JP4918427B2 - 共振センサの測定位置検出方法及び装置 - Google Patents
共振センサの測定位置検出方法及び装置 Download PDFInfo
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- JP4918427B2 JP4918427B2 JP2007201162A JP2007201162A JP4918427B2 JP 4918427 B2 JP4918427 B2 JP 4918427B2 JP 2007201162 A JP2007201162 A JP 2007201162A JP 2007201162 A JP2007201162 A JP 2007201162A JP 4918427 B2 JP4918427 B2 JP 4918427B2
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- measurement
- output signal
- characteristic curve
- probe
- resonance
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- 238000005259 measurement Methods 0.000 title claims description 59
- 238000000034 method Methods 0.000 title claims description 7
- 238000001514 detection method Methods 0.000 claims description 19
- 239000000523 sample Substances 0.000 claims description 19
- 241001422033 Thestylus Species 0.000 description 12
- 230000005284 excitation Effects 0.000 description 5
- 230000003993 interaction Effects 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
- G01Q30/06—Display or data processing devices for error compensation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
20…共振センサ
22…測定子(スタイラス)
22A…測定子先端
24…加振用圧電素子
26…検出用圧電素子
28…加振回路
30…検出回路
Claims (2)
- 加振手段により測定子を長手方向に共振振動させ、検出手段により測定子の共振に応じた出力信号を得て、該出力信号の変化を捉えることで、測定対象に対する測定子先端の倣い接触を検知するようにした倣い測定による共振センサの測定位置検出方法において、
測定子と測定対象間の距離と、出力信号の変化状態の関係を表わす特性曲線を得て、
該特性曲線から、接触開始位置に相当する出力信号の変化開始位置を推定して、測定位置とする際に、予め得ておいた非接触領域のデータと、倣い測定時に得た接触領域のデータを用いることを特徴とする共振センサの測定位置検出方法。 - 加振手段により測定子を長手方向に共振振動させ、検出手段により測定子の共振に応じた出力信号を得て、該出力信号の変化を捉えることで、測定対象に対する測定子先端の倣い接触を検知するようにした倣い測定による共振センサの測定位置検出装置において、
測定子と測定対象間の距離と、出力信号の変化状態の関係を表わす特性曲線を得る手段と、
該特性曲線から、予め得ておいた非接触領域のデータと、倣い測定時に得た接触領域のデータを用いることにより、接触開始位置に相当する出力信号の変化開始位置を推定して、測定位置とする手段と、
を備えたことを特徴とする共振センサの測定位置検出装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007201162A JP4918427B2 (ja) | 2007-08-01 | 2007-08-01 | 共振センサの測定位置検出方法及び装置 |
EP08161262.4A EP2031369B1 (en) | 2007-08-01 | 2008-07-28 | Method and apparatus for detecting measurement position of resonance sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007201162A JP4918427B2 (ja) | 2007-08-01 | 2007-08-01 | 共振センサの測定位置検出方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009036632A JP2009036632A (ja) | 2009-02-19 |
JP4918427B2 true JP4918427B2 (ja) | 2012-04-18 |
Family
ID=40158217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007201162A Active JP4918427B2 (ja) | 2007-08-01 | 2007-08-01 | 共振センサの測定位置検出方法及び装置 |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2031369B1 (ja) |
JP (1) | JP4918427B2 (ja) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819501A (ja) * | 1981-07-28 | 1983-02-04 | Mitsutoyo Mfg Co Ltd | タッチ信号検出方法および装置 |
DE4204602A1 (de) * | 1992-02-15 | 1993-08-19 | Zeiss Carl Fa | Verfahren zur koordinatenmessung an werkstuecken |
JPH07167638A (ja) * | 1993-12-15 | 1995-07-04 | Nikon Corp | タッチプローブ |
JP2889196B2 (ja) * | 1996-10-08 | 1999-05-10 | 株式会社ミツトヨ | センサ信号の直流レベル変化検知回路 |
JP3754821B2 (ja) * | 1998-07-09 | 2006-03-15 | 日本電子株式会社 | カンチレバー振幅測定方法および非接触原子間力顕微鏡 |
US6810597B2 (en) * | 1999-04-08 | 2004-11-02 | Renishaw Plc | Use of surface measuring probes |
JP3536013B2 (ja) * | 1999-07-23 | 2004-06-07 | 株式会社ミツトヨ | 表面形状測定方法 |
JP3819250B2 (ja) | 2000-05-15 | 2006-09-06 | 株式会社ミツトヨ | 加振型接触検出センサ |
JP3818928B2 (ja) * | 2002-02-14 | 2006-09-06 | 株式会社ミツトヨ | 表面形状測定方法および表面形状測定装置 |
JP4009152B2 (ja) * | 2002-07-09 | 2007-11-14 | 株式会社ミツトヨ | 表面形状測定装置および表面形状測定方法 |
JP4876216B2 (ja) * | 2005-01-06 | 2012-02-15 | 国立大学法人北海道大学 | 表面位置計測方法および表面位置計測装置 |
JP4909548B2 (ja) * | 2005-09-01 | 2012-04-04 | 株式会社ミツトヨ | 表面形状測定装置 |
JP4909562B2 (ja) * | 2005-10-21 | 2012-04-04 | 株式会社ミツトヨ | 表面性状測定装置 |
-
2007
- 2007-08-01 JP JP2007201162A patent/JP4918427B2/ja active Active
-
2008
- 2008-07-28 EP EP08161262.4A patent/EP2031369B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2031369A2 (en) | 2009-03-04 |
EP2031369A3 (en) | 2010-02-24 |
EP2031369B1 (en) | 2018-08-29 |
JP2009036632A (ja) | 2009-02-19 |
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