JP4893727B2 - Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method - Google Patents

Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method Download PDF

Info

Publication number
JP4893727B2
JP4893727B2 JP2008283836A JP2008283836A JP4893727B2 JP 4893727 B2 JP4893727 B2 JP 4893727B2 JP 2008283836 A JP2008283836 A JP 2008283836A JP 2008283836 A JP2008283836 A JP 2008283836A JP 4893727 B2 JP4893727 B2 JP 4893727B2
Authority
JP
Japan
Prior art keywords
substrate
door member
sensor component
conveyor
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008283836A
Other languages
Japanese (ja)
Other versions
JP2010114169A (en
Inventor
正幸 萬谷
成孝 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008283836A priority Critical patent/JP4893727B2/en
Publication of JP2010114169A publication Critical patent/JP2010114169A/en
Application granted granted Critical
Publication of JP4893727B2 publication Critical patent/JP4893727B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

本発明は、電子部品実装用装置に備えられて基板の搬送を行う基板搬送装置、電子部品実装用装置及び電子部品実装用装置の作業方法に関するものである。   The present invention relates to a substrate carrying device that is provided in an electronic component mounting device and carries a substrate, an electronic component mounting device, and an operation method for the electronic component mounting device.

スクリーン印刷機や電子部品実装装置等の電子部品実装用装置に備えられる基板搬送装置は、本体カバーによって覆われた基台上に設置された一又は複数の搬送コンベアから成る基板搬送路を有し、本体カバーに形成された開口部から外部に突出した搬送コンベアの端部は本体カバーの外部に設けられた搬送コンベアカバーによって覆われている(特許文献1)。搬送コンベアカバーには、外部から搬送コンベアに基板が投入されるとき、若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口のほか、搬送コンベアに外部からアクセスするためのアクセス用開口が設けられる。アクセス用開口は搬送コンベアカバーに設けられた扉部材によって開閉自在に覆われ、オペレータは扉部材を開いて搬送コンベアや基板の点検等を行うことができる。   A substrate transfer device provided in an electronic component mounting apparatus such as a screen printer or an electronic component mounting apparatus has a substrate transfer path including one or more transfer conveyors installed on a base covered with a main body cover. The end of the conveyor that protrudes outside from the opening formed in the body cover is covered with a conveyor conveyor provided outside the body cover (Patent Document 1). The transport conveyor cover is used to access the transport conveyor from the outside in addition to the substrate passage opening that serves as a path for the substrate when the substrate is loaded into the transport conveyor from the outside or when the substrate is discharged from the transport conveyor to the outside. Access openings are provided. The access opening is covered with a door member provided on the transport conveyor cover so that the access opening can be opened and closed, and the operator can open the door member to check the transport conveyor and the substrate.

このような基板搬送装置には、基板通路開口から異物が侵入したり、作業装置の作動中にオペレータが誤って基板通路開口から手を差し入れたりしたときにこれを検知する異物侵入検出センサが設けられており、異物侵入検出センサにより異物等が検出されたとき、搬送コンベアの作動が停止されてオペレータの安全が図られるようになっている。異物侵入検出センサには光センサが用いられ、光センサは、搬送コンベアの幅方向に対向して設けられた2つのセンサ部品(例えば、投光器と受光器或いは投受光器と反射器)の間で検査光の授受を行い、検査光の受光状態の変化に基づいて、基板通路開口からの異物の侵入を検出する。   Such a substrate transfer device is provided with a foreign matter intrusion detection sensor that detects when foreign matter enters from the substrate passage opening or when an operator mistakenly inserts a hand from the substrate passage opening during operation of the working device. Thus, when a foreign object or the like is detected by the foreign object intrusion detection sensor, the operation of the transfer conveyor is stopped to ensure the safety of the operator. An optical sensor is used as the foreign matter intrusion detection sensor, and the optical sensor is disposed between two sensor components (for example, a projector and a light receiver or a light projector and a light receiver and a reflector) provided facing each other in the width direction of the conveyor. Inspection light is transmitted and received, and intrusion of foreign matter from the substrate passage opening is detected based on a change in the light reception state of the inspection light.

また、搬送コンベアカバーには扉部材の開閉状態を検出できる扉部材開閉検出センサが設けられており、搬送コンベアの作動開始時あるいは作動中に扉部材が開かれていないかどうかが検知されるようになっている。扉部材開閉検出センサにはリミットスイッチが用いられることが多い。
特開2001−345594号公報
In addition, the conveyance conveyor cover is provided with a door member opening / closing detection sensor that can detect the open / closed state of the door member, so that it is detected whether the door member is not opened at the start or during operation of the conveyance conveyor. It has become. Limit switches are often used for door member open / close detection sensors.
JP 2001-345594 A

しかしながら、上記センサは高価であってコストがかかるうえ、両センサについて独立した信号処理を行わなければならないため信号処理構成が複雑になるという問題点があった。   However, the above-described sensor is expensive and expensive, and there is a problem in that the signal processing configuration becomes complicated because independent signal processing must be performed for both sensors.

そこで本発明では、安価かつ簡単な構成で搬送コンベアカバーの基板通路開口からの異物の侵入と、アクセス用開口を覆う扉部材の開閉状態の検出を行うことができる基板搬送装置、電子部品実装用装置及び電子部品実装用装置の作業方法を提供することを目的とする。   Therefore, in the present invention, a substrate transport apparatus and electronic component mounting capable of detecting the intrusion of foreign matter from the substrate passage opening of the transport conveyor cover and the open / closed state of the door member covering the access opening with an inexpensive and simple configuration. It is an object of the present invention to provide a working method for an apparatus and an electronic component mounting apparatus.

請求項1に記載の基板搬送装置は、基板の搬送を行う搬送コンベアと、搬送コンベアの端部を覆い、外部から搬送コンベアに基板が投入されるとき若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口及び搬送コンベアに外部からアクセスするためのアクセス用開口が設けられた搬送コンベアカバーと、搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材と、扉部材に対して固定して設
けられた第1センサ部品及び搬送コンベアカバーに対して固定して設けられた第2センサ部品から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光の授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光の授受が不能となる光センサと、光センサを構成する第1センサ部品及び第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行う検知手段とを備えた。
The substrate transfer apparatus according to claim 1 covers a transfer conveyor for transferring a substrate and an end of the transfer conveyor, and the substrate is discharged from the transfer conveyor to the outside when the substrate is input to the transfer conveyor from the outside. A substrate conveyor opening serving as a substrate passage and a conveyance conveyor cover provided with an access opening for accessing the conveyance conveyor from the outside, and a door member provided on the conveyance conveyor cover so as to open and close the access opening. The first sensor component is fixed to the door member and the second sensor component is fixed to the transport conveyor cover. When the door member is closed, the first sensor component and the first sensor component are Inspection light can be exchanged between two sensor parts, and inspection light cannot be exchanged between the first sensor part and the second sensor part when the door member is opened. The open / close state of the door member is detected depending on whether or not inspection light can be exchanged between the optical sensor and the first sensor component and the second sensor component constituting the optical sensor, and the door member is closed. Foreign matter has entered the space covered by the transfer conveyor cover from the substrate passage opening based on the change in the state of the inspection light exchange between the first sensor component and the second sensor component. And detecting means for detecting this.

請求項2に記載の基板搬送装置は、請求項1に記載の基板搬送装置であって、扉部材が閉じられているとき、第1センサ部品と第2センサ部品は、搬送コンベアにより搬送される基板の上方領域で検査光の授受を行う。   The substrate transfer device according to claim 2 is the substrate transfer device according to claim 1, wherein when the door member is closed, the first sensor component and the second sensor component are transferred by a transfer conveyor. Inspection light is exchanged in the upper region of the substrate.

請求項3に記載の電子部品実装用装置は、基板の搬送を行う搬送コンベアと、搬送コンベアの端部を覆い、外部から搬送コンベアに基板が投入されるとき若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口及び搬送コンベアに外部からアクセスするためのアクセス用開口が設けられた搬送コンベアカバーと、搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材と、扉部材に対して固定して設けられた第1センサ部品及び搬送コンベアカバーに対して固定して設けられた第2センサ部品から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光の授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光の授受が不能となる光センサと、光センサを構成する第1センサ部品及び第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行う検知手段と、搬送コンベアにより基板を搬送して位置決めし、その位置決めした基板に電子部品実装用の作業を施す作業装置と、を備えた。   The electronic component mounting apparatus according to claim 3 covers the transport conveyor for transporting the substrate and the end of the transport conveyor, and the substrate is discharged from the transport conveyor to the outside when the substrate is loaded into the transport conveyor from the outside. A substrate passage opening serving as a passage for the substrate and a transfer conveyor cover provided with an access opening for accessing the transfer conveyor from the outside, and a door provided on the transfer conveyor cover so as to freely open and close the access opening A first sensor component that is fixed to the door member and a second sensor component that is fixed to the transport conveyor cover, and the first sensor component when the door member is closed The inspection light can be exchanged between the first sensor component and the second sensor component. When the door member is opened, the inspection light is exchanged between the first sensor component and the second sensor component. The door member detects the open / closed state of the door member based on whether or not inspection light can be exchanged between the first sensor component and the second sensor component constituting the optical sensor. When the closed state is detected, foreign matter is introduced into the space covered by the transport conveyor cover from the substrate passage opening based on the change in the state of the inspection light exchange between the first sensor component and the second sensor component. A detection means for detecting the intrusion and a working device that transports and positions the substrate by a transport conveyor and performs an electronic component mounting operation on the positioned substrate.

請求項4に記載の電子部品実装用装置は、請求項3に記載の電子部品実装用装置であって、扉部材が閉じられているとき、第1センサ部品と第2センサ部品は、搬送コンベアにより搬送される基板の上方領域で検査光の授受を行う。   The electronic component mounting apparatus according to claim 4 is the electronic component mounting apparatus according to claim 3, wherein when the door member is closed, the first sensor component and the second sensor component are transport conveyors. Inspection light is exchanged in the upper region of the substrate conveyed by the above.

請求項5に記載の電子部品実装用装置の作業方法は、基板の搬送を行う搬送コンベアと、搬送コンベアの端部を覆い、外部から搬送コンベアに基板が投入されるとき若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口及び搬送コンベアに外部からアクセスするためのアクセス用開口が設けられた搬送コンベアカバーと、搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材と、扉部材に対して固定して設けられた第1センサ部品及び搬送コンベアカバーに対して固定して設けられた第2センサ部品から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光の授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光の授受が不能となる光センサと、搬送コンベアにより基板を搬送して位置決めし、その位置決めした基板に電子部品実装用の作業を施す作業装置とを備える電子部品実装用装置の作業方法であって、光センサを構成する第1センサ部品及び第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行う。   According to a fifth aspect of the present invention, there is provided a work method for the electronic component mounting apparatus, comprising: a transport conveyor that transports a substrate; and an end portion of the transport conveyor, and when the substrate is loaded into the transport conveyor from the outside or from the transport conveyor to the outside. A substrate passage opening that serves as a passage for the substrate when the substrate is discharged, a conveyance conveyor cover provided with an access opening for external access to the conveyance conveyor, and an access opening provided on the conveyance conveyor cover that can be opened and closed freely. A first sensor component fixed to the door member and a second sensor component fixed to the transport conveyor cover, and the door member is closed when the door member is closed. Inspection light can be exchanged between the first sensor component and the second sensor component. When the door member is opened, the first sensor component and the second sensor component are A method of operating an electronic component mounting apparatus, comprising: an optical sensor that cannot transmit and receive inspection light; and a work apparatus that transports and positions a substrate by a transport conveyor and performs an electronic component mounting operation on the positioned substrate. The opening / closing state of the door member is detected based on whether or not inspection light can be exchanged between the first sensor component and the second sensor component constituting the optical sensor, and the door member is closed. When detecting, detection of foreign matter intruding into the space covered by the transport conveyor cover from the substrate passage opening based on the change in the state of the inspection light exchange between the first sensor component and the second sensor component I do.

本発明では、光センサの第1センサ部品と第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態が検知され、扉部材が閉じられており、第1センサ部品と第2センサ部品の間で検査光の授受が可能であるときには、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、搬送コンベアカバーの基板通路開口からの異物の侵入を検出することができるようになっている。このように本発明では、異物の侵入を検出するための光センサで扉部材の開閉状態を検知することができるので、扉部材の開閉検出のための専用のセンサは不要となり、安価かつ簡単な構成で、搬送コンベアカバーの基板通路開口からの異物の侵入と、アクセス用開口を覆う扉部材の開閉状態の検出を行うことができる。   In the present invention, the open / close state of the door member is detected depending on whether or not inspection light can be exchanged between the first sensor component and the second sensor component of the optical sensor, and the door member is closed. When inspection light can be exchanged between the sensor component and the second sensor component, the substrate path of the transport conveyor cover is changed based on the change in the state of inspection light exchange between the first sensor component and the second sensor component. Intrusion of foreign matter from the opening can be detected. As described above, in the present invention, since the open / closed state of the door member can be detected by the optical sensor for detecting the intrusion of the foreign matter, a dedicated sensor for detecting the open / close of the door member becomes unnecessary, and it is inexpensive and simple. With the configuration, it is possible to detect the intrusion of foreign matter from the substrate passage opening of the transport conveyor cover and the open / closed state of the door member covering the access opening.

以下、図面を参照して本発明の実施の形態について説明する。図1は本発明の一実施の形態におけるスクリーン印刷機の斜視図、図2は本発明の一実施の形態におけるスクリーン印刷機の側面図、図3は本発明の一実施の形態におけるスクリーン印刷機の平面図、図4は本発明の一実施の形態におけるスクリーン印刷機を構成する印刷作業実行部の正面図、図5は本発明の一実施の形態におけるスクリーン印刷機の制御系統を示すブロック図、図6(a),(b)は本発明の一実施の形態におけるスクリーン印刷機を構成する印刷作業実行部の動作説明図、図7(a),(b)は本発明の一実施の形態におけるスクリーン印刷機の搬送コンベアカバーの斜視図、図8(a),(b)は本発明の一実施の形態におけるスクリーン印刷機の搬送コンベアカバーの断面正面図である。   Embodiments of the present invention will be described below with reference to the drawings. 1 is a perspective view of a screen printer according to an embodiment of the present invention, FIG. 2 is a side view of the screen printer according to an embodiment of the present invention, and FIG. 3 is a screen printer according to an embodiment of the present invention. FIG. 4 is a front view of a printing work execution unit constituting the screen printer in one embodiment of the present invention, and FIG. 5 is a block diagram showing a control system of the screen printer in one embodiment of the present invention. 6 (a) and 6 (b) are diagrams for explaining the operation of the printing work execution unit constituting the screen printing machine according to the embodiment of the present invention, and FIGS. 7 (a) and 7 (b) are diagrams for explaining an embodiment of the present invention. The perspective view of the conveyance conveyor cover of the screen printing machine in a form, and Fig.8 (a), (b) is a cross-sectional front view of the conveyance conveyor cover of the screen printing machine in one embodiment of this invention.

図1において、本実施の形態における基板搬送装置を備えた電子部品実装用装置の一例としてのスクリーン印刷機1は、外部から投入(矢印A1)された基板PBを内部に搬入して所定の作業位置に位置決めし、スクリーン印刷を行って外部に排出する(矢印A2)。以下の説明では、スクリーン印刷機1における基板PBの搬送方向をX軸方向とし、X軸方向と直交する水平面内方向をY軸方向とする。また、上下方向をZ軸方向とする。   In FIG. 1, a screen printing machine 1 as an example of an electronic component mounting apparatus provided with a board conveying apparatus according to the present embodiment carries a board PB loaded from the outside (arrow A1) into a predetermined work. Positioned at the position, screen printing is performed and the sheet is discharged to the outside (arrow A2). In the following description, the conveyance direction of the substrate PB in the screen printing machine 1 is the X-axis direction, and the horizontal plane direction orthogonal to the X-axis direction is the Y-axis direction. Also, the vertical direction is the Z-axis direction.

図2及び図3において、スクリーン印刷機1は、本体カバー2によって覆われた基台3と、基台3に設けられて基板PBをX軸方向に搬送する基板搬送路4と、基台3上に設けられ、基板PBに対するスクリーン印刷作業を実行する印刷作業実行部5を備えている。   2 and 3, the screen printing machine 1 includes a base 3 covered with a main body cover 2, a substrate transport path 4 that is provided on the base 3 and transports a substrate PB in the X-axis direction, and a base 3. A printing work execution unit 5 that is provided above and executes a screen printing work on the substrate PB is provided.

図2及び図3において基板搬送路4は、X軸方向に並んで設けられた搬入コンベア11、位置決めコンベア12及び搬出コンベア13から成り、それぞれ一対のベルトコンベアから成る。搬入コンベア11は本体カバー2に設けられた投入側開口部2aから外部(基板PBの搬送方向の上流側)に突出しており、搬出コンベア13は本体カバー2に設けられた排出側開口部2bから外部(基板PBの搬送方向の下流側)に突出している。   2 and 3, the substrate transport path 4 includes a carry-in conveyor 11, a positioning conveyor 12, and a carry-out conveyor 13 provided side by side in the X-axis direction, each of which includes a pair of belt conveyors. The carry-in conveyor 11 protrudes to the outside (upstream side in the conveyance direction of the substrate PB) from the input side opening 2 a provided in the main body cover 2, and the carry-out conveyor 13 from the discharge side opening 2 b provided in the main body cover 2. It protrudes to the outside (downstream side in the conveyance direction of the substrate PB).

搬入コンベア11はスクリーン印刷機1の外部から投入された基板PBをスクリーン印刷機1の内部に搬入して位置決めコンベア12に受け渡す。位置決めコンベア12は搬入コンベア11から受け取った基板PBを作業実行位置(図3に示す基板PBの位置)に位置決めし、基板PBに対するスクリーン印刷作業が終了した後、基板PB(スクリーン印刷が施された基板PB)を搬出コンベア13に受け渡す。搬出コンベア13は位置決めコンベア12から受け取った基板PBをスクリーン印刷機1の外部に搬出する。   The carry-in conveyor 11 carries the substrate PB input from the outside of the screen printing machine 1 into the screen printing machine 1 and delivers it to the positioning conveyor 12. The positioning conveyor 12 positions the substrate PB received from the carry-in conveyor 11 at the work execution position (the position of the substrate PB shown in FIG. 3), and after the screen printing operation for the substrate PB is completed, the substrate PB (screen printing is performed). The substrate PB) is transferred to the carry-out conveyor 13. The carry-out conveyor 13 carries the substrate PB received from the positioning conveyor 12 out of the screen printing machine 1.

図4において印刷作業実行部5は、基板搬送路4(位置決めコンベア12)によって位置決めされた基板PBをクランプしてその基板PBの水平面内(X軸及びY軸方向)方向への位置合わせと上下方向(Z軸方向)への位置合わせを行う基板位置合わせ部21、基板位置合わせ部21の上方に設けられたマスクプレート22及びスキージユニット23、XYロボット24(図3)によって基板位置合わせ部21とマスクプレート22の間の空間を水平面内方向に移動自在に設けられたカメラユニット25並びにマスクプレート22
にペーストを供給するシリンジユニット26を備えている。
In FIG. 4, the printing work execution unit 5 clamps the substrate PB positioned by the substrate transport path 4 (positioning conveyor 12), aligns the substrate PB in the horizontal plane (X-axis and Y-axis directions), and moves up and down. A substrate alignment unit 21 that performs alignment in the direction (Z-axis direction), a mask plate 22 and a squeegee unit 23 provided above the substrate alignment unit 21, and an XY robot 24 (FIG. 3). And the mask plate 22 and the camera unit 25 provided so as to be movable in the horizontal plane in the space between the mask plate 22 and the mask plate 22.
A syringe unit 26 for supplying the paste to is provided.

図4において、印刷作業実行部5の基板位置合わせ部21は、基台3に対してY軸方向に相対移動するYテーブル21a、Yテーブル21aに対してX軸方向に相対移動するXテーブル21b、Xテーブル21bに対してZ軸回りに(水平面内で)相対回転するθテーブル21c、θテーブル21cに固定されたベースプレート21d、ベースプレート21dに対して相対昇降する第1昇降プレート21e、第1昇降プレート21eに対して相対昇降する第2昇降プレート21f及び第2昇降プレート21fに固定された下受けユニット21g及び位置決めコンベア12の上方でY軸方向に開閉動作する一対の部材から成るクランパ21hから成る(図3も参照)。   In FIG. 4, the substrate alignment unit 21 of the printing work execution unit 5 includes a Y table 21a that moves relative to the base 3 in the Y axis direction, and an X table 21b that moves relative to the Y table 21a in the X axis direction. The θ table 21c that rotates relative to the X table 21b around the Z axis (within a horizontal plane), the base plate 21d fixed to the θ table 21c, the first elevating plate 21e that elevates relative to the base plate 21d, and the first elevating The second elevating plate 21f moves up and down relative to the plate 21e, the lower receiving unit 21g fixed to the second elevating plate 21f, and the clamper 21h including a pair of members that open and close in the Y-axis direction above the positioning conveyor 12. (See also FIG. 3).

図3及び図4において、マスクプレート22は平面視において矩形形状を有するマスク枠22aによって四辺が支持されており、マスク枠22aによって囲まれた内側領域には、印刷対象物である基板PBの上面に形成された電極D(図3)の形状や位置等に対応した多数の孔から成るマスクパターン(図示せず)が設けられている。   3 and 4, the mask plate 22 is supported at four sides by a mask frame 22a having a rectangular shape in plan view, and an inner region surrounded by the mask frame 22a has an upper surface of the substrate PB that is a printing object. A mask pattern (not shown) composed of a large number of holes corresponding to the shape, position, etc. of the electrode D (FIG. 3) formed on is provided.

図4において、スキージユニット23は基板位置合わせ部21に対してY軸方向に移動自在に設けられた移動プレート23pと、移動プレート23pに取り付けられて上下方向に延びた2つのスキージ昇降シリンダ(空圧シリンダ)23sと、各スキージ昇降シリンダ23sの下部に取り付けられてY軸方向に対向する2つのスキージ23aを備えて成る。各スキージ23aはX軸方向に延びた「へら」状の部材であり、それぞれスキージ昇降シリンダ23sの下方への突没動作によって、移動プレート23pに対して昇降される。   In FIG. 4, the squeegee unit 23 includes a moving plate 23 p provided so as to be movable in the Y-axis direction with respect to the substrate alignment unit 21, and two squeegee lifting cylinders (empty) attached to the moving plate 23 p and extending vertically. Pressure cylinder) 23s and two squeegees 23a that are attached to the lower part of each squeegee lifting cylinder 23s and face each other in the Y-axis direction. Each squeegee 23a is a “spar” -like member extending in the X-axis direction, and is moved up and down with respect to the moving plate 23p by a downward projecting operation of the squeegee lifting cylinder 23s.

図3において、XYロボット24は、基台3の上方をY軸方向に延び、基台3に相対的に固定して設けられたY軸ステージ24a、X軸方向に延び、Y軸ステージ24aに沿って移動自在に設けられたX軸ステージ24b及びX軸ステージ24bに沿って移動自在に設けられた移動プレート24cから成っている。図4において、カメラユニット25は、XYロボット24の移動プレート24cに、撮像面を下方に向けた第1カメラ25aと、撮像面を上方に向けた第2カメラ25bが取り付けられた構成となっている。   In FIG. 3, the XY robot 24 extends above the base 3 in the Y-axis direction, and is provided with a Y-axis stage 24a provided fixed relative to the base 3, and extends in the X-axis direction. The X-axis stage 24b is movably provided along the X-axis stage 24b, and the movable plate 24c is provided movably along the X-axis stage 24b. 4, the camera unit 25 has a configuration in which a moving plate 24c of the XY robot 24 is attached with a first camera 25a with an imaging surface facing downward and a second camera 25b with an imaging surface facing upward. Yes.

図4において、シリンジユニット26は、基板位置合わせ部21に対して水平面内方向に移動自在に設けられた移動プレート26pに、基板PBに印刷しようとするペーストを下方に吐出するシリンジ26aが取り付けられた構成となっている。   In FIG. 4, the syringe unit 26 is provided with a syringe 26 a that discharges a paste to be printed on the substrate PB downward on a moving plate 26 p provided so as to be movable in a horizontal plane direction with respect to the substrate alignment unit 21. It becomes the composition.

基板搬送路4を構成する搬入コンベア11、位置決めコンベア12及び搬出コンベア13による基板PBの搬送及び位置決め動作は、このスクリーン印刷機1が備える制御装置30(図5)が図示しないアクチュエータ等から成る基板搬送路作動機構31(図5)の作動制御を行うことによってなされる。   The substrate PB is conveyed and positioned by the carry-in conveyor 11, the positioning conveyor 12 and the carry-out conveyor 13 constituting the substrate conveyance path 4, and the control device 30 (FIG. 5) provided in the screen printing machine 1 includes an actuator or the like (not shown). This is done by controlling the operation of the transport path operating mechanism 31 (FIG. 5).

基台3に対するYテーブル21aのY軸方向への移動、Yテーブル21aに対するXテーブル21bのX軸方向への移動、Xテーブル21bに対するθテーブル21cのZ軸回りの回転、ベースプレート21dに対する(すなわちθテーブル21cに対する)第1昇降プレート21eの昇降、第1昇降プレート21eに対する第2昇降プレート21fの(すなわち下受けユニット21gの)昇降及びクランパ21hの開閉動作の各動作は、制御装置30がYテーブル駆動モータMyやXテーブル駆動モータMx(図4)等のアクチュエータ等から成る基板位置合わせ部作動機構32(図5)の作動制御を行うことによってなされる。   Movement of the Y table 21a with respect to the base 3 in the Y axis direction, movement of the X table 21b with respect to the Y table 21a in the X axis direction, rotation of the θ table 21c with respect to the X table 21b around the Z axis, and rotation with respect to the base plate 21d (ie, θ The controller 30 controls the Y table to move the first elevating plate 21e (with respect to the table 21c), the second elevating plate 21f with respect to the first elevating plate 21e (that is, the lowering unit 21g) and the opening / closing operation of the clamper 21h. This is done by controlling the operation of the substrate alignment unit operating mechanism 32 (FIG. 5) including actuators such as the drive motor My and the X table drive motor Mx (FIG. 4).

スキージユニット23の移動(移動プレート23pの移動)動作は、制御装置30が図示しないアクチュエータ等から成るスキージユニット移動機構33(図5)の作動制御を
行うことによってなされ、各スキージ23aの昇降動作は、制御装置30が前述のスキージ昇降シリンダ23s等から成るスキージ昇降機構34(図5)の作動制御を行うことによってなされる。
The movement of the squeegee unit 23 (movement of the moving plate 23p) is performed by the operation control of the squeegee unit moving mechanism 33 (FIG. 5) including an actuator not shown in the figure, and the squeegee 23a is moved up and down. The controller 30 controls the operation of the squeegee lifting mechanism 34 (FIG. 5) including the squeegee lifting cylinder 23s.

XYロボット24を構成するX軸ステージ24bのY軸方向への移動動作及び移動プレート24cのX軸方向への移動動作は、制御装置30が図示しないアクチュエータ等から成るXYロボット作動機構35(図5)の作動制御を行うことによってなされる。   The movement operation in the Y-axis direction of the X-axis stage 24b constituting the XY robot 24 and the movement operation in the X-axis direction of the movement plate 24c are performed by an XY robot operating mechanism 35 (FIG. ).

第1カメラ25aは、制御装置30に制御されて、基板位置合わせ部21によって位置合わせされた基板PBに設けられている基板位置検出マークM(図3)の撮像を行い(図5)、第2カメラ25bは、制御装置30に制御されて、マスクプレート22に設けられているマスク位置検出マーク(図示せず)の撮像を行う(図5)。第1カメラ25aの撮像によって得られた画像データ及び第2カメラ25bの撮像によって得られた画像データは制御装置30に入力される(図5)。   The first camera 25a is controlled by the control device 30, and images the substrate position detection mark M (FIG. 3) provided on the substrate PB aligned by the substrate alignment unit 21 (FIG. 5). The two cameras 25b are controlled by the control device 30 and image a mask position detection mark (not shown) provided on the mask plate 22 (FIG. 5). Image data obtained by imaging with the first camera 25a and image data obtained by imaging with the second camera 25b are input to the control device 30 (FIG. 5).

シリンジユニット26の移動(移動プレート26pの移動)動作は、制御装置30が図示しないアクチュエータ等から成るシリンジユニット移動機構36(図5)の作動制御を行うことによってなされ、シリンジ26aによるペーストの供給動作は、制御装置30が図示しないアクチュエータ等から成るシリンジ作動機構37(図5)の作動制御を行うことによってなされる。   The movement of the syringe unit 26 (movement of the moving plate 26p) is performed when the control device 30 controls the operation of the syringe unit moving mechanism 36 (FIG. 5) including an actuator (not shown), and the paste 26 is supplied by the syringe 26a. The control device 30 controls the operation of the syringe operation mechanism 37 (FIG. 5) including an actuator (not shown).

スクリーン印刷機1の制御装置30は、図示しない検出手段により、オペレータ(或いはスクリーン印刷機1の上流側に設置された図示しない他の装置)から基板搬送路4(搬入コンベア11)に基板PBが投入されたことを検知したら、搬入コンベア11と位置決めコンベア12を作動させ、投入された基板PBを搬入コンベア11によって受け取ってスクリーン印刷機1の内部に搬入し、位置決めコンベア12に受け渡す。制御装置30は、位置決めコンベア12により基板PBを受け取ったら、位置決めコンベア12をそのまま作動させ、基板PBが作業実行位置に到達したところで位置決めコンベア12を停止させて、基板PBを作業実行位置に位置決めする(基板位置決め工程)。   The control device 30 of the screen printing machine 1 uses a detection means (not shown) to transfer the substrate PB from the operator (or another device (not shown) installed on the upstream side of the screen printing machine 1) to the substrate conveyance path 4 (the carry-in conveyor 11). When it is detected that it has been loaded, the carry-in conveyor 11 and the positioning conveyor 12 are operated, and the loaded substrate PB is received by the carry-in conveyor 11 and carried into the screen printing machine 1 and delivered to the positioning conveyor 12. When receiving the substrate PB from the positioning conveyor 12, the control device 30 operates the positioning conveyor 12 as it is, stops the positioning conveyor 12 when the substrate PB reaches the work execution position, and positions the substrate PB at the work execution position. (Substrate positioning step).

制御装置30は、基板PBを作業実行位置に位置決めしたら、第2昇降プレート21fを第1昇降プレート21eに対して相対上昇させ、下受けユニット21gの上面を基板PBの下面に下方から当接させて、下受けユニット21gに基板PBを支持させる。下受けユニット21gに基板PBを支持させたら、制御装置30はクランパ21hにより基板PBをクランプさせて、基板PBを位置決めコンベア12上に(すなわち基板搬送路4上に)固定する(基板固定工程)。   After positioning the substrate PB at the work execution position, the control device 30 raises the second elevating plate 21f relative to the first elevating plate 21e and brings the upper surface of the lower receiving unit 21g into contact with the lower surface of the substrate PB from below. Then, the substrate PB is supported by the lower receiving unit 21g. After the substrate PB is supported by the lower receiving unit 21g, the control device 30 clamps the substrate PB by the clamper 21h and fixes the substrate PB on the positioning conveyor 12 (that is, on the substrate transport path 4) (substrate fixing step). .

制御装置30は、基板PBを位置決めコンベア12上に固定したら、カメラユニット25の移動と第1カメラ25aの撮像動作制御を行って基板PBの基板位置検出マークMの画像データを取得し、基板PBの位置を把握するとともに、カメラユニット25の移動と第2カメラ25bの撮像動作制御を行ってマスクプレート22のマスク位置検出マークの画像データを取得し、マスクプレート22の位置を把握する。   After fixing the substrate PB on the positioning conveyor 12, the control device 30 performs the movement of the camera unit 25 and the imaging operation control of the first camera 25a to acquire the image data of the substrate position detection mark M of the substrate PB, and the substrate PB. The position of the mask plate 22 is acquired by obtaining the image data of the mask position detection mark of the mask plate 22 by moving the camera unit 25 and controlling the imaging operation of the second camera 25b.

制御装置30は、基板PBの位置とマスクプレート22の位置を把握したら、基板位置合わせ部21による基板PBの水平面内方向の移動動作によって、基板PBをマスクプレート22の直下の所定位置に位置させた後、基板位置合わせ部21による基板PBの垂直方向の移動(第1昇降プレート21eの上昇)動作によって、基板PBの上面をマスクプレート22の下面に下方から接触させる(図6(a)の図中に示す矢印B1)。これによりマスクプレート22が基板PBに対して位置合わせされる(図6(a)。基板位置合わせ工程)。   After grasping the position of the substrate PB and the position of the mask plate 22, the control device 30 moves the substrate PB in the horizontal plane direction by the substrate alignment unit 21 and positions the substrate PB at a predetermined position directly below the mask plate 22. After that, the upper surface of the substrate PB is brought into contact with the lower surface of the mask plate 22 from below by moving the substrate PB in the vertical direction (raising the first elevating plate 21e) by the substrate alignment unit 21 (see FIG. 6A). Arrow B1) shown in the figure. As a result, the mask plate 22 is aligned with the substrate PB (FIG. 6A, substrate alignment step).

制御装置30は、マスクプレート22に対する基板PBの位置合わせを行ったら、基板PBに対するスクリーン印刷を実行する。これには先ず、シリンジユニット26をマスクプレート22の上方に移動させ、シリンジ26aからマスクプレート22の上面に半田ペーストや導電性ペースト等のペーストPTを供給する(図6(a)。ペースト供給工程)。   After aligning the substrate PB with respect to the mask plate 22, the control device 30 executes screen printing on the substrate PB. First, the syringe unit 26 is moved above the mask plate 22, and the paste PT such as solder paste or conductive paste is supplied from the syringe 26a to the upper surface of the mask plate 22 (FIG. 6A). ).

制御装置30は、マスクプレート22の上面にペーストPTを供給したら、一方のスキージ23aを下降させてそのスキージ23aの下縁をマスクプレート22の上面に当接させる。そして、スキージユニット23をY軸方向に移動させ、スキージ23aをマスクプレート22上で摺動させることによってペーストPTをかき寄せて(図6(b)中に示す矢印B2)、ペーストPTをマスクプレート22のパターン孔内に充填させる(図6(b)。スキージング工程)。   When supplying the paste PT to the upper surface of the mask plate 22, the control device 30 lowers one squeegee 23 a and brings the lower edge of the squeegee 23 a into contact with the upper surface of the mask plate 22. Then, the squeegee unit 23 is moved in the Y-axis direction, and the squeegee 23a is slid on the mask plate 22 to scrape the paste PT (arrow B2 shown in FIG. 6 (b)). (Fig. 6B. Squeezing step).

制御装置30は、マスクプレート22のパターン孔内にペーストPTを充填させたら、第2昇降プレート21fを第1昇降プレート21eに対して相対下降させ、マスクプレート22を基板PBから分離させる。これにより、いわゆる版離れが行われ、マスクプレート22のパターン孔内に充填されたペーストPTが基板PB上に印刷(転写)される(版離れ工程)。   After filling the pattern hole of the mask plate 22 with the paste PT, the control device 30 lowers the second elevating plate 21f relative to the first elevating plate 21e and separates the mask plate 22 from the substrate PB. Thereby, so-called plate separation is performed, and the paste PT filled in the pattern holes of the mask plate 22 is printed (transferred) onto the substrate PB (plate separation step).

制御装置30は、基板PBにペーストPTを印刷し、基板PBへのスクリーン印刷作業が終了したら、基板位置合わせ部21を作動させて、位置決めコンベア12の搬出コンベア13に対する位置調整を行う。位置決めコンベア12の搬出コンベア13に対する位置調整が終了したら、制御装置30は位置決めコンベア12と搬出コンベア13を作動させ、基板PBを位置決めコンベア12から搬出コンベア13に載せ換え、更に搬出コンベア13によって、基板PBをスクリーン印刷機1の下流側に配置された他の装置等に搬出する(基板搬出工程)。   The control device 30 prints the paste PT on the substrate PB, and when the screen printing operation on the substrate PB is completed, the control device 30 operates the substrate alignment unit 21 to adjust the position of the positioning conveyor 12 relative to the carry-out conveyor 13. When the position adjustment of the positioning conveyor 12 with respect to the carry-out conveyor 13 is completed, the control device 30 operates the positioning conveyor 12 and the carry-out conveyor 13 to transfer the substrate PB from the positioning conveyor 12 to the carry-out conveyor 13, and further, the substrate by the carry-out conveyor 13. The PB is carried out to another device or the like disposed on the downstream side of the screen printing machine 1 (substrate carrying out step).

ところで、図1、図2及び図3に示すように、このスクリーン印刷機1の本体カバー2には、本体カバー2の投入側開口部2aから突出した搬入コンベア11の端部を覆う搬入コンベアカバー41と、本体カバー2の排出側開口部2bから突出した搬出コンベア13の端部を覆う搬出コンベアカバー42が設けられている。   By the way, as shown in FIGS. 1, 2, and 3, the main body cover 2 of the screen printing machine 1 has a carry-in conveyor cover that covers the end of the carry-in conveyor 11 protruding from the input side opening 2 a of the main body cover 2. 41 and a carry-out conveyor cover 42 covering the end of the carry-out conveyor 13 protruding from the discharge side opening 2b of the main body cover 2 is provided.

搬入コンベアカバー41には、外部から搬入コンベア11に基板PBが投入されるときの基板PBの通路となる基板投入通路開口41aと、搬入コンベア11に外部からアクセスするための搬入側アクセス用開口41bが設けられている。また、搬出コンベアカバー42には、搬出コンベア13から外部に基板PBが排出されるときの基板PBの通路となる基板排出通路開口42aと、搬出コンベア13に外部からアクセスするための搬出側アクセス用開口42bが設けられている。更に、搬入コンベアカバー41には、搬入側アクセス用開口41bを開閉自在に覆う搬入側扉部材41cが設けられており、搬出コンベアカバー42には、搬出側アクセス用開口42bを開閉自在に覆う搬出側扉部材42cが設けられている。   The carry-in conveyor cover 41 includes a substrate loading passage opening 41a that serves as a passage for the substrate PB when the substrate PB is loaded into the carry-in conveyor 11 from the outside, and a loading-side access opening 41b for accessing the carry-in conveyor 11 from the outside. Is provided. Further, the carry-out conveyor cover 42 has a substrate discharge passage opening 42a that becomes a passage for the substrate PB when the substrate PB is discharged from the carry-out conveyor 13 to the outside, and a discharge-side access for accessing the carry-out conveyor 13 from the outside. An opening 42b is provided. Further, the carry-in conveyor cover 41 is provided with a carry-in side door member 41c that covers the carry-in side access opening 41b so that it can be opened and closed. The carry-out conveyor cover 42 carries out a carry-out that covers the carry-out side access opening 42b so that it can be opened and closed. A side door member 42c is provided.

搬入側扉部材41cはヒンジHを介して搬入コンベアカバー41に取り付けられて上下に開閉自在となっており、搬入側扉部材41cの上面には把持部Pが設けられている。このためオペレータは、把持部Pを持ってヒンジHを支点に搬入側扉部材41cを引き上げて開き、搬入側アクセス用開口41bを上方に露出させることによって、搬入コンベア11の点検等を行うことができる。また同様に、搬出側扉部材42cはヒンジHを介して搬出コンベアカバー42に取り付けられて上下に開閉自在となっており、搬出側扉部材42cの上面には把持部Pが設けられている。このためオペレータは、把持部Pを持ってヒン
ジHを支点に搬出側扉部材42cを引き上げ開き、搬出側アクセス用開口42bを上方に露出させることによって、搬出コンベア13の点検等を行うことができる。(図2、図7及び図8参照)。
The carry-in side door member 41c is attached to the carry-in conveyor cover 41 via a hinge H and can be opened and closed up and down. A grip portion P is provided on the upper surface of the carry-in side door member 41c. For this reason, the operator can inspect the carry-in conveyor 11 and the like by pulling up and opening the carry-in side door member 41c with the hinge H as a fulcrum and holding the carry-in side access opening 41b upward. it can. Similarly, the carry-out side door member 42c is attached to the carry-out conveyor cover 42 via a hinge H and can be opened and closed up and down. A grip portion P is provided on the upper surface of the carry-out side door member 42c. For this reason, the operator can inspect the carry-out conveyor 13 and the like by pulling and opening the carry-out side door member 42c with the hinge H as a fulcrum with the gripping part P and exposing the carry-out side access opening 42b upward. . (See FIGS. 2, 7 and 8).

図7及び図8において、搬入側扉部材41cの下面には、下方に延びるセンサ取り付けブラケットSBの上端部が取り付けられており、センサ取り付けブラケットSBの下端には搬入側光センサ41dの第1センサ部品である投光器S1が設けられている。また、搬入コンベアカバー41の内面には、搬入側光センサ41dの第2センサ部品である受光器S2が設けられている。   7 and 8, an upper end portion of the sensor mounting bracket SB extending downward is attached to the lower surface of the carry-in side door member 41c, and a first sensor of the carry-in side optical sensor 41d is attached to the lower end of the sensor mounting bracket SB. A projector S1 which is a component is provided. In addition, on the inner surface of the carry-in conveyor cover 41, a light receiver S2 that is a second sensor component of the carry-in side optical sensor 41d is provided.

ここで、投光器S1と受光器S2は、搬入側扉部材41cが閉じられた状態で、搬入コンベア11をその平面視において幅方向(Y方向)に挟むように、かつ、搬入コンベア11により搬送(搬入)される基板PBの上方領域においてほぼ水平方向に対向するように設けられており(図7(a)及び図8(a))、搬入側扉部材41cが閉じられた状態では投光器S1と受光器S2が搬入コンベア11の幅方向(Y軸方向)に対向するので投光器S1と受光器S2の間での検査光Lの授受が可能であるが、搬入側扉部材41cが開かれた状態では投光器S1と受光器S2が対向せず、投光器S1と受光器S2の間での検査光Lの授受が不能になるようになっている。   Here, the light projector S1 and the light receiver S2 are conveyed by the carry-in conveyor 11 so that the carry-in conveyor 11 is sandwiched in the width direction (Y direction) in a plan view with the carry-in side door member 41c closed ( In the upper region of the substrate PB to be carried in (see FIG. 7A and FIG. 8A), it is provided so as to face the projector S1 when the carry-in door member 41c is closed. Since the light receiver S2 faces the width direction (Y-axis direction) of the carry-in conveyor 11, inspection light L can be exchanged between the light projector S1 and the light receiver S2, but the carry-in side door member 41c is opened. Then, the projector S1 and the light receiver S2 do not face each other, and the inspection light L cannot be exchanged between the projector S1 and the light receiver S2.

搬入側扉部材41cが閉じられているとき、投光器S1と受光器S2は搬入コンベア11により搬送される基板PBの上方領域で検査光Lの授受を行うので(図7(a)及び図8(a))、基板投入通路開口41aから搬入コンベアカバー41により覆われる空間内(詳細には搬入コンベア11の上方領域)に異物が侵入したことの検出が可能となる。一方、搬入側扉部材41cが開かれているとき、投光器S1と受光器S2は検査光Lの授受を行わないので(図7(b)及び図8(b))、基板投入通路開口41aから異物が侵入したことの検出はできなくなる。   When the carry-in side door member 41c is closed, the light projector S1 and the light receiver S2 exchange the inspection light L in the upper region of the substrate PB transported by the carry-in conveyor 11 (FIGS. 7A and 8). a)) It is possible to detect that foreign matter has entered the space covered by the carry-in conveyor cover 41 (specifically, the region above the carry-in conveyor 11) from the substrate loading passage opening 41a. On the other hand, when the carry-in side door member 41c is opened, the light projector S1 and the light receiver S2 do not transmit or receive the inspection light L (FIGS. 7B and 8B). It is impossible to detect that a foreign object has entered.

同様に、図7及び図8において、搬出側扉部材42cの下面には、下方に延びるセンサ取り付けブラケットSBの上端部が取り付けられており、センサ取り付けブラケットSBの下端には搬出側光センサ42dの第1センサ部品である投光器S1が設けられている。また、搬出コンベアカバー42の内面には、搬出側光センサ42dの第2センサ部品である受光器S2が設けられている。   Similarly, in FIG.7 and FIG.8, the upper end part of the sensor attachment bracket SB extended downward is attached to the lower surface of the carry-out side door member 42c, and the lower end of the sensor attachment bracket SB has the carry-out side optical sensor 42d. A projector S1 that is a first sensor component is provided. Further, on the inner surface of the carry-out conveyor cover 42, a light receiver S2 that is a second sensor component of the carry-out side optical sensor 42d is provided.

ここで、投光器S1と受光器S2は、搬出側扉部材42cが閉じられた状態で、搬出コンベア13をその平面視において幅方向(Y軸方向)に挟むように、かつ、搬出コンベア13により搬送(搬出)される基板PBの上方領域においてほぼ水平方向に対向するように設けられており(図7(a)及び図8(a))、搬出側扉部材42cが閉じられた状態では投光器S1と受光器S2が搬出コンベア13の幅方向(Y軸方向)に対向するので投光器S1と受光器S2の間での検査光Lの授受が可能であるが、搬出側扉部材42cが開かれた状態では投光器S1と受光器S2が対向せず、投光器S1と受光器S2の間での検査光Lの授受が不能になるようになっている。   Here, the light projector S1 and the light receiver S2 are conveyed by the carry-out conveyor 13 so as to sandwich the carry-out conveyor 13 in the width direction (Y-axis direction) in a plan view with the carry-out side door member 42c closed. In the upper region of the substrate PB to be (unloaded), it is provided so as to oppose substantially in the horizontal direction (FIGS. 7A and 8A), and the projector S1 in the state where the unloading side door member 42c is closed. Since the light receiver S2 faces the width direction (Y-axis direction) of the carry-out conveyor 13, the inspection light L can be exchanged between the light projector S1 and the light receiver S2, but the carry-out side door member 42c is opened. In this state, the projector S1 and the light receiver S2 do not face each other, and the inspection light L cannot be exchanged between the projector S1 and the light receiver S2.

搬出側扉部材42cが閉じられているとき、投光器S1と受光器S2は搬出コンベア13により搬送される基板PBの上方領域で検査光Lの授受を行うので(図7(a)及び図8(a))、基板排出通路開口42aから搬出コンベアカバー42により覆われる空間内(詳細には搬出コンベア13の上方領域)に異物が侵入したことの検出が可能となる。一方、搬出側扉部材42cが開かれているとき、投光器S1と受光器S2は検査光Lの授受を行わないので(図7(b)及び図8(b))、基板排出通路開口42aから異物が侵入したことの検出はできなくなる。   When the carry-out side door member 42c is closed, the light projector S1 and the light receiver S2 exchange inspection light L in the upper region of the substrate PB transported by the carry-out conveyor 13 (FIGS. 7A and 8 (A) and FIG. a)) It is possible to detect that foreign matter has entered the space covered by the carry-out conveyor cover 42 (specifically, the region above the carry-out conveyor 13) from the substrate discharge passage opening 42a. On the other hand, when the carry-out side door member 42c is opened, the light projector S1 and the light receiver S2 do not transmit or receive the inspection light L (FIGS. 7B and 8B), and therefore from the substrate discharge passage opening 42a. It is impossible to detect that a foreign object has entered.

図5において、搬入側光センサ41d(投光器S1及び受光器S2)は制御装置30と繋がっており、制御装置30は、搬入側光センサ41dを構成する投光器S1と受光器S2の間で検査光Lの授受が可能であるか否かによって、搬入側扉部材41cの開閉状態を検知する。具体的には、搬入側光センサ41dの投光器S1と受光器S2の間で検査光Lの授受が可能であることをもって、搬入側扉部材41cが閉じている状態を検知し、投光器S1と受光器S2の間で検査光Lの授受が不能であることをもって、搬入側扉部材41cが開いている状態を検知する。また、搬入側扉部材41cが閉じられた状態を検知しているときには、投光器S1と受光器S2の間の検査光Lの授受の状態の変化に基づいて(具体的には、受光器S2の検査光Lの受光状態が受光状態から非受光状態に切り換わったことをもって)、基板投入通路開口41aから搬入コンベアカバー41により覆われる空間内に異物が侵入したことの検出を行う。   In FIG. 5, the carry-in side optical sensor 41d (light projector S1 and light receiver S2) is connected to the control device 30, and the control device 30 inspects the inspection light between the light projector S1 and the light receiver S2 constituting the carry-in side optical sensor 41d. The open / close state of the carry-in side door member 41c is detected depending on whether or not L can be exchanged. Specifically, when the inspection light L can be transmitted and received between the light projector S1 and the light receiver S2 of the carry-in side optical sensor 41d, the closed state of the carry-in side door member 41c is detected, and the light projector S1 and the light receiver are received. When the transfer of the inspection light L between the containers S2 is impossible, the state where the carry-in side door member 41c is opened is detected. Further, when the closed state of the carry-in side door member 41c is detected, based on the change in the state of transfer of the inspection light L between the light projector S1 and the light receiver S2 (specifically, the light receiver S2 When the light receiving state of the inspection light L is switched from the light receiving state to the non-light receiving state), it is detected that foreign matter has entered the space covered by the carry-in conveyor cover 41 from the substrate loading passage opening 41a.

同様に、図5において、搬出側光センサ42d(投光器S1及び受光器S2)は制御装置30と繋がっており、制御装置30は、搬出側光センサ42dを構成する投光器S1と受光器S2の間で検査光Lの授受が可能であるか否かによって、搬出側扉部材42cの開閉状態を検知する。具体的には、搬出側光センサ42dの投光器S1と受光器S2の間で検査光Lの授受が可能であることをもって、搬出側扉部材42cが閉じている状態を検知し、投光器S1と受光器S2の間で検査光Lの授受が不能であることをもって、搬出側扉部材42cが開いている状態を検知する。また、搬出側扉部材42cが閉じられた状態を検知しているときには、投光器S1と受光器S2の間の検査光Lの授受の状態の変化に基づいて(具体的には、受光器S2の検査光Lの受光状態が受光状態から非受光状態に切り換わったことをもって)、基板排出通路開口42aから搬出コンベアカバー42により覆われる空間内に異物が侵入したことの検出を行う。   Similarly, in FIG. 5, the carry-out side optical sensor 42d (light projector S1 and light receiver S2) is connected to the control device 30, and the control device 30 is located between the light projector S1 and the light receiver S2 constituting the carry-out side optical sensor 42d. The open / close state of the carry-out side door member 42c is detected depending on whether or not the inspection light L can be transferred. Specifically, when the inspection light L can be transmitted and received between the light projector S1 and the light receiver S2 of the carry-out side optical sensor 42d, the state in which the carry-out side door member 42c is closed is detected, and the light projector S1 and the light receiver are received. When the inspection light L cannot be exchanged between the containers S2, the state where the carry-out side door member 42c is opened is detected. Further, when the state where the carry-out side door member 42c is closed is detected, based on the change in the state of the inspection light L exchanged between the projector S1 and the light receiver S2 (specifically, the light receiver S2 When the light receiving state of the inspection light L is switched from the light receiving state to the non-light receiving state), it is detected that foreign matter has entered the space covered by the carry-out conveyor cover 42 from the substrate discharge passage opening 42a.

制御装置30は、上記のようにして搬入側光センサ41dによって基板投入通路開口41aから異物が侵入したことを検知し、或いは搬出側光センサ42dによって基板排出通路開口42aから異物が侵入したことを検知したら、本体カバー2に設けられたディスプレイ装置50(図1及び図5)にその旨を表示してオペレータに注意を喚起するとともに、基板搬送路4及び印刷作業実行部5の作動を停止させる。これにより、基板投入通路開口41a或いは基板排出通路開口42aからオペレータが誤って手を差し入れてしまった場合であってもオペレータの作業の安全を図ることができ、異物が入り込んでしまった場合であっても、その異物が基板搬送路4によって作業実行部5の方へ運ばれてしまう事態を防止できるので、オペレータは安心して作業を行うことができる。   As described above, the control device 30 detects that foreign matter has entered from the substrate insertion passage opening 41a by the carry-in side optical sensor 41d, or detects that foreign matter has entered from the substrate discharge passage opening 42a by the carry-out side optical sensor 42d. When detected, the fact is displayed on the display device 50 (FIGS. 1 and 5) provided on the main body cover 2 to alert the operator, and the operations of the substrate transport path 4 and the printing work execution unit 5 are stopped. . As a result, even if the operator accidentally inserts his / her hand through the substrate insertion passage opening 41a or the substrate discharge passage opening 42a, the operator's work can be secured, and foreign matter has entered. However, since it is possible to prevent the foreign matter from being carried toward the work execution unit 5 by the substrate transport path 4, the operator can work with peace of mind.

また制御装置30は、基板搬送路4及び印刷作業実行部5によるスクリーン印刷作業を開始する際、搬入側光センサ41dによって搬入側扉部材41cが開かれていることを検知し、或いは搬出側光センサ42dによって搬出側扉部材42cが開けられていることを検知したときは、ディスプレイ装置50にその旨を表示してオペレータに注意を喚起するとともに、基板搬送路4及び印刷作業実行部5の作動を開始させないようにする。また、制御装置30は、スクリーン印刷作業中に搬入側光センサ41dによって搬入側扉部材41cが開けられたことを検知し、或いは搬出側光センサ42dによって搬出側扉部材42cが開けられたことを検知したときは、ディスプレイ装置50にその旨を表示してオペレータ注意を喚起するとともに、基板搬送路4及び印刷作業実行部5の作動を停止させる。これにより、搬入側アクセス用開口41b或いは搬出側アクセス用開口42bからオペレータが手を差し入れたり異物が入り込んだりする可能性のある状態で基板搬送路4及び印刷作業実行部5が作動することを防止でき、オペレータの作業の安全を図ることができる。   The control device 30 detects that the carry-in side light member 41c is opened by the carry-in side optical sensor 41d when starting the screen printing work by the substrate conveyance path 4 and the print work execution unit 5, or carries out the carry-out side light. When it is detected by the sensor 42d that the carry-out side door member 42c is opened, the fact is displayed on the display device 50 to alert the operator, and the operation of the substrate transport path 4 and the printing work execution unit 5 is performed. Do not start. Further, the control device 30 detects that the carry-in side light member 41c is opened by the carry-in side optical sensor 41d during the screen printing operation, or detects that the carry-out side light member 42c is opened by the carry-out side optical sensor 42d. When detected, the fact is displayed on the display device 50 to alert the operator, and the operation of the substrate transport path 4 and the printing work execution unit 5 is stopped. This prevents the substrate transport path 4 and the printing work execution unit 5 from operating in a state where the operator may insert his hand or foreign matter may enter from the loading side access opening 41b or the unloading side access opening 42b. The operator's work can be made safe.

以上説明したように、本実施の形態におけるスクリーン印刷機1は、基板PBの搬送を行う搬入コンベア11(搬送コンベア)と、搬入コンベア11の端部を覆い、外部から搬
入コンベア11に基板PBが投入されるときの基板PBの通路となる基板投入通路開口41a(基板通路開口)及び搬入コンベア11に外部からアクセスするための搬入側アクセス用開口41b(アクセス用開口)が設けられた搬入コンベアカバー41(搬送コンベアカバー)と、搬入コンベアカバー41に設けられて搬入側アクセス用開口41bを開閉自在に覆う搬入側扉部材41c(扉部材)と、搬入側扉部材41cに対して固定して設けられた投光器S1(第1センサ部品)及び搬入コンベアカバー41に対して固定して設けられた受光器S2(第2センサ部品)から成り、搬入側扉部材41cが閉じられた状態では投光器S1と受光器S2の間で検査光Lの授受を行うことが可能であり、搬入側扉部材41cが開かれた状態では投光器S1と受光器S2の間の検査光Lの授受が不能となる搬入側光センサ41d(光センサ)と、搬入側光センサ41dを構成する投光器S1及び受光器S2の間で検査光Lの授受が可能であるか否かによって搬入側扉部材41cの開閉状態を検知するとともに、搬入側扉部材41cが閉じられた状態を検知しているとき、投光器S1と受光器S2の間の検査光Lの授受の状態の変化に基づいて、基板投入通路開口41aから搬入コンベアカバー41により覆われる空間内に異物が侵入したことの検出を行う検知手段(制御装置30)から成る基板搬送装置を備えている。
As described above, the screen printing machine 1 according to the present embodiment covers the carry-in conveyor 11 (carrying conveyor) that carries the substrate PB and the end of the carry-in conveyor 11, and the substrate PB is placed on the carry-in conveyor 11 from the outside. A loading conveyor cover provided with a substrate loading passage opening 41a (substrate passage opening) serving as a passage for the substrate PB when loaded and a loading side access opening 41b (access opening) for accessing the loading conveyor 11 from the outside. 41 (conveyor conveyor cover), a carry-in door member 41c (door member) provided on the carry-in conveyor cover 41 so as to open and close the carry-in access opening 41b and a carry-in door member 41c. Light receiving device S2 (second sensor unit) fixed to the projector S1 (first sensor component) and the carry-in conveyor cover 41 ), The inspection light L can be exchanged between the projector S1 and the light receiver S2 when the carry-in door member 41c is closed, and the light projector S1 when the carry-in door member 41c is opened. And inspection light L between the light-receiving device S2 and the light-receiving device S2 and the light-receiving device S2 and the light-receiving device S2 that make up the light-receiving-side optical sensor 41d. When the open / close state of the carry-in side door member 41c is detected depending on whether or not it is possible, and the closed state of the carry-in side door member 41c is detected, the inspection light L between the light projector S1 and the light receiver S2 is detected. There is provided a substrate transfer device comprising detection means (control device 30) for detecting that foreign matter has entered the space covered by the carry-in conveyor cover 41 from the substrate input passage opening 41a based on the change in the state of transfer. .

また本実施の形態におけるスクリーン印刷機1は、基板PBの搬送を行う搬出コンベア13(搬送コンベア)と、搬出コンベア13の端部を覆い、搬出コンベア13から外部に基板PBが排出されるときの基板PBの通路となる基板排出通路開口42a(基板通路開口)及び搬出コンベア13に外部からアクセスするための搬出側アクセス用開口42b(アクセス用開口)が設けられた搬出コンベアカバー42(搬送コンベアカバー)と、搬出コンベアカバー42に設けられて搬出側アクセス用開口42bを開閉自在に覆う搬出側扉部材42c(扉部材)と、搬出側扉部材42cに対して固定して設けられた投光器S1(第1センサ部品)及び搬出コンベアカバー42に対して固定して設けられた受光器S2(第2センサ部品)から成り、搬出側扉部材42cが閉じられた状態では投光器S1と受光器S2の間で検査光Lの授受を行うことが可能であり、搬出側扉部材42cが開かれた状態では投光器S1と受光器S2の間の検査光Lの授受が不能となる搬出側光センサ42d(光センサ)と、搬出側光センサ42dを構成する投光器S1及び受光器S2の間で検査光Lの授受が可能であるか否かによって搬出側扉部材42cの開閉状態を検知するとともに、搬出側扉部材42cが閉じられた状態を検知しているとき、投光器S1と受光器S2の間の検査光Lの授受の状態の変化に基づいて、基板排出通路開口42aから搬出コンベアカバー42により覆われる空間内に異物が侵入したことの検出を行う検知手段(制御装置30)から成る基板搬送装置を備えている。   Further, the screen printing machine 1 according to the present embodiment covers the carry-out conveyor 13 (carrying conveyor) that carries the substrate PB and the end of the carry-out conveyor 13, and the substrate PB is discharged from the carry-out conveyor 13 to the outside. An unloading conveyor cover 42 (conveying conveyor cover) provided with an unloading side access opening 42b (access opening) for accessing the unloading conveyor 13 from the outside, and a substrate discharge path opening 42a (substrate path opening) serving as a path for the substrate PB ), A carry-out side door member 42c (door member) provided on the carry-out conveyor cover 42 so as to be able to open and close the carry-out side access opening 42b, and a light projector S1 (fixed to the carry-out side door member 42c) The first sensor component) and the light receiver S2 (second sensor component) fixed to the carry-out conveyor cover 42 are When the side door member 42c is closed, the inspection light L can be exchanged between the light projector S1 and the light receiver S2, and when the carry-out side door member 42c is opened, the light projector S1 and the light receiver S2 Whether or not the inspection light L can be exchanged between the unloading side optical sensor 42d (optical sensor) that cannot transmit and receive the inspection light L between the projector S1 and the light receiver S2 constituting the unloading side optical sensor 42d. When the open / close state of the carry-out side door member 42c is detected and the state in which the carry-out side door member 42c is closed is detected, the change in the state of the inspection light L exchanged between the light projector S1 and the light receiver S2 Is provided with a substrate transfer device comprising a detection means (control device 30) for detecting that foreign matter has entered the space covered by the carry-out conveyor cover 42 from the substrate discharge passage opening 42a.

本実施の形態における基板搬送装置では、光センサ(搬入側光センサ41d又は搬出側光センサ42d)の投光器S1と受光器S2の間で検査光Lの授受が可能であるか否かによって扉部材(搬入側扉部材41c又は搬出側扉部材42c)の開閉状態が検知され、扉部材が閉じられており、投光器S1と受光器S2の間で検査光Lの授受が可能であるときには、投光器S1と受光器S2の間の検査光Lの授受の状態の変化に基づいて、搬送コンベアカバー(搬入コンベアカバー41又は搬出コンベアカバー42)の基板通路開口からの異物の侵入を検出することができるようになっている。このように本実施の形態における基板搬送装置では、異物の侵入を検出するための光センサで扉部材の開閉状態を検知することができるので、扉部材の開閉検出のための専用のセンサは不要となり、安価かつ簡単な構成で搬送コンベアカバーの基板通路開口からの異物の侵入と、アクセス用開口を覆う扉部材の開閉状態の検出を行うことができる。   In the substrate transfer apparatus in the present embodiment, the door member depends on whether or not the inspection light L can be exchanged between the light projector S1 and the light receiver S2 of the optical sensor (the carry-in side optical sensor 41d or the carry-out side optical sensor 42d). When the open / close state of the (load-in side door member 41c or the carry-out side door member 42c) is detected, the door member is closed, and the inspection light L can be transferred between the light projector S1 and the light receiver S2, the light projector S1 Intrusion of foreign matter from the substrate passage opening of the transport conveyor cover (the carry-in conveyor cover 41 or the carry-out conveyor cover 42) can be detected based on a change in the state of transfer of the inspection light L between the optical receiver S2 and the light receiver S2. It has become. As described above, in the substrate transfer apparatus according to the present embodiment, since the open / closed state of the door member can be detected by the optical sensor for detecting the intrusion of the foreign matter, a dedicated sensor for detecting the open / close of the door member is unnecessary. Thus, it is possible to detect the intrusion of foreign matter from the substrate passage opening of the transport conveyor cover and the open / closed state of the door member covering the access opening with an inexpensive and simple configuration.

また、本実施の形態では、扉部材(搬入側扉部材41c又は搬出側扉部材42c)が閉じられているとき、投光器S1と受光器S2は、搬送コンベア(搬入コンベア11又は搬出コンベア13)により搬送される基板PBの上方領域で検査光Lの授受を行うようになっており、基板PBの搬送中に基板PBによって検査光Lが遮断されることがなく、異物
の検出を適確に行うことができるようになっている。
Further, in the present embodiment, when the door member (the carry-in side door member 41c or the carry-out side door member 42c) is closed, the light projector S1 and the light receiver S2 are moved by the transport conveyor (the carry-in conveyor 11 or the carry-out conveyor 13). The inspection light L is exchanged in the upper region of the substrate PB to be conveyed, and the inspection light L is not blocked by the substrate PB during the conveyance of the substrate PB, and the foreign matter is accurately detected. Be able to.

また、本実施の形態における電子部品実装用装置としてのスクリーン印刷機1は、基板PBの搬送を行う搬送コンベア(搬入コンベア11又は搬出コンベア13)と、搬送コンベアの端部を覆い、外部から搬送コンベアに基板PBが投入されるとき若しくは搬送コンベアから外部に基板PBが排出されるときの基板PBの通路となる基板通路開口(基板投入通路開口41a又は基板排出通路開口42a)及び搬送コンベアに外部からアクセスするためのアクセス用開口(搬入側アクセス用開口41b又は搬出側アクセス用開口42b)が設けられた搬送コンベアカバー(搬入コンベアカバー41又は搬出コンベアカバー42)と、搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材(搬入側扉部材41c又は搬出側扉部材42c)と、扉部材に対して固定して設けられた第1センサ部品(投光器S1)及び搬送コンベアカバーに対して固定して設けられた第2センサ部品(受光器S2)から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光Lの授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光Lの授受が不能となる光センサ(搬入側光センサ41d又は搬出側光センサ42d)と、光センサを構成する第1センサ部品及び第2センサ部品の間で検査光Lの授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光Lの授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行う検知手段と、搬送コンベアにより基板PBを搬送して位置決めし、その位置決めした基板PBに電子部品実装用の作業(ここではスクリーン印刷作業)を施す作業装置としての印刷作業実行部5を備えたものとなっている。   Further, the screen printing machine 1 as the electronic component mounting apparatus in the present embodiment covers the conveyance conveyor (the carry-in conveyor 11 or the carry-out conveyor 13) that conveys the substrate PB and the end of the conveyance conveyor, and conveys it from the outside. A substrate passage opening (substrate loading passage opening 41a or substrate discharge passage opening 42a) that becomes a passage for the substrate PB when the substrate PB is loaded into the conveyor or when the substrate PB is discharged from the conveyance conveyor to the outside, and external to the conveyance conveyor A transport conveyor cover (loading conveyor cover 41 or unloading conveyor cover 42) provided with an access opening (loading side access opening 41b or unloading side access opening 42b) for access from the Door member (opening side door member 41c or unloading side door part) which covers opening for opening freely 42c), a first sensor component (light projector S1) fixed to the door member, and a second sensor component (light receiver S2) fixed to the transport conveyor cover. The inspection light L can be exchanged between the first sensor component and the second sensor component in the closed state, and between the first sensor component and the second sensor component when the door member is opened. Test light L between the first sensor component and the second sensor component constituting the optical sensor and the optical sensor (the carry-in side optical sensor 41d or the carry-out side optical sensor 42d) that cannot transfer the test light L. Whether the door member is opened or closed based on whether it is possible or not, and when the door member is closed, the inspection light L is transferred between the first sensor component and the second sensor component. Substrate passage opening based on changes in Detecting means for detecting that a foreign object has entered the space covered by the transport conveyor cover, and the substrate PB is transported and positioned by the transport conveyor, and an operation for mounting electronic components on the positioned substrate PB (here, A printing work execution unit 5 is provided as a working device for performing screen printing work).

また、本実施の形態における電子部品実装用装置の作業方法は、上記スクリーン印刷機1(電子部品実装用装置)の作業方法であって、光センサ(搬入側光センサ41d又は搬出側光センサ42d)を構成する第1センサ部品(投光器S1)及び第2センサ部品(受光器S2)の間で検査光Lの授受が可能であるか否かによって扉部材(搬入側扉部材41c又は搬出側扉部材42c)の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光Lの授受の状態の変化に基づいて、基板通路開口(基板投入通路開口41a又は基板排出通路開口42a)から搬送コンベアカバー(搬入コンベアカバー41又は搬出コンベアカバー42)により覆われる空間内に異物が侵入したことの検出を行うようになっている。   The working method of the electronic component mounting apparatus in the present embodiment is the working method of the screen printing machine 1 (electronic component mounting apparatus), and is an optical sensor (carry-in side optical sensor 41d or carry-out side optical sensor 42d). Depending on whether or not the inspection light L can be exchanged between the first sensor component (light projector S1) and the second sensor component (light receiver S2) constituting the door member (the carry-in side door member 41c or the carry-out side door). When detecting the open / closed state of the member 42c) and detecting the closed state of the door member, based on the change in the state of the inspection light L exchanged between the first sensor component and the second sensor component, Foreign matter has entered the space covered by the transfer conveyor cover (the carry-in conveyor cover 41 or the carry-out conveyor cover 42) from the substrate passage opening (the substrate input passage opening 41a or the substrate discharge passage opening 42a). It is adapted to perform the detection.

本実施の形態におけるスクリーン印刷機1及びスクリーン印刷機1の作業方法では、本実施の形態における安価な基板搬送装置を用いて電子部品実装用の作業が行われるので、基板生産工程に要するコストを低減することができる。   In the working method of the screen printing machine 1 and the screen printing machine 1 according to the present embodiment, the work for mounting electronic components is performed using the inexpensive board conveying device according to the present embodiment. Can be reduced.

これまで本発明の実施の形態について説明してきたが、本発明は上述の実施の形態に示したものに限定されない。例えば、上述の実施の形態では、搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材は、ヒンジHを介して上下に開閉自在となっていたが、扉部材の構成は限定されず、上下方向や水平方向にスライドさせる構成等であってもよい。   Although the embodiments of the present invention have been described so far, the present invention is not limited to those shown in the above-described embodiments. For example, in the above-described embodiment, the door member that is provided on the transport conveyor cover and covers the access opening so as to be openable and closable can be opened and closed up and down via the hinge H, but the configuration of the door member is limited. Instead, it may be configured to slide vertically or horizontally.

また、上述の実施の形態では、扉部材に対して固定して設けられた第1センサ部品が投光器S1であり、搬送コンベアカバーに対して固定して設けられた第2センサ部品が受光器S2であったが、第1センサ部品が受光器S2で、第2センサ部品が投光器S1であってもよい。また、第1センサ部品と第2センサ部品は、投光器と受光器の組み合わせでなくてもよく、例えば、投受光器と反射器の組み合わせ等であってもよい。   In the above-described embodiment, the first sensor component fixed to the door member is the projector S1, and the second sensor component fixed to the transport conveyor cover is the light receiver S2. However, the first sensor component may be the light receiver S2, and the second sensor component may be the projector S1. Further, the first sensor component and the second sensor component may not be a combination of a projector and a light receiver, and may be a combination of a projector and a reflector, for example.

また、本発明に係る基板搬送装置は、上述したスクリーン印刷機1に限られず、電子部品実装装置や外観検査装置等の他の電子部品実装用装置にも適用することができる。この場合、電子部品実装用装置が行う電子部品実装用の作業には、電子部品実装装置では基板PBに電子部品を搭載する電子部品搭載作業、外観検査装置では、スクリーン印刷作業或いは電子部品搭載作業が終了した基板PBの外観検査を行う外観検査作業が該当する。   Moreover, the board | substrate conveyance apparatus which concerns on this invention is not restricted to the screen printer 1 mentioned above, It can apply also to other electronic component mounting apparatuses, such as an electronic component mounting apparatus and an external appearance inspection apparatus. In this case, the electronic component mounting operation performed by the electronic component mounting apparatus includes an electronic component mounting operation for mounting the electronic component on the substrate PB in the electronic component mounting apparatus, and a screen printing operation or an electronic component mounting operation in the appearance inspection apparatus. Appearance inspection work for inspecting the appearance of the substrate PB is completed.

安価かつ簡単な構成で搬送コンベアカバーの基板通路開口からの異物の侵入と、アクセス用開口を覆う扉部材の開閉状態の検出を行うことができる基板搬送装置、電子部品実装用装置及び電子部品実装用装置の作業方法を提供する。   Substrate transport device, electronic component mounting device, and electronic component mounting capable of detecting the intrusion of foreign matter from the substrate passage opening of the transport conveyor cover and the open / closed state of the door member covering the access opening with an inexpensive and simple configuration A working method of the apparatus is provided.

本発明の一実施の形態におけるスクリーン印刷機の斜視図The perspective view of the screen printer in one embodiment of this invention 本発明の一実施の形態におけるスクリーン印刷機の側面図The side view of the screen printer in one embodiment of the present invention 本発明の一実施の形態におけるスクリーン印刷機の平面図The top view of the screen printer in one embodiment of the present invention 本発明の一実施の形態におけるスクリーン印刷機を構成する印刷作業実行部の正面図The front view of the printing work execution part which comprises the screen printer in one embodiment of this invention 本発明の一実施の形態におけるスクリーン印刷機の制御系統を示すブロック図The block diagram which shows the control system of the screen printer in one embodiment of this invention (a)(b)本発明の一実施の形態におけるスクリーン印刷機を構成する印刷作業実行部の動作説明図(A) (b) Operation | movement explanatory drawing of the printing work execution part which comprises the screen printer in one embodiment of this invention (a)(b)本発明の一実施の形態におけるスクリーン印刷機の搬送コンベアカバーの斜視図(A) (b) The perspective view of the conveyance conveyor cover of the screen printer in one embodiment of this invention (a)(b)本発明の一実施の形態におけるスクリーン印刷機の搬送コンベアカバーの断面正面図(A) (b) The cross-sectional front view of the conveyance conveyor cover of the screen printer in one embodiment of this invention

符号の説明Explanation of symbols

11 搬入コンベア(搬送コンベア)
30 制御装置(検知手段)
41 搬入コンベアカバー(搬送コンベアカバー)
41a 基板投入通路開口(基板通路開口)
41b 搬入側アクセス用開口(アクセス用開口)
41c 搬入側扉部材(扉部材)
41d 搬入側光センサ(光センサ)
S1 投光器(第1センサ部品)
S2 受光器(第2センサ部品)
L 検査光
PB 基板
11 Carry-in conveyor (conveyor)
30 Control device (detection means)
41 Carry-in conveyor cover (conveyor cover)
41a Substrate input passage opening (Substrate passage opening)
41b Loading side access opening (access opening)
41c Loading side door member (door member)
41d Loading side optical sensor (optical sensor)
S1 Floodlight (first sensor component)
S2 Receiver (second sensor component)
L Inspection light PB substrate

Claims (5)

基板の搬送を行う搬送コンベアと、
搬送コンベアの端部を覆い、外部から搬送コンベアに基板が投入されるとき若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口及び搬送コンベアに外部からアクセスするためのアクセス用開口が設けられた搬送コンベアカバーと、
搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材と、
扉部材に対して固定して設けられた第1センサ部品及び搬送コンベアカバーに対して固定して設けられた第2センサ部品から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光の授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光の授受が不能となる光センサと、
光センサを構成する第1センサ部品及び第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行う検知手段とを備えたことを特徴とする基板搬送装置。
A transport conveyor for transporting the substrate;
Covers the end of the transfer conveyor and externally accesses the substrate path opening and the transfer conveyor when the substrate is loaded into the transfer conveyor from the outside or when the substrate is discharged from the transfer conveyor to the outside. A transport conveyor cover provided with an access opening;
A door member provided on the transport conveyor cover so as to freely open and close the access opening;
The first sensor component is fixed to the door member and the second sensor component is fixed to the transport conveyor cover. When the door member is closed, the first sensor component and the second sensor component are provided. An optical sensor capable of transferring inspection light between sensor parts, and incapable of transferring inspection light between the first sensor part and the second sensor part when the door member is opened;
The open / close state of the door member is detected depending on whether inspection light can be exchanged between the first sensor component and the second sensor component constituting the optical sensor, and the closed state of the door member is detected. Detection that detects that a foreign object has entered the space covered by the transport conveyor cover from the substrate passage opening based on a change in the state of inspection light exchange between the first sensor component and the second sensor component. And a substrate transport apparatus.
扉部材が閉じられているとき、第1センサ部品と第2センサ部品は、搬送コンベアにより搬送される基板の上方領域で検査光の授受を行うことを特徴とする請求項1に記載の基板搬送装置。   2. The substrate transport according to claim 1, wherein when the door member is closed, the first sensor component and the second sensor component exchange inspection light in an upper region of the substrate transported by the transport conveyor. apparatus. 基板の搬送を行う搬送コンベアと、
搬送コンベアの端部を覆い、外部から搬送コンベアに基板が投入されるとき若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口及び搬送コンベアに外部からアクセスするためのアクセス用開口が設けられた搬送コンベアカバーと、
搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材と、
扉部材に対して固定して設けられた第1センサ部品及び搬送コンベアカバーに対して固定して設けられた第2センサ部品から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光の授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光の授受が不能となる光センサと、
光センサを構成する第1センサ部品及び第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行う検知手段と、
搬送コンベアにより基板を搬送して位置決めし、その位置決めした基板に電子部品実装用の作業を施す作業装置と、
を備えたことを特徴とする電子部品実装用装置。
A transport conveyor for transporting the substrate;
Covers the end of the transfer conveyor and externally accesses the substrate path opening and the transfer conveyor when the substrate is loaded into the transfer conveyor from the outside or when the substrate is discharged from the transfer conveyor to the outside. A transport conveyor cover provided with an access opening;
A door member provided on the transport conveyor cover so as to freely open and close the access opening;
The first sensor component is fixed to the door member and the second sensor component is fixed to the transport conveyor cover. When the door member is closed, the first sensor component and the second sensor component are provided. An optical sensor capable of transferring inspection light between sensor parts, and incapable of transferring inspection light between the first sensor part and the second sensor part when the door member is opened;
The open / close state of the door member is detected depending on whether inspection light can be exchanged between the first sensor component and the second sensor component constituting the optical sensor, and the closed state of the door member is detected. Detection that detects that a foreign object has entered the space covered by the transport conveyor cover from the substrate passage opening based on a change in the state of inspection light exchange between the first sensor component and the second sensor component. Means,
A work device that transports and positions the board by a transport conveyor, and performs work for mounting electronic components on the positioned board;
An electronic component mounting apparatus comprising:
扉部材が閉じられているとき、第1センサ部品と第2センサ部品は、搬送コンベアにより搬送される基板の上方領域で検査光の授受を行うことを特徴とする請求項3に記載の電子部品実装用装置。   4. The electronic component according to claim 3, wherein when the door member is closed, the first sensor component and the second sensor component exchange inspection light in an upper region of the substrate transported by the transport conveyor. Mounting device. 基板の搬送を行う搬送コンベアと、搬送コンベアの端部を覆い、外部から搬送コンベアに基板が投入されるとき若しくは搬送コンベアから外部に基板が排出されるときの基板の通路となる基板通路開口及び搬送コンベアに外部からアクセスするためのアクセス用開口が設けられた搬送コンベアカバーと、搬送コンベアカバーに設けられてアクセス用開口を開閉自在に覆う扉部材と、扉部材に対して固定して設けられた第1センサ部品及び搬送コ
ンベアカバーに対して固定して設けられた第2センサ部品から成り、扉部材が閉じられた状態では第1センサ部品と第2センサ部品の間で検査光の授受を行うことが可能であり、扉部材が開かれた状態では第1センサ部品と第2センサ部品の間の検査光の授受が不能となる光センサと、搬送コンベアにより基板を搬送して位置決めし、その位置決めした基板に電子部品実装用の作業を施す作業装置とを備える電子部品実装用装置の作業方法であって、
光センサを構成する第1センサ部品及び第2センサ部品の間で検査光の授受が可能であるか否かによって扉部材の開閉状態を検知するとともに、扉部材が閉じられた状態を検知しているとき、第1センサ部品と第2センサ部品の間の検査光の授受の状態の変化に基づいて、基板通路開口から搬送コンベアカバーにより覆われる空間内に異物が侵入したことの検出を行うことを特徴とする電子部品実装用装置の作業方法。
A transport conveyor that transports the substrate, a substrate passage opening that covers the end of the transport conveyor and serves as a path for the substrate when the substrate is loaded into the transport conveyor from the outside or when the substrate is discharged from the transport conveyor to the outside; and A transport conveyor cover provided with an access opening for accessing the transport conveyor from the outside, a door member provided on the transport conveyor cover for opening and closing the access opening, and fixed to the door member. The first sensor component and the second sensor component fixed to the transport conveyor cover are provided. When the door member is closed, inspection light is exchanged between the first sensor component and the second sensor component. An optical sensor that can perform the inspection, and cannot transfer inspection light between the first sensor component and the second sensor component when the door member is opened; And positioned more transporting the substrate, a working method of the electronic component mounting apparatus and a working device for performing the work of mounting electronic parts on the positioning the substrate,
The open / close state of the door member is detected depending on whether inspection light can be exchanged between the first sensor component and the second sensor component constituting the optical sensor, and the closed state of the door member is detected. Detecting that a foreign object has entered the space covered by the transfer conveyor cover from the substrate passage opening based on a change in the state of inspection light exchange between the first sensor component and the second sensor component. An electronic component mounting apparatus working method characterized by the above.
JP2008283836A 2008-11-05 2008-11-05 Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method Active JP4893727B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008283836A JP4893727B2 (en) 2008-11-05 2008-11-05 Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008283836A JP4893727B2 (en) 2008-11-05 2008-11-05 Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method

Publications (2)

Publication Number Publication Date
JP2010114169A JP2010114169A (en) 2010-05-20
JP4893727B2 true JP4893727B2 (en) 2012-03-07

Family

ID=42302525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008283836A Active JP4893727B2 (en) 2008-11-05 2008-11-05 Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method

Country Status (1)

Country Link
JP (1) JP4893727B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5998356B2 (en) * 2013-02-18 2016-09-28 パナソニックIpマネジメント株式会社 Substrate transport apparatus and transport belt maintenance inspection method
JP6315683B2 (en) * 2014-06-11 2018-04-25 富士通周辺機株式会社 Printed circuit board inspection apparatus and printed circuit board inspection system
JP6498397B2 (en) * 2014-08-26 2019-04-10 株式会社Fuji Transport device
JP6247202B2 (en) 2014-12-18 2017-12-13 ファナック株式会社 Machine tool equipped with a protective cover detection device
JP6464362B2 (en) * 2017-02-14 2019-02-06 パナソニックIpマネジメント株式会社 Screen printing apparatus and screen printing method
JP7213414B2 (en) * 2018-08-30 2023-01-27 パナソニックIpマネジメント株式会社 Component mounter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001345594A (en) * 2000-05-31 2001-12-14 Juki Corp Board transporting equipment
JP4409079B2 (en) * 2000-11-15 2010-02-03 パナソニック株式会社 Electronic component mounting equipment
JP2007191253A (en) * 2006-01-18 2007-08-02 Brother Ind Ltd Label preparation device and cartridge for preparing label
JP4081492B2 (en) * 2006-01-24 2008-04-23 三友工業株式会社 Safety door device for injection molding equipment

Also Published As

Publication number Publication date
JP2010114169A (en) 2010-05-20

Similar Documents

Publication Publication Date Title
JP4840422B2 (en) Electronic component mounting apparatus and work method by electronic component mounting apparatus
JP4893727B2 (en) Substrate transport apparatus, electronic component mounting apparatus, and electronic component mounting apparatus working method
JP4831061B2 (en) Electronic component mounting apparatus and emergency stop method for electronic component mounting apparatus
WO2012157032A1 (en) Printing device
CN107791663B (en) Screen printing apparatus and screen printing method
KR102207774B1 (en) Device and method for detecting position, and method of manufacturing substrate
WO2013080408A1 (en) Component mounting method and component mounting system
EP2522510A1 (en) Printing apparatus
JP7086862B2 (en) Screen printing machine
JP6694778B2 (en) Screen printer
JP2010147288A (en) Electronic component mounting line, and operation method by electronic component mounting line
JP2013214588A (en) Electronic component mounting system
WO2017022109A1 (en) Solder printing machine
JP4972449B2 (en) Substrate transport apparatus and printing apparatus
US9215836B2 (en) Printed circuit board production apparatus and printing machine
JP4013861B2 (en) Screen printing apparatus and screen printing method
JP5122532B2 (en) Transfer method of support pin
JP5229244B2 (en) Electronic component mounting apparatus and work method by electronic component mounting apparatus
JP4858520B2 (en) Screen printing machine and screen printing method
JPH0792190A (en) Inspection equipment for printed board
JP4567511B2 (en) Printing device
JP5146473B2 (en) Screen printing machine and screen printing method
JP5370229B2 (en) Electronic component mounting apparatus and work method by electronic component mounting apparatus
JP4952697B2 (en) Screen printing machine and screen printing method
JP5214516B2 (en) Support pin transfer device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100827

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20100914

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111116

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111122

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111205

R151 Written notification of patent or utility model registration

Ref document number: 4893727

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150106

Year of fee payment: 3