JP4895634B2 - 基板処理装置 - Google Patents

基板処理装置 Download PDF

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Publication number
JP4895634B2
JP4895634B2 JP2006041424A JP2006041424A JP4895634B2 JP 4895634 B2 JP4895634 B2 JP 4895634B2 JP 2006041424 A JP2006041424 A JP 2006041424A JP 2006041424 A JP2006041424 A JP 2006041424A JP 4895634 B2 JP4895634 B2 JP 4895634B2
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Prior art keywords
gas
holding
wafer
cassette
boat
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Active
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JP2006041424A
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English (en)
Japanese (ja)
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JP2007221000A5 (enrdf_load_stackoverflow
JP2007221000A (ja
Inventor
信人 嶋
英樹 堀田
崇 中川
忠司 紺谷
謙和 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP2006041424A priority Critical patent/JP4895634B2/ja
Publication of JP2007221000A publication Critical patent/JP2007221000A/ja
Publication of JP2007221000A5 publication Critical patent/JP2007221000A5/ja
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Publication of JP4895634B2 publication Critical patent/JP4895634B2/ja
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JP2006041424A 2006-02-17 2006-02-17 基板処理装置 Active JP4895634B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006041424A JP4895634B2 (ja) 2006-02-17 2006-02-17 基板処理装置

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Application Number Priority Date Filing Date Title
JP2006041424A JP4895634B2 (ja) 2006-02-17 2006-02-17 基板処理装置

Publications (3)

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JP2007221000A JP2007221000A (ja) 2007-08-30
JP2007221000A5 JP2007221000A5 (enrdf_load_stackoverflow) 2009-03-19
JP4895634B2 true JP4895634B2 (ja) 2012-03-14

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JP2006041424A Active JP4895634B2 (ja) 2006-02-17 2006-02-17 基板処理装置

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JP (1) JP4895634B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5545055B2 (ja) * 2010-06-15 2014-07-09 東京エレクトロン株式会社 支持体構造及び処理装置
JP6458547B2 (ja) * 2015-02-24 2019-01-30 株式会社デンソー シャワーヘッド、シャワーヘッドシステム、及び成膜装置
CN108695138A (zh) * 2017-03-29 2018-10-23 株式会社日立国际电气 衬底支承件、衬底处理装置及半导体器件的制造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102524A (ja) * 1988-10-11 1990-04-16 Nec Corp ウェハーボート
JP3023977B2 (ja) * 1990-11-01 2000-03-21 東京エレクトロン株式会社 縦型熱処理装置
JPH0737814A (ja) * 1993-07-23 1995-02-07 Sony Corp 薄膜形成装置

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JP2007221000A (ja) 2007-08-30

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