JP4878829B2 - Mask blank manufacturing method and processing apparatus - Google Patents

Description

  The present invention relates to a method for manufacturing a mask blank for manufacturing a transfer mask used for manufacturing a semiconductor integrated circuit, a liquid crystal display device, and the like, a processing apparatus, and a carriage.

  When manufacturing a semiconductor integrated circuit, a liquid crystal display device, etc., in the process of patterning a thin film using photolithography technology, a transfer mask in which a transfer pattern made of a light-shielding film or the like is formed on a light-transmitting substrate such as a synthetic quartz substrate Is used. To manufacture such a transfer mask, first, a light-transmitting substrate is polished, and then a solid light-shielding film and a solid resist layer are sequentially formed on the main surface. Next, the resist layer is selectively exposed, baked and developed to form a resist pattern, and then a light-shielding film is patterned using the resist pattern as a mask, and a transfer pattern is provided on the surface of the light-transmitting substrate. Manufacturing a transfer mask. Here, mask blanks (both in the stage where a solid light-shielding film or the like is formed on the translucent substrate and in the stage where a solid light-shielding film and a solid resist layer are laminated on the entire surface of the translucent substrate) Or it is called a mask blank).

  Further, in order to manufacture mask blanks, a process of inspecting the translucent substrate for the presence or absence of scratches or foreign matter, the presence or absence of pinholes for the light-shielding film, and the like are performed. Among such processes, for example, in the process of inspecting large mask blanks, a work such as a light-shielding substrate or an intermediate product on which a light-shielding film is formed is mounted on a carriage and transported to an inspection device. Is transferred onto the vibration isolation table of the inspection apparatus.

  However, when the inspection process is performed by the conventional method, the workpiece is transferred from the carriage to the vibration isolation table of the inspection apparatus, and when the inspection is completed, the workpiece needs to be transferred from the vibration isolation table to the carriage. There is a problem that is low. In particular, in the case of a large transparent substrate, the weight may be close to 100 kg, and it takes a lot of trouble to transfer such a heavy object between the carriage and the vibration isolation table. In addition, since the synthetic quartz substrate used as the translucent substrate is extremely expensive, if the corner of the substrate hits a carriage or a vibration isolation table during the transfer operation, a large amount of damage occurs. In order to manufacture mask blanks, processing steps such as a polishing step for the light-transmitting substrate are performed. In these processing apparatuses as well as the inspection step, the workpiece is transferred between the carriage and the processing stand. Since the work is performed, there is a problem similar to the above-described inspection process.

  In view of the above problems, a mask blank that can efficiently perform a processing process such as an inspection process and can reliably perform processing in a state in which chipping or the like is prevented from occurring on a light-transmitting substrate or the like. It is in providing the manufacturing method of this, a processing apparatus, and a trolley | bogie.

In order to solve the above problems, in the present invention, in a mask blank manufacturing method in which a metal film for forming at least a transfer pattern is formed on a main surface of a translucent substrate, the translucent substrate or the translucent substrate is used. Inspection that inspects the workpiece while the workpiece mounted on the cart is connected to the inspection device with the workpiece mounted on the workpiece in the standing state when the mask blanks are manufactured from the optical substrate. The inspection apparatus includes a vibration isolation table connected in a state where the carriage is floated, and a lifting device for floating the carriage, wherein the vibration isolation table is a carriage connection region of the carriage Are provided on both sides of each of the first vibration isolation table and the second vibration isolation table on one side of the workpiece. opposite Second inspection apparatus facing is mounted on the other surface side of the first inspection device and the workpiece, the carriage, the first anti-vibration table portion and a side facing the second anti-vibration table section It has a plate portion which protrudes each, in the inspection process, the lifting device is the first anti-vibration table portion and the second anti-vibration table portion respectively disposed a lifting plate of the plate portion The cart is lifted by being raised in an engaged state, and the cart is connected to the vibration isolation table.

In this invention, when performing the inspection process with respect to the workpiece, since the cart on which the workpiece is mounted is connected to the processing device, the processing can be performed while the workpiece is mounted on the cart. Therefore, it is not necessary to transfer the workpiece between the carriage and the processing board.

In this invention, the said workpiece | work is a translucent board | substrate, In the said test | inspection process, the presence or absence of a damage | wound and a foreign material shall be test | inspected with respect to the main surface of the said translucent board | substrate. Or the said workpiece | work is a translucent board | substrate with which the metal film was formed, and it shall test | inspect the presence or absence of a pinhole with respect to a metal film in the said test process.

Next, the processing apparatus of the present invention includes a processing table on which processing equipment for a workpiece is mounted, and a connecting device that connects the cart on which the workpiece is mounted to the processing table, and the cart is connected to the processing table. A pair of guide portions are provided for guiding on both sides of the cart toward the connection position, and the processing table includes a first vibration isolation table portion and a second vibration removal table that sandwich the cart connection region of the cart on both sides at the connection position. The carriage has a plate portion projecting on each side facing the first vibration isolation table portion and the second vibration isolation table portion, and the coupling device includes the first vibration isolation table portion and the first vibration isolation table portion. And the second vibration isolating table portion, and the lift plate is lifted in a state where the elevator plate is engaged with the plate portion to lift the carriage. , the carriage, the first anti-vibration table portion and connecting said second vibration isolation table portion, of the carriage And surface, in the portion facing the side portion of the carriage in the guide unit is characterized by being composed magnet to direct the same poles each other.

In addition, the processing apparatus of the present invention includes a processing table on which processing equipment for a workpiece is mounted, and a connecting device that connects the cart on which the workpiece is mounted to the processing table, and the processing table is a cart of the cart. A first anti-vibration base and a second anti-vibration base that sandwich the connection region on both sides, wherein the carriage is on a side facing the first anti-vibration base and the second anti-vibration base; The connecting device has a lifting plate disposed on each of the first vibration isolation table portion and the second vibration isolation table portion, and the connection device is connected to the plate. The cart is lifted in a state of being engaged with a portion, the cart is lifted, the cart, the first anti-vibration table portion and the second anti-vibration table portion are connected, and the processing device A first inspection device facing one side of the workpiece on each of the first vibration isolation table and the second vibration isolation table; Characterized in that it is a second inspection device which faces the other surface side of the workpiece.

Furthermore, the processing apparatus of the present invention includes a trolley that can be mounted in a state where a workpiece made of a translucent substrate or a workpiece in the process of manufacturing mask blanks from the translucent substrate is erected, and the trolley on both sides. The first vibration isolation table portion and the second vibration isolation table portion to be sandwiched, and the plate portion projecting on each of the sides facing the first vibration isolation table portion and the second vibration isolation table portion in the carriage When it is mounted on the first anti-vibration table portion, and the first inspection device which faces the one surface of the workpiece, is mounted on the second anti-vibration table portion, opposite to the other surface of the workpiece A second inspection device, and a lift plate that can be engaged with the carriage disposed on each of the first vibration isolation table portion and the second vibration isolation table portion is raised, and the lift plate is moved to the plate portion. to be engaged in a state of being floated said carriage, said carriage, said first anti-vibration table unit and the second dividing And having a lifting device for coupling the platform portion.

In the present invention, the cart is provided with a caster whose direction is reversed when moving forward and backward, and a first magnet provided on the cart and the caster when the caster floats from the floor surface. It is preferable to include a caster automatic reversing device that automatically reverses the caster in a retreating direction by a magnetic repulsive force with the second magnet . When the carriage is moved forward after moving forward, it is necessary to reverse the direction of the caster. When such a caster reversal occurs, conventionally, the cart swings sideways, but if the caster is automatically flipped when it floats from the floor, the cart may swing sideways when the cart is moved backward. Absent. Therefore, even if there are processing tables on both sides of the connecting position of the cart, the cart does not hit the processing table.

  In the present invention, when processing a workpiece, since the cart on which the workpiece is mounted is connected to the processing device, the processing can be performed while the workpiece is mounted on the cart. For this reason, since it is not necessary to transfer a workpiece | work from a trolley | bogie to a processing apparatus, and it is not necessary to transfer a workpiece | work from a processing apparatus to a trolley after a process, work efficiency can be improved. In particular, even in the case of a workpiece having a weight of nearly 100 kg, it takes a lot of time to transfer the workpiece. However, according to the present invention, it is not necessary to perform such a job at all, so that the work efficiency can be greatly improved. it can. In addition, there is no fear that the workpiece hits the cart or the processing device and is missing when the workpiece is transferred between the cart and the processing device.

  Embodiments of the present invention will be described with reference to the drawings. In the following description, as a workpiece, a light-transmitting substrate for manufacturing mask blanks, or a mask blank in the process of manufacturing a mask blank formed with a metal film for forming a transfer pattern on the light-transmitting substrate. An explanation will be given focusing on an example in which inspection is performed.

(Description of mask blanks)
When manufacturing a semiconductor integrated circuit, a liquid crystal display device, etc., in the process of patterning a thin film using photolithography technology, a transfer mask in which a transfer pattern made of a light-shielding film or the like is formed on a light-transmitting substrate such as a synthetic quartz substrate Is used. In order to manufacture such a transfer mask, for example, an inspection process is performed on the translucent substrate to inspect whether there are any scratches or foreign matters. Next, in the polishing step, after polishing the main surface of the translucent substrate, an inspection step is performed to inspect whether the main surface of the translucent substrate is scratched or foreign. Next, in the film forming process, after forming a solid light-shielding film on the main surface of the light-transmitting substrate, an inspection process is performed to inspect the light-shielding film for pinholes. Next, a resist layer is sequentially formed on the light-shielding film to manufacture mask blanks. Next, the resist layer is selectively exposed, baked, and developed to form a resist pattern, and then the light-shielding film is patterned using the resist pattern as a mask to transfer the light-transmitting substrate with the transfer pattern. Manufacture a mask.

(Configuration of inspection process and inspection equipment)
FIG. 1 shows a method of manufacturing a mask blank according to the present invention. A translucent substrate for manufacturing a mask blank or a workpiece made of a product in the process of manufacturing a mask blank from the translucent substrate is mounted on a carriage. It is explanatory drawing which shows a mode that it conveys to an inspection apparatus. 2 (a) and 2 (b) are a side view of the carriage shown in FIG. 1 and a front view showing an enlarged lower portion of the carriage. FIGS. 3A and 3B are a front view schematically showing a state in which the carriage has entered the carriage connection region of the inspection apparatus shown in FIG. 1, and a front view schematically showing the state in which the carriage has floated. It is. FIG. 4 is a plan view of the inspection apparatus shown in FIG. 1 and a guide portion provided in the inspection apparatus.

  In this embodiment, in the inspection process when manufacturing the mask blanks, as shown in FIG. 1, a large and heavy workpiece 10 (light-shielding substrate or intermediate product of mask blanks) of 1200 mm × 1400 mm is mounted on the carriage 20. In this state, it is advanced to the inspection device 3 in the direction indicated by the arrow L and conveyed.

  As shown in FIGS. 1 and 2 (a) and 2 (b), the carriage 20 receives a carriage body 21 having a caster 28 at the bottom, and a lower end portion of the workpiece 10 in an upright position on the carriage body 21. It has the receiving part 22 and a pair of workpiece | work support parts 23 and 24 which clamp the side edge part of the workpiece | work 10 from both sides. The work support portions 23 and 24 are movable between a work support position indicated by a solid line in FIG. 2A and a work release position indicated by a two-dot chain line in FIG. The caster 28 is supported by the carriage main body 21 so as to be rotatable around a vertical axis, and the direction is reversed when the carriage 20 moves forward and backward.

  In the present embodiment, long steel materials 25 and 26 having an L-shaped cross section are fixed to both side portions of the carriage 20, and horizontal plate portions 251 and 261 of the steel materials 25 and 26 project laterally.

  As shown in FIG. 1, FIG. 3A and FIG. 4, the inspection apparatus 3 has a planar U-shaped vibration isolation table 40 made of a steel honeycomb surface plate. The anti-vibration table 40 includes a space serving as a cart connection region 30 at the center thereof, and an open end thereof serves as an entrance / exit of the cart 20. In addition, the vibration isolation table 40 includes a first vibration isolation table portion 41 and a second vibration isolation table portion 42 that sandwich the carriage connection region 30 on both sides. The vibration isolator 40 having such a configuration is obtained by combining the members on the first anti-vibration table portion 41 side and the members on the second anti-vibration table portion 42 side. These two members are directly connected to each other and are also fixed by the frame 43. At the bottom of the vibration isolation table 40, there are an air spring unit 45, a leg 46 with an adjuster for fixing the vibration isolation table 40 to the floor F with the vibration isolation table 40 kept horizontal, and a vibration isolation table 40. A caster 47 used when moving is provided.

  In the inspection apparatus 3, a first inspection unit 31 (inspection equipment) and the first inspection unit 31 are driven on the first vibration isolation table 41 in the X-axis direction, the Y-axis direction, and the Z-axis direction. A first three-axis drive device 36 is mounted. Further, on the second vibration isolation table 42, a second inspection unit 32 (inspection equipment) and a second driving unit for driving the second inspection unit 32 in the X-axis direction, the Y-axis direction, and the Z-axis direction. The three-axis drive device 37 is mounted. Although not shown, the first inspection unit 31 includes an LED, a reflection mirror, and an imaging lens arranged in a front local darkroom, and a cooling CCD camera behind the imaging lens. The second inspection unit 32 includes an LED and a reflection mirror, and the inner surface thereof serves as a trap surface for preventing stray light and forming a local darkroom.

  In the inspection apparatus 3 configured as described above, the steel materials 25 and 26 projecting from both side surfaces of the carriage 20 are formed on the inner surface side of the first vibration isolation table portion 41 and the inner surface side of the second vibration isolation table portion 42. Elevating plates 51 and 52 of the elevating device 5 (connecting device) that are planarly overlapped with each of the horizontal plate portions 251 and 261 at a lower position are arranged. These elevating plates 51 and 52 are connected to an output shaft (not shown) of an air cylinder device attached to the vibration isolation table 40, as shown by arrows U and D in FIGS. 1 and 3A. Can be moved up and down. In addition, as the raising / lowering apparatus 5, it may replace with an air cylinder apparatus and the structure which raises / lowers the raising / lowering plates 51 and 52 with an electric winch may be employ | adopted.

  A stopper unit 39 that receives the carriage 20 when the carriage 20 moves forward to the carriage connection area is formed at the tip of the vibration isolation table 40. The stopper unit 39 includes an auxiliary cylinder (not shown) that applies thrust to the carriage 20 when the carriage 20 is moved backward.

  As shown in FIG. 4, the inspection device 3 is provided with a pair of guide portions 71 and 72 that guide the carriage 20 on both sides toward the carriage connection region 30. Here, each of the pair of guide portions 71 and 72 includes a plurality of guide rollers 710 and 720, and guides the carriage 20 toward the carriage connection region 30 by the guide rollers 710 and 720.

(Operation)
When performing the inspection process on the workpiece 10 using the inspection apparatus 3 configured as described above, the cart 20 mounted with the workpiece 10 standing is moved forward as indicated by the arrow L to be the vibration isolation table 40. To enter the cart connection area 30. At that time, since the cart 20 is guided by the guide portions 71 and 72 on both sides, the cart 20 smoothly enters the cart connection region 30 without hitting the vibration isolation table 40.

  Next, when the inspection device 3 detects that the carriage 20 has entered the carriage connection region 30 by a sensor (not shown), the elevation device 5 is activated, and the elevation plates 51 and 52 are moved as indicated by arrows U. To rise. And as shown in FIG.3 (b), the raising / lowering plates 51 and 52 engage with the horizontal board parts 251 and 261 of the steel materials 25 and 26 which protruded from the both sides | surfaces of the trolley | bogie 20, and make the trolley | bogie 20 from the floor surface F. Ascend and stop. As a result, the cart 20 is connected to the vibration isolation table 40 in a state of floating from the floor surface F.

  In this state, the first inspection unit 31 faces the one surface side (main surface) of the workpiece 10, and the second inspection unit 32 faces the other surface side (back surface) of the workpiece 10. Then, the first three-axis driving device 36 and the second three-axis driving device 37 move the first inspection unit 31 and the second inspection unit 32 in the Z-axis direction to the optimal position. In this state, when light is emitted from the LED of the first inspection unit 31, this light illuminates the workpiece 10, and the light transmitted through the workpiece 10 is reflected by the reflection mirror of the second inspection unit 32. It will be. When light is emitted from the LED of the second inspection unit 32, the light illuminates the work 10 from the back, and the light transmitted through the work 10 is reflected by the reflection mirror of the first inspection unit 31. It will be. In this way, in the first inspection unit 31, the cooled CCD camera images the workpiece 10 in the dark field by the light that has been subjected to multiple reflection and transmission reflection. For this reason, it can be inspected whether the work 10 has scratches or foreign matters attached thereto. Further, when the work 10 is a light-transmitting substrate having a light-shielding film formed thereon, a pin pole can be detected. At that time, the first three-axis driving device 36 and the second three-axis driving device 37 are used to move the first inspection unit 31 and the second inspection unit 32 in the X-axis direction and the Y-axis direction, and the workpiece 10 Each position in the in-plane direction is inspected.

  After the inspection is completed in this manner, the lifting device 5 is operated, and as shown by the arrow D, the lifting plates 51 and 52 are lowered, so that the carriage 20 is landed on the floor surface F. Then, using the thrust of the stopper unit 39, the carriage 20 is retracted from the carriage connection region 30 as shown by the arrow 0 and is taken out of the inspection device 3, and then the workpiece 10 is mounted on the carriage 20 and the next Transport to process.

(Effect of this form)
As described above, in the mask blank manufacturing method and the inspection apparatus 3 according to the present embodiment, when the workpiece 10 is inspected, the carriage 20 on which the workpiece 10 is mounted is connected to the inspection apparatus 3. Inspection can be carried out with the device mounted on. In addition, since the carriage 20 on which the workpiece 10 is mounted is levitated and connected to the vibration isolation table 40 of the inspection apparatus 3, vibration is not transmitted to the workpiece 10. Therefore, a fine inspection can be performed on the workpiece 10 with high accuracy. Moreover, since it is not necessary to transfer the workpiece | work 10 from the trolley | bogie 20 to the inspection apparatus 3, and it is not necessary to transfer the workpiece | work 10 from the inspection apparatus 3 to the trolley | bogie 20 after a test | inspection, work efficiency can be improved. In particular, even in the case of a large workpiece 10 having a weight of nearly 100 kg, it takes a lot of time to transfer the workpiece 10. However, according to this embodiment, it is not necessary to perform such operation at all. Can be improved. Further, when the workpiece 10 is transferred between the carriage 20 and the inspection apparatus 3, there is no fear that the workpiece 10 hits the carriage 20 or the inspection apparatus 3 and is missing.

(Other embodiments)
As shown in FIG. 5, the guide parts 71 and 72 for the carriage 20 are neodymium magnets having the same poles facing the side part of the carriage 20 and the part of the guide parts 71 and 72 facing the side part of the carriage 20. It is preferable to arrange magnets 29 and 70 such as (Nb-Fe-B). If comprised in this way, since the magnetic repulsive force will generate | occur | produce between the trolley | bogie 20 and the guide parts 71 and 72, the trolley | bogie 20 will not rub the guide parts 71 and 72. FIG. Therefore, dust generation due to rubbing between the carriage 20 and the guide portion can be prevented, so that dust does not adhere to the workpiece 10. Further, even if the inspection process is performed in a clean room, the clean room is not contaminated.

  As an example of utilizing such magnetic repulsion, as shown in FIG. 5, a magnet 29 having, for example, an N pole facing outward is formed on the side surface of the carriage 20, while a guide roller 710 as shown in FIG. , A configuration in which the outer peripheral surface of 720 is magnetized to the N pole may be employed.

  6 (a) and 6 (b), the casters 28 of the carriage 20 are enlarged, and the direction is reversed when moving forward (direction indicated by arrow L) and when moving backward (direction indicated by arrow O). It is preferable to provide a caster automatic reversing device 60 for automatically reversing the caster 28 that has been oriented in the forward direction until the caster 28 is lifted from the floor F with respect to the caster 28 to be moved. The caster automatic reversing device 60 shown here includes a first magnet 61 formed of a neodymium magnet or the like formed on the bottom of the carriage main body 21, a neodymium magnet provided on a plate portion 282 extending from the support portion 281 of the caster 28, or the like. And the second magnet 62. Here, the state shown in FIGS. 6A and 6B is a state in which the carriage 20 is moving forward, and the first magnet 61 and the second magnet 62 have the same magnetic pole (for example, N pole). Opposite and close. However, since the caster 28 is in contact with the floor surface F under the weight of the carriage 20, the carriage 20 moves forward even when the magnetic repulsion between the first magnet 61 and the second magnet 62 is received. Remain in the posture.

  In this state, when the caster 28 ascends from the floor surface F when the cart 20 is connected to the inspection apparatus 3, the caster 28 receives the magnetic repulsive force between the first magnet 61 and the second magnet 62. The direction automatically reverses and switches to the direction in which the carriage 20 moves backward. Therefore, after the inspection is completed, when the carriage 20 is retracted from the carriage connection area, the caster 28 has already been reversed, so that the carriage 20 can be smoothly retracted. That is, if the carriage 20 is moved backward with the caster moving the carriage 20 forward as in the prior art, the carriage 20 swings sideways when the caster 28 is reversed. It is necessary to increase the clearance between the base 41 and the clearance between the carriage 20 and the second vibration isolation base 42. However, according to this embodiment, when the carriage 20 is moved backward, it cannot swing sideways. Therefore, the clearance between the carriage 20 and the first vibration isolation table 41 and the carriage 20 and the second vibration isolation table 42 are The clearance between the two can be reduced. Therefore, the inspection accuracy for the workpiece 10 can be improved. Further, according to this embodiment, even if the clearance between the carriage 20 and the first vibration isolation table portion 41 and the clearance between the carriage 20 and the second vibration isolation table portion 42 are reduced, the carriage 20 Is not rubbed against the first vibration isolation table 41 or the second vibration isolation table 42, and dust generation can be prevented.

  In the caster automatic reversing device 60, a magnet that holds the state in which the caster 28 is switched in the retreating direction may be added, or a configuration that uses a biasing force of a spring may be employed.

  Furthermore, in the above embodiment, the present invention is applied to the inspection process for the workpiece 10. However, when manufacturing the mask blanks, the workpiece 10 and the processing table are conventionally used in the processing process such as the polishing process for the translucent substrate. In this processing step, the carriage 20 on which the workpiece 10 is mounted may be connected in a state where it floats on the processing table of the processing apparatus. Further, when it is not necessary to float the carriage 20 depending on the contents of processing, the carriage 20 on which the workpiece 10 is mounted and the processing apparatus are connected by a connecting mechanism on the processing apparatus side, and the workpiece 10 is mounted on the carriage 20. Processing may be performed as it is.

It is explanatory drawing of the manufacturing method of a mask blank to which this invention is applied, and an inspection apparatus. (a), (b) is the side view of the trolley | bogie shown in FIG. 1, and the front view which expands and shows the lower part of a trolley | bogie. (a), (b) is the front view which shows typically the state which made the trolley approach the trolley | bogie connection area | region of the inspection apparatus shown in FIG. 1, and the front view which shows typically the state which floated the trolley | bogie. . It is a top view of the guide part provided in the inspection apparatus shown in FIG. 1, and an inspection apparatus. It is a top view which shows the example of improvement of the guide part shown in FIG. (a), (b) is the top view and side view which show the modified example of the caster of the trolley | bogie shown in FIG.

Explanation of symbols

3 Inspection device 5 Lifting device (coupling device)
10 Workpiece (light shielding substrate or mask blanks in the middle of manufacturing)
20 bogie 28 casters 29, 70 magnet 30 for guide 30 bogie connection area 40 anti-vibration table 41 first anti-vibration table portion 42 second anti-vibration table portions 31, 32 inspection unit (inspection equipment)
36, 37 Triaxial driving devices 51, 52 Lifting plates 61, 62 of lifting device Magnets 71, 72 Guide portions 251, 261 Horizontal plates of the cart

Claims (7)

In the manufacturing method of mask blanks in which a metal film for forming at least a transfer pattern is formed on the main surface of the translucent substrate,
A state in which a trolley mounted in an upright state on a workpiece made of the translucent substrate or a mask blank manufactured from the translucent substrate is connected to an inspection apparatus, and the workpiece is mounted on the trolley. Including an inspection process to inspect the workpiece as it is,
The inspection apparatus includes a vibration isolation table connected in a state where the carriage is levitated, and an elevating device for levitating the carriage,
The vibration isolation table includes a first vibration isolation table portion and a second vibration isolation table portion that sandwich a carriage connection region of the carriage on both sides, and the first vibration isolation table portion and the second vibration isolation table. A first inspection device facing the one surface side of the workpiece and a second inspection device facing the other surface side of the workpiece are mounted on each of the base parts,
The carriage has a plate portion projecting on each of the sides facing the first vibration isolation table and the second vibration isolation table,
In the inspection step, the elevating device raises the elevating plate disposed on each of the first vibration isolating table part and the second vibration isolating table part in a state of being engaged with the plate part. A manufacturing method of mask blanks, wherein a cart is levitated and the cart is connected to the vibration isolation table. The workpiece is a translucent substrate,
The method for manufacturing a mask blank according to claim 1, wherein in the inspection step, the main surface of the translucent substrate is inspected for the presence or absence of scratches or foreign matter. The workpiece is a translucent substrate on which a metal film is formed,
The method for manufacturing a mask blank according to claim 1, wherein in the inspection step, the metal film is inspected for the presence or absence of pinholes. A processing base on which processing equipment for the workpiece is mounted; and a connecting device for connecting a cart on which the workpiece is mounted to the processing base;
A pair of guide portions for guiding the cart on both sides of the cart toward the connection position with the processing table;
The processing table includes a first vibration isolation table portion and a second vibration isolation table portion sandwiching a cart connection region of the cart on both sides at the connection position,
The carriage has a plate portion projecting on each of the sides facing the first vibration isolation table and the second vibration isolation table,
The coupling device includes a lift plate disposed on each of the first vibration isolation table portion and the second vibration isolation table portion, and lifts the lift plate in a state of being engaged with the plate portion. The trolley is lifted to connect the trolley, the first anti-vibration base and the second anti-vibration base,
2. A processing apparatus according to claim 1, wherein magnets having the same poles are formed on a side surface portion of the carriage and a portion of the guide portion facing the side surface portion of the carriage. A processing base on which processing equipment for the workpiece is mounted; and a connecting device for connecting a cart on which the workpiece is mounted to the processing base;
The processing table includes a first vibration isolation table portion and a second vibration isolation table portion that sandwich a cart connection region of the cart on both sides,
The carriage has a plate portion projecting on each of the sides facing the first vibration isolation table and the second vibration isolation table,
The coupling device includes a lift plate disposed on each of the first vibration isolation table portion and the second vibration isolation table portion, and lifts the lift plate in a state of being engaged with the plate portion. The trolley is lifted to connect the trolley, the first anti-vibration base and the second anti-vibration base,
The processing device is opposed to the first inspection device facing the one surface side of the workpiece and the other surface side of the workpiece on each of the first vibration isolation table portion and the second vibration isolation table portion. A processing apparatus which is a second inspection device. A trolley that can be mounted in a standing state with a workpiece made of a translucent substrate or a product in the middle of manufacturing mask blanks from the translucent substrate;
A first anti-vibration table part and a second anti-vibration table part sandwiching the carriage on both sides;
In the carriage, a plate portion projecting on each of the sides facing the first vibration isolation table portion and the second vibration isolation table portion;
A first inspection device mounted on the first vibration isolation table and facing one side of the workpiece;
A second inspection device mounted on the second vibration isolation table and facing the other surface side of the workpiece;
The lift plate that can be engaged with the carriage disposed on each of the first vibration isolation table portion and the second vibration isolation table portion is raised, the lift plate is engaged with the plate portion, and the carriage is moved. A processing apparatus comprising: an elevator device that connects the cart, the first vibration isolation table portion, and the second vibration isolation table portion in a floating state. The cart is a caster whose direction is reversed when moving forward and backward, and a first magnet provided on the cart and a second magnet provided on the caster when the caster floats from the floor surface. 7. A processing apparatus according to claim 4, further comprising a caster automatic reversing device for automatically reversing the caster in a retreating direction by a magnetic repulsive force with the magnet of the other. .

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