JP4950574B2 - Potential measuring apparatus and potential measuring method - Google Patents

Potential measuring apparatus and potential measuring method Download PDF

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JP4950574B2
JP4950574B2 JP2006178885A JP2006178885A JP4950574B2 JP 4950574 B2 JP4950574 B2 JP 4950574B2 JP 2006178885 A JP2006178885 A JP 2006178885A JP 2006178885 A JP2006178885 A JP 2006178885A JP 4950574 B2 JP4950574 B2 JP 4950574B2
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detection
vibration
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potential measuring
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篤史 香取
好克 市村
隆志 牛島
義貴 財津
薫 野口
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Canon Inc
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Description

本発明は、静電容量測定装置及び電位測定装置、それを用いた画像形成装置、及び電位測定方法などに関する。 The present invention relates to a capacitance measuring device and a potential measuring device, an image forming apparatus using the same, a potential measuring method, and the like.

感光体を用いた電子写真式の画像形成装置において、高画質な画像を形成する場合には、電位測定装置により、感光体の電位を測定しながら画像形成装置を制御する必要がある。電位測定装置としては、帯電している感光体(測定対象)に検知電極を近接させ、機械的に感光体と検知電極間の容量を変化させ、静電誘導により検知電極に誘導される微小な電荷を測定する例がある。 In an electrophotographic image forming apparatus using a photoreceptor, when forming a high-quality image, it is necessary to control the image forming apparatus while measuring the potential of the photoreceptor with a potential measuring device. As a potential measuring device, a detection electrode is brought close to a charged photoconductor (measurement object), a capacitance between the photoconductor and the detection electrode is mechanically changed, and a minute electrode guided to the detection electrode by electrostatic induction. There is an example of measuring the charge.

図10に、電位測定装置の概念的な構成図を示す。図10において、501は測定対象、502は検知電極、503は電荷検出手段であり、測定対象501の表面電位はVD、容量変化手段により変化する容量はC1、電荷検出手段503から出力される信号はVOUTで表している。ここにおいて、機械的に容量C1を変化させるには、測定対象501から検知電極502に入射する電気力線を周期的に変化させる方法を採用するものや、検知電極502を周期的に移動させる方法を採用するものがある。 FIG. 10 shows a conceptual configuration diagram of the potential measuring apparatus. In FIG. 10, reference numeral 501 denotes a measurement object, 502 denotes a detection electrode, and 503 denotes charge detection means. The surface potential of the measurement object 501 is VD, the capacitance changed by the capacitance change means is C1, and the signal output from the charge detection means 503 Is represented by VOUT. Here, in order to change the capacitance C1 mechanically, a method of periodically changing the electric lines of force incident on the detection electrode 502 from the measurement object 501 or a method of moving the detection electrode 502 periodically. There is something that adopts.

前者では、測定対象(感光体)と検知電極間にフォーク形状のシャッタを挿入し、シャッタを測定対象の表面と平行な方向に周期的に動かすことで、測定対象から検知電極上に到達する電気力線を周期的に遮る構成が開示されている。そして測定面から見た実効的な検知電極の面積を変化させて、測定対象と検知電極間の静電容量を変化させることで電位を検出するものである(特許文献1参照)。 In the former, a fork-shaped shutter is inserted between the measurement target (photosensitive member) and the detection electrode, and the shutter is periodically moved in a direction parallel to the surface of the measurement target, so that the electricity reaching the detection electrode from the measurement target is obtained. The structure which interrupts | blocks a force line periodically is disclosed. Then, the potential is detected by changing the capacitance between the measurement object and the detection electrode by changing the effective area of the detection electrode viewed from the measurement surface (see Patent Document 1).

また、測定対象と対向する位置に開口部を有した金属のシールド材を配置し、フォークの形状をした振動素子の先端に検知電極を設けるものもある。これは検知電極の位置が開口部直下で平行に移動することで、検知電極に達する電気力線の数を変化させ、静電容量を変化させる構成もある(特許文献2参照)。 In addition, there is a type in which a metal shield material having an opening is disposed at a position facing a measurement target, and a detection electrode is provided at the tip of a fork-shaped vibration element. There is also a configuration in which the capacitance of the detection electrode is changed by changing the number of lines of electric force reaching the detection electrode by moving the position of the detection electrode in parallel under the opening (see Patent Document 2).

後者では、検知電極を片持ち梁状の振動子の先端に配置し、片持ち梁を振動させることで、測定対象と検知電極間の距離を周期的に変化させ、静電容量を変化させる構成がある(特許文献3参照)。
米国特許第4,720,682号公報 米国特許第3,852,667号公報 米国特許第4,763,078号公報
In the latter configuration, the sensing electrode is placed at the tip of a cantilevered vibrator, and the cantilever is vibrated to periodically change the distance between the measurement target and the sensing electrode, thereby changing the capacitance. (See Patent Document 3).
U.S. Pat.No. 4,720,682 U.S. Pat.No. 3,852,667 U.S. Pat.No. 4,763,078

電位測定装置又は静電容量測定装置において、静電容量を変化させる為のフォーク形状のシャッタや振動素子を安定に振動させるためには、振動の状態の検出を行う必要がある。しかし、振動の状態の検出を行うためには、別途、振動検出用のセンサを備える必要があり、構成要素が増加しがちである。 In the potential measuring device or the capacitance measuring device, it is necessary to detect the vibration state in order to stably vibrate the fork-shaped shutter and the vibration element for changing the capacitance. However, in order to detect the state of vibration, it is necessary to separately provide a vibration detection sensor, and the number of components tends to increase.

したがって、本発明の目的は、別途、振動検出用のセンサを用いることなく、振動の状態の検出を行えるようにするための技術を提供することにある。 Therefore, an object of the present invention is to provide a technique for enabling detection of a vibration state without using a vibration detection sensor.

上記課題に鑑み、本発明の電位測定装置又は静電容量測定装置は、機械的な振動により測定対象の面と検知電極間の静電容量を変化させる容量変化手段と、容量変化手段によって検知電極に静電誘導される電荷量を検出する電荷検出手段と、前記機械的な振動を励起する振動発生と前記機械的な振動の状態の検出とを選択的に行う振動発生・検出手段とを有することを特徴とする。また、上記課題に鑑み、本発明の電位測定方法は、機械的な振動により測定対象の面と検知電極間の静電容量を変化させることで検知電極に静電誘導される電荷量を検出し、その検出結果に基づいて測定対象の面の電位を測定する電位測定方法であって、前記機械的な振動の状態を検出してその検出結果に基づいて前記機械的な振動の励起態様を制御すると共に、前記機械的な振動を励起する期間と前記機械的な振動の状態を検出する期間が重ならないように設定することを特徴とする。 In view of the above problems, the potential measuring device or the capacitance measuring device of the present invention includes a capacitance changing unit that changes the capacitance between the surface to be measured and the detection electrode by mechanical vibration, and a detection electrode by the capacitance changing unit. Charge detection means for detecting the amount of charge electrostatically induced in the device, and vibration generation / detection means for selectively performing vibration generation for exciting the mechanical vibration and detection of the state of the mechanical vibration. It is characterized by that. In view of the above problems, the potential measurement method of the present invention detects the amount of charge that is electrostatically induced in the detection electrode by changing the capacitance between the surface to be measured and the detection electrode by mechanical vibration. A potential measurement method for measuring a potential of a surface to be measured based on a detection result, detecting a state of the mechanical vibration and controlling an excitation mode of the mechanical vibration based on the detection result In addition, the period for exciting the mechanical vibration and the period for detecting the state of the mechanical vibration are set so as not to overlap.

より具体的には、本発明の電位測定装置、静電容量測定装置ないしこれらの方法は、振動を励起ないし発生するための駆動信号を振動発生・検出手段に印加する期間と、駆動信号を印加せず、振動により発生する信号を振動発生・検出手段で検出する期間の2つの期間を有している。その結果、単一の構成手段の振動発生・検出手段を用いて、振動を発生させ、振動の検出を行うことができるようになる。 More specifically, the potential measuring device, the capacitance measuring device or these methods according to the present invention apply a period for applying a driving signal for exciting or generating vibration to the vibration generating / detecting means, and applying the driving signal. In addition, there are two periods of a period in which a signal generated by vibration is detected by the vibration generation / detection means. As a result, vibration can be generated and detected by using the vibration generating / detecting means of the single component means.

また、上記課題に鑑み、本発明の静電容量定方法は、機械的な振動により測定対象の面と検知電極間の静電容量を変化させることで検知電極に静電誘導される電荷量を検出し、その検出結果に基づいて測定対象の面と前記検知電極との間の静電容量を測定する静電容量測定方法であって、前記機械的な振動の状態を検出してその検出結果に基づいて前記機械的な振動の励起態様を制御すると共に、前記機械的な振動を励起する期間と前記機械的な振動の状態を検出する期間が重ならないように設定することを特徴とする。なお、本発明の静電容量測定装置ないし方法とは、静電容量を変化させることにより、測定対象面の電位、測定対象面−電極間の距離の変化や、測定対象面−電極間の誘電率の変化等を測定するものである。 Further, in view of the above problems, the capacitance determination method of the present invention can reduce the amount of charge electrostatically induced in the detection electrode by changing the capacitance between the surface to be measured and the detection electrode by mechanical vibration. A capacitance measuring method for detecting and measuring a capacitance between a surface to be measured and the detection electrode based on the detection result, and detecting the mechanical vibration state and detecting the result The excitation mode of the mechanical vibration is controlled based on the above, and the period for exciting the mechanical vibration and the period for detecting the state of the mechanical vibration are set so as not to overlap each other. Note that the capacitance measuring device or method of the present invention means that the capacitance of the measurement target surface, the change in the distance between the measurement target surface and the electrode, and the dielectric between the measurement target surface and the electrode are changed by changing the capacitance. It measures the change in rate.

また、上記課題に鑑み、本発明の画像形成装置は、上記の電位測定装置と画像形成手段を備え、電位測定装置の検知電極の面が画像形成手段の電位測定の対象となる面と対向して配置され、画像形成手段が電位測定装置の信号検出結果を用いて画像形成の制御を行うことを特徴とする。 In view of the above problems, an image forming apparatus according to the present invention includes the above-described potential measuring device and an image forming unit, and a surface of the detection electrode of the potential measuring device faces a surface of the image forming unit that is a potential measurement target. The image forming means controls image formation using the signal detection result of the potential measuring device.

本発明の電位測定装置、静電容量測定装置ないしこれらの方法によれば、振動発生・検出手段という単一の手段で振動発生と振動状態の検出をできるため、構成要素を増やすことなく、比較的安定な振動を実現できる。そのため、安定した出力を得ることができ、比較的高性能な電位測定装置、静電容量測定装置ないしこれらの方法を提供できる。 According to the potential measuring device, the capacitance measuring device or these methods of the present invention, the vibration generation and the vibration state can be detected by a single means of vibration generation / detection means, so that the comparison can be made without increasing the number of components. Stable vibration can be realized. Therefore, a stable output can be obtained, and a relatively high-performance potential measuring device, capacitance measuring device or these methods can be provided.

以下に、本発明の実施の形態を説明する。本発明の実施形態では、機械的な振動により測定対象の面と検知電極間の静電容量を変化させる容量変化手段によって検知電極に静電誘導される電荷量を検出する。そして前記機械的な振動を励起する機能と前記機械的な振動の状態を検出する機能を選択的に行う振動発生・検出手段を備えている。 Hereinafter, embodiments of the present invention will be described. In the embodiment of the present invention, the amount of charge that is electrostatically induced in the detection electrode is detected by the capacitance changing means that changes the capacitance between the surface to be measured and the detection electrode by mechanical vibration. Further, vibration generating / detecting means for selectively performing the function of exciting the mechanical vibration and the function of detecting the state of the mechanical vibration is provided.

以下、電位測定装置を例示して図面を用いて本発明の実施の形態を詳細に説明する。
(第1の実施の形態)
図1に、第1の実施の形態に係る電位測定装置の構成図を示す。図1において、101は検知電極、102は振動子、103は、振動子102の振動を励起すると共にその振動状態を検出するための振動発生・検出手段の主要部を構成する手段である。(以下、これのことを振動発生・検出手段と言う)104は、振動発生・検出手段の一部をなす配線切替え手段、105は駆動信号印加手段、106は振動検出信号増幅手段、107は駆動信号生成手段である。108は、検知電極101に静電誘導される電荷量を検出するための電荷検出手段である。
Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings by exemplifying a potential measuring device.
(First embodiment)
FIG. 1 shows a configuration diagram of the potential measuring apparatus according to the first embodiment. In FIG. 1, 101 is a detection electrode, 102 is a vibrator, and 103 is a means that forms the main part of vibration generation / detection means for exciting the vibration of the vibrator 102 and detecting its vibration state. (This is hereinafter referred to as vibration generation / detection means) 104 is a wiring switching means forming part of the vibration generation / detection means, 105 is a drive signal applying means, 106 is a vibration detection signal amplifying means, and 107 is a drive It is a signal generation means. Reference numeral 108 denotes charge detection means for detecting the amount of charge electrostatically induced in the detection electrode 101.

容量変化手段である振動子102は、測定対象である感光体ドラム(不図示)から検知電極101に到達する電気力線を周期的に遮蔽するチョッパーの機能を有している。この振動子102の振動を発生させるために、振動子には振動発生・検出手段103が備えられている。 The vibrator 102 that is a capacity changing unit has a chopper function that periodically shields electric lines of force that reach the detection electrode 101 from a photosensitive drum (not shown) that is a measurement target. In order to generate vibration of the vibrator 102, the vibrator is provided with vibration generation / detection means 103.

模式斜視図である図2に、本実施形態に係る電位測定装置の振動子の一例が示されている。図2において、201は圧電素子、202は振動子102の固定端、203は被測定面(測定対象の面)、204は、被測定面203から検知電極101に対して発生する電気力線である。 FIG. 2, which is a schematic perspective view, shows an example of a vibrator of the potential measuring device according to the present embodiment. In FIG. 2, 201 is a piezoelectric element, 202 is a fixed end of the vibrator 102, 203 is a surface to be measured (surface to be measured), and 204 is a line of electric force generated from the surface to be measured 203 to the detection electrode 101. is there.

図3に、本実施形態に係る電位測定装置の信号を説明する図を示す。図3において、横軸に時間を示し、縦軸に信号の大きさを示している。図3(a)には、駆動信号印加手段105により印加される印加信号110が示される。(ここではアナログ的な信号を示しているが、パルス信号の如きデジタル的な駆動信号であっても構わない)図3(b)には、振動子102の振動112により圧電素子301に発生する振動検出信号113(印加信号110が印加されず、振動子102の振動だけが発生しているとした場合)が示される。図3(c)には、配線切替え手段104の接点Aでの信号が示されている。配線切替え手段104は、後記駆動信号生成手段107からの駆動信号115に基づいて制御される。 FIG. 3 is a diagram illustrating signals of the potential measuring device according to the present embodiment. In FIG. 3, the horizontal axis indicates time, and the vertical axis indicates the signal magnitude. FIG. 3A shows an applied signal 110 applied by the drive signal applying means 105. (Although an analog signal is shown here, it may be a digital drive signal such as a pulse signal.) In FIG. 3B, the piezoelectric element 301 is generated by the vibration 112 of the vibrator 102. A vibration detection signal 113 (when the applied signal 110 is not applied and only the vibration of the vibrator 102 is generated) is shown. FIG. 3C shows a signal at the contact A of the wiring switching unit 104. The wiring switching unit 104 is controlled based on a drive signal 115 from the drive signal generation unit 107 described later.

本実施形態の図2の例では、振動発生・検出手段103には、圧電素子201を用いている。圧電素子201は、電圧を印加することで歪みを発生し、交流電圧を印加する(印加信号110)ことにより振動111を発生させられる(図3(a)参照)。振動子102は、固定端202で保持冶具に固定されており、圧電素子201が振動(111)することで両方の振動子102が振動を発生する構造になっている。振動子102は、矢印Cの方向に周期的な往復振動を行う。振動子102の振動により、電気力線204が周期的に遮蔽され、検知電極101に周期的に電荷が誘導(誘導電荷信号116)される。 In the example of FIG. 2 of the present embodiment, the piezoelectric element 201 is used for the vibration generating / detecting means 103. The piezoelectric element 201 generates distortion by applying a voltage, and generates vibration 111 by applying an alternating voltage (application signal 110) (see FIG. 3A). The vibrator 102 is fixed to a holding jig at a fixed end 202, and has a structure in which both vibrators 102 generate vibration when the piezoelectric element 201 vibrates (111). The vibrator 102 performs periodic reciprocating vibration in the direction of arrow C. Due to the vibration of the vibrator 102, the electric force lines 204 are periodically shielded, and charges are periodically induced to the detection electrode 101 (inductive charge signal 116).

本実施形態では、配線切替え手段104は、例えば、アナログスイッチにより構成されている。勿論、機械的なスイッチなどでもよい。配線切替え手段104の接点Aは、予め定めた一定の周期で、駆動信号印加手段105側と振動検出信号増幅手段106側に交互に選択的に接続される。本実施形態では、駆動信号115の1周期毎に、この切替え動作を繰り返している。これに限らず、振動発生・検出手段が振動発生機能を行う期間と検出機能を行う期間は、それぞれ、駆動信号の周期の整数倍の時間となっていれば、各機能を好適に行うことができる。 In the present embodiment, the wiring switching unit 104 is constituted by an analog switch, for example. Of course, a mechanical switch or the like may be used. The contact A of the wiring switching means 104 is selectively connected alternately to the drive signal applying means 105 side and the vibration detection signal amplifying means 106 side at a predetermined fixed period. In this embodiment, this switching operation is repeated for each cycle of the drive signal 115. Not limited to this, if the period during which the vibration generation / detection means performs the vibration generation function and the period during which the detection function is performed are each an integral multiple of the cycle of the drive signal, each function can be suitably performed. it can.

配線切替え手段104が駆動信号発生手段105に接続されている期間は、駆動信号印加手段105により、振動発生・検出手段103に駆動印加信号110が印加される。また、配線切替え手段104が振動検出信号増幅手段106に接続されている期間は、振動子102の振動112に対応した検出信号113が、振動発生・検出手段103から出力される。これは、振動子102の振動(112)により発生する圧電素子の歪みに対応した電圧113を圧電素子201が発生させる特性を用いている(図3(b)参照)。その検出信号113は、検出手段106(増幅手段を含む)により検出増幅信号114に変換される。 During the period in which the wiring switching unit 104 is connected to the drive signal generation unit 105, the drive signal application unit 105 applies the drive application signal 110 to the vibration generation / detection unit 103. Further, during the period in which the wiring switching unit 104 is connected to the vibration detection signal amplification unit 106, a detection signal 113 corresponding to the vibration 112 of the vibrator 102 is output from the vibration generation / detection unit 103. This uses the characteristic that the piezoelectric element 201 generates a voltage 113 corresponding to the distortion of the piezoelectric element generated by the vibration (112) of the vibrator 102 (see FIG. 3B). The detection signal 113 is converted into a detection amplification signal 114 by the detection means 106 (including the amplification means).

駆動信号生成手段107においては、その増幅信号114の情報を元にして、振動子102が安定な動作をするように駆動信号115が生成される。具体的には、振動子102の振動振幅が最も大きくなるように、または、駆動信号115に対する振動子102の振動の位相が所望の位相になるように(典型的には、90度の位相ずれになるように)、駆動信号115を変化させる。ここで、生成された駆動信号115は、駆動信号印加手段105に伝達される。 In the drive signal generation means 107, the drive signal 115 is generated based on the information of the amplified signal 114 so that the vibrator 102 operates stably. Specifically, the vibration amplitude of the vibrator 102 is maximized, or the vibration phase of the vibrator 102 with respect to the drive signal 115 becomes a desired phase (typically, a phase shift of 90 degrees). The drive signal 115 is changed. Here, the generated drive signal 115 is transmitted to the drive signal applying unit 105.

振動子102が持つ固有の振動周波数の駆動信号を印加することで、少ない投入エネルギーで大きな振動を得られる。これを共振と呼び、高効率に振動をさせるだけでなく、安定な振動を得ることができる。共振では、特定周波数(ほぼ固有の振動周波数)の駆動信号115への感度が高く、他の周波数の駆動信号115に反応しにくい。また、共振の状態では、振動が駆動信号115の周波数に対して変化する時定数が長い。そのため、本実施形態のように駆動と検出を間欠的に繰り返したとしても、駆動信号115の周波数で安定した共振駆動をさせられ、同時に振動の状態の検出も好適に行うことができる(図3(c)参照)。 By applying a drive signal having a specific vibration frequency of the vibrator 102, a large vibration can be obtained with a small input energy. This is called resonance, and not only can vibration be performed with high efficiency, but also stable vibration can be obtained. In resonance, the sensitivity to the drive signal 115 at a specific frequency (almost unique vibration frequency) is high, and it is difficult to react to the drive signal 115 at other frequencies. In the resonance state, the time constant with which the vibration changes with respect to the frequency of the drive signal 115 is long. Therefore, even if driving and detection are intermittently repeated as in the present embodiment, stable resonance driving can be performed at the frequency of the driving signal 115, and at the same time, the state of vibration can be suitably detected (FIG. 3). (See (c)).

振動子102の動作が安定すると、検知電極101に安定に電荷が誘導される(誘導電荷信号116の安定的な発生)。検知電極101に誘導された電荷による電荷信号116は、電荷検出手段108で電荷検出信号117に変換される。この電荷検出信号117も安定に得ることができるため、電位測定装置の検出精度向上に繋がる。 When the operation of the vibrator 102 is stabilized, charges are stably induced in the detection electrode 101 (stable generation of the induced charge signal 116). The charge signal 116 due to the charge induced in the detection electrode 101 is converted into a charge detection signal 117 by the charge detection means 108. Since this charge detection signal 117 can also be obtained stably, the detection accuracy of the potential measuring device is improved.

以上に説明した本実施形態に係る電位測定装置では、機械的な振動を発生させるための駆動信号の印加期間と、機械的な振動の状態を検出する検出期間が異なる期間を有するので、単一の振動発生・検出手段のみで、駆動信号の印加と駆動状態の検出を行える。そのため、比較的簡単な構成で、振動子102を安定な振動状態に常に保つことができる。これにより、検知電極101に安定した電荷の誘導を行うことができ、電荷の検出信号が安定するため、高精度な電位測定装置を実現できる。 In the potential measuring apparatus according to the present embodiment described above, the drive signal application period for generating mechanical vibration and the detection period for detecting the state of mechanical vibration have different periods. Only the vibration generation / detection means can apply the drive signal and detect the drive state. Therefore, the vibrator 102 can always be kept in a stable vibration state with a relatively simple configuration. Thus, stable charge induction can be performed on the detection electrode 101, and the charge detection signal is stabilized, so that a highly accurate potential measurement device can be realized.

(第2の実施の形態)
第2の実施の形態に係る電位測定装置は、振動発生・検出手段103の構成が第1の実施の形態のものとは異なる形態である。その他は、第1の実施の形態と同じである。
(Second Embodiment)
The potential measuring device according to the second embodiment has a configuration in which the configuration of the vibration generating / detecting means 103 is different from that of the first embodiment. Others are the same as those in the first embodiment.

本実施形態では、振動発生・検出手段103に電磁アクチュエータを用いている。図4に、本実施形態に係る電位測定装置の振動発生・検出手段を説明する模式図を示す。図4において、211は振動子、212は支持枠、213はねじりバネ、214は検知電極パッド、215は配線、216は磁石、217はコイル配線、218はコイルパッド、219はコイル基板である。振動子211は、ねじりバネ213により保持されており、ねじりバネ213は支持枠212に固定されている。振動子211とねじりバネ213と支持枠212の表面には、検知電極101と配線215、検知電極パッド214が配置されている。振動子211とねじりバネ213と支持枠212の裏面には、コイル配線217とコイル電極パッド218が配置されている。支持枠212の周囲には、図4(a)のように磁石216が配置されている。 In this embodiment, an electromagnetic actuator is used for the vibration generating / detecting means 103. FIG. 4 is a schematic diagram for explaining vibration generation / detection means of the potential measuring apparatus according to the present embodiment. In FIG. 4, 211 is a vibrator, 212 is a support frame, 213 is a torsion spring, 214 is a detection electrode pad, 215 is a wiring, 216 is a magnet, 217 is a coil wiring, 218 is a coil pad, and 219 is a coil substrate. The vibrator 211 is held by a torsion spring 213, and the torsion spring 213 is fixed to the support frame 212. On the surface of the vibrator 211, the torsion spring 213, and the support frame 212, the detection electrode 101, the wiring 215, and the detection electrode pad 214 are disposed. A coil wiring 217 and a coil electrode pad 218 are disposed on the back surface of the vibrator 211, the torsion spring 213, and the support frame 212. A magnet 216 is arranged around the support frame 212 as shown in FIG.

コイル217に交流の駆動信号115を印加させることにより、磁石216の磁界の向きとコイル217に流れる電流の方向の関係(フレミングの左手の法則)から、振動子211に機械的な振動を発生させる。振動子211は、ねじりバネ213を軸として、矢印Dの方向にねじり振動を行う。また、駆動信号115を印加しない期間には、振動子211の振動方向と磁石216の磁界の向きとの関係から、コイル217に起電力が発生する。これを検出することで、振動子211の振動の状態を検出できる。 By applying the AC drive signal 115 to the coil 217, mechanical vibration is generated in the vibrator 211 from the relationship between the direction of the magnetic field of the magnet 216 and the direction of the current flowing in the coil 217 (Fleming's left-hand rule). . The vibrator 211 performs torsional vibration in the direction of arrow D about the torsion spring 213 as an axis. Further, during a period in which the drive signal 115 is not applied, an electromotive force is generated in the coil 217 due to the relationship between the vibration direction of the vibrator 211 and the direction of the magnetic field of the magnet 216. By detecting this, the state of vibration of the vibrator 211 can be detected.

振動発生・検出手段にこのような電磁アクチュエータを用いることにより、大きな振動を効率よく得られる。そのため、小型な構成で、安定したより大きな電荷の検出信号を得ることができる。こうして、本実施形態に係る電位測定装置によれば、小型な構成で、より高精度な電位測定装置を実現できる。 By using such an electromagnetic actuator for the vibration generating / detecting means, a large vibration can be obtained efficiently. Therefore, a stable and larger charge detection signal can be obtained with a small configuration. Thus, according to the potential measuring device according to the present embodiment, a more accurate potential measuring device can be realized with a small configuration.

図4(a)の構成は、振動子211にコイル217を配置している構成であるが、図4(b)に示すように振動211子の裏面に磁石216を配置し、別途、コイル基板219上にコイル配線217とコイルパッド218を配置する構成にしてもよい。この構成によれば、振動子211の周辺に磁石を配置するための領域を削減できるため、更に小型で、且つ高精度な電位測定装置を提供できる。尚、本実施形態では、振動子102をねじれ振動すると説明したが、本実施形態における機械的な振動はこれに限るものではない。 4A is a configuration in which the coil 217 is disposed on the vibrator 211. However, as shown in FIG. 4B, a magnet 216 is disposed on the back surface of the vibration 211 element, and a coil substrate is separately provided. The coil wiring 217 and the coil pad 218 may be arranged on the 219. According to this configuration, the area for arranging the magnet around the vibrator 211 can be reduced, so that a more compact and highly accurate potential measuring device can be provided. In the present embodiment, it has been described that the vibrator 102 is torsionally vibrated, but the mechanical vibration in the present embodiment is not limited to this.

(第3の実施の形態)
第3の実施の形態に係る電位測定装置は、配線切替え手段104による駆動期間と検出期間の設定態様が第1の実施の形態のものとは異なる。その他は、第1の実施の形態ないしは第2の実施の形態と同じである。
(Third embodiment)
The potential measuring apparatus according to the third embodiment is different from that of the first embodiment in the manner of setting the drive period and the detection period by the wiring switching means 104. Others are the same as those in the first embodiment or the second embodiment.

図5−1は、本実施形態に係る電位測定装置の切替えスイッチの切替えを説明する図である。図5−1において、横軸に時間、縦軸に信号の大きさを示している。 FIG. 5A is a diagram for explaining switching of the changeover switch of the potential measuring apparatus according to the present embodiment. In FIG. 5A, the horizontal axis represents time, and the vertical axis represents the signal magnitude.

図5−1(a)では、駆動期間に対して、検出期間が長くなっている(具体的には、1:3)。この構成にすることにより、振動の状態を検出できる期間が長くなる。そのため、振動状態の検出信号が小さい場合でも、振動の状態をより正確に検出できる。 In FIG. 5A, the detection period is longer than the drive period (specifically, 1: 3). With this configuration, the period during which the state of vibration can be detected becomes longer. Therefore, even when the vibration state detection signal is small, the vibration state can be detected more accurately.

図5−1(b)では、駆動期間に対して、検出期間が短くなっている(具体的には、3:1)。この構成にすることにより、振動発生・検出手段に駆動信号を印加する時間が増えるため、駆動期間に印加する駆動信号を小さくできる。そのため、大きな駆動信号が必要な場合でも、駆動信号印加手段に対する負荷が軽くなるため、安定な駆動信号を印加することができる。よって、駆動信号が大きい場合にも、安定な振動を得られる。 In FIG. 5B, the detection period is shorter than the drive period (specifically, 3: 1). With this configuration, the time for applying the drive signal to the vibration generating / detecting means is increased, so that the drive signal applied during the drive period can be reduced. For this reason, even when a large drive signal is required, the load on the drive signal applying unit is reduced, so that a stable drive signal can be applied. Therefore, stable vibration can be obtained even when the drive signal is large.

図5−2(a)、(b)では、駆動期間と検出期間が、振動子の駆動信号の1周期と一致していない。ただし、検出期間と駆動期間の合計が、振動子の駆動振動の1周期の倍数とは一致している。ここでは、駆動振動の1周期と一致している。 In FIGS. 5-2 (a) and (b), the drive period and the detection period do not coincide with one cycle of the drive signal of the vibrator. However, the sum of the detection period and the drive period coincides with a multiple of one cycle of the drive vibration of the vibrator. Here, it coincides with one cycle of the drive vibration.

図5−2(a)では、検出信号のピークの部分を検出できるように検出期間を設けている。これにより、振動の最大値を常にモニタでき、且つ効率よくエネルギーを振動子に付与できるように駆動期間を設定することができる。一方、図5−2(b)では、検出信号のゼロクロス点を検出できるように検出期間を設けている。これにより、振動の位相タイミングを常にモニタすることができ、且つ効率よくエネルギーを振動子に付与できるように駆動期間を設定できる。 In FIG. 5A, a detection period is provided so that the peak portion of the detection signal can be detected. As a result, the drive period can be set so that the maximum value of vibration can always be monitored and energy can be efficiently applied to the vibrator. On the other hand, in FIG. 5B, a detection period is provided so that the zero cross point of the detection signal can be detected. As a result, it is possible to constantly monitor the phase timing of the vibration and set the drive period so that energy can be efficiently applied to the vibrator.

これらの構成を用いると、振動の状態の検出を行ないながら、且つ一定の制限下で駆動期間をできるだけ長く設定できるため、駆動を効率良く行うことができ、振動子の更なる安定な振動を得ることができる。 By using these configurations, it is possible to set the drive period as long as possible while detecting the state of vibration and under certain restrictions, so that the drive can be performed efficiently and further stable vibration of the vibrator can be obtained. be able to.

本実施形態に係る電位測定装置によれば、駆動期間と検出期間を所望の比にすることで、更に安定な振動を得ることができる。そのため、より高精度な電位測定装置を提供できる。 According to the potential measuring device according to the present embodiment, a more stable vibration can be obtained by setting the drive period and the detection period to a desired ratio. Therefore, a more accurate potential measuring device can be provided.

(第4の実施の形態)
第4の実施の形態に係る電位測定装置は、検知電極101の誘導電荷を検出する電荷検出手段108が上記の実施形態とは異なる形態である。その他は、第1の実施の形態ないしは第3の実施の形態の何れかと同じである。
(Fourth embodiment)
In the potential measurement device according to the fourth embodiment, the charge detection means 108 for detecting the induced charge of the detection electrode 101 is different from the above embodiment. Others are the same as those of the first embodiment or the third embodiment.

図6−1、図6−2は、本実施形態に係る電位測定装置の電荷検出手段108の幾つかの例を説明する図である。図6−1、図6−2において、301はアナログスイッチ、302はバンドパスフィルタ、303は同期検波手段である。図7−1、図7−2は、本実施形態に係る電位測定装置の電荷検出手段108での信号を説明する図である。図7−1、図7−2において、横軸に時間、縦軸に信号の大きさを示している。尚、本実施形態の説明では、図3と同様な駆動期間と検出期間を用いる。但し、本実施形態の駆動期間と検出期間はこれに限ったものではない。 6A and 6B are diagrams for explaining some examples of the charge detection unit 108 of the potential measuring apparatus according to the present embodiment. 6A and 6B, reference numeral 301 denotes an analog switch, 302 denotes a band pass filter, and 303 denotes synchronous detection means. 7A and 7B are diagrams for explaining signals in the charge detection unit 108 of the potential measuring device according to the present embodiment. 7A and 7B, the horizontal axis represents time, and the vertical axis represents the signal magnitude. In the description of this embodiment, the same drive period and detection period as those in FIG. 3 are used. However, the drive period and the detection period of the present embodiment are not limited to this.

図6−1(a)の例は、電荷検出手段108は、アナログスイッチ301を備えている構成である。接点Bは、駆動期間中にはGNDに接地され、検出期間には検知電極101に接続するようになっている。一般に、電位測定装置においては、感光ドラム(電位の測定対象)から検知電極101に誘導された電荷以外による信号(ノイズ)が、駆動印加信号110により発生する。これは、高精度な電位測定を行う場合、検出分解能の低下の要因となる。図6−1(a)のような電荷検出手段108を用いることで、駆動信号110が印加されている駆動期間は、誘導電荷の検出を行わない。(すなわち、電荷検出手段から信号を出力する期間が、振動発生・検出手段が検出機能を行う期間に含まれている)従って電荷の検出信号117から、駆動信号110によるノイズが検出されることはない。図7−1(a)に、その時の電荷検出信号117を示す。これにより、駆動信号110のノイズの影響を受けない電位測定を行うことができる。 In the example of FIG. 6A, the charge detection unit 108 includes an analog switch 301. The contact B is grounded to GND during the drive period, and is connected to the detection electrode 101 during the detection period. In general, in the potential measurement device, a signal (noise) other than the charge induced from the photosensitive drum (potential measurement target) to the detection electrode 101 is generated by the drive application signal 110. This causes a decrease in detection resolution when performing highly accurate potential measurement. By using the charge detection means 108 as shown in FIG. 6A, the induction charge is not detected during the drive period in which the drive signal 110 is applied. (In other words, the period during which the signal is output from the charge detection means is included in the period during which the vibration generation / detection means performs the detection function.) Therefore, noise due to the drive signal 110 is detected from the charge detection signal 117. Absent. FIG. 7A shows the charge detection signal 117 at that time. Thereby, the potential measurement which is not influenced by the noise of the drive signal 110 can be performed.

図6−1(b)の例は、図6−1(a)にバンドパスフィルタ302を追加した構成である。バンドパスフィルタ302の中心周波数は、振動子102の駆動周波数付近に設定されている。これにより、図7−1(a)に示したような断片的な電荷検出信号117を、図7−1(b)に示すような連続的な信号に変換できる。そのため、後段での電荷検出信号117の処理が容易になる。また、振動周波数から離れた周波数成分を除去できるため、電荷検出信号117において他の周波数のノイズが検出され難くなる。 The example in FIG. 6B is a configuration in which a bandpass filter 302 is added to FIG. The center frequency of the bandpass filter 302 is set near the drive frequency of the vibrator 102. Thereby, the fragmentary charge detection signal 117 as shown in FIG. 7-1 (a) can be converted into a continuous signal as shown in FIG. 7-1 (b). This facilitates processing of the charge detection signal 117 at the subsequent stage. Further, since a frequency component far from the vibration frequency can be removed, noise at other frequencies is hardly detected in the charge detection signal 117.

図6−2の例は、電荷検出手段108は、図6−1(a)の構成に加えて同期検波手段303を備えている構成である。図7−2(a)に示すような、振動子102の駆動周期に同期した同期信号(DUTY比 50%)により、同期検波が行われる。これにより、図7−2(b)に示すように、容易に振動子102の駆動周波数成分付近のみの電荷検出信号117を取り出すことができる。 In the example of FIG. 6B, the charge detection unit 108 includes a synchronous detection unit 303 in addition to the configuration of FIG. 6A. Synchronous detection is performed by a synchronous signal (DUTY ratio 50%) synchronized with the driving cycle of the vibrator 102 as shown in FIG. Thereby, as shown in FIG. 7B, the charge detection signal 117 only near the drive frequency component of the vibrator 102 can be easily extracted.

また、駆動期間と検出期間が、振動子102の駆動周期の倍数になっているとより好ましい。この場合、電荷検出手段108の位相がずれた場合でも、検波した信号値に誤差が出なくなるため、より正確な値を検波することができる。 In addition, it is more preferable that the driving period and the detection period are multiples of the driving period of the vibrator 102. In this case, even when the phase of the charge detection means 108 is shifted, an error does not occur in the detected signal value, so that a more accurate value can be detected.

その他の実施形態として、電荷検出手段108は、図6−1(a)と同様にアナログスイッチ301を備えている構成がある。ここでは、アナログスイッチ301の動作が、先程の説明と異なる。アナログスイッチ301は、接点Bを、駆動期間中にGNDに接地する。更に、検出期間中において、同期信号がHIGHの時には、検知電極110に接続し、同期信号がLOWの時には、GNDに接続する。具体的には、図7−2(b)のような電荷検出信号117となる。この構成により、簡易な構成で、駆動期間と検出期間の切替えと高精度な同期検波を、同時に行うことができる。 As another embodiment, the charge detection unit 108 includes an analog switch 301 as in FIG. 6A. Here, the operation of the analog switch 301 is different from that described above. The analog switch 301 grounds the contact B to GND during the driving period. Further, during the detection period, when the synchronization signal is HIGH, it is connected to the detection electrode 110, and when the synchronization signal is LOW, it is connected to GND. Specifically, the charge detection signal 117 is as shown in FIG. With this configuration, it is possible to simultaneously perform switching between the driving period and the detection period and highly accurate synchronous detection with a simple configuration.

本実施形態に係る電位測定装置は、上記のような電荷検出手段108を用いることで、駆動信号によるノイズの影響を小さくして、検知電極110誘導電荷を検出できる。そのため、本実施形態により、駆動信号の影響が少ない、高精度な電位測定装置を実現できる。 The potential measurement apparatus according to the present embodiment can detect the induced charge of the detection electrode 110 by using the charge detection unit 108 as described above, reducing the influence of noise due to the drive signal. Therefore, according to the present embodiment, it is possible to realize a highly accurate potential measurement device that is less affected by the drive signal.

(第5の実施の形態)
第5の実施の形態は、本発明の電位測定装置を用いた画像形成装置に関する。ここで用いる電位測定装置は、第1の実施の形態から第4の実施の形態の何れかと同じである。
(Fifth embodiment)
The fifth embodiment relates to an image forming apparatus using the potential measuring device of the present invention. The potential measuring device used here is the same as any one of the first to fourth embodiments.

図8に、本実施形態に係る画像形成装置を説明する模式図を示す。図8は、感光ドラム401の回転軸Eと垂直な平面上での配置を示した図である。図8において、401は感光ドラム、402は紙、403はクリーナ部、404は帯電手段、405は露光手段、406は本発明による電位測定装置、407は現像手段である。画像形成手段は、感光ドラム401、帯電手段404、露光手段405などで構成される。 FIG. 8 is a schematic diagram illustrating the image forming apparatus according to the present embodiment. FIG. 8 is a view showing the arrangement of the photosensitive drum 401 on a plane perpendicular to the rotation axis E. FIG. In FIG. 8, 401 is a photosensitive drum, 402 is paper, 403 is a cleaner, 404 is charging means, 405 is exposure means, 406 is a potential measuring device according to the present invention, and 407 is development means. The image forming unit includes a photosensitive drum 401, a charging unit 404, an exposure unit 405, and the like.

感光ドラム401は、軸Eを中心に方向Fの向きに回転する。感光ドラム401は、帯電手段404により帯電され、露光手段405により露光され、帯電パターンが形成される。電位測定装置406は、感光ドラム401上での帯電パターンの電位を測定する。そして、現像手段407において、帯電パターン部のみ(または、帯電パターン部以外のみ)にトナー等を吸着させて現像し、方向Gに走査されている紙402上に画像が転写される。その後、感光ドラム401は、クリーナ部403により清掃される。 The photosensitive drum 401 rotates about the axis E in the direction F. The photosensitive drum 401 is charged by the charging unit 404 and exposed by the exposure unit 405 to form a charged pattern. The potential measuring device 406 measures the potential of the charging pattern on the photosensitive drum 401. Then, the developing unit 407 develops the toner by adsorbing toner or the like only on the charged pattern portion (or only on the charged pattern portion), and the image is transferred onto the paper 402 scanned in the direction G. Thereafter, the photosensitive drum 401 is cleaned by the cleaner unit 403.

上記構成において、電位測定装置406での測定結果を用いて、帯電手段404や露光手段405などの制御を行い、画像の調整を行う。上記の画像形成装置においては、感光ドラム401の偏芯度合い、帯電手段404の帯電レベルの差、感光ドラム401の個体の表面状態、及び経時変化などが存在する。そのため、感光ドラム401上に形成される帯電パターンの帯電された電位は、画像形成装置の個体や時間により大きさが異なる。この電位の違いは、画像形成装置が画像を形成した時の、紙402上での画像濃さの違いの原因となる。このように、感光ドラム401上での帯電量の差が、画像形成装置の画質に大きな影響を与える。 In the above configuration, the measurement result of the potential measurement device 406 is used to control the charging unit 404, the exposure unit 405, and the like, thereby adjusting the image. In the image forming apparatus described above, there are the degree of eccentricity of the photosensitive drum 401, the difference in the charging level of the charging unit 404, the surface state of the individual photosensitive drum 401, and the change with time. Therefore, the charged potential of the charging pattern formed on the photosensitive drum 401 varies depending on the individual image forming apparatus and time. This difference in potential causes a difference in image density on the paper 402 when the image forming apparatus forms an image. As described above, the difference in the charge amount on the photosensitive drum 401 greatly affects the image quality of the image forming apparatus.

第1の実施の形態から第4の実施の形態の何れかに記載されている電位測定装置は、上記のような画像形成装置に用いることができる。本発明の電位測定装置は、比較的簡単な構成で高精度な電位測定を行うことができるため、帯電手段404や露光手段405などの制御を、この電位測定結果を基に行うことで、高画質な画像を維持できる。ここで、帯電手段404や露光手段405などの制御は、帯電手段404の帯電電圧を変更することや、露光手段405の光量や発光時間を変化させることにより行い得る。 The potential measuring device described in any of the first to fourth embodiments can be used for the image forming apparatus as described above. Since the potential measurement apparatus of the present invention can perform highly accurate potential measurement with a relatively simple configuration, the control of the charging unit 404, the exposure unit 405, and the like is performed based on the result of the potential measurement. You can maintain high-quality images. Here, the control of the charging unit 404 and the exposure unit 405 can be performed by changing the charging voltage of the charging unit 404 or changing the light amount and the light emission time of the exposure unit 405.

上記のように、本実施形態によると、高画質な画像形成装置を提供することができる。 As described above, according to this embodiment, an image forming apparatus with high image quality can be provided.

(第6の実施の形態)
図9に、第6の実施の形態に係る電位測定装置の構成図を示す。図9は、振動検出信号増幅手段106からの検出増幅信号601が、電荷検出手段108に入力されていることが異なる。それ以外の構成は、図1と同じ構成である。
(Sixth embodiment)
FIG. 9 shows a configuration diagram of a potential measuring apparatus according to the sixth embodiment. FIG. 9 is different from FIG. 9 in that the detection amplification signal 601 from the vibration detection signal amplification unit 106 is input to the charge detection unit 108. Other configurations are the same as those in FIG.

本実施形態では、電荷検出手段108において、誘導電荷信号116と検出増幅信号601の演算を行って、電荷検出信号117を求める。具体的には、振動子102の振動の大きさを示す検出増幅信号601で、誘導電荷信号116を割り算する演算処理を行うことで、電荷検出信号117を求める。この処理によって、振動子102の振動が変化した場合にも精度良く電荷検出信号117を求めることができる。 In the present embodiment, the charge detection unit 108 calculates the induced charge signal 116 and the detection amplification signal 601 to obtain the charge detection signal 117. Specifically, the charge detection signal 117 is obtained by performing arithmetic processing for dividing the induced charge signal 116 by the detection amplification signal 601 indicating the magnitude of the vibration of the vibrator 102. By this processing, the charge detection signal 117 can be obtained with high accuracy even when the vibration of the vibrator 102 changes.

例えば、熱による共振周波数の変動等によって、振動子102の振動が変化した場合、測定対象面(不図示)の電位の変化が無くても、振動子102の振動の大きさに比例して誘導電荷信号116が変化する。この結果、実際の測定対象面の電位とは異なる値が検知されることとなる。このような場合でも、上記構成とすることにより、電荷検出信号117を正確な値に補正することができる。 For example, when the vibration of the vibrator 102 changes due to a change in the resonance frequency due to heat, etc., the vibration is induced in proportion to the vibration magnitude of the vibrator 102 even if there is no change in the potential of the measurement target surface (not shown). The charge signal 116 changes. As a result, a value different from the actual potential of the measurement target surface is detected. Even in such a case, with the above configuration, the charge detection signal 117 can be corrected to an accurate value.

即ち、本実施形態を用いることで、より精度の高い電位測定を行うことが可能となる。さらに振動子102を厳密に一定の振幅になるように高精度に制御していなくても、高精度な電位測定を行うことができる。それにより、駆動信号生成手段107による振動子102の振幅の制御精度が低い構成、または、振動子102の制御性が低い場合でも、高精度な電位測定を行うことができる。そのため、より簡易な構成で、高精度な電位測定を行うことができる。 That is, by using this embodiment, it is possible to perform more accurate potential measurement. Further, even if the vibrator 102 is not controlled with high accuracy so as to have a strictly constant amplitude, high-precision potential measurement can be performed. Thereby, even when the control accuracy of the amplitude of the vibrator 102 by the drive signal generation unit 107 is low, or even when the controllability of the vibrator 102 is low, highly accurate potential measurement can be performed. Therefore, highly accurate potential measurement can be performed with a simpler configuration.

また、検出増幅信号114の信号をなくした構成で、駆動信号生成手段107から出力する駆動信号を一定の波形に固定して、高精度な電位測定を行うことができる。そのため、駆動信号生成手段107を、極めて簡易な構成で実現することができる。 In addition, with the configuration in which the detection amplification signal 114 is eliminated, the drive signal output from the drive signal generation means 107 can be fixed to a constant waveform, and highly accurate potential measurement can be performed. Therefore, the drive signal generation means 107 can be realized with a very simple configuration.

尚、本明細書では、本発明の原理を用いた電位測定装置について説明を行ったが、本発明はこれに限るものではない。同様な構成を有した静電容量測定装置にも用いることができる。例えば、測定対象の面203(401、501)が或る所定の電位に保持されている構成で、測定対象面203と検知電極101(502)の間の静電容量の変化を検出する装置に用いることができる。これにより、検出した静電容量の変化により、測定対象面−電極間の距離の変化や、測定対象面−電極間の誘電率の変化等を測定することができる。 In the present specification, the potential measuring device using the principle of the present invention has been described, but the present invention is not limited to this. It can also be used for a capacitance measuring device having a similar configuration. For example, in a configuration in which the measurement target surface 203 (401, 501) is held at a predetermined potential, the apparatus detects a change in capacitance between the measurement target surface 203 and the detection electrode 101 (502). Can be used. Accordingly, a change in the distance between the measurement target surface and the electrode, a change in the dielectric constant between the measurement target surface and the electrode, and the like can be measured based on the detected change in capacitance.

本発明の第1の実施の形態に係る電位測定装置の構成を示すブロック図である。It is a block diagram which shows the structure of the electric potential measuring apparatus which concerns on the 1st Embodiment of this invention. 第1の実施の形態に係る電位測定装置の振動発生・検出手段の構造を示す模式斜視図である。It is a model perspective view which shows the structure of the vibration generation and detection means of the electric potential measurement apparatus which concerns on 1st Embodiment. 第1の実施の形態に係る電位測定装置の各信号を示すグラフ図である。It is a graph which shows each signal of the electric potential measurement apparatus which concerns on 1st Embodiment. 本発明の第2の実施の形態に係る電位測定装置の振動発生・検出手段の構造を示す模式斜視図である。It is a model perspective view which shows the structure of the vibration generation and detection means of the electric potential measurement apparatus which concerns on the 2nd Embodiment of this invention. 本発明の第3の実施の形態に係る電位測定装置の各信号を示すグラフ図である。It is a graph which shows each signal of the electric potential measurement apparatus which concerns on the 3rd Embodiment of this invention. 本発明の第3の実施の形態に係る電位測定装置の各信号を示すグラフ図である。It is a graph which shows each signal of the electric potential measurement apparatus which concerns on the 3rd Embodiment of this invention. 本発明の第4の実施の形態に係る電位測定装置の電荷検出手段の構成を示す模式図である。It is a schematic diagram which shows the structure of the electric charge detection means of the electric potential measurement apparatus which concerns on the 4th Embodiment of this invention. 本発明の第4の実施の形態に係る電位測定装置の電荷検出手段の構成を示す模式図である。It is a schematic diagram which shows the structure of the electric charge detection means of the electric potential measurement apparatus which concerns on the 4th Embodiment of this invention. 第4の実施の形態に係る電位測定装置の電荷検出手段の各信号を示すグラフ図である。It is a graph which shows each signal of the charge detection means of the electric potential measurement apparatus which concerns on 4th Embodiment. 第4の実施の形態に係る電位測定装置の電荷検出手段の各信号を示すグラフ図である。It is a graph which shows each signal of the charge detection means of the electric potential measurement apparatus which concerns on 4th Embodiment. 本発明の電位測定装置を用いた第5の実施の形態に係る画像形成装置を、感光ドラムの回転軸と垂直な平面上での配置関係で示したブロック図である。FIG. 10 is a block diagram showing an image forming apparatus according to a fifth embodiment using the potential measuring device of the present invention in an arrangement relationship on a plane perpendicular to a rotation axis of a photosensitive drum. 本発明の第6の実施の形態に係る電位測定装置の構成を示すブロック図である。It is a block diagram which shows the structure of the electric potential measurement apparatus which concerns on the 6th Embodiment of this invention. 一般的な非接触型の電位測定装置の模式図である。It is a schematic diagram of a general non-contact type potential measuring device.

符号の説明Explanation of symbols

101、502 検知電極
102、211 容量変化手段(振動子)
103、104、201、216、217 振動発生・検出手段(圧電素子、磁石、コイル配線、アナログスイッチ)
104 振動発生・検出手段のアナログスイッチ
106 振動検出信号増幅手段
108、503 電荷検出手段(増幅手段)
203、401、501 測定対象の面(感光ドラム、被測定面)
216、217 電磁アクチュエータ(磁石、コイル配線)
301 電荷検出手段のアナログスイッチ
302 バンドパスフィルタ
303 同期検波手段
401、404、405 画像形成手段
404 帯電手段
405 露光手段
406 電位測定装置
601 検出増幅信号
101, 502 Sense electrodes 102, 211 Capacitance changing means (vibrator)
103, 104, 201, 216, 217 Vibration generation / detection means (piezoelectric element, magnet, coil wiring, analog switch)
104 Analog switch 106 for vibration generation / detection means Vibration detection signal amplification means 108, 503 Charge detection means (amplification means)
203, 401, 501 Surface to be measured (photosensitive drum, surface to be measured)
216, 217 Electromagnetic actuator (magnet, coil wiring)
301 Analog switch of charge detection means 302 Band pass filter 303 Synchronous detection means 401, 404, 405 Image forming means 404 Charging means 405 Exposure means 406 Potential measuring device 601 Detection amplification signal

Claims (9)

機械的な振動により測定対象の面と検知電極間の静電容量を変化させる容量変化手段と、前記容量変化手段によって前記検知電極に静電誘導される電荷量を検出する電荷検出手段と、前記機械的な振動を励起する振動発生と前記機械的な振動の状態の検出とを選択的に行う振動発生・検出手段とを有し、
前記振動発生・検出手段が検出機能を行う検出期間が、前記機械的な振動の状態を表す検出信号のピークの部分を検出できるように設定されていることを特徴とする電位測定装置。
A charge detector for detecting the capacitance change means for changing the capacitance between the surface and the detection electrode to be measured by the mechanical vibration, the amount of charge electrostatically induced to the sensing electrode by the capacitance change means, said have a vibration generating and detecting means for selectively performing the detection of the mechanical vibration of the vibration generator for exciting the mechanical vibration state,
A potential measuring apparatus , wherein a detection period during which the vibration generating / detecting means performs a detection function is set so as to detect a peak portion of a detection signal representing the mechanical vibration state .
前記振動発生・検出手段は、圧電素子を含むことを特徴とする請求項1に記載の電位測定装置。 The potential measuring apparatus according to claim 1, wherein the vibration generating / detecting unit includes a piezoelectric element. 前記振動発生・検出手段は、電磁アクチュエータを含むことを特徴とする請求項1に記載の電位測定装置。 The potential measuring apparatus according to claim 1, wherein the vibration generating / detecting unit includes an electromagnetic actuator. 前記振動発生・検出手段振動発生期間と検出期間との合計が、それぞれ、前記機械的な振動の周期の整数倍の時間となっていることを特徴とする請求項1から3の何れかに記載の電位測定装置。 The sum of the vibration generation period and the detection period of the vibration generation / detection means is a time that is an integral multiple of the period of the mechanical vibration, respectively. The potential measuring apparatus described. 前記電荷検出手段から信号を出力する期間が、前記振動発生・検出手段が検出機能を行う検出期間に含まれていることを特徴とする請求項1から4の何れかに記載の電位測定装置。 5. The potential measuring device according to claim 1, wherein a period in which a signal is output from the charge detection unit is included in a detection period in which the vibration generation / detection unit performs a detection function. 前記電荷検出手段が、前記機械的な振動の周波数付近を中心としたバンドパスフィルタを有していることを特徴とする請求項1から5の何れかに記載の電位測定装置。 The potential measuring apparatus according to claim 1, wherein the charge detection unit includes a bandpass filter centered around a frequency of the mechanical vibration. 前記電荷検出手段が、前記機械的な振動の周期による同期検波手段を有していることを特徴とする請求項1から5の何れかに記載の電位測定装置。 6. The potential measuring apparatus according to claim 1, wherein the charge detecting means includes synchronous detection means based on the mechanical vibration period. 請求項1乃至7の何れかに記載の電位測定装置と画像形成手段を備え、前記電位測定装置の前記検知電極の面が前記画像形成手段の電位測定の対象となる面と対向して配置され、前記画像形成手段が前記電位測定装置の信号検出結果を用いて画像形成の制御を行うことを特徴とする画像形成装置。 Comprising a potential measuring device and image forming means according to any one of claims 1 to 7, the surface of the sensing electrode of the potential measuring device is disposed to face the subject to face the potential measurement of the image forming means an image forming apparatus characterized by controlling the image formation using the image forming means the signal detection result of the potential measuring apparatus. 機械的な振動により測定対象の面と検知電極間の静電容量を変化させることで前記検知電極に静電誘導される電荷量を検出し、その検出結果に基づいて測定対象の面の電位を測定する電位測定方法であって、前記機械的な振動の状態を検出してその検出結果に基づいて前記機械的な振動の励起態様を制御すると共に、前記機械的な振動を励起する期間と前記機械的な振動の状態を検出する検出期間が重ならないように設定し、前記検出期間を、前記機械的な振動の状態を表す検出信号のピークの部分を検出できるように設定することを特徴とする電位測定方法。 Detecting the amount of electric charge electrostatically induced to the sensing electrode by varying a static capacitance between the mechanical surface of the measurement object by the vibration detecting electrode, the potential of the surface of the measuring object based on the detection result A potential measurement method for measuring, wherein the state of mechanical vibration is detected, and the excitation mode of the mechanical vibration is controlled based on the detection result, and the period of exciting the mechanical vibration and the The detection period for detecting the mechanical vibration state is set so as not to overlap, and the detection period is set so that the peak portion of the detection signal representing the mechanical vibration state can be detected. Potential measurement method.
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