JP4927642B2 - 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ - Google Patents

二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ Download PDF

Info

Publication number
JP4927642B2
JP4927642B2 JP2007139920A JP2007139920A JP4927642B2 JP 4927642 B2 JP4927642 B2 JP 4927642B2 JP 2007139920 A JP2007139920 A JP 2007139920A JP 2007139920 A JP2007139920 A JP 2007139920A JP 4927642 B2 JP4927642 B2 JP 4927642B2
Authority
JP
Japan
Prior art keywords
temperature
cooling stage
stage
refrigerator
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007139920A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008292103A (ja
JP2008292103A5 (enExample
Inventor
一俊 青木
隆弘 岡田
久純 駒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP2007139920A priority Critical patent/JP4927642B2/ja
Publication of JP2008292103A publication Critical patent/JP2008292103A/ja
Publication of JP2008292103A5 publication Critical patent/JP2008292103A5/ja
Application granted granted Critical
Publication of JP4927642B2 publication Critical patent/JP4927642B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2007139920A 2007-05-28 2007-05-28 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ Active JP4927642B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007139920A JP4927642B2 (ja) 2007-05-28 2007-05-28 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007139920A JP4927642B2 (ja) 2007-05-28 2007-05-28 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ

Publications (3)

Publication Number Publication Date
JP2008292103A JP2008292103A (ja) 2008-12-04
JP2008292103A5 JP2008292103A5 (enExample) 2009-11-05
JP4927642B2 true JP4927642B2 (ja) 2012-05-09

Family

ID=40167010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007139920A Active JP4927642B2 (ja) 2007-05-28 2007-05-28 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ

Country Status (1)

Country Link
JP (1) JP4927642B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10001117B2 (en) 2015-03-04 2018-06-19 Sumitomo Heavy Industries, Ltd. Cryopump system, cryopump controller, and method for regenerating the cryopump
WO2024054066A1 (ko) * 2022-09-08 2024-03-14 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010097888A1 (ja) * 2009-02-24 2010-09-02 キヤノンアネルバテクニクス株式会社 二段式冷凍機の運転制御方法、二段式冷凍機を有するクライオポンプの運転制御方法、二段式冷凍機、クライオポンプ及び真空基板処理装置
JP4912438B2 (ja) * 2009-07-16 2012-04-11 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
CN103353184B (zh) * 2013-07-29 2015-02-04 中国科学院理化技术研究所 一种直线型双作用制冷系统
US10060655B2 (en) 2014-08-11 2018-08-28 Raytheon Company Temperature control of multi-stage cryocooler with load shifting capabilities
JP2025153410A (ja) 2024-03-29 2025-10-10 アルバック・クライオ株式会社 クライオシステム、および、真空処理方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0338113B1 (de) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas
JPH0893643A (ja) * 1994-09-27 1996-04-09 Ebara Corp クライオポンプ
JPH08232839A (ja) * 1995-02-27 1996-09-10 Daikin Ind Ltd 極低温冷凍機
JP2000018158A (ja) * 1998-06-30 2000-01-18 Daikin Ind Ltd クライオポンプおよびクライオポンプによるキセノンガスの凝縮方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10001117B2 (en) 2015-03-04 2018-06-19 Sumitomo Heavy Industries, Ltd. Cryopump system, cryopump controller, and method for regenerating the cryopump
WO2024054066A1 (ko) * 2022-09-08 2024-03-14 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법

Also Published As

Publication number Publication date
JP2008292103A (ja) 2008-12-04

Similar Documents

Publication Publication Date Title
JP4927642B2 (ja) 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ
CN101981389B (zh) 制冷装置
KR100997284B1 (ko) 공기 조화기 및 그 제어방법
EP2325580B1 (en) Refrigeration device
CN102165192B (zh) 真空排气系统、冷冻机、低温泵及其运转方法、以及基板处理装置
US20130025304A1 (en) Loading and unloading of compressors in a cooling system
KR101721171B1 (ko) 크라이오펌프, 크라이오펌프의 제어 방법, 및 냉동기
JP7200364B2 (ja) 車両温度管理システム
WO2009119023A1 (ja) 冷凍装置
KR101763249B1 (ko) 콜드트랩 및 콜드트랩의 제어방법
KR102190259B1 (ko) 항온항습장치 및 이를 이용한 항온항습장치 제어 방법
CN106931545A (zh) 一种热泵喷焓系统及其控制方法、空调器
JP5113776B2 (ja) 冷凍装置
JP3086813B2 (ja) 空気調和装置における電子膨脹弁の制御方法
US11428216B2 (en) Cryopump and method for controlling cryopump
WO2010097888A1 (ja) 二段式冷凍機の運転制御方法、二段式冷凍機を有するクライオポンプの運転制御方法、二段式冷凍機、クライオポンプ及び真空基板処理装置
JP2006017377A (ja) ヒートポンプ給湯機
JP5516332B2 (ja) ヒートポンプ式温水暖房機
JP2007101093A (ja) 空調装置およびその運転制御方法
JP2005055053A (ja) 空気調和装置
JP2011196610A (ja) 冷凍サイクル装置
JP2007278656A (ja) ヒートポンプ給湯装置
JP2005331203A (ja) 空気調和機
TWI846332B (zh) 低溫泵及低溫泵的運轉方法
JP5978045B2 (ja) 減圧システム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090909

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090924

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110623

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110705

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110905

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120117

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120209

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150217

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4927642

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250