JP4883775B2 - 光学装置、露光装置及びデバイス製造方法 - Google Patents

光学装置、露光装置及びデバイス製造方法 Download PDF

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Publication number
JP4883775B2
JP4883775B2 JP2006220637A JP2006220637A JP4883775B2 JP 4883775 B2 JP4883775 B2 JP 4883775B2 JP 2006220637 A JP2006220637 A JP 2006220637A JP 2006220637 A JP2006220637 A JP 2006220637A JP 4883775 B2 JP4883775 B2 JP 4883775B2
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Japan
Prior art keywords
optical element
measuring
measuring instrument
support
optical
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Expired - Fee Related
Application number
JP2006220637A
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English (en)
Japanese (ja)
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JP2008047653A (ja
JP2008047653A5 (enExample
Inventor
亮 縄田
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Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006220637A priority Critical patent/JP4883775B2/ja
Priority to US11/835,022 priority patent/US7643150B2/en
Publication of JP2008047653A publication Critical patent/JP2008047653A/ja
Publication of JP2008047653A5 publication Critical patent/JP2008047653A5/ja
Application granted granted Critical
Publication of JP4883775B2 publication Critical patent/JP4883775B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2006220637A 2006-08-11 2006-08-11 光学装置、露光装置及びデバイス製造方法 Expired - Fee Related JP4883775B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006220637A JP4883775B2 (ja) 2006-08-11 2006-08-11 光学装置、露光装置及びデバイス製造方法
US11/835,022 US7643150B2 (en) 2006-08-11 2007-08-07 Optical apparatus, exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006220637A JP4883775B2 (ja) 2006-08-11 2006-08-11 光学装置、露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008047653A JP2008047653A (ja) 2008-02-28
JP2008047653A5 JP2008047653A5 (enExample) 2009-10-15
JP4883775B2 true JP4883775B2 (ja) 2012-02-22

Family

ID=39050413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006220637A Expired - Fee Related JP4883775B2 (ja) 2006-08-11 2006-08-11 光学装置、露光装置及びデバイス製造方法

Country Status (2)

Country Link
US (1) US7643150B2 (enExample)
JP (1) JP4883775B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008030664A1 (de) 2008-07-01 2010-01-21 Carl Zeiss Smt Ag Optische Abbildungseinrichtung mit Bestimmung von Abbildungsfehlern
NL2003193A (en) * 2008-08-18 2010-03-09 Asml Netherlands Bv Projection system, lithographic apparatus, method of projecting a beam of radiation onto a target and device manufacturing method.
EP2340148A4 (en) * 2008-09-09 2012-05-02 Univ Cornell OPTICAL GRID FOR A HIGH-PRECISION AND HIGH-RESOLUTION METHOD FOR NANO-PRODUCTION IN SEMICONDUCTOR SIZE
WO2010037575A1 (en) * 2008-09-30 2010-04-08 Asml Netherlands B.V. Projection system and lithographic apparatus
CN102782581B (zh) * 2010-02-23 2015-05-20 Asml荷兰有限公司 光刻设备和器件制造方法
GB2513927A (en) * 2013-05-10 2014-11-12 Zeiss Carl Smt Gmbh Optical element arrangement with an optical element split into optical sub-elements
WO2019134775A1 (en) * 2018-01-04 2019-07-11 Asml Netherlands B.V. Lithographic apparatus and method
DE102019218609A1 (de) * 2019-11-29 2021-06-02 Carl Zeiss Smt Gmbh Abstützung einer optischen einheit
DE102020211691A1 (de) * 2020-09-17 2022-03-17 Carl Zeiss Smt Gmbh Optisches system und lithographieanlage

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3928094A (en) * 1975-01-16 1975-12-23 Fairchild Camera Instr Co Method of aligning a wafer beneath a mask and system therefor and wafer having a unique alignment pattern
JP4194160B2 (ja) * 1998-02-19 2008-12-10 キヤノン株式会社 投影露光装置
JP2000286189A (ja) * 1999-03-31 2000-10-13 Nikon Corp 露光装置および露光方法ならびにデバイス製造方法
JP2004266264A (ja) * 2003-02-13 2004-09-24 Canon Inc 光学系、露光装置、デバイス製造方法
JP2004246060A (ja) * 2003-02-13 2004-09-02 Canon Inc 反射型投影光学系の調整方法
US7589911B2 (en) * 2003-09-18 2009-09-15 Canon Kabushiki Kaisha Technique for positioning optical system element
JP2005236258A (ja) 2003-09-18 2005-09-02 Canon Inc 光学装置およびデバイス製造方法
US7133115B2 (en) * 2003-10-14 2006-11-07 Canon Kabushiki Kaisha Positioning device, exposure apparatus using the positioning device, and device production method

Also Published As

Publication number Publication date
JP2008047653A (ja) 2008-02-28
US20080037029A1 (en) 2008-02-14
US7643150B2 (en) 2010-01-05

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