JP4844879B2 - Surface coated cutting tool with excellent wear resistance with hard coating layer in high speed cutting of heat resistant alloy - Google Patents
Surface coated cutting tool with excellent wear resistance with hard coating layer in high speed cutting of heat resistant alloy Download PDFInfo
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この発明は、Ｔｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の切削加工を、高い発熱を伴う高速切削条件で行った場合にも、硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具（以下、被覆工具という）に関するものである。 In the present invention, even when heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys are cut under high-speed cutting conditions with high heat generation, the hard coating layer exhibits excellent wear resistance. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool).
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるスローアウエイチップ、前記被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに前記被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、また前記スローアウエイチップを着脱自在に取り付けて前記ソリッドタイプのエンドミルと同様に切削加工を行うスローアウエイエンドミル工具などが知られている。 In general, for coated tools, throwaway inserts that are detachably attached to the tip of the cutting tool for turning and planing of various steel and cast iron materials, drilling of the work material, etc. Drills, miniature drills, solid type end mills used for chamfering, grooving, shouldering, etc. of the work material, and the solid type A slow-away end mill tool that performs cutting work in the same manner as an end mill is known.
被覆工具の一つとして、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された工具基体の表面に、
１〜８μｍの層厚を有し、組成式：（ＡｌＸＴｉＹＣｒＱＢＲ）Ｎ（ただし、原子比で、Ｘ＝０．５〜０．８、Ｙ＝１−Ｘ−Ｑ−Ｒ、Ｑ≧０．０６、Ｒ≦０．１を示す）を満足する硬質被覆層を物理蒸着してなる被覆工具が知られており、そして、前記被覆工具の硬質被覆層[以下、（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層という]は、通常の条件下で、合金工具鋼などの高硬度鋼の切削に用いた場合に、すぐれた耐摩耗性を発揮することが知られている。
As one of the coated tools, on the surface of a tool base made of tungsten carbide (hereinafter referred to as WC) based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) based cermet,
Has a layer thickness of 1 to 8 .mu.m, the composition formula: (Al X Ti Y Cr Q B R) N ( provided that an atomic ratio, X = 0.5~0.8, Y = 1 -X-Q-R , Q ≧ 0.06, R ≦ 0.1) is known, and a coated tool formed by physical vapor deposition is known, and a hard coated layer of the coated tool [hereinafter referred to as (Al, The Ti, Cr, B) N layer] is known to exhibit excellent wear resistance when used for cutting high-hardness steel such as alloy tool steel under normal conditions.
さらに、上記の被覆工具が、例えば図２に概略説明図で示される物理蒸着装置の１種であるアークイオンプレーティング装置に上記の工具基体を装入し、ヒータで装置内を、例えば５５０℃の温度に加熱した状態で、アノード電極と所定組成を有するＡｌとＴｉとＣｒとＢの合金（以下、Ａｌ−Ｔｉ−Ｃｒ−Ｂ合金で示す）がセットされたカソード電極（蒸発源）との間に、例えば電流：１００Ａの条件でアーク放電を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して、例えば２．６６Ｐａの反応雰囲気とし、一方上記工具基体には、例えば−１００〜−２００Ｖのバイアス電圧を印加した条件で、前記工具基体の表面に、上記（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより製造されることも知られている。
近年の切削加工装置のＦＡ化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴って切削加工は一段と高速化する傾向にあるが、上記の従来被覆工具においては、これを通常条件での切削加工に用いた場合には問題はないが、これを特に高い発熱を伴うＴｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の高速切削に用いた場合には、硬質被覆層は切削時に発生する高熱によって過熱され、潤滑性が不足したり、また溶着を生じたりするために、摩耗進行が促進され、比較的短時間で使用寿命に至るのが現状である。 In recent years, the use of FA for cutting devices has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting processing, and along with this, cutting processing tends to be further accelerated. In the case of a coated tool, there is no problem when it is used for cutting under normal conditions, but this is particularly suitable for high-speed cutting of heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys with high heat generation. When used, the hard coating layer is overheated by high heat generated during cutting, resulting in insufficient lubricity and welding, thus promoting the progress of wear and reaching the service life in a relatively short time. is the current situation.
そこで、本発明者等は、上述のような観点から、特にＴｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の高速切削加工で、硬質被覆層がすぐれた耐摩耗性を発揮する被覆工具を開発すべく、上記の従来被覆工具に着目し、研究を行った結果、
（イ）例えば図１（ａ）に概略平面図で、同（ｂ）に概略正面図で示される構造の（Ａｌ，Ｔｉ）Ｎ蒸着用アークイオンプレーティング（ＡＩＰ）装置とＣｒ−Ｂ蒸着用マグネトロンスパッタリング（ＳＰ）装置を併設した蒸着装置を用い、装置中央部に工具基体（例えば、超硬基体）装着用回転テーブルを設け、前記回転テーブルを挟んで、一方側に、所定組成のＡｌ−Ｔｉ合金からなるカソード電極（蒸発源）を備えた（Ａｌ，Ｔｉ）Ｎ蒸着用アークイオンプレーティング装置、他方側に、ＣｒＢ２焼結体からなるターゲット（蒸発源）を備えたＣｒ−Ｂ蒸着用マグネトロンスパッタリング装置を対向配設し、また工具基体装着用回転テーブル上に、これの中心軸から半径方向に所定距離離れた位置に複数の工具基体をリング状に装着し、この状態で装置内雰囲気を窒素雰囲気として、前記回転テーブルを回転させると共に、形成される硬質被覆層の層厚均一化を図る目的で工具基体自体も自転させながら、前記の（Ａｌ，Ｔｉ）Ｎ蒸着用アークイオンプレーティング装置のＡｌ−Ｔｉ合金からなるカソード電極（蒸発源）とアノード電極との間にアーク放電を発生させ、それと同時に、対向配設したＣｒ−Ｂ蒸着用マグネトロンスパッタリング装置のＣｒＢ２焼結体からなるターゲット（蒸発源）にパルス電圧を印加しＣｒＢ２をスパッタすると、アークイオンプレーティングとスパッタリングによってＡｌとＴｉとＣｒとＢの窒化物層（以下、（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層で示す）が蒸着形成され、そして、上記窒化物層は、回転テーブル上に配置された工具基体が、上記一方側のＡｌ−Ｔｉ合金のカソード電極（蒸発源）に最も接近した位置で、相対的に、蒸着層中のＡｌ、Ｔｉの含有割合が最大となって、Ｃｒ、Ｂの含有割合が最小となる領域（以下、Ａｌ−Ｔｉ最高含有点という）が形成され、また、前記工具基体が、上記他方側のＣｒＢ２焼結体ターゲット（蒸発源）に最も接近した位置で、相対的に、蒸着層中のＣｒ、Ｂの含有割合が最大となって、Ａｌ、Ｔｉの含有割合が最小となる領域（以下、Ｃｒ−Ｂ最高含有点という）が形成され、上記回転テーブルの回転によって層中には層厚方向に沿って、前記Ａｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点が回転テーブルの回転速度に応じた所定間隔をもって交互に繰り返し現れると共に、前記Ａｌ−Ｔｉ最高含有点から前記Ｃｒ−Ｂ最高含有点、前記Ｃｒ−Ｂ最高含有点から前記Ａｌ−Ｔｉ最高含有点へ、Ａｌ、Ｔｉ、Ｃｒ、Ｂの含有量がそれぞれ連続的に変化する成分濃度分布構造の蒸着層（以下、組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層という）が形成されること。
In view of the above, the inventors of the present invention have a hard coating layer with excellent wear resistance especially in high-speed cutting processing of heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys. As a result of conducting research while focusing on the above-mentioned conventional coated tools in order to develop tools,
(A) For example, an (Al, Ti) N deposition arc ion plating (AIP) apparatus and a Cr-B deposition structure having a structure shown in FIG. 1 (a) in a schematic plan view and in FIG. Using a vapor deposition apparatus provided with a magnetron sputtering (SP) apparatus, a rotary table for mounting a tool substrate (for example, a carbide substrate) is provided in the central portion of the apparatus, and an Al− having a predetermined composition is placed on one side of the rotary table. Arc ion plating apparatus for (Al, Ti) N vapor deposition provided with cathode electrode (evaporation source) made of Ti alloy, Cr—B vapor deposition provided with target (evaporation source) made of CrB 2 sintered body on the other side A plurality of tool substrates are mounted in a ring shape on a rotary table for mounting a tool substrate on a rotary table for mounting the tool substrate at a position spaced apart from the central axis in a radial direction. In this state, the atmosphere in the apparatus is changed to a nitrogen atmosphere, the rotary table is rotated, and the tool base itself is rotated for the purpose of uniforming the thickness of the hard coating layer to be formed, while the (Al, Ti) An arc discharge is generated between the cathode electrode (evaporation source) and the anode electrode made of an Al-Ti alloy of an N deposition arc ion plating apparatus, and at the same time, a Cr-B deposition magnetron sputtering apparatus disposed opposite to each other. When a pulse voltage is applied to a target (evaporation source) made of a CrB 2 sintered body and CrB 2 is sputtered, a nitride layer of Al, Ti, Cr and B (hereinafter referred to as (Al, Ti, Cr, B) N)) is deposited, and the nitride layer is formed by a tool substrate disposed on a turntable. In the position closest to the cathode electrode (evaporation source) of the Al-Ti alloy on one side, the content ratio of Al and Ti in the vapor deposition layer is relatively maximum, and the content ratio of Cr and B is minimum A region (hereinafter referred to as Al-Ti highest content point) is formed, and the tool base is relatively close to the other side of the CrB 2 sintered body target (evaporation source), A region where the content ratio of Cr and B in the vapor deposition layer is maximized and the content ratio of Al and Ti is minimum (hereinafter referred to as the Cr-B maximum content point) is formed, and the rotation table rotates the layer. In the layer thickness direction, the Al-Ti highest content point and the Cr-B highest content point repeatedly appear alternately with a predetermined interval according to the rotation speed of the rotary table, and from the Al-Ti highest content point Cr-B highest content point, before A vapor deposition layer having a component concentration distribution structure in which the content of Al, Ti, Cr, and B continuously changes from the highest content point of Cr-B to the highest content point of Al-Ti (hereinafter referred to as composition change (Al, Ti, Cr, B) N layer) is formed.
（ロ）上記組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層において、そのＡｌ成分は高温硬さ、耐熱性および耐酸化性を向上させ、同Ｔｉ成分は高温強度を向上させ、さらに、同Ｃｒ成分はより一段と高温強度を向上させ、同Ｂ成分は、被削材との反応性を低下させると同時に潤滑性を高める作用があり、したがって相対的にＡｌ，Ｔｉの含有割合が高いＡｌ−Ｔｉ最高含有点では、上記組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層はすぐれた高温硬さ、耐熱性、耐酸化性と所定の高温強度を有するが、その反面、被削材との反応性が高くまた潤滑性も不十分であるために、高速切削条件下では溶着や偏摩耗を生じやすいことから、上記組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層のＡｌ−Ｔｉ最高含有点における潤滑性、非反応性の不足を補う目的で、より一段と優れた高温強度とすぐれた潤滑性、非反応性を備えたＣｒ−Ｂ最高含有点を厚さ方向に交互に介在させることによって、上記組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層全体として、すぐれた高温硬さ、耐熱性、耐酸化性、高温強度、潤滑性および非反応性を具備するようになり、その結果として、高速条件下で耐熱合金の切削加工を行っても溶着、偏摩耗等を生じることなくすぐれた耐摩耗性を発揮するようになること。
以上（イ）、（ロ）に示される研究結果を得たのである。
(B) In the hard coating layer composed of the above-mentioned composition change (Al, Ti, Cr, B) N layer, the Al component improves the high temperature hardness, heat resistance and oxidation resistance, and the Ti component improves the high temperature strength. Furthermore, the Cr component further improves the high-temperature strength, and the B component has the effect of lowering the reactivity with the work material and at the same time improving the lubricity, and therefore relatively containing Al and Ti. At a high Al-Ti highest content point, the hard coating layer composed of the above-mentioned composition change (Al, Ti, Cr, B) N layer has excellent high-temperature hardness, heat resistance, oxidation resistance and predetermined high-temperature strength. However, since the reactivity with the work material is high and the lubricity is insufficient, welding and uneven wear are likely to occur under high-speed cutting conditions. Therefore, the composition change (Al, Ti, Cr, B) Moisture at the highest Al-Ti content point of the N layer In order to compensate for the lack of reactivity and non-reactivity, the above composition is obtained by alternately interposing the highest content points of Cr-B with higher temperature strength, superior lubricity and non-reactivity in the thickness direction. As a whole hard coating layer composed of modified (Al, Ti, Cr, B) N layers, it has excellent high temperature hardness, heat resistance, oxidation resistance, high temperature strength, lubricity and non-reactivity. As a result, even when cutting heat-resistant alloys under high-speed conditions, excellent wear resistance is exhibited without causing welding, uneven wear, or the like.
The research results shown in (a) and (b) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、
炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体を、一方にカソード電極としてＡｌ−Ｔｉ合金を、また、他方にターゲットとしてＣｒＢ２焼結材料を設けた蒸着装置の回転テーブル上に載置し、前記工具基体を回転テーブルで回転させながら、Ａｌ−Ｔｉ合金カソード電極側でのアークイオンプレーティングと、ＣｒＢ２焼結材料ターゲット側でのスパッタリングにより、工具基体表面にＡｌとＴｉとＣｒとＢの窒化物層からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ａ）前記硬質被覆層は１〜８μｍの平均層厚を有し、硬質被覆層の層厚方向に沿って、前記Ａｌ−Ｔｉ合金カソード電極近傍で形成されるＡｌ−Ｔｉ最高含有点と前記ＣｒＢ２焼結材料ターゲット近傍で形成されるＣｒ−Ｂ最高含有点とが０．００５〜０．１μｍの間隔をおいて交互に繰り返し存在し、
（ｂ）前記Ａｌ−Ｔｉ最高含有点から前記Ｃｒ−Ｂ最高含有点、前記Ｃｒ−Ｂ最高含有点から前記Ａｌ−Ｔｉ最高含有点へと、Ａｌ、Ｔｉ、Ｃｒ、Ｂの含有割合がそれぞれ連続的に変化する成分濃度分布構造を有し、
（ｃ）前記Ａｌ−Ｔｉ合金カソード電極近傍で形成される前記Ａｌ−Ｔｉ最高含有点におけるＡｌ成分、Ｔｉ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｑ、Ｒで表したときに、Ｘは０．４０〜０．６０、Ｙは０．３０〜０．５０、Ｑは０．０１〜０．１０、Ｒは０．０１〜０．１０で、かつ、Ｘ＋Ｙ＋Ｑ＋Ｒ＝１を満足し、
（ｄ）前記ＣｒＢ２焼結材料ターゲット近傍で形成される前記Ｃｒ−Ｂ最高含有点におけるＡｌ成分、Ｔｉ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｑ、Ｒで表したときに、Ｘは０．０５〜０．２０、Ｙは０．０５〜０．２０、Ｑは０．２５〜０．４０、Ｒは０．４０〜０．５５で、かつ、Ｘ＋Ｙ＋Ｑ＋Ｒ＝１を満足する組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層を蒸着形成してなる、
耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する被覆工具（表面被覆切削工具）に特徴を有するものである。
This invention was made based on the above research results,
A rotary table of a vapor deposition apparatus in which a tungsten carbide-based cemented carbide or titanium carbonitride-based cermet is provided with an Al—Ti alloy as a cathode electrode on one side and a CrB 2 sintered material as a target on the other side. While the tool base is rotated on a rotary table, Al and Ti are sputtered on the Al—Ti alloy cathode electrode side and sputtering on the CrB 2 sintered material target side, and Al and In a surface-coated cutting tool in which a hard coating layer composed of a nitride layer of Ti, Cr and B is formed by vapor deposition,
(A) The hard coating layer has an average layer thickness of 1 to 8 μm, and the Al-Ti highest content point formed in the vicinity of the Al-Ti alloy cathode electrode along the thickness direction of the hard coating layer and the The Cr-B highest content point formed in the vicinity of the CrB 2 sintered material target is alternately and repeatedly present at an interval of 0.005 to 0.1 μm,
(B) The content ratio of Al, Ti, Cr, B is continuous from the highest Al-Ti content point to the highest Cr-B content point and from the highest Cr-B content point to the highest Al-Ti content point. Has a component concentration distribution structure that changes periodically,
(C) The Al component, Ti component, Cr component, and B component at the Al-Ti highest content point formed in the vicinity of the Al-Ti alloy cathode electrode are X, When represented by Y, Q, and R, X is 0.40 to 0.60, Y is 0.30 to 0.50, Q is 0.01 to 0.10, and R is 0.01 to 0.10. And satisfies X + Y + Q + R = 1,
(D) The Al component, Ti component, Cr component, and B component at the highest Cr-B content point formed in the vicinity of the CrB 2 sintered material target are X, When represented by Y, Q, and R, X is 0.05 to 0.20, Y is 0.05 to 0.20, Q is 0.25 to 0.40, and R is 0.40 to 0.55. And a composition change (Al, Ti, Cr, B) N layer satisfying X + Y + Q + R = 1 is formed by vapor deposition.
It is characterized by a coated tool (surface coated cutting tool) that exhibits excellent wear resistance with a hard coating layer in high-speed cutting of a heat-resistant alloy.
つぎに、この発明の被覆工具の硬質被覆層を構成する組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層に関し、上記の通りに数値限定した理由を説明する。 Next, the reason why the numerical values of the composition change (Al, Ti, Cr, B) N layer constituting the hard coating layer of the coated tool of the present invention are limited as described above will be described.
（ａ）Ａｌ−Ｔｉ最高含有点のＡｌ、Ｔｉ含有割合
組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層におけるＡｌは、高温硬さ、耐熱性および耐酸化性を向上させ、同Ｔｉは高温強度を向上させ、同Ｃｒ成分はより一段と高温強度を高め、さらに同Ｂ成分は被削材との反応性を低下させると同時に潤滑性を高める作用があり、したがって、相対的にＡｌ，Ｔｉ成分の含有割合が高いＡｌ−Ｔｉ最高含有点ではすぐれた高温硬さ、耐熱性、耐酸化性および所定の高温強度を備えるが、Ａｌの含有割合（Ｘ値）が０．４０未満の場合には、硬質被覆層として最小限要求される高温硬さ、耐熱性、耐酸化性を維持することはできず、Ｔｉの含有割合（Ｙ値）が０．３０未満の場合には、高温強度の不足によるチッピング発生の恐れがあり、一方、Ａｌの含有割合（Ｘ値）が０．６０を超えたり、Ｔｉの含有割合（Ｙ値）が０．５０を超えたりしたような場合には、Ｃｒの含有割合（Ｑ値）およびＢの含有割合（Ｒ値）が少なくなりすぎて、硬質被覆層の反応性の低減および潤滑性の向上を図ることができなくなることから、Ａｌの含有割合（Ｘ値）を０．４０〜０．６０、Ｔｉの含有割合（Ｙ値）を０．３０〜０．５０とそれぞれ定めた。
なお、Ａｌ−Ｔｉ最高含有点におけるＣｒ成分の含有割合（Ｑ値）およびＢ成分の含有割合（Ｒ値）は、耐熱合金の高速切削で要求される高温硬さ、耐熱性、耐酸化性を損なわずに所定の高温強度、非反応性、潤滑性を得るという点から、それぞれ、０．０１≦Ｑ≦０．１０、０．０１≦Ｒ≦０．１０の範囲とする必要があり、しかも、Ｘ、Ｙ、Ｑ、Ｒは、Ｘ＋Ｙ＋Ｑ＋Ｒ＝１を満たす数値でなければならない。
(A) Al and Ti content at the highest Al-Ti content point Al (Ti, Cr, B) Al in the N layer improves high temperature hardness, heat resistance and oxidation resistance, and Ti is high temperature Strength is improved, the Cr component further increases the high temperature strength, and the B component has the effect of lowering the reactivity with the work material and at the same time improving the lubricity, and therefore relatively Al and Ti components. When the Al-Ti highest content point is high, it has excellent high-temperature hardness, heat resistance, oxidation resistance and predetermined high-temperature strength, but when the Al content rate (X value) is less than 0.40 The minimum required high-temperature hardness, heat resistance, and oxidation resistance for a hard coating layer cannot be maintained, and if the Ti content (Y value) is less than 0.30, the high-temperature strength is insufficient. There is a risk of chipping due to the presence of Al. When the ratio (X value) exceeds 0.60 or the Ti content ratio (Y value) exceeds 0.50, the Cr content ratio (Q value) and the B content ratio (R Value) becomes too small to reduce the reactivity of the hard coating layer and improve the lubricity, so the Al content ratio (X value) is 0.40 to 0.60, Ti content The ratio (Y value) was set to 0.30 to 0.50.
In addition, the content ratio (Q value) of the Cr component and the content ratio (R value) of the B component at the Al-Ti highest content point are the high-temperature hardness, heat resistance, and oxidation resistance required for high-speed cutting of the heat-resistant alloy. In order to obtain a predetermined high-temperature strength, non-reactivity, and lubricity without damage, it is necessary to set the ranges of 0.01 ≦ Q ≦ 0.10 and 0.01 ≦ R ≦ 0.10, respectively. , X, Y, Q, and R must be numerical values satisfying X + Y + Q + R = 1.
（ｂ）Ｃｒ−Ｂ最高含有点のＣｒ、Ｂ含有割合
硬質被覆層のＣｒ−Ｂ最高含有点において、組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層はすぐれた非反応性と潤滑性を備えるが、硬質被覆層は、これらの特性ばかりでなく、硬質被覆層として最小限要求される高温硬さ、耐熱性、耐酸化性、高温強度を当然備える必要があることから、Ｃｒ−Ｂ最高含有点におけるＣｒ含有割合（Ｑ値）、Ｂ含有割合（Ｒ値）を、Ａｌ，Ｔｉ，Ｃｒ，Ｂの合量に占める割合（原子比）で、それぞれ、０．２５〜０．４０、０．４０〜０．５５と定めた。
つまり、Ｃｒ含有割合（Ｑ値）が０．４０を超えると、あるいは、Ｂ含有割合（Ｒ値）が０．５５を超えると、（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層中のＡｌ、Ｔｉ成分の含有量が減少し、その結果、高温硬さ、耐熱性、高温強度、耐酸化性が不十分となり、切刃にチッピング（微小欠け）などが発生し易くなり、一方、Ｃｒ含有割合（Ｑ値）が０．２５未満になると、あるいは、Ｂ含有割合（Ｒ値）が０．４０未満になると、（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層中のＣｒおよびＢの含有割合が少なくなり過ぎて、より一段の高温強度の向上、反応性の低減作用および潤滑性改善効果を期待できなくなることから、Ｃｒの含有割合（Ｑ値）を０．２５〜０．４０と、また、Ｂの含有割合（Ｒ値）を、０．４０〜０．５５（いずれも、原子比）に定めた。
なお、Ｃｒ−Ｂ最高含有点におけるＡｌ成分の含有割合（Ｘ値）およびＴｉ成分の含有割合（Ｙ値）は、耐熱合金の高速切削で最低限必要とされる高温硬さ、耐熱性、耐酸化性の点から、０．０５≦Ｘ≦０．２０、０．０５≦Ｙ≦０．２０ の範囲であることが必要であり、そして、Ｘ、Ｙは、Ｘ＋Ｙ＋Ｑ＋Ｒ＝１を満たす数値でなければならない。
(B) Cr and B content ratio of Cr-B highest content point At the Cr-B highest content point of the hard coating layer, composition change (Al, Ti, Cr, B) N layer has excellent non-reactivity and lubricity. However, the hard coating layer must have not only these properties but also the minimum required high temperature hardness, heat resistance, oxidation resistance, and high temperature strength as the hard coating layer. The Cr content ratio (Q value) and B content ratio (R value) at the content point are ratios (atomic ratios) to the total amount of Al, Ti, Cr, and B, 0.25 to 0.40, 0, respectively. .40-0.55.
That is, when the Cr content ratio (Q value) exceeds 0.40 or the B content ratio (R value) exceeds 0.55, Al, Ti in the (Al, Ti, Cr, B) N layer As a result, the content of components decreases, resulting in insufficient high-temperature hardness, heat resistance, high-temperature strength, and oxidation resistance, and chipping (minute chipping) is likely to occur on the cutting edge. When the Q value is less than 0.25, or when the B content (R value) is less than 0.40, the Cr and B content in the (Al, Ti, Cr, B) N layer decreases. After that, it is impossible to expect a further improvement in high-temperature strength, a reactivity reduction effect and a lubricity improvement effect, so the Cr content ratio (Q value) is 0.25 to 0.40, The content ratio (R value) was set to 0.40 to 0.55 (both atomic ratios).
In addition, the content ratio (X value) of the Al component and the content ratio (Y value) of the Ti component at the Cr-B highest content point are the minimum required high-temperature hardness, heat resistance, and acid resistance for high-speed cutting of heat-resistant alloys. From the viewpoint of chemical properties, it is necessary that the range is 0.05 ≦ X ≦ 0.20, 0.05 ≦ Y ≦ 0.20, and X and Y must be values satisfying X + Y + Q + R = 1. I must.
（ｃ）Ａｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点間の間隔
この発明の硬質被覆層は、その層厚方向に亘って、窒化物を構成する成分の濃度が、Ａｌ−Ｔｉ最高含有点からＣｒ−Ｂ最高含有点へと、また、Ｃｒ−Ｂ最高含有点からＡｌ−Ｔｉ最高含有点へと連続的に変化するものであるため、例えば、成分濃度が不連続な変化をする複数層の積層構造からなる硬質被覆層に比べれば、複数層間での剥離等の恐れは無く硬質被覆層自体の密着強度・接合強度は非常にすぐれたものであるが、Ａｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点間の間隔が０．００５μm未満ではそれぞれの点を上記の組成で明確に形成することが困難であり、この結果それぞれの層に所望の高温硬さ、耐熱性、高温強度、耐酸化性、非反応性および潤滑性を確保することができなくなり、またその間隔が０．１μmを越えるとそれぞれの点がもつ欠点、すなわちＣｒ−Ｂ最高含有点であれば高温硬さ、耐熱性および耐酸化性の不足、また、Ａｌ−Ｔｉ最高含有点であれば非反応性および潤滑性の不足が層内に局部的に現れ、これが原因で切刃にチッピングが発生し易くなったり、また、摩耗進行が促進されるようになることから、その間隔を０．００５〜０．１μmと定めた。
なお、Ａｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点間の間隔は、（Ａｌ，Ｔｉ）Ｎ蒸着用アークイオンプレーティング（ＡＩＰ）装置とＣｒ−Ｂ蒸着用マグネトロンスパッタリング（ＳＰ）装置を併設した蒸着装置を用い、アークイオンプレーティングとスパッタリングを同時に行って蒸着膜を形成する際に、例えば、工具基体を装着した回転テーブルの回転速度を制御することによって調整することができるので、回転テーブルの回転速度を適宜に設定することにより、Ａｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点間の間隔が上記数値範囲内の所望の値となる組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層を容易に形成することができる。
(C) Interval between Al-Ti highest content point and Cr-B highest content point The hard coating layer of this invention has a concentration of the component constituting the nitride in the layer thickness direction so that the highest content of Al-Ti is contained. Since the point continuously changes from the Cr-B highest content point and from the Cr-B highest content point to the Al-Ti highest content point, for example, a plurality of component concentrations change discontinuously. Compared to a hard coating layer composed of a laminated structure of layers, there is no risk of peeling between multiple layers, and the adhesion strength and bonding strength of the hard coating layer itself are very good, but the Al-Ti highest content point If the distance between the Cr-B highest content points is less than 0.005 μm, it is difficult to clearly form each point with the above composition. As a result, the desired high-temperature hardness, heat resistance, and high-temperature strength are applied to each layer. Ensure oxidation resistance, non-reactivity and lubricity If the distance exceeds 0.1 μm, the disadvantages of the respective points, that is, if the Cr-B highest content point, insufficient high-temperature hardness, heat resistance and oxidation resistance, and Al-Ti highest If it is a content point, non-reactivity and lack of lubricity appear locally in the layer, and this makes it easier for chipping to occur on the cutting edge, and also promotes wear progression, The interval was determined to be 0.005 to 0.1 μm.
The interval between the highest Al-Ti content point and the highest Cr-B content point is provided with an (Al, Ti) N deposition arc ion plating (AIP) device and a Cr-B deposition magnetron sputtering (SP) device. When forming a vapor deposition film by performing arc ion plating and sputtering at the same time using, for example, the rotation table can be adjusted by controlling the rotation speed of the rotation table mounted with the tool base. The composition change (Al, Ti, Cr, B) N in which the interval between the Al-Ti highest content point and the Cr-B highest content point becomes a desired value within the above numerical range by appropriately setting the rotation speed of Layers can be easily formed.
（ｄ）平均層厚
その平均層厚が１μｍ未満では、硬質被覆層が所望の高温硬さ、高温強度、耐熱性、耐酸化性、非反応性および潤滑性を長期に亘って確保することができず、その結果、耐熱合金の高速切削における耐摩耗性の向上を期待することができず、一方、その平均層厚が８μｍを越えると、切刃にチッピングが発生し易くなることから、その平均層厚を１〜８μｍと定めた。
(D) Average layer thickness If the average layer thickness is less than 1 μm, the hard coating layer can ensure the desired high temperature hardness, high temperature strength, heat resistance, oxidation resistance, non-reactivity and lubricity over a long period of time. As a result, it is not possible to expect an improvement in wear resistance in high-speed cutting of a heat-resistant alloy. On the other hand, if the average layer thickness exceeds 8 μm, chipping tends to occur on the cutting edge. The average layer thickness was determined to be 1-8 μm.
この発明の被覆工具は、硬質被覆層を構成する組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層が、全体として、すぐれた高温硬さ、高温強度、耐熱性、耐酸化性を有するとともに、さらに、すぐれた非反応性と潤滑性をも具備することから、Ｔｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金を、特に大きな発熱を伴う高速切削条件で加工した場合であっても、溶着・偏摩耗等を生じることなく長期に亘ってすぐれた耐摩耗性を発揮するものである。 In the coated tool of the present invention, the composition change (Al, Ti, Cr, B) N layer constituting the hard coating layer as a whole has excellent high-temperature hardness, high-temperature strength, heat resistance, oxidation resistance, Furthermore, since it also has excellent non-reactivity and lubricity, even when heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys are processed under high-speed cutting conditions with particularly large heat generation. It exhibits excellent wear resistance over a long period of time without causing welding or uneven wear.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ３Ｃ２粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、ボールミルで７２時間湿式混合し、乾燥した後、１００ＭＰａ の圧力で圧粉体にプレス成形し、この圧粉体を６Ｐａの真空中、温度：１４００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＷＣ基超硬合金製の工具基体Ａ−１〜Ａ−１０を形成した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended in the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. Medium, sintered at 1400 ° C for 1 hour, after sintering, WC-based carbide with honing of R: 0.03 on the cutting edge and chip shape of ISO standard CNMG120408 Alloy tool bases A-1 to A-10 were formed.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ２Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、１００ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を２ｋＰａの窒素雰囲気中、温度：１５００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣＮ基サーメット製の工具基体Ｂ−１〜Ｂ−６を形成した。 In addition, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, mix these raw material powders into the composition shown in Table 2, wet mix for 24 hours with a ball mill, dry, and press-mold into green compact at 100 MPa pressure The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour. After sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to meet ISO standards / Tool bases B-1 to B-6 made of TiCN base cermet having a chip shape of CNMG120408 were formed.
ついで、上記の工具基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図１に示されるアークイオンプレーティング装置とマグネトロンスパッタリング装置を併設した蒸着装置内の回転テーブル上に外周部に沿って装着し、一方側の前記アークイオンプレーティング装置のカソード電極（蒸発源）として、種々の成分組成をもったＡｌ−Ｔｉ合金、他方側のマグネトロンスパッタリング装置のターゲット（蒸発源）としてＣｒＢ２焼結体を装着し、またボンバード洗浄用金属Ｔｉも装着し、まず装置内を排気して０．５Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、前記回転テーブル上で自転しながら回転する工具基体に−１０００Ｖの直流バイアス電圧を印加して、カソード電極の前記金属Ｔｉとアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって工具基体表面をＴｉボンバード洗浄し、
（ｂ）ついで、装置内に反応ガスとして窒素ガスを導入して２Ｐａの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する工具基体に−１００Ｖの直流バイアス電圧を印加して、カソード電極とアノード電極との間に９０Ａの電流を流してアーク放電を発生させ、
（ｃ）また、それと同時に、ＣｒＢ２焼結体のターゲットにパルス電源を用いて３ｋＷのパルス電力を印加してＣｒＢ２をスパッタし、
（ｄ）前記回転テーブル上で自転しながら回転する工具基体の表面に、表３，４に示される目標組成のＡｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点とが交互に、同じく表３、表４に示される目標間隔で繰り返し存在し、また、前記Ａｌ−Ｔｉ最高含有点から前記Ｃｒ−Ｂ最高含有点、前記Ｃｒ−Ｂ最高含有点から前記Ａｌ−Ｔｉ最高含有点へと、Ａｌ、Ｔｉ、Ｃｒ、Ｂの含有割合が連続的に変化する成分濃度分布構造を有し、さらに、同じく表３、表４に示される目標層厚の組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、ＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状の本発明被覆工具１〜１６をそれぞれ製造した。
なお、上記実施例では、Ａｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点との目標間隔は、回転テーブルの回転速度を０．５〜１０ｒｐｍの範囲内で変化させることにより、所定の目標間隔値となるように調整した。
Next, each of the tool bases A1 to A10 and B1 to B6 is ultrasonically cleaned in acetone and dried, and the inside of the vapor deposition apparatus provided with the arc ion plating apparatus and the magnetron sputtering apparatus shown in FIG. Of the arc ion plating apparatus on one side, and the cathode electrode (evaporation source) of the arc ion plating apparatus on one side, Al-Ti alloy having various component compositions, magnetron sputtering apparatus on the other side A CrB 2 sintered body is attached as a target (evaporation source), and a bombard cleaning metal Ti is also attached. First, the inside of the apparatus is evacuated and kept at a vacuum of 0.5 Pa or less, and the inside of the apparatus is heated to 500 ° C. Then, a DC bias voltage of −1000 V is applied to the tool base that rotates while rotating on the rotary table. Then, a current of 100 A is passed between the metal Ti of the cathode electrode and the anode electrode to generate an arc discharge, thereby cleaning the tool base surface with Ti bombardment,
(B) Next, nitrogen gas is introduced as a reaction gas into the apparatus to form a reaction atmosphere of 2 Pa, and a DC bias voltage of −100 V is applied to the tool base that rotates while rotating on the rotary table, and the cathode An arc discharge is generated by passing a current of 90 A between the electrode and the anode electrode,
(C) At the same time, a pulse power of 3 kW is applied to the target of the CrB 2 sintered body using a pulse power source to sputter CrB 2 ,
(D) Al-Ti highest content points and Cr-B highest content points of the target compositions shown in Tables 3 and 4 are alternately formed on the surface of the tool base that rotates while rotating on the rotary table. , Repeatedly present at the target intervals shown in Table 4, and from the Al-Ti highest content point to the Cr-B highest content point, from the Cr-B highest content point to the Al-Ti highest content point, Al , Ti, Cr, B have a component concentration distribution structure in which the content ratio changes continuously, and the compositional change in target layer thickness (Al, Ti, Cr, B) N shown in Tables 3 and 4 is also shown. By depositing a hard coating layer composed of layers, the inventive coated tools 1 to 16 having a throwaway tip shape defined in ISO · CNMG120408 were produced.
In the above embodiment, the target interval between the highest Al-Ti content point and the highest Cr-B content point is determined by changing the rotational speed of the rotary table within a range of 0.5 to 10 rpm. It adjusted so that it might become a value.
また、比較の目的で、これら工具基体Ａ１〜Ａ１０およびＢ１〜Ｂ６を、アセトン中で超音波洗浄し、乾燥した状態で、それぞれ図２に示される通常のアークイオンプレーティング装置に装入し、カソード電極（蒸発源）として、種々の成分組成をもったＡｌ−Ｔｉ−Ｃｒ−Ｂ合金を装着し、さらにボンバード洗浄用金属Ｔｉも装着し、装置内を排気して０．５Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、前記工具基体に−１０００Ｖの直流バイアス電圧を印加して、カソード電極の前記金属Ｔｉとアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって工具基体表面をＴｉボンバード洗浄し、ついで装置内に反応ガスとして窒素ガスを導入して２Ｐａの反応雰囲気とすると共に、前記工具基体に印加するバイアス電圧を−１００Ｖに下げて、前記カソード電極とアノード電極との間に９０Ａの電流を流してアーク放電を発生させ、もって前記工具基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれの表面に、表５，６に示される目標組成および目標層厚をもった組成的に均一の（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、同じくスローアウエイチップ形状の従来被覆工具１〜１６をそれぞれ製造した。 Further, for the purpose of comparison, these tool bases A1 to A10 and B1 to B6 were ultrasonically cleaned in acetone and dried, and each was charged into a normal arc ion plating apparatus shown in FIG. As the cathode electrode (evaporation source), Al-Ti-Cr-B alloys having various components are mounted, and metal Ti for bombard cleaning is also mounted. The inside of the apparatus is evacuated to a vacuum of 0.5 Pa or less. While being held, the inside of the apparatus was heated to 500 ° C. with a heater, a DC bias voltage of −1000 V was applied to the tool base, and a current of 100 A was passed between the metal Ti of the cathode electrode and the anode electrode. Arc discharge is generated, and the surface of the tool base is cleaned with Ti bombardment, and then nitrogen gas is introduced into the apparatus as a reaction gas to obtain a reaction atmosphere of 2 Pa. The bias voltage applied to the tool base is lowered to −100 V, and a current of 90 A is caused to flow between the cathode electrode and the anode electrode to generate arc discharge, whereby each of the tool bases A1 to A10 and B1 to B6. By similarly depositing a hard coating layer composed of a compositionally uniform (Al, Ti, Cr, B) N layer having the target composition and the target layer thickness shown in Tables 5 and 6 on the surface, a slow-away tip is also formed. Shaped conventional coated tools 1-16 were produced respectively.
つぎに、上記の各種の被覆チップを、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆チップ１〜１６および従来被覆チップ１〜１６について、
被削材：質量％で、Ｔｉ−６％Ａｌ−４％Ｖの組成を有する合金の長さ方向等間隔４本縦溝入り丸棒、
切削速度： ６０ ｍ／ｍｉｎ．、
切り込み： １．０ ｍｍ、
送り： ０．２５ ｍｍ／ｒｅｖ．、
切削時間： ５ 分、
の条件（切削条件Ａ）でＴｉ基合金の乾式高速断続切削加工試験（通常の切削速度は、３０ ｍ／ｍｉｎ．）、
被削材：質量％で、Ｎｉ−１９％Ｃｒ−１８．５％Ｆｅ−５．２％Ｃｄ−５％Ｔａ−３％Ｍｏ−０．９％Ｔｉ−０．５％Ａｌの組成を有する合金の丸棒、
切削速度： ６５ ｍ／ｍｉｎ．、
切り込み： １．２ ｍｍ、
送り： ０．１５ ｍｍ／ｒｅｖ．、
切削時間： ６ 分、
の条件（切削条件Ｂ）でのＮｉ基合金の乾式高速連続切削加工試験（通常の切削速度は、４０ｍ／ｍｉｎ．）、
被削材：質量％で、Ｃｏ−２３％Ｃｒ−６％Ｍｏ−２％Ｎｉ−１％Ｆｅ−０．６％Ｓｉ−０．４％Ｃの組成を有する合金の長さ方向等間隔４本縦溝入り丸棒、
切削速度： ５５ ｍ／ｍｉｎ．、
切り込み： １．２ ｍｍ、
送り： ０．２ ｍｍ／ｒｅｖ．、
切削時間： ５ 分、
の条件（切削条件Ｃ）でのＣｏ基合金の乾式高速断続切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、を行い、いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表７に示した。
Next, in the state where each of the above-mentioned various coated chips is screwed to the tip of the tool steel tool with a fixing jig, the present coated chips 1-16 and the conventional coated chips 1-16,
Work material: Round bar with four flutes at equal intervals in the longitudinal direction of an alloy having a composition of Ti-6% Al-4% V in mass%,
Cutting speed: 60 m / min. ,
Cutting depth: 1.0 mm,
Feed: 0.25 mm / rev. ,
Cutting time: 5 minutes,
In the following conditions (cutting conditions A), a dry high-speed intermittent cutting test of a Ti-based alloy (normal cutting speed is 30 m / min.),
Work material: Alloy having a composition of Ni-19% Cr-18.5% Fe-5.2% Cd-5% Ta-3% Mo-0.9% Ti-0.5% Al in mass% Round bar,
Cutting speed: 65 m / min. ,
Cutting depth: 1.2 mm,
Feed: 0.15 mm / rev. ,
Cutting time: 6 minutes,
Dry high-speed continuous cutting test of Ni-based alloy under the conditions (cutting condition B) (normal cutting speed is 40 m / min.),
Work material: 4 equal in the length direction of an alloy having a composition of Co-23% Cr-6% Mo-2% Ni-1% Fe-0.6% Si-0.4% C in mass%. Vertical grooved round bar,
Cutting speed: 55 m / min. ,
Cutting depth: 1.2 mm,
Feed: 0.2 mm / rev. ,
Cutting time: 5 minutes,
The dry high-speed intermittent cutting test (normal cutting speed is 30 m / min.) Of the Co-based alloy under the above conditions (cutting condition C), and measuring the flank wear width of the cutting edge in any cutting test did. The measurement results are shown in Table 7.
原料粉末として、平均粒径：５．５μｍを有する中粗粒ＷＣ粉末、同０．８μｍの微粒ＷＣ粉末、同１．３μｍのＴａＣ粉末、同１．２μｍのＮｂＣ粉末、同１．２μｍのＺｒＣ粉末、同２．３μｍのＣｒ３Ｃ２粉末、同１．５μｍのＶＣ粉末、同１．０μｍの（Ｔｉ，Ｗ）Ｃ［質量比で、ＴｉＣ／ＷＣ＝５０／５０］粉末、および同１．８μｍのＣｏ粉末を用意し、これら原料粉末をそれぞれ表８に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、１００ＭＰａの圧力で所定形状の各種の圧粉体にプレス成形し、これらの圧粉体を、６Ｐａの真空雰囲気中、７℃／分の昇温速度で１３７０〜１４７０℃の範囲内の所定の温度に昇温し、この温度に１時間保持後、炉冷の条件で焼結して、直径が８ｍｍ、１３ｍｍ、および２６ｍｍの３種の工具基体形成用丸棒焼結体を形成し、さらに前記の３種の丸棒焼結体から、研削加工にて、表７に示される組合せで、切刃部の直径×長さがそれぞれ６ｍｍ×１３ｍｍ、１０ｍｍ×２２ｍｍ、および２０ｍｍ×４５ｍｍの寸法、並びにいずれもねじれ角４５度の４枚刃スクエア形状をもったＷＣ基超硬合金製の工具基体（エンドミル）Ｃ−１〜Ｃ−８をそれぞれ製造した。 As raw material powders, medium coarse WC powder having an average particle diameter of 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, NbC powder of 1.2 μm, ZrC of 1.2 μm Powder, 2.3 μm Cr 3 C 2 powder, 1.5 μm VC powder, 1.0 μm (Ti, W) C [by mass ratio, TiC / WC = 50/50] powder, and 1 Prepare 8 μm Co powder, mix these raw material powders with the composition shown in Table 8, add wax, ball mill in acetone for 24 hours, dry under reduced pressure, and press at a pressure of 100 MPa. The green compacts were press-molded, and these green compacts were heated to a predetermined temperature in the range of 1370 to 1470 ° C. at a rate of temperature increase of 7 ° C./min in a 6 Pa vacuum atmosphere. After holding at temperature for 1 hour, sintering under furnace cooling conditions Then, three types of round rod sintered bodies for forming a tool base having diameters of 8 mm, 13 mm, and 26 mm are formed, and further, the three types of round bar sintered bodies are ground and are shown in Table 7. In combination, the diameter x length of the cutting edge is 6 mm x 13 mm, 10 mm x 22 mm, and 20 mm x 45 mm, respectively, and each is made of a WC-based cemented carbide with a 4-flute square shape with a twist angle of 45 degrees Tool bases (end mills) C-1 to C-8 were produced.
ついで、これらの工具基体（エンドミル）Ｃ−１〜Ｃ−８の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図１に示されるアークイオンプレーティング装置とマグネトロンスパッタリング装置を併設した蒸着装置に装入し、上記実施例１と同一の条件で、層厚方向に沿って表９に示される目標組成のＡｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点とが交互に、同じく表９に示される目標間隔で繰り返し存在し、かつ前記Ａｌ−Ｔｉ最高含有点から前記Ｃｒ−Ｂ最高含有点、前記Ｃｒ−Ｂ最高含有点から前記Ａｌ−Ｔｉ最高含有点へと、Ａｌ、Ｔｉ、Ｃｒ、Ｂの含有割合が連続的に変化する成分濃度分布構造を有し、かつ同じく表９に示される目標層厚の組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明被覆エンドミル１〜８をそれぞれ製造した。 Next, the surfaces of these tool substrates (end mills) C-1 to C-8 were ultrasonically cleaned in acetone and dried, and the arc ion plating apparatus and magnetron sputtering apparatus shown in FIG. 1 were also provided. In the vapor deposition apparatus, under the same conditions as in Example 1 above, the Al-Ti highest content point and the Cr-B highest content point of the target composition shown in Table 9 along the layer thickness direction alternately. Repetitively present at the target intervals shown in Table 9, and from the Al-Ti highest content point to the Cr-B highest content point, from the Cr-B highest content point to the Al-Ti highest content point, Al, Ti A hard coating layer having a component concentration distribution structure in which the content ratios of Cr, B and B are continuously changed, and comprising a composition change (Al, Ti, Cr, B) N layer of the target layer thickness also shown in Table 9 Vapor deposition formation Accordingly, the present invention coated end mills 1-8 as the present invention coated tool was produced, respectively.
また、比較の目的で、上記の工具基体（エンドミル）Ｃ−１〜Ｃ−８の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図２に示される通常のアークイオンプレーティング装置に装入し、上記実施例１と同一の条件で、工具基体（エンドミル）Ｃ−１〜Ｃ−８の表面に、表１０に示される目標組成および目標層厚をもった組成的に均一の（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、従来被覆工具としての従来被覆エンドミル１〜８をそれぞれ製造した。 Further, for the purpose of comparison, the surface of the tool base (end mill) C-1 to C-8 is ultrasonically cleaned in acetone and dried, and the ordinary arc ion plating apparatus shown in FIG. Under the same conditions as in Example 1 above, the surfaces of the tool bases (end mills) C-1 to C-8 were uniformly compositionally provided with the target composition and target layer thickness shown in Table 10. Conventional coating end mills 1 to 8 as conventional coating tools were manufactured by vapor-depositing a hard coating layer composed of (Al, Ti, Cr, B) N layers.
つぎに、上記本発明被覆エンドミル１〜８および従来被覆エンドミル１〜８のうち、
本発明被覆エンドミル１〜３および従来被覆エンドミル１〜３については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍの、質量％で、Ｃｏ−２０％Ｃｒ−１５％Ｗ−１０％Ｎｉ−１．５％Ｍｎ−１％Ｓｉ−１％Ｆｅ−０．１２％Ｃの組成を有する合金の板材、
切削速度： ４５ ｍ／ｍｉｎ．、
溝深さ（切り込み）： ３．０ ｍｍ、
テーブル送り： ３００ ｍｍ／分、
の条件でのＣｏ基合金の乾式高速溝切削加工試験（通常の切削速度は、２５ｍ／ｍｉｎ．）、
本発明被覆エンドミル４〜６および従来被覆エンドミル４〜６については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍの、質量％で、Ｎｉ−１９％Ｃｒ−１４％Ｃｏ−４．５％Ｍｏ−２．５％Ｔｉ−２％Ｆｅ−１．２％Ａｌ−０．７％Ｍｎ−０．４％Ｓｉの組成を有する合金の板材、
切削速度： ５０ ｍ／ｍｉｎ．、
溝深さ（切り込み）： ３．５ ｍｍ、
テーブル送り： ３００ ｍｍ／分、
の条件でのＮｉ基合金の乾式高速溝切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、
本発明被覆エンドミル７，８および従来被覆エンドミル７，８については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍの、質量％で、Ｔｉ−３％Ａｌ−２．５％Ｖの組成を有する合金の板材、
切削速度： ４５ ｍ／ｍｉｎ．、
溝深さ（切り込み）： ６．０ ｍｍ、
テーブル送り： ２５０ ｍｍ／分、
の条件でのＴｉ基合金の乾式高速溝切削加工試験（通常の切削速度は、２０ｍ／ｍｉｎ．）
をそれぞれ行い、いずれの溝切削加工試験でも切刃部の外周刃の逃げ面摩耗幅が使用寿命の目安とされる０．１ｍｍに至るまでの切削溝長を測定した。この測定結果を表９，１０にそれぞれ示した。
Next, of the present invention coated end mills 1-8 and the conventional coated end mills 1-8,
About this invention coated end mills 1-3 and conventional coated end mills 1-3,
Work Material-Planar Dimensions: 100 mm × 250 mm, Thickness: 50 mm, Mass%, Co-20% Cr-15% W-10% Ni-1.5% Mn-1% Si-1% Fe-0 An alloy plate having a composition of 12% C;
Cutting speed: 45 m / min. ,
Groove depth (cut): 3.0 mm,
Table feed: 300 mm / min,
A dry high-speed grooving test of a Co-based alloy under the conditions (normal cutting speed is 25 m / min.),
About this invention coated end mills 4-6 and conventional coated end mills 4-6,
Work Material-Plane Dimensions: 100mm x 250mm, Thickness: 50mm, Mass%, Ni-19% Cr-14% Co-4.5% Mo-2.5% Ti-2% Fe-1.2 An alloy plate having a composition of% Al-0.7% Mn-0.4% Si,
Cutting speed: 50 m / min. ,
Groove depth (cut): 3.5 mm,
Table feed: 300 mm / min,
Ni-base alloy dry high-speed grooving test under the conditions (normal cutting speed is 30 m / min.),
For the coated end mills 7 and 8 of the present invention and the conventional coated end mills 7 and 8,
Workpiece material-planar dimensions: 100 mm × 250 mm, thickness: 50 mm, mass%, alloy plate material having a composition of Ti-3% Al-2.5% V,
Cutting speed: 45 m / min. ,
Groove depth (cut): 6.0 mm,
Table feed: 250 mm / min,
Dry high-speed grooving test of Ti-based alloy under the conditions (normal cutting speed is 20 m / min.)
In each groove cutting test, the cutting groove length was measured until the flank wear width of the outer peripheral edge of the cutting edge reached 0.1 mm, which is a guide for the service life. The measurement results are shown in Tables 9 and 10, respectively.
上記の実施例２で製造した直径が８ｍｍ（工具基体Ｃ−１〜Ｃ−３形成用）、１３ｍｍ（工具基体Ｃ−４〜Ｃ−６形成用）、および２６ｍｍ（工具基体Ｃ−７、Ｃ−８形成用）の３種の丸棒焼結体を用い、この３種の丸棒焼結体から、研削加工にて、溝形成部の直径×長さがそれぞれ４ｍｍ×１３ｍｍ（工具基体Ｄ−１〜Ｄ−３）、８ｍｍ×２２ｍｍ（工具基体Ｄ−４〜Ｄ−６）、および１６ｍｍ×４５ｍｍ（工具基体Ｄ−７、Ｄ−８）の寸法、並びにいずれもねじれ角３０度の２枚刃形状をもったＷＣ基超硬合金製の工具基体（ドリル）Ｄ−１〜Ｄ−８をそれぞれ製造した。
The diameters produced in Example 2 above were 8 mm (for forming the tool bases C-1 to C-3), 13 mm (for forming the tool bases C-4 to C-6), and 26 mm (tool bases C-7 and C). -8 for forming), and from these three types of round bar sintered bodies, the diameter x length of the groove forming part is 4 mm x 13 mm (tool base D) by grinding. −1 to D-3), 8 mm × 22 mm (tool base D-4 to D-6), and 16 mm × 45 mm (tool bases D-7 and D-8), and all having a twist angle of 30
ついで、これらの工具基体（ドリル）Ｄ−１〜Ｄ−８の切刃に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図１に示されるアークイオンプレーティング装置とマグネトロンスパッタリング装置を併設した蒸着装置に装入し、上記実施例１と同一の条件で、層厚方向に沿って表１１に示される目標組成のＡｌ−Ｔｉ最高含有点とＣｒ−Ｂ最高含有点とが交互に、同じく表１１に示される目標間隔で繰り返し存在し、かつ前記Ａｌ−Ｔｉ最高含有点から前記Ｃｒ−Ｂ最高含有点、前記Ｃｒ−Ｂ最高含有点から前記Ａｌ−Ｔｉ最高含有点へと、Ａｌ、Ｔｉ、Ｃｒ、Ｂの含有割合が連続的に変化する成分濃度分布構造を有し、かつ同じく表１１に示される目標層厚の組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明被覆ドリル１〜８をそれぞれ製造した。 Then, the cutting edges of these tool bases (drills) D-1 to D-8 are subjected to honing, ultrasonically cleaned in acetone, and dried, and the arc ion plating apparatus shown in FIG. The Al-Ti highest content point and the Cr-B highest content point of the target composition shown in Table 11 along the layer thickness direction under the same conditions as in Example 1 above were charged in a vapor deposition device equipped with a magnetron sputtering device. Are alternately present at the target intervals shown in Table 11, and from the Al-Ti highest content point to the Cr-B highest content point, from the Cr-B highest content point to the Al-Ti highest content point. The compositional change of the target layer thickness (Al, Ti, Cr, B) N, which has a component concentration distribution structure in which the content ratio of Al, Ti, Cr, B continuously changes and is also shown in Table 11 Layered hard By the covering layer vapor deposited, the present invention coated drill 1-8 as the present invention coated tool was produced, respectively.
また、比較の目的で、上記の工具基体（ドリル）Ｄ−１〜Ｄ−８の表面に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図２に示される通常のアークイオンプレーティング装置に装入し、上記実施例１と同一の条件で、工具基体（ドリル）Ｄ−１〜Ｄ−８の表面に、表１２に示される目標組成および目標層厚をもった組成的に均一の（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、従来被覆工具としての従来被覆ドリル１〜８をそれぞれ製造した。 For comparison purposes, the surfaces of the above-mentioned tool bases (drills) D-1 to D-8 are subjected to honing, ultrasonically cleaned in acetone, and dried, as shown in FIG. The sample was charged into an arc ion plating apparatus, and had the target composition and target layer thickness shown in Table 12 on the surfaces of the tool bases (drills) D-1 to D-8 under the same conditions as in Example 1. Conventionally coated drills 1 to 8 as conventional coated tools were manufactured by vapor-depositing a hard coating layer composed of a compositionally uniform (Al, Ti, Cr, B) N layer.
つぎに、上記本発明被覆ドリル１〜８および従来被覆ドリル１〜８のうち、
本発明被覆ドリル１〜３および従来被覆ドリル１〜３については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍの、質量％で、Ｃｏ−２０％Ｃｒ−２０％Ｎｉ−４％Ｍｏ−４％Ｗ−４％Ｃｄ−３％Ｆｅ−１．５％Ｍｎ−０．７％Ｓｉ−０．３８％Ｃの組成を有する合金の板材、
切削速度： ３５ ｍ／ｍｉｎ．、
送り： ０．２ ｍｍ／ｒｅｖ、
穴深さ： ８ ｍｍ、
の条件でのＣｏ基合金の湿式高速穴あけ切削加工試験（通常の切削速度は、２０ｍ／ｍｉｎ．）、
本発明被覆ドリル４〜６および従来被覆ドリル４〜６については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍの、質量％で、Ｔｉ−６％Ａｌ−４％Ｖの組成を有する合金の板材、
切削速度： ４５ ｍ／ｍｉｎ．、
送り： ０．１５ ｍｍ／ｒｅｖ、
穴深さ： １５ ｍｍ、
の条件でのＴｉ基合金の湿式高速穴あけ切削加工試験（通常の切削速度は、２５ｍ／ｍｉｎ．）、
本発明被覆ドリル７，８および従来被覆ドリル７，８については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍの、質量％で、Ｎｉ−１９％Ｃｒ−１８．５％Ｆｅ−５．２％Ｃｄ−５％Ｔａ−３％Ｍｏ−０．９％Ｔｉ−０．５％Ａｌ−０．３％Ｓｉ−０．２％Ｍｎ−０．０５％Ｃｕ−０．０４％Ｃの組成を有する合金の板材、
切削速度： ５０ ｍ／ｍｉｎ．、
送り： ０．２５ ｍｍ／ｒｅｖ、
穴深さ： ２０ ｍｍ、
の条件でのＮｉ基合金の湿式高速穴あけ切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、
をそれぞれ行い、いずれの湿式高速穴あけ切削加工試験（水溶性切削油使用）でも、先端切刃面の逃げ面摩耗幅が０．３ｍｍに至るまでの穴あけ加工数を測定した。この測定結果を表１１，１２にそれぞれ示した。
Next, among the above-mentioned present invention coated drills 1-8 and conventional coated drills 1-8,
About this invention coated drill 1-3 and conventional coated drill 1-3,
Work Material-Planar Dimensions: 100 mm × 250 mm, Thickness: 50 mm, Mass%, Co-20% Cr-20% Ni-4% Mo-4% W-4% Cd-3% Fe-1.5 An alloy plate having a composition of% Mn-0.7% Si-0.38% C;
Cutting speed: 35 m / min. ,
Feed: 0.2 mm / rev,
Hole depth: 8 mm,
Wet high-speed drilling test of Co-based alloy under the conditions of (normal cutting speed is 20 m / min.),
About this invention coated drill 4-6 and conventional coated drills 4-6,
Workpiece material—planar dimensions: 100 mm × 250 mm, thickness: 50 mm, mass%, alloy plate material having a composition of Ti-6% Al-4% V,
Cutting speed: 45 m / min. ,
Feed: 0.15 mm / rev,
Hole depth: 15 mm,
A wet high-speed drilling test of a Ti-based alloy under the conditions (normal cutting speed is 25 m / min.),
About this invention covering drills 7 and 8 and conventional covering drills 7 and 8,
Work Material—Plane Size: 100 mm × 250 mm, Thickness: 50 mm, Mass%, Ni-19% Cr-18.5% Fe-5.2% Cd-5% Ta-3% Mo-0.9 An alloy plate having a composition of% Ti-0.5% Al-0.3% Si-0.2% Mn-0.05% Cu-0.04% C,
Cutting speed: 50 m / min. ,
Feed: 0.25 mm / rev,
Hole depth: 20 mm,
Wet high-speed drilling test of Ni-based alloy under the conditions (normal cutting speed is 30 m / min.),
In each wet high-speed drilling test (using water-soluble cutting oil), the number of drilling processes until the flank wear width of the tip cutting edge surface reached 0.3 mm was measured. The measurement results are shown in Tables 11 and 12, respectively.
この結果得られた本発明被覆工具としての本発明被覆チップ１〜１６、本発明被覆エンドミル１〜８、および本発明被覆ドリル１〜８の硬質被覆層を構成する組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層のＡｌ−Ｔｉ最高含有点およびＣｒ−Ｂ最高含有点の組成を、透過型電子顕微鏡を用いてのエネルギー分散Ｘ線分析法により測定したところ、それぞれ目標組成のＡｌ−Ｔｉ最高含有点およびＣｒ−Ｂ最高含有点と実質的に同じ組成を示した。また、従来被覆工具としての従来被覆チップ１〜１６、従来被覆エンドミル１〜８、および従来被覆ドリル１〜８の硬質被覆層を構成する組成的に均一な（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層の組成を、透過型電子顕微鏡を用いてのエネルギー分散Ｘ線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。
As a result, the composition changes (Al, Ti, Cr) constituting the hard coating layers of the present coated chips 1 to 16, the present coated end mills 1 to 8, and the present coated drills 1 to 8 as the present coated tool obtained as a result. B) The composition of the Al-Ti highest content point and the Cr-B highest content point of the N layer was measured by energy dispersive X-ray analysis using a transmission electron microscope. The composition was substantially the same as the content point and the highest content point of Cr-B. Further, compositionally uniform (Al, Ti, Cr, B) N constituting the hard coating layers of the conventional coated tips 1 to 16, the conventional coated end mills 1 to 8, and the conventional coated drills 1 to 8 as conventional coated tools. The composition of the layers was measured by energy dispersive X-ray analysis using a transmission electron microscope, and each showed substantially the same composition as the target composition.
また、上記の硬質被覆層の平均層厚を走査型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値（５ヶ所の平均値）を示した。 Moreover, when the average layer thickness of said hard coating layer was cross-sectional measured using the scanning electron microscope, all showed the average value (average value of five places) substantially the same as target layer thickness.
表７、９〜１２に示される結果から、本発明被覆工具は、Ｔｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の高熱発生を伴う高速条件下での切削加工に用いた場合であっても、硬質被覆層を構成する組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層が、全体として、すぐれた高温硬さ、高温強度、耐熱性、耐酸化性、さらに、すぐれた非反応性と潤滑性を備えていることによって、溶着、偏摩耗の発生がなく、長期に亘ってすぐれた耐摩耗性を発揮するのに対して、硬質被覆層が組成的に均一な（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層で構成された従来被覆工具においては、高速切削加工で高熱発生を伴うことにより、溶着・偏摩耗が発生し、これが原因で比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 7 and 9-12, the coated tool of the present invention is used for cutting under high-speed conditions accompanied by high heat generation of heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys. Even so, the composition change (Al, Ti, Cr, B) N layer constituting the hard coating layer as a whole has excellent high temperature hardness, high temperature strength, heat resistance, oxidation resistance, and excellent non-reaction. It has excellent heat resistance over a long period of time without the occurrence of welding and uneven wear, and the hard coating layer is compositionally uniform (Al, Ti , Cr, B) In conventional coated tools composed of N layers, high heat generation is involved in high-speed cutting, which causes welding and partial wear, which can lead to a service life in a relatively short time. it is obvious.
上述のように、この発明の被覆工具は、一般鋼や普通鋳鉄などの切削加工は勿論のこと、高い発熱を伴うＴｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の高速切削加工に用いた場合でも、長期に亘ってすぐれた耐摩耗性を発揮し、すぐれた切削性能を示すものであるから、切削加工装置のＦＡ化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention is suitable for high-speed cutting of heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys with high heat generation, as well as cutting of general steel and ordinary cast iron. Even when it is used, it exhibits excellent wear resistance over a long period of time and exhibits excellent cutting performance. Therefore, FA of cutting equipment, labor saving and energy saving of cutting, and cost reduction It is possible to cope with the above sufficiently.
Claims (1)
（ａ）前記硬質被覆層は１〜８μｍの平均層厚を有し、硬質被覆層の層厚方向に沿って、前記Ａｌ−Ｔｉ合金カソード電極近傍で形成されるＡｌ−Ｔｉ最高含有点と前記ＣｒＢ２焼結材料ターゲット近傍で形成されるＣｒ−Ｂ最高含有点とが０．００５〜０．１μｍの間隔をおいて交互に繰り返し存在し、
（ｂ）前記Ａｌ−Ｔｉ最高含有点から前記Ｃｒ−Ｂ最高含有点、前記Ｃｒ−Ｂ最高含有点から前記Ａｌ−Ｔｉ最高含有点へと、Ａｌ、Ｔｉ、Ｃｒ、Ｂの含有割合がそれぞれ連続的に変化する成分濃度分布構造を有し、
（ｃ）前記Ａｌ−Ｔｉ合金カソード電極近傍で形成される前記Ａｌ−Ｔｉ最高含有点におけるＡｌ成分、Ｔｉ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｑ、Ｒで表したときに、Ｘは０．４０〜０．６０、Ｙは０．３０〜０．５０、Ｑは０．０１〜０．１０、Ｒは０．０１〜０．１０で、かつ、Ｘ＋Ｙ＋Ｑ＋Ｒ＝１を満足し、
（ｄ）前記ＣｒＢ２焼結材料ターゲット近傍で形成される前記Ｃｒ−Ｂ最高含有点におけるＡｌ成分、Ｔｉ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｑ、Ｒで表したときに、Ｘは０．０５〜０．２０、Ｙは０．０５〜０．２０、Ｑは０．２５〜０．４０、Ｒは０．４０〜０．５５で、かつ、Ｘ＋Ｙ＋Ｑ＋Ｒ＝１を満足する組成変化（Ａｌ，Ｔｉ，Ｃｒ，Ｂ）Ｎ層を蒸着形成してなる、
耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具。
A rotary table of a vapor deposition apparatus in which a tungsten carbide-based cemented carbide or titanium carbonitride-based cermet is provided with an Al—Ti alloy as a cathode electrode on one side and a CrB 2 sintered material as a target on the other side. While the tool base is rotated on a rotary table, Al and Ti are sputtered on the Al—Ti alloy cathode electrode side and sputtering on the CrB 2 sintered material target side, and Al and In a surface-coated cutting tool in which a hard coating layer composed of a nitride layer of Ti, Cr and B is formed by vapor deposition,
(A) The hard coating layer has an average layer thickness of 1 to 8 μm, and the Al-Ti highest content point formed in the vicinity of the Al-Ti alloy cathode electrode along the thickness direction of the hard coating layer and the The Cr-B highest content point formed in the vicinity of the CrB 2 sintered material target is alternately and repeatedly present at an interval of 0.005 to 0.1 μm,
(B) The content ratio of Al, Ti, Cr, B is continuous from the highest Al-Ti content point to the highest Cr-B content point and from the highest Cr-B content point to the highest Al-Ti content point. Has a component concentration distribution structure that changes periodically,
(C) The Al component, Ti component, Cr component, and B component at the Al-Ti highest content point formed in the vicinity of the Al-Ti alloy cathode electrode are X, When represented by Y, Q, and R, X is 0.40 to 0.60, Y is 0.30 to 0.50, Q is 0.01 to 0.10, and R is 0.01 to 0.10. And satisfies X + Y + Q + R = 1,
(D) The Al component, Ti component, Cr component, and B component at the highest Cr-B content point formed in the vicinity of the CrB 2 sintered material target are X, When represented by Y, Q, and R, X is 0.05 to 0.20, Y is 0.05 to 0.20, Q is 0.25 to 0.40, and R is 0.40 to 0.55. And a composition change (Al, Ti, Cr, B) N layer satisfying X + Y + Q + R = 1 is formed by vapor deposition.
A surface-coated cutting tool that exhibits high wear resistance with a hard coating layer in high-speed cutting of heat-resistant alloys.
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