JPS62110167A - Apparatus for detecting surface potential - Google Patents

Apparatus for detecting surface potential

Info

Publication number
JPS62110167A
JPS62110167A JP25024885A JP25024885A JPS62110167A JP S62110167 A JPS62110167 A JP S62110167A JP 25024885 A JP25024885 A JP 25024885A JP 25024885 A JP25024885 A JP 25024885A JP S62110167 A JPS62110167 A JP S62110167A
Authority
JP
Japan
Prior art keywords
output
phase
circuit
electrode
ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25024885A
Other languages
Japanese (ja)
Other versions
JPH0445108B2 (en
Inventor
Akira Kumada
明 久万田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP25024885A priority Critical patent/JPS62110167A/en
Publication of JPS62110167A publication Critical patent/JPS62110167A/en
Publication of JPH0445108B2 publication Critical patent/JPH0445108B2/ja
Granted legal-status Critical Current

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  • Control Or Security For Electrophotography (AREA)
  • Measurement Of Current Or Voltage (AREA)

Abstract

PURPOSE:To reduce output variation based on the variation in the distance between a detection electrode and an electrode to be measured by simple constitution, by a method wherein the output of a detection means is separated corresponding to a phase to obtain a first and a second phase outputs and the ratio of said phase outputs is taken to correct the phase outputs. CONSTITUTION:A vibration electrode 2 is vibrated by the piezoelectric tuning fork vibrated by a piezoelectric tuning fork oscillation circuit 11 and charge based on the change in the capacity between an electrode 2 and a surface to be measured is induced on the electrode 2. This charge is converted to voltage by the integrating circuit constituting a detection means and said voltage is amplified by an amplifying circuit 13 to be applied to half wave separators 14, 15. The separators 14, 15 respectively separate the output of the circuit 12 to apply first and second phase outputs. The first phase output from the separator 14 is smoothed and amplified by a smoothing/ amplifying circuit 16 and a detection signal before correction is applied to a multiplier circuit 18. The second phase output from the other separator 15 is applied to a dividing circuit 19 to operate the ratio of the first and the second phase outputs. This calculated ratio is applied to the circuit 18 to be multiplied by the first phase output while the corrected output is amplified by an amplifying circuit 20 to be applied to an output terminal 21.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、被測定表面と振動電極間の距離の変動に基
づく出力変動分を低試し1qる構造を備えた衣面電fG
検出H”PIに関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention provides an electric field fG having a structure that reduces output fluctuations due to fluctuations in the distance between the surface to be measured and the vibrating electrode.
Regarding detection H''PI.

[従来の技術1 非接触に被測定表面の゛上位を検出する装置としては、
ブー」ツバ式のちのあるいは振vJ容Φ型のものなどが
周知rある。しかし、いずれの形式の検出装置において
も、被測定表面と検知電極との間の距離の変動により、
出力が変化することを避けられなかった。これは、いず
れも被測定表面と倹知電園との間の育苗結合により検知
電極上に誘起される電荷の変動にh(づき表面電位を検
出するしのだからである。
[Prior art 1] As a device for non-contact detection of the upper surface of the surface to be measured,
There are some well-known types such as the ``boo'' brim type or the ``vJ shape'' type. However, in both types of detection devices, due to variations in the distance between the surface to be measured and the sensing electrode,
It was inevitable that the output would change. This is because the surface potential is detected based on the change in charge induced on the sensing electrode due to the seedling coupling between the surface to be measured and the seedling.

そこで、従来より、検知電極の近傍に補正用の1七捗を
S2け、浦+I Ill i上極から17られろ出力を
フィードバックし距離依存性を減少させる試みや、ある
いは特開+1056−4062号に開示されているよう
にヂ]ツバに検9JI ’jF+ tIN′!の出力を
フィードバッりし、距離依存性を減少させるものが提案
されている。
Therefore, attempts have been made to reduce the distance dependence by attaching a correction electrode near the sensing electrode and feeding back the output from the upper electrode, or to reduce the distance dependence. As disclosed in ヂ] Tsuba ni ken9JI 'jF+tIN'! A method has been proposed that feeds back the output of , and reduces distance dependence.

[発明が解決しようとする問題点] しかしながら、上述した距離依存性を減少させる構成で
は、補正回路の構成が複雑となっており、また高電圧の
信号を帰還させるため絶縁が困難であるという問題があ
った。のみならず、表面電位検出装置自体も大型となり
、したがって組み込む機器に取付スペースがさほどない
場合、たとえば複写機の感光ドラム周辺に実装する場合
などでは現実には取付けが困難であった。
[Problems to be Solved by the Invention] However, in the configuration for reducing the distance dependence described above, the configuration of the correction circuit is complicated, and there are also problems in that insulation is difficult because high voltage signals are fed back. was there. In addition, the surface potential detection device itself is large in size, and therefore, it is difficult to mount the surface potential detection device in cases where there is not much space for installation in the device into which it is installed, for example, when it is mounted around the photosensitive drum of a copying machine.

よって、この発明の目的は、比較的簡単な構成で、検知
電極と被測定表面との間の距離の変動にすづく出力変動
を効果的に低減し19る構造を備えた表面電位検出Vt
置を提供することにある。
Therefore, an object of the present invention is to provide a surface potential detection Vt having a relatively simple structure and having a structure that effectively reduces output fluctuations caused by fluctuations in the distance between a sensing electrode and a surface to be measured.
The aim is to provide a

[問題点を解決するための手段] この発明の表面電位検出装置は、上述した振動容?型の
表面電位検出装置を改良したものであり、下記の構成を
備える。
[Means for Solving the Problems] The surface potential detection device of the present invention has the above-mentioned vibration chamber. This is an improved type of surface potential detection device, and has the following configuration.

すなわら、被測定表面との間の容量変化に基づいて電荷
が誘起される振vJ電極と、この振動電慢上に誘起され
た電?術を電圧変化として取出す検出手段と、該検出手
段の出力を位相に応じて第1および第2の位相出力に分
離する分離手段と、この分離手段から与えられる第1お
よび第2の位相出力の比をとり、該比に基づき第1およ
び第2の位相出力を補正する補正手段とを備える。
In other words, there is a oscillating VJ electrode in which a charge is induced based on a capacitance change between it and the surface to be measured, and an electric charge induced on this oscillating voltage. a detecting means for extracting the voltage as a voltage change, a separating means for separating the output of the detecting means into first and second phase outputs according to the phase, and a first and second phase output provided from the separating means. and a correction means for calculating the ratio and correcting the first and second phase outputs based on the ratio.

[作用コ この発明は、振動電極から取出される出力を位相により
分離した場合、第1および第2の位相出力の比が、下記
の式(4)および(5)から明らかなように、被測定表
面と振vJ電極間の距離に逆比例し、振動電極の振幅に
比例することを利用し、振e電極より得られる検出信号
、すむわら第1または第2の位相出力に該比を掛は合わ
せることにより、被測定表面と振動電極間の設定距離の
変動および振幅変動を原因とする表面電位検出装置の出
力変動を補正するものである。
[Operation] This invention provides that when the outputs taken out from the vibrating electrodes are separated by phase, the ratio of the first and second phase outputs is Using the fact that the distance between the measurement surface and the vibrating electrode is inversely proportional to the amplitude of the vibrating electrode, the detection signal obtained from the vibrating electrode, which is the first or second phase output, is multiplied by this ratio. By combining these, it is possible to correct output fluctuations of the surface potential detection device caused by fluctuations in the set distance between the surface to be measured and the vibrating electrode and fluctuations in amplitude.

すなわち、今、第2図に示すように、被測定表面1から
l1li71電極2までの距離を、静止状態においてd
、とじ、娠Cノ電極2の振幅を2Δdとする。
That is, as shown in FIG. 2, the distance from the surface to be measured 1 to the l1li71 electrode 2 is now d
, the amplitude of the grazing C electrode 2 is 2Δd.

この場合、被測定表面1の電位をVにッ、静止状態にお
ける被測定表面1と振動電極2との間の容量をCnとす
ると、振動電極2に誘起される電荷Qは、次の式(1)
で表わされる。
In this case, if the potential of the surface to be measured 1 is V and the capacitance between the surface to be measured 1 and the vibrating electrode 2 in a resting state is Cn, then the electric charge Q induced in the vibrating electrode 2 is calculated by the following formula ( 1)
It is expressed as

Δd1 Q = V(VCo / (1+2;Sln ωt )
電荷Qの変化は、たとえば第3図に示す積分回路により
電圧の変化に変換可能であり、変換された出力をVとす
ると、■は次の式(2)により表わされる。
Δd1 Q = V(VCo/(1+2;Slnωt)
A change in charge Q can be converted into a change in voltage by, for example, an integrating circuit shown in FIG. 3. If the converted output is V, then ■ is expressed by the following equation (2).

今、sinωを一±1の場合を考えると、sinωを−
1の場合Vは最小値となり、sinω℃−一1の場合V
は最大値をとる。したがって、最小値および最大1直を
、それぞれ、V iiz およびVl。ア とし、その
絶対値の比γをとると、次の式(3)により表わされる
Now, if we consider the case where sinω is 1 ± 1, then sinω is -
When 1, V becomes the minimum value, and when sinω℃−1, V
takes the maximum value. Therefore, the minimum and maximum values are V iiz and Vl, respectively. A and taking the ratio γ of its absolute value, it is expressed by the following equation (3).

上記式(3) ’C−表わされる比γは、d、およびΔ
dのみの関数であり、したがっで振動電極2の振幅2Δ
dが一定であるとすると、doの変化によるγの変化な
らびにΔdの変化に基づくγの変化は、それぞれ、次の
式(4)および(5)で表dOすなわち被測定表面1と
S動電極2との間の距離に逆比例し、振動゛電極2の振
幅2Δdに比例することがわかる。よって、この比γの
値を適当な大きさに調整し、表面電位検出装置の出力に
l)け合わせることにより、被測定表面と振動電極との
間の距wiならびに振動電極の振幅の変動に影響されに
くい出ツノを与える表面゛上位検出装置を構成しInる
ことかわかる。この発明の表面電位検出装置は、上記の
ように振動°セ極の出力を位相により分離し、分離され
た各出力の比をとり、でれによって表面電位検出装置の
出力を浦[Euんとするものである。
The ratio γ represented by the above formula (3) 'C- is d, and Δ
d, and therefore the amplitude 2Δ of the vibrating electrode 2
Assuming that d is constant, the change in γ due to a change in do and the change in γ due to a change in Δd are expressed by the following equations (4) and (5), respectively. It can be seen that the vibration is inversely proportional to the distance between the electrode 2 and the amplitude 2Δd of the vibration electrode 2. Therefore, by adjusting the value of this ratio γ to an appropriate value and multiplying it by the output of the surface potential detection device, it is possible to compensate for fluctuations in the distance wi between the surface to be measured and the vibrating electrode and the amplitude of the vibrating electrode. It can be seen that the upper detection device is configured to provide a surface that is not easily affected. The surface potential detecting device of the present invention separates the output of the vibrating seperator according to the phase, calculates the ratio of each separated output, and converts the output of the surface potential detecting device into the It is something to do.

[実施例の説明1 第1図は、この発明の一実施例の表面電位検出装置のブ
ロック図である。第1図を参照して、振動電極2は、被
測定表面と距1!Irdoを隔てて配置されているもの
であり、たとえば振動型…2は圧?H音叉の片方の腕に
取付けられ、圧電音叉発振回路11により振幅2Δd″
c振動するように構成されている。振動′セ極2上には
、この振動に基づき被測定表面1との間の容量変化によ
り被測定表面1の電位に応じた電荷が誘起される。
[Description of Embodiment 1] FIG. 1 is a block diagram of a surface potential detection device according to an embodiment of the present invention. Referring to FIG. 1, the vibrating electrode 2 is at a distance of 1! from the surface to be measured. It is placed across the Irdo, for example a vibration type... 2 is pressure? It is attached to one arm of the H tuning fork, and the amplitude is 2Δd'' by the piezoelectric tuning fork oscillation circuit 11.
c It is configured to vibrate. On the basis of this vibration, a charge corresponding to the potential of the surface to be measured 1 is induced on the vibrating separator 2 due to a change in capacitance with the surface to be measured 1.

感動′市極2の出力は積分回路12に与えられる。The output of Kando'ichigoku 2 is given to an integrating circuit 12.

積分回路12は、振vJ電慟2上に誘起された電荷を電
圧変化として取出す検出手段を構成するものぐある。す
なわら、積分回路12は、たとえば第3図に例示したよ
うな回路で構成され、@i1J電極2上に誘起された電
荷を電圧に変換する。この電圧に変換された出力は、増
幅回路13に与えられて増幅される。増幅回路13の出
力は、半波分離器14.15にりえられる。゛L;皮分
防こ14.15は、増幅回路13の出力を位相に応じて
分離し、それぞれ、第1および第2の位相出力を与える
分離手段を構成するもので句る。一方の半波分離器14
の出力、すなわち第1位相出力は、第1位相出力の波形
を平滑にしかつ増幅するための平滑1j4幅回路16に
りえられるとともに、他方の半波分#を器15にも与え
られる。平滑増幅回路16で平滑化され、かつ増幅され
た第1位相出力は、補正された検出出力を4えるべく、
掛は算回路18に与えられるとともに、前述した比γを
演りするために割算回路19にも与えられる。
The integrating circuit 12 constitutes a detection means for extracting the charge induced on the vibration vJ electric current 2 as a voltage change. In other words, the integrating circuit 12 is constituted by, for example, a circuit as illustrated in FIG. 3, and converts the charge induced on the @i1J electrode 2 into a voltage. The output converted into this voltage is given to the amplifier circuit 13 and amplified. The output of the amplifier circuit 13 is sent to a half-wave separator 14.15. 14 and 15 constitute separation means that separates the output of the amplifier circuit 13 according to the phase and provides first and second phase outputs, respectively. One half-wave separator 14
The output, that is, the first phase output, is fed to a smoothing 1j4 width circuit 16 for smoothing and amplifying the waveform of the first phase output, and the other half wave component # is also fed to the device 15. The first phase output smoothed and amplified by the smoothing amplification circuit 16 increases the corrected detection output by 4.
The multiplier is applied to the arithmetic circuit 18 and also to the division circuit 19 in order to calculate the ratio γ mentioned above.

他方の半波分I!III器15の第2位相出力は、同様
に、他方の平滑増幅回路17で平滑化されかつ増幅され
、割算回路19に与えられる。!’IJ i回路19は
、第1位相出力と第2位相出力の比を演算し、すなわら
γの値を算出し、これを掛は算回路18に与える。
The other half wave I! Similarly, the second phase output of the III unit 15 is smoothed and amplified by the other smoothing amplifier circuit 17, and is provided to the divider circuit 19. ! The IJ i circuit 19 calculates the ratio of the first phase output and the second phase output, that is, calculates the value of γ, and supplies this to the multiplication circuit 18.

掛は算回路18では、第1位相出力にVづく゛検出出力
に、上述したγが掛は合わされ、補正された出力を、増
幅回路20に与え、増幅回路20が、被測定表面と娠8
電極との間の距離ならびに1lii動電極の層幅に影響
されない出力を出力端子21に与える。
In the multiplication circuit 18, the detection output obtained by multiplying the first phase output by V is multiplied by the above-mentioned γ, and the corrected output is given to the amplifier circuit 20.
An output is provided to the output terminal 21 that is not affected by the distance between the electrodes and the layer width of the moving electrode.

次に動作につき説明する。第1図の実施例では、振動電
極2が圧電音叉発振回路11により駆動される圧電音叉
で振動され、その結果振動電極2上に被測定表面との間
の容量変化に基づいた電荷が誘起される。この電荷は、
積分回路12により電圧に変換される。積分回路12の
出力波形を、第4図に丞す。次に、積分回路回路12の
出力は、増幅器13で増幅され、゛[゛波分離機14.
15にりえられる。半波分11fll篤1/1.15は
、それぞれ、位相によって第4図に示した積分回路12
の出力を9薗し、第1および第2の位相出力を与える。
Next, the operation will be explained. In the embodiment shown in FIG. 1, the vibrating electrode 2 is vibrated by a piezoelectric tuning fork driven by a piezoelectric tuning fork oscillation circuit 11, and as a result, charges are induced on the vibrating electrode 2 based on the capacitance change between it and the surface to be measured. Ru. This charge is
The integrator circuit 12 converts it into a voltage. The output waveform of the integrating circuit 12 is shown in FIG. Next, the output of the integrating circuit 12 is amplified by the amplifier 13, and the output of the integrating circuit 12 is amplified by the wave separator 14.
I'll be back on the 15th. The half-wave components 11fll and 1/1.15 are connected to the integrator circuit 12 shown in FIG. 4 depending on the phase, respectively.
The output of 9 is inputted to give the first and second phase outputs.

この実施例では、半波分M器14,15は、位相の正負
により積分回路12によりちえられろ出力を分離してい
る。一方の半波分離器14の出力を第5図に、他方の半
波分1器15の出力を第6図に示す。なお、積分回路1
2の出力の弁部に際しては、必ずしも位相の正(1によ
り分離せずともよく、任意の基準電圧を5えて、該基準
電圧にIJづき分離してもよい。
In this embodiment, the half-wave M dividers 14 and 15 separate the outputs, which are changed by the integrating circuit 12 depending on the positive and negative phases. The output of one half-wave separator 14 is shown in FIG. 5, and the output of the other half-wave divider 15 is shown in FIG. In addition, integrating circuit 1
In the case of a valve section with an output of 2, it is not necessary to separate by positive phase (1), but it is also possible to add an arbitrary reference voltage by 5 and separate by IJ to the reference voltage.

半波分離器14の出力、すなわら第)位相出力は、平滑
増幅回路16で平滑化され、かつ増幅され、掛は算回路
18に補正前の検出信月を勺える。
The output of the half-wave separator 14, i.e., the first phase output, is smoothed and amplified by the smoothing amplifier circuit 16, and the output signal before correction is sent to the arithmetic circuit 18.

同時に、゛V−滑増幅回路1Gの出力は、Tを演算する
ためにυ1回路1つにも与えられる。
At the same time, the output of the V-slip amplifier circuit 1G is also given to one υ1 circuit in order to calculate T.

他方の半波分離11Ts15の出力、すなわら第2位相
出力はvj算回路19に与えられ、第1位相出力と第2
位相出力との比が割は回路1つで演算される。この求め
られた比γが、掛は粋回路18に与えられ、第1位相出
力と1卦は合わされる。ところで、この各平滑増幅回路
16.17の出力(よ、第7図に示すとおりである。
The output of the other half-wave separator 11Ts15, that is, the second phase output, is given to the vj calculation circuit 19, which separates the first phase output and the second phase output.
The ratio to the phase output is calculated using only one circuit. This obtained ratio γ is given to the multiplication circuit 18, and the first phase output and one trigram are combined. By the way, the outputs of each smoothing amplifier circuit 16 and 17 are as shown in FIG.

そして、上述した式(4)および(5)から明らかなよ
うに、第7図に示した第2位相出力Vカフ、および第1
位相出力V mlγは、被測定゛電位V1.xが変化し
た場合であっても、第23図に示す関係を表わす。よっ
て、V、x が変化しても、γ−V、。メ/Vvai%
 はほぼ一定となる。したがって、位相出力ki−にT
を掛は合わせれば、被測定表面と振動電極との間の距離
に影響されず、かつ被測定表面の電位に応じた出力を得
ることが可能となる。また、同時に振動電極の振幅の変
動に影響されにくい検出出力を得ることができる。
As is clear from equations (4) and (5) above, the second phase output V cuff shown in FIG.
The phase output Vmlγ is the potential to be measured V1. Even when x changes, the relationship shown in FIG. 23 is expressed. Therefore, even if V,x changes, γ-V,. Me/Vvai%
remains almost constant. Therefore, the phase output ki- has T
By combining these values, it becomes possible to obtain an output that is not affected by the distance between the surface to be measured and the vibrating electrode and that corresponds to the potential of the surface to be measured. Moreover, at the same time, it is possible to obtain a detection output that is not easily affected by fluctuations in the amplitude of the vibrating electrode.

[発明の効果〕 この発明では、検出手段の出力を位相に応じて第1位相
出力および第2位相出力に分離する分離手段と、この分
離手段から与えられる各位相出力の比をとり、類比に基
づき、第1または第2の位相出力を補正する補正手段と
を有するので、振動電極の取付精度、すなわち被測定表
面と振動電極との間の設定距離が変動したとしても、該
設定距離の変動に影響されずに正確に被測定表面の表面
電位を検出することができる。のみならず、前述した式
(4)および(5)から明らかなように、振動電極の振
幅変動に基づく影響も大幅に低減し得る。
[Effects of the Invention] In this invention, the ratio of the separation means for separating the output of the detection means into a first phase output and a second phase output according to the phase and each phase output given from this separation means is calculated, and the ratio is calculated by analogy. Accordingly, even if the mounting accuracy of the vibrating electrode, that is, the set distance between the surface to be measured and the vibrating electrode changes, there is no change in the set distance. It is possible to accurately detect the surface potential of the surface to be measured without being affected by the Furthermore, as is clear from equations (4) and (5) above, the influence due to amplitude fluctuations of the vibrating electrode can also be significantly reduced.

よって、この発明の表面電位検出装置では、振動電極の
取付けおよび位置調整に煩雑な作業を要せず、かつ出力
安定性に浸れた表面電位検出装置を実現することができ
る。
Therefore, in the surface potential detection device of the present invention, it is possible to realize a surface potential detection device that does not require complicated work for attaching and adjusting the position of the vibrating electrode, and is characterized by stable output.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明の一実施例の概略ブロック図である
。第2図は、振動電極と被測定表面との関係を示す側面
図である。第3図は、積分回路の一例を示す回路図であ
る。第4図は、積分回路の出力波形を示す図であり、第
5図は一方の半波分離器の出力波形を示す図であり、第
6図は他方の半波分離器の出力波形を示す図である。第
7図は。 双方の平滑増幅回路の出力波形を示す図である。 第8図は、第1位相出力および第2位相出力と、被測定
表面の電位との関係を示す図である。 図において、1は被測定表面、2は振動電極、12は検
出手段を構成する積分回路、14.15は分離手段を構
成する半波分離器、19は補正手段を構成する割算回路
、18は補正手段を構成する掛は算回路を示す。 @4圀
FIG. 1 is a schematic block diagram of one embodiment of the present invention. FIG. 2 is a side view showing the relationship between the vibrating electrode and the surface to be measured. FIG. 3 is a circuit diagram showing an example of an integrating circuit. FIG. 4 is a diagram showing the output waveform of the integrating circuit, FIG. 5 is a diagram showing the output waveform of one half-wave separator, and FIG. 6 is a diagram showing the output waveform of the other half-wave separator. It is a diagram. Figure 7 is. It is a figure which shows the output waveform of both smoothing amplifier circuits. FIG. 8 is a diagram showing the relationship between the first phase output, the second phase output, and the potential of the surface to be measured. In the figure, 1 is the surface to be measured, 2 is a vibrating electrode, 12 is an integrating circuit constituting the detection means, 14.15 is a half-wave separator constituting the separating means, 19 is a dividing circuit constituting the correcting means, 18 The symbol composing the correction means indicates an arithmetic circuit. @4koku

Claims (2)

【特許請求の範囲】[Claims] (1)被測定表面との間の容量変化に基づいて電荷が誘
起される振動電極と、 振動電極上に誘起された電荷を電圧変化として取出す検
出手段と、 前記検出手段の出力を位相に応じて第1および第2の位
相出力に分離する分離手段と、 前記分離手段から与えられる第1および第2の位相出力
の比をとり、該比に基づき前記第1または第2の位相出
力を補正する補正手段とを備える、表面電位検出装置。
(1) A vibrating electrode in which an electric charge is induced based on a capacitance change between the vibrating electrode and the surface to be measured, a detection means for extracting the electric charge induced on the vibrating electrode as a voltage change, and an output of the detection means according to the phase. a separating means for separating into first and second phase outputs; and calculating a ratio of the first and second phase outputs given from the separating means, and correcting the first or second phase output based on the ratio. A surface potential detection device comprising: a correction means for detecting a surface potential;
(2)前記補正手段は、第1および第2の位相出力の比
を演算する割算回路と、該割算回路により与えられる前
記比に基づく補正出力を、前記第1または第2の位相出
力に掛け合わせる掛け算回路とを含む、特許請求の範囲
第1項記載の表面電位検出装置。
(2) The correction means includes a division circuit that calculates the ratio of the first and second phase outputs, and a correction output based on the ratio given by the division circuit, to the first or second phase output. 2. The surface potential detection device according to claim 1, further comprising a multiplication circuit for multiplying .
JP25024885A 1985-11-07 1985-11-07 Apparatus for detecting surface potential Granted JPS62110167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25024885A JPS62110167A (en) 1985-11-07 1985-11-07 Apparatus for detecting surface potential

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25024885A JPS62110167A (en) 1985-11-07 1985-11-07 Apparatus for detecting surface potential

Publications (2)

Publication Number Publication Date
JPS62110167A true JPS62110167A (en) 1987-05-21
JPH0445108B2 JPH0445108B2 (en) 1992-07-23

Family

ID=17205049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25024885A Granted JPS62110167A (en) 1985-11-07 1985-11-07 Apparatus for detecting surface potential

Country Status (1)

Country Link
JP (1) JPS62110167A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5600251A (en) * 1994-03-07 1997-02-04 Nec Corporation Surface electric potential sensor drive and induction noise cancellation circuit
JP2007078674A (en) * 2005-08-16 2007-03-29 Canon Inc Electric potential measuring device, capacitance measuring device, electric potential measuring method, and capacitance measuring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5600251A (en) * 1994-03-07 1997-02-04 Nec Corporation Surface electric potential sensor drive and induction noise cancellation circuit
JP2007078674A (en) * 2005-08-16 2007-03-29 Canon Inc Electric potential measuring device, capacitance measuring device, electric potential measuring method, and capacitance measuring method

Also Published As

Publication number Publication date
JPH0445108B2 (en) 1992-07-23

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