JP4934830B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
- Publication number
- JP4934830B2 JP4934830B2 JP2007290934A JP2007290934A JP4934830B2 JP 4934830 B2 JP4934830 B2 JP 4934830B2 JP 2007290934 A JP2007290934 A JP 2007290934A JP 2007290934 A JP2007290934 A JP 2007290934A JP 4934830 B2 JP4934830 B2 JP 4934830B2
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- Japan
- Prior art keywords
- plasma
- substrate
- magnetic field
- crucible
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims description 101
- 239000010408 film Substances 0.000 description 52
- 230000015572 biosynthetic process Effects 0.000 description 16
- 238000007733 ion plating Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Description
Claims (4)
- 所定の軸に沿って順に配置された、陰極、中間電極および陽極と、前記中間電極と陽極との間の空間に基板を保持するための基板保持部と、前記中間電極から前記所定の軸に沿って引き出されたプラズマを扁平に広げる磁界を印加する第1の磁界発生部とを有し、
前記基板保持部は、基板を保持する面が、前記所定の軸に対して凹型のドーム状であり、
前記基板保持部の外側には、前記扁平なプラズマを前記基板保持部に向かって凸型に変形させる磁界を発する第2の磁界発生部が配置されていることを特徴とするプラズマ処理装置。 - 請求項1に記載のプラズマ処理装置において、前記第2の磁界発生部は、ソレノイドコイルまたは円環状の磁石であり、中心軸が、前記基板保持部の中心軸と一致するように配置されていることを特徴とするプラズマ処理装置。
- 請求項2に記載のプラズマ処理装置において、前記基板保持部に対向する位置に配置された坩堝をさらに有し、前記坩堝の開口径は、前記基板保持部の径よりも小さいことを特徴とするプラズマ処理装置。
- 請求項3に記載のプラズマ処理装置において、前記基板保持部と坩堝は、これらの中点を中心とする仮想球面上に配置され、前記基板保持部の基板を保持する面は、前記仮想球面に沿った球面形状であることを特徴とするプラズマ処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007290934A JP4934830B2 (ja) | 2007-11-08 | 2007-11-08 | プラズマ処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007290934A JP4934830B2 (ja) | 2007-11-08 | 2007-11-08 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009114525A JP2009114525A (ja) | 2009-05-28 |
JP4934830B2 true JP4934830B2 (ja) | 2012-05-23 |
Family
ID=40781983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007290934A Expired - Fee Related JP4934830B2 (ja) | 2007-11-08 | 2007-11-08 | プラズマ処理装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4934830B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0293064A (ja) * | 1988-09-30 | 1990-04-03 | Raimuzu:Kk | イオンプレーティング装置 |
JPH03291377A (ja) * | 1990-04-10 | 1991-12-20 | Kawasaki Steel Corp | 耐摩耗性の極めて優れる被膜を有する鋼板の製造方法 |
JPH0641754A (ja) * | 1992-07-28 | 1994-02-15 | Chugai Ro Co Ltd | シートプラズマ成膜装置 |
JP2005154804A (ja) * | 2003-11-21 | 2005-06-16 | Olympus Corp | 光学薄膜成膜装置及び光学薄膜成膜方法 |
JP4906331B2 (ja) * | 2005-12-06 | 2012-03-28 | 新明和工業株式会社 | シートプラズマ成膜装置 |
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2007
- 2007-11-08 JP JP2007290934A patent/JP4934830B2/ja not_active Expired - Fee Related
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JP2009114525A (ja) | 2009-05-28 |
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