding an object,
A suction plate made of porous carbon having air permeability, having a suction surface for sucking and holding an object, and a suction surface sucked by the suction means;
A support made of carbon that supports the bottom and side surfaces of the adsorption plate;
A ventilation groove provided on the bottom surface of the support and not in contact with the suction plate;
A connection port communicating with the ventilation groove and connected to the suction means;
A baked adhesive portion formed on a portion of the bottom surface and side surface of the suction plate that contacts the support,
Equipped with a,
The fired adhesive portion is a carbon black powder or coke on one thermosetting resin among phenol resin, furan resin, epoxy resin, divinylbenzene resin, urea resin, melamine resin, unsaturated polyester resin, allyl resin. One or one or more carbon materials in powder or graphite powder are added, and the adhesive adjusted to a viscosity of 35 PaS to 200 PaS is carbonized at a temperature of 600 ° C or higher.
A carbon adsorbent characterized by the above. A carbon adsorbent connected to the suction means for sucking and holding an object,
An adsorption plate made of porous carbon having air permeability, having an adsorption surface for sucking and holding an object, a suction surface sucked by the suction means, and a non-breathable side surface;
A support made of carbon that supports the bottom surface of the adsorption plate;
A ventilation groove provided on the bottom surface of the suction plate and not in contact with the support;
A connection port communicating with the ventilation groove and connected to the suction means;
A fired bonding portion formed on a portion of the bottom surface of the suction plate that contacts the support , and
The fired adhesive portion is a carbon black powder or coke on one thermosetting resin among phenol resin, furan resin, epoxy resin, divinylbenzene resin, urea resin, melamine resin, unsaturated polyester resin, allyl resin. One or one or more carbon materials in powder or graphite powder are added, and the adhesive adjusted to a viscosity of 35 PaS to 200 PaS is carbonized at a temperature of 600 ° C or higher.
A carbon adsorbent characterized by the above. A method for producing a carbon adsorbent connected to a suction means for sucking and holding an object,
An adsorption plate made of porous carbon having air permeability and having an adsorption surface for sucking and holding an object and an adsorption surface sucked by the suction means is supported on a support made of carbon,
In the thermosetting resin of phenol resin , furan resin, epoxy resin, divinylbenzene resin, urea resin, melamine resin, unsaturated polyester resin, allyl resin in the part where the adsorbing plate and the support come into contact In addition, one or more carbon materials in carbon black powder, coke powder or graphite powder are added, an adhesive adjusted to a viscosity of 35 PaS to 200 PaS is further applied, and the part where the adhesive is applied is inactive Firing at a temperature of 600 ° C. or higher in an atmosphere or a reducing atmosphere;
Carbon adsorbent manufacturing method characterized in that The support is
A ventilation groove provided on the bottom surface of the support and not in contact with the suction plate;
A connection port communicating with the ventilation groove and connected to the suction means;
A method for producing a carbon adsorbent according to claim 3.

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