JP4848319B2 - 圧電ポンプ - Google Patents
圧電ポンプ Download PDFInfo
- Publication number
- JP4848319B2 JP4848319B2 JP2007164740A JP2007164740A JP4848319B2 JP 4848319 B2 JP4848319 B2 JP 4848319B2 JP 2007164740 A JP2007164740 A JP 2007164740A JP 2007164740 A JP2007164740 A JP 2007164740A JP 4848319 B2 JP4848319 B2 JP 4848319B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric layer
- shim
- layer
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000002093 peripheral effect Effects 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 13
- 230000009471 action Effects 0.000 claims description 5
- 239000013013 elastic material Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 190
- 238000006073 displacement reaction Methods 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 18
- 229920001971 elastomer Polymers 0.000 description 13
- 239000007788 liquid Substances 0.000 description 12
- 230000010287 polarization Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000000605 extraction Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Description
11 メインシム
11a 配線突起
12 積層圧電体
12a 下部圧電体層
12b 上部圧電体層
13a 中間電極層
13b シム側電極層
13c 表面電極層
13d 側面電極
13e 取出電極
14 第1給電ライン
15 第2給電ライン
18 導電性ゴム
20 圧電ポンプ
21 ロアハウジング
22 ミドルハウジング
23 アッパハウジング
24 吸入ポート
25 吐出ポート
26 ドライバ回路基板
27 Oリング(環状狭着部材)
28 ガイド(環状狭着部材)
29 環状電極端子
30 吸入流路
31 吐出流路
32、33 逆止弁
40 中間シム
A 大気室
P ポンプ室
Claims (5)
- 導電性金属薄板からなるメインシムと、このメインシム上に形成した圧電体層とを有する圧電振動子;及びこの圧電振動子の周縁の表裏を狭着支持し、該圧電振動子の表裏に形成されたポンプ室と大気室を液密に保持する一対の環状狭着部材;を有し、前記圧電振動子を振動させてポンプ作用を得る圧電ポンプにおいて、
前記圧電振動子は、前記メインシムの一方の面を前記ポンプ室に臨ませ、他方の面に前記圧電体層が少なくとも1層形成されており、
前記一対の環状狭着部材は、ポンプ室側の環状狭着部材が前記メインシムの周縁に当接し、大気室側の環状狭着部材が前記圧電体層の周縁に当接することを特徴とする圧電ポンプ。 - 請求項1記載の圧電ポンプにおいて、前記圧電振動子の圧電体層は、メインシムの他方の面上に形成した下部圧電体層と、この下部圧電体層上に該下部圧電体層とは電気的に分離させて形成した上部圧電体層を有し、この上部圧電体層は前記下部圧電体層より小径であって、前記大気室側の環状狭着部材は、前記上部圧電体層の周縁を開放し、前記下部圧電体層の周縁を狭着支持する圧電ポンプ。
- 請求項1または2記載の圧電ポンプにおいて、前記圧電振動子の複数層の圧電体層の間には、前記メインシムとは別に、機械的復元性を有する金属弾性材料からなる中間シムが介在している圧電ポンプ。
- 請求項3記載の圧電ポンプにおいて、前記中間シムは、前記メインシムより高い機械的復元性を有する圧電ポンプ。
- 請求項3または4記載の圧電ポンプにおいて、前記中間シムは、該中間シム上の圧電体層より大径であり、この中間シムと前記メインシムの周縁及び両シムの間の圧電体層が、前記一対の環状挟着部材によって挟着支持されている圧電ポンプ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007164740A JP4848319B2 (ja) | 2007-02-16 | 2007-06-22 | 圧電ポンプ |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007035878 | 2007-02-16 | ||
JP2007035878 | 2007-02-16 | ||
JP2007164740A JP4848319B2 (ja) | 2007-02-16 | 2007-06-22 | 圧電ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008223754A JP2008223754A (ja) | 2008-09-25 |
JP4848319B2 true JP4848319B2 (ja) | 2011-12-28 |
Family
ID=39706824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007164740A Expired - Fee Related JP4848319B2 (ja) | 2007-02-16 | 2007-06-22 | 圧電ポンプ |
Country Status (2)
Country | Link |
---|---|
US (1) | US20080199331A1 (ja) |
JP (1) | JP4848319B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2241757B1 (en) | 2007-12-03 | 2018-01-03 | Murata Manufacturing Co. Ltd. | Piezoelectric pump |
CN107023462A (zh) * | 2016-01-29 | 2017-08-08 | 研能科技股份有限公司 | 微型气压动力装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7191503B2 (en) * | 2000-09-18 | 2007-03-20 | Par Technologies, Llc | Method of manufacturing a piezoelectric actuator |
JP3951998B2 (ja) * | 2003-09-29 | 2007-08-01 | ブラザー工業株式会社 | 液体移送装置 |
JP2006132476A (ja) * | 2004-11-08 | 2006-05-25 | Alps Electric Co Ltd | 圧電気体ポンプ |
US20060232166A1 (en) * | 2005-04-13 | 2006-10-19 | Par Technologies Llc | Stacked piezoelectric diaphragm members |
-
2007
- 2007-06-22 JP JP2007164740A patent/JP4848319B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-13 US US12/030,436 patent/US20080199331A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2008223754A (ja) | 2008-09-25 |
US20080199331A1 (en) | 2008-08-21 |
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