JP4849311B2 - 研磨方法、この研磨方法を用いた半導体デバイスの製造方法 - Google Patents
研磨方法、この研磨方法を用いた半導体デバイスの製造方法 Download PDFInfo
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- JP4849311B2 JP4849311B2 JP2005358634A JP2005358634A JP4849311B2 JP 4849311 B2 JP4849311 B2 JP 4849311B2 JP 2005358634 A JP2005358634 A JP 2005358634A JP 2005358634 A JP2005358634 A JP 2005358634A JP 4849311 B2 JP4849311 B2 JP 4849311B2
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- substrate
- polishing
- temperature
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
4 基板保持台
7 冷却液流路
10 研磨工具
11 研磨パッド
25 冷却液供給装置
50 基板
51 基板の表面
Claims (3)
- 円盤状に形成された基板を基板保持台に保持し、前記基板保持台に対向させて設置した研磨工具を前記基板に接触させるとともに前記基板保持台及び前記研磨工具を前記基板の半径方向に相対移動させて前記基板の表面の研磨を行う研磨方法において、
予め取得した、前記基板保持台の温度に対する前記基板の半径方向に沿った研磨速度の分布の依存性を示すデータに基づいて、前記基板の表面全体を平坦形状にし得る前記研磨速度の分布が得られるように前記基板保持台の温度を変化させて前記基板の表面の研磨を行うことを特徴とする研磨方法。 - 前記基板保持台の温度の調節は、前記基板保持台の内部に形成された流体流路に温度調節を施した液体を供給することによって行われることを特徴とする請求項1に記載の研磨方法。
- 前記基板が半導体ウェハであり、請求項1又は2に記載の研磨方法を用いて前記半導体ウェハの表面を平坦化する工程を有したことを特徴とする半導体デバイス製造方法。
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JP2005358634A JP4849311B2 (ja) | 2005-12-13 | 2005-12-13 | 研磨方法、この研磨方法を用いた半導体デバイスの製造方法 |
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JP2005358634A JP4849311B2 (ja) | 2005-12-13 | 2005-12-13 | 研磨方法、この研磨方法を用いた半導体デバイスの製造方法 |
Publications (2)
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JP2007160450A JP2007160450A (ja) | 2007-06-28 |
JP4849311B2 true JP4849311B2 (ja) | 2012-01-11 |
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JP2005358634A Active JP4849311B2 (ja) | 2005-12-13 | 2005-12-13 | 研磨方法、この研磨方法を用いた半導体デバイスの製造方法 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007063232B4 (de) * | 2007-12-31 | 2023-06-22 | Advanced Micro Devices, Inc. | Verfahren zum Polieren eines Substrats |
JP5715034B2 (ja) * | 2011-11-30 | 2015-05-07 | 株式会社東京精密 | 研磨装置による研磨方法 |
JP2016119406A (ja) * | 2014-12-22 | 2016-06-30 | 株式会社荏原製作所 | 基板処理装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0929591A (ja) * | 1995-07-24 | 1997-02-04 | Sony Corp | 基板研磨装置 |
JP4059567B2 (ja) * | 1998-06-30 | 2008-03-12 | 東京エレクトロン株式会社 | 試料研磨装置及び化学機械研磨方法 |
JP2002231672A (ja) * | 2001-01-31 | 2002-08-16 | Mitsubishi Materials Silicon Corp | ウェーハ研磨方法およびその装置 |
JP2003275948A (ja) * | 2002-03-22 | 2003-09-30 | Mitsubishi Electric Corp | 半導体基板の研磨装置 |
JP2004358637A (ja) * | 2003-06-06 | 2004-12-24 | Nikon Corp | 加工室の換気構造、研磨装置、半導体デバイス製造方法、及び半導体デバイス |
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