JP4861749B2 - Mold apparatus and method for manufacturing molded product - Google Patents

Description

  The present invention relates to a molding apparatus for molding a semiconductor device with a resin and a method for manufacturing a molded product manufactured by the molding apparatus. More specifically, the present invention relates to a molding apparatus for molding a semiconductor device having a semiconductor element and a heat radiating plate attached to both surfaces thereof, and a method for manufacturing a molded product.

  2. Description of the Related Art Conventionally, a semiconductor device in which a heat radiating plate is attached on both sides and a semiconductor element, an electronic circuit, or the like is mounted therebetween is sealed by resin molding. In resin molding, generally, upper and lower molds are clamped with a semiconductor device interposed therebetween, and resin is supplied between them with a plunger. At this time, if the clamping force is applied to the semiconductor device as it is, the electronic circuit of the semiconductor device may be destroyed. On the other hand, if the mold clamping is loose, the resin may enter between the mold and the heat radiating plate, and the resin may adhere to the outer surface of the heat radiating plate, thereby reducing the heat dissipation. Or there exists a possibility that a heat sink may be pressed outward by resin pressure, and may peel from an electronic circuit etc.

On the other hand, a technique is disclosed in which a plurality of spacers are installed between the heat radiating plates and a mold clamping force is received by the spacers (see Patent Document 1). According to the semiconductor device described in this document, the semiconductor element can be prevented from being damaged, and the resin can be prevented from entering the outer surface of the heat sink. Or the manufacturing method which affixes the insulating sheet which has elasticity on the outer side of a heat sink, and clamps is also disclosed (refer patent document 2). According to the manufacturing method of this document, the pressing force can be relaxed by the elasticity of the insulating sheet, and damage to the element can be prevented.
JP 2004-303900 A JP 2002-324816 A

  However, the conventional techniques described above have the following problems. In the technique of Patent Document 1, it is necessary to form a recess for receiving the spacer on the heat sink. In addition, it is necessary to install a plurality of spacers each time for molding. Therefore, the installation work is very complicated. Furthermore, if the relationship between the thickness of the lead frame provided around the semiconductor device and the length of the spacer is not strictly controlled to prevent resin leakage to the outside, there is a risk of resin leakage to the outside. There was a problem.

  Moreover, in the technique described in Patent Document 2, a step of attaching an insulating sheet is necessary. Moreover, if the insulating sheet is flexible, the heat sink is pushed outward by the resin pressure of the mold resin, and there is a problem that the heat sink may be peeled off.

  The present invention has been made to solve the problems of the conventional molding apparatus. That is, it is an object of the present invention to provide a molding apparatus and a method for manufacturing a molded product that prevent both damage to the semiconductor device and adhesion of resin to the outer surface of the heat sink.

  The molding apparatus of the present invention made for the purpose of solving this problem includes a first mold, a second mold that forms a mold chamber together with the first mold, and the first and second molds. A mold material supply section for supplying the mold material to the mold chamber, and the second mold moves in the mold clamping direction, and one surface is a slide that is a contact surface in contact with the object to be molded It has a member and the adjustment member which adjusts the pressing force to the molding target object of a slide member.

  According to the molding apparatus of the present invention, the mold chamber is constituted by the first mold and the second mold, and the mold material is supplied thereto by the mold material supply unit. Objects can be molded. Here, in this invention, the 2nd metal mold | die has a slide member and an adjustment member. The slide member is moved in the mold clamping direction, and its contact surface comes into contact with the object. Since the pressing force of the slide member to the molding object is adjusted by the adjusting member, it can be pressed with an appropriate pressing force. Accordingly, the pressing force can be appropriately selected so as to prevent both the damage of the semiconductor device and the adhesion of the resin to the outer surface of the heat sink.

Furthermore, in the present invention, the back surface of the contact surface of the slide member is a pressed surface that receives a pressing force toward the object to be molded, and the adjustment member has a pressing surface that slidably contacts the pressed surface of the slide member. And a moving member that moves in a direction that intersects the clamping direction, and the pressed surface of the slide member and the pressing surface of the moving member are provided in a direction that intersects the clamping direction, and the movement of the moving member It is inclined with respect to the direction. For this reason , the back surface of the contact surface of the slide member is a pressed surface, and receives a pressing force by the pressing surface of the adjustment member. At this time, since these surfaces are inclined with respect to the moving direction of the moving member in a direction intersecting with the clamping direction, the moving surface is moved in the moving direction to bring the contact surface into the clamping direction. Can be pressed.

Further, in the present invention, the slide device includes a swivel member having a contact surface that comes into contact with the object to be molded, and a back member that is in contact with one place on the back surface of the swivel member and presses a plurality of places on the back surface with a spring. der Ru. For this reason , the slide member can change the angle formed by the contact surface and the inclined surface within a certain range. Therefore, even if the object is inclined to some extent, the contact surface can be reliably brought into contact with the object.

Furthermore, the present invention is a method of manufacturing a molded product in which a molding object is arranged in a mold chamber constituted by first and second molds, and a molding material is supplied into the mold chamber. , Using a slide member that moves in the mold clamping direction, and whose one surface is a contact surface that contacts the object to be molded, and an adjustment member that adjusts the pressing force of the slide member to the object to be molded, One surface of the molding object is placed in contact with the mold chamber of the first mold, the first and second molds are clamped with a part of the molding object sandwiched, and the slide member is moved by the adjusting member. By moving the other side of the mold object until it touches a part other than a part of the mold object, the mold object is pressed and brought into close contact with the mold object, and the mold material is supplied to the mold chamber in that state. Also extends to a method.

Furthermore, the present invention is a method of manufacturing a molded product in which a molding object is arranged in a mold chamber constituted by first and second molds, and a molding material is supplied into the mold chamber. The swivel member moves in the clamping direction, and one surface is in contact with a swivel member that is a contact surface that contacts the object to be molded , and one position on the back surface of the swivel member, and a plurality of positions on the back surface are pressed by a spring, and the swivel The back side surface of the member side surface has a back member that is a pressed surface that receives a pressing force toward the object to be molded, a pressing surface that slidably contacts the pressed surface of the back member, and mold clamping It possesses an adjustment member for adjusting a pressing force to the mold object of the swivel member by moving in a direction intersecting the direction, the pressing surface of the pressing surface and the adjustment member of the back member, the mold clamping direction And is provided in a direction crossing the, using shall inclined with respect to the movement direction of the adjusting member, the mold object was placed on the mold chamber of the first mold, the first and second The mold is clamped, the slide member is pressed against the object to be molded by the adjusting member, and the mold material is supplied into the mold chamber in this state.

  According to the molding apparatus and the method for manufacturing a molded product of the present invention, it is possible to prevent both damage to the semiconductor device and adhesion of resin to the outer surface of the heat sink.

"First form"
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present embodiment, the present invention is applied to a molding apparatus for manufacturing a semiconductor device by molding an electronic circuit including a semiconductor element and a device in which a heat sink is arranged on both sides thereof.

  As shown in FIG. 1, the molding apparatus 1 according to the present embodiment includes a lower mold 11 and an upper mold 12 to form a mold chamber 13, and a plunger 14 that supplies mold resin M into the mold chamber 13. ing. Further, the upper mold 12 has a slide member 21 and a moving member 22 inside thereof (on the mold chamber 13 side). A screw 23 is screwed onto the right surface of the moving member 22 in the figure. The screw 23 passes through the upper mold 12 in a rotatable manner, and its head protrudes to the right outside of the upper mold 12 in the figure.

  The upper mold 12 moves in a direction in which the upper mold 12 is in contact with or separated from the lower mold 11 (vertical direction in FIG. 1). At the time of molding, the object W to be molded is sandwiched between them, and the mold resin M is supplied into the mold chamber 13. Therefore, the vertical direction in the figure is the mold clamping direction. Note that the upper and lower surfaces of the object W are generally parallel, and when the object W is disposed on the lower mold 11, the upper surface becomes a horizontal plane. When the upper mold 12 is moved up and down for clamping, the slide member 21 and the moving member 22 are moved in the vertical direction in the drawing together with the upper mold 12.

  The slide member 21 is attached to the upper mold 12 so as to be slidable in the vertical direction in the figure, that is, in a direction parallel to the mold clamping. The slide member 21 is a contact surface whose lower surface in the drawing is in contact with the upper surface of the object W. The contact surface is a surface (horizontal plane in the figure) perpendicular to the clamping direction of the upper and lower molds 11 and 12. The upper surface of the slide member 21 in the drawing is inclined with respect to the contact surface, and in the drawing, the inclined surface is directed from the upper right to the lower left. This inclined surface is a pressed surface that receives a pressing force toward the object W.

  The moving member 22 is sandwiched between the slide member 21 and the upper mold 12 and is movable in the left-right direction in the figure while being in contact with both. For this purpose, screw holes in the left-right direction in the figure are formed inside the moving member 22. The moving member 22 is moved in the left-right direction in the drawing along the inner surface of the upper mold 12 by the rotation of the screw 23. At this time, the lower surface of the moving member 22 in the drawing is a pressing surface that contacts the pressed surface (inclined surface) of the slide member 21, and this pressing surface is an inclined surface parallel to the pressed surface of the slide member 21. . The pressed surface of the slide member 21 and the pressing surface of the moving member 22 are provided in a direction intersecting the mold clamping direction, and slide smoothly with each other. Further, the upper surface of the moving member 22 slides smoothly with respect to the inner surface of the upper mold 12.

  From these, the moving direction of the moving member 22 is a direction intersecting the mold clamping direction, and is inclined not parallel to the pressed surface of the slide member 21 and the pressing surface of the moving member 22. As the moving member 22 moves, the slide member 21 in contact with the lower surface of the moving member 22 is slid in the vertical direction in the figure. The movement amount of the slide member 21 in the vertical direction in the drawing is smaller than the movement amount of the movement member 22 in the horizontal direction in the drawing. Therefore, it is easy to finely adjust the position of the slide member in the vertical direction in the drawing by moving the moving member 22 by the rotation of the screw 23. The pressing force on the object W is also finely adjusted by fine adjustment of the slide member.

  As shown in FIG. 1, the object W molded by the molding apparatus 1 of this embodiment has a semiconductor element W3 and the like sandwiched between an upper electrode W1 and a lower electrode W2. A lead frame W4 is provided around the object W. The upper electrode W1 and the lower electrode W2 are flat plates parallel to each other and function as a heat sink. At the time of molding, the lower electrode W2 in the drawing is placed in contact with the upper surface of the lower mold 11 in the drawing. Further, the slide member 21 is arranged so that the lower surface in the drawing is in contact with the upper surface of the upper electrode W1. Furthermore, at the time of mold clamping, the lead frame W4 is sandwiched between the lower mold 11 and the upper mold 12 as shown in FIG. This prevents the resin from leaking outside.

  Next, a mold forming method by the mold apparatus 1 of the present embodiment, that is, a method for manufacturing a molded product will be described. First, as shown in FIG. 2, the upper and lower molds 11 and 12 are opened, and the object W is placed between them. At this time, the slide member 21 and the moving member 22 are disposed upward together with the upper mold 12. Further, the screw 23 is in the most loosened position, and the moving member 22 is disposed at the left end portion in the figure. Therefore, the slide member 21 is disposed above the movement range with respect to the upper mold 12.

  Next, the upper and lower molds 11 and 12 are clamped as indicated by arrows in FIG. That is, the upper mold 12, the slide member 21, and the moving member 22 are integrally moved downward in the drawing. As a result, as shown in FIG. 3, the lead frame W4 is sandwiched between the upper and lower molds 11 and 12 and clamped. On the other hand, there is a slight gap between the upper surface of the upper electrode W1 and the lower surface of the slide member 21. Although it is shown exaggeratedly in the figure, it is sufficient if this gap is less than 1 mm. At this time, the clamping force is applied to the lead frame W4 but not to the main body portion of the object W.

  Next, as indicated by an arrow in FIG. 3, the screw 23 is rotated from the outside of the molds 11 and 12. Thereby, the moving member 22 is moved rightward in the figure. Thereby, the pressing surface of the moving member 22 pushes down the inclined surface of the slide member 21, and the slide member 21 is slid downward in the figure as shown in FIG. Thus, the screw 23 is rotated until the lower surface of the slide member 21 contacts the upper surface of the object W. Since it moves via an inclined surface, the pressing force to the target object W of the slide member 21 can be finely adjusted.

  At this time, as the moving member 22 is moved to the right, the pressing force increases. However, as described above, the sliding member 21 moves in the vertical direction in the drawing with respect to the moving amount in the horizontal direction in the drawing. Since the amount of movement is small, the rise of the pressing force becomes gradual. Therefore, it is easy to adjust the pressing force to such an extent that there is no gap between the lower surface of the slide member 21 and the upper surface of the object W and the object W is not damaged. The pressing force applied to the object W by the slide member at this time may be about 1/100 of the mold clamping force or about 1/10 of the resin pressure.

  Subsequently, the plunger 14 is operated to supply resin into the mold chamber 13. At this time, since the upper surface of the object W is in contact with the contact surface of the slide member 21 without a gap, there is no possibility that the resin enters. Further, an upward force due to the resin pressure is applied to the upper electrode W1 of the object W, but since the upper surface is in contact with the slide member 21, the upward movement of the upper electrode W1 is prevented. Therefore, there is no possibility that the upper electrode W1 is peeled off from the object W.

  Thereby, as shown in FIG. 5, the mold chamber 13 is filled with the mold resin. In this state, the mold resin is held for a predetermined time, or a predetermined heat treatment is performed to cure the mold resin. When the mold resin has been cured, open the mold. That is, the upper mold 12 is moved upward in the figure, and the object W solidified by the mold resin is taken out. Thereby, a molded product was obtained. This completes each step of the molding method.

  As described above in detail, according to the molding apparatus 1 of the present embodiment, the plunger 14 is operated in the mold chamber formed by clamping the object W with the lower mold 11 and the upper mold 12 interposed therebetween. Resin is supplied. At this time, a slide member 21 and a moving member 22 that move up and down together with the upper die 12 are provided inside the upper die 12. The lower surface of the slide member 21 is in contact with the object W, and the upper surface is an inclined surface that is in contact with the pressing surface of the moving member 22. Therefore, by moving the moving member 22 to the left and right, the vertical position of the slide member 21 can be easily finely adjusted, and the lower surface of the slide member 21 is applied to the upper surface of the object W with a very small pressure compared to the clamping force. Can be contacted. Therefore, it is possible to prevent the mold resin from adhering to the upper surface without damaging the object W. As a result, the mold apparatus prevents damage to the semiconductor device and adhesion of the resin to the outer surface of the heat sink.

"Second form"
Hereinafter, a second embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present embodiment, the present invention is applied to a molding apparatus for manufacturing a semiconductor device by molding an electronic circuit including a semiconductor element and a device in which a heat sink is arranged on both sides thereof. In addition, the molding apparatus 2 of this embodiment is different from the molding apparatus 1 of the first embodiment in that only the slide member 21 and the moving member 22 provided in the upper mold 12 are changed. The same parts are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 6, the molding apparatus 2 of this embodiment is provided with a slide member 30 having a swivel structure at a portion corresponding to the slide member 21 in the first embodiment. The slide member 30 has a back member 31 and a swivel member 32. A convex portion 33 is formed at the center of the lower surface of the back member 31, and this convex portion 33 is in contact with one place on the upper surface of the swivel member 32. Further, springs 34 are arranged at several places around the convex portion 33, and both end portions thereof are fixed to the back member 31 and the swivel member 32, respectively.

  In this embodiment, the lower surface of the swivel member 32 is a contact surface that contacts the object W, and the upper surface of the back member 31 is an inclined surface. The moving member 22 is the same as in the first embodiment. Since the spring 34 is appropriately expanded and contracted, the contact surface is not necessarily a horizontal plane, and can be inclined in any direction within a certain angle range with respect to the horizontal plane. Therefore, even if the upper surface of the object W is inclined, the contact surface is inclined following the upper surface of the object W and can be contacted without a gap.

  The method of molding with the molding apparatus 2 of this embodiment is the same as that of the first embodiment. That is, the object W is arranged with the upper mold 12 opened, and the mold is clamped. At this time, the moving member 22 and the slide member 30 move up and down in FIG. 6 together with the upper mold 12. Thereafter, the screw 23 is rotated to move the moving member 22 to the right in FIG. Thereby, the back member 31 is pressed downward in the figure. Further, the swivel member 32 also receives a downward force in the figure through the convex portion 33. By this force, the swivel member 32 is pressed along the upper surface of the object W.

  The subsequent steps are the same as in the first embodiment. That is, in this state, the resin may be supplied and cured as in the first embodiment. Since the upper surface of the object W is covered with the swivel member 32, adhesion of the resin is prevented. Further, peeling of the upper electrode W1 due to resin pressure is also prevented.

  As described above in detail, the molding apparatus 2 of the present embodiment can also prevent the molding resin from adhering to the upper surface without damaging the object W. Furthermore, even if the upper surface of the object W is slightly inclined, the upper surface of the object W can be imitated by the inclination between the back member 31 and the swivel member 32. Therefore, the same effect can be obtained for the object W in which the parallelism of the upper and lower electrodes W1, W2 is not very good.

  In addition, this form is only a mere illustration and does not limit this invention at all. Therefore, the present invention can naturally be improved and modified in various ways without departing from the gist thereof. For example, in the above embodiment, the slide member 21 is pressed against the object W by pulling the moving member 22 toward the screw 23, but this may be reversed. That is, if the inclination direction of the pressing surface and the pressed surface is reversed, or the screw attachment side is reversed, the moving member can be pushed away from the screw to press the slide member.

  Further, for example, in the above-described embodiment, the slide member 21 is wedge-shaped and the moving direction of the moving member 22 is horizontal. Adjustment is possible. Furthermore, although the contact surfaces of the slide members 21 and 30 are flat, when the upper surface of the upper electrode W1 is a target object W that is not flat, the shape may be changed as appropriate. What is necessary is just to contact at least the periphery of the upper surface of the target object W. In this embodiment, the slide member and the moving member are provided on the upper die, but may be provided on the lower die. In addition, the object W molded by the molding apparatuses 1 and 2 according to the present embodiment is not limited to a semiconductor device. Any object W to be molded except for the upper and lower surfaces can be used.

It is sectional drawing which shows the molding apparatus which concerns on a 1st form. It is explanatory drawing which shows a mold forming method. It is explanatory drawing which shows a mold forming method. It is explanatory drawing which shows a mold forming method. It is explanatory drawing which shows a mold forming method. It is sectional drawing which shows the molding apparatus which concerns on a 2nd form.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 2 Mold apparatus 11 Lower mold 12 Upper mold 13 Mold chamber 14 Plunger 21, 30 Slide member 22 Moving member 31 Back member 32 Swivel member

Claims (3)

A first mold,
A second mold constituting a mold chamber together with the first mold;
A mold material supply unit for supplying a mold material to a mold chamber constituted by the first and second molds;
The second mold is
A swivel member that moves in the mold clamping direction and whose one surface is in contact with the object to be molded ;
A back which is in contact with one place on the back surface of the swivel member and presses a plurality of places on the back surface with a spring, and the back side surface of the swivel member side is a pressed surface that receives a pressing force toward the molding object. Members,
An adjusting member that has a pressing surface that slidably contacts the pressed surface of the back member, and that adjusts the pressing force of the swivel member against the molding object by moving in a direction intersecting the mold clamping direction. Yes, and
Pressing surface of the pressing surface and the adjustment member of the back member is provided in a direction crossing the clamping direction, and characterized that you have inclined to the direction of movement of the adjusting member mold apparatus. In a method for manufacturing a molded product, in which a molding object is arranged in a mold chamber constituted by first and second molds, and a molding material is supplied into the mold chamber,
As the second mold,
A slide member that moves in the mold clamping direction and whose one surface is in contact with the object to be molded;
Using an adjustment member that adjusts the pressing force of the slide member to the molding object,
Placing one surface of the molding object in contact with the mold chamber of the first mold,
The first and second molds are clamped with a part of the molding object interposed therebetween ,
By moving the slide member by the adjusting member until it contacts a portion other than the part of the other surface of the molding object, it is pressed against the molding object to be brought into close contact therewith ,
In this state, a mold material is supplied into the mold chamber. In a method for manufacturing a molded product, in which a molding object is arranged in a mold chamber constituted by first and second molds, and a molding material is supplied into the mold chamber,
As the second mold,
A swivel member that moves in the mold clamping direction and whose one surface is in contact with the object to be molded ;
A back which is in contact with one place on the back surface of the swivel member and presses a plurality of places on the back surface with a spring, and the back side surface of the swivel member side is a pressed surface that receives a pressing force toward the molding object. Members,
An adjusting member that has a pressing surface that slidably contacts the pressed surface of the back member, and that adjusts the pressing force of the swivel member against the molding object by moving in a direction intersecting the mold clamping direction. Yes, and
Pressing surface of the pressing surface and the adjustment member of the back member is provided in a direction crossing the clamping direction, and, using shall inclined with respect to the direction of movement of the adjusting member,
Placing the object to be molded in the mold chamber of the first mold;
Clamping the first and second molds;
The slide member is pressed against the object to be molded by the adjustment member,
In this state, a mold material is supplied into the mold chamber.

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