JP4844884B2 - A surface-coated cutting tool that exhibits excellent chipping resistance and wear resistance due to its excellent hard coating layer in high-speed cutting of heat-resistant alloys - Google Patents
A surface-coated cutting tool that exhibits excellent chipping resistance and wear resistance due to its excellent hard coating layer in high-speed cutting of heat-resistant alloys Download PDFInfo
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この発明は、Ｔｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の切削加工を、高い発熱を伴う高速切削条件で行った場合にも、硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具（以下、被覆工具という）に関するものである。 The present invention provides excellent chipping resistance and wear resistance even when cutting heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys under high-speed cutting conditions with high heat generation. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits the properties.
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるスローアウエイチップ、前記被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに前記被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、また前記スローアウエイチップを着脱自在に取り付けて前記ソリッドタイプのエンドミルと同様に切削加工を行うスローアウエイエンドミル工具などが知られている。 In general, for coated tools, throwaway inserts that are detachably attached to the tip of the cutting tool for turning and planing of various steel and cast iron materials, drilling of the work material, etc. Drills, miniature drills, solid type end mills used for chamfering, grooving, shouldering, etc. of the work material, and the solid type A slow-away end mill tool that performs cutting work in the same manner as an end mill is known.
被覆工具の一つとして、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された工具基体の表面に、ＡｌとＣｒの窒化物、あるいは、ＡｌとＣｒとＢの窒化物からなる硬質被覆層を物理蒸着してなる被覆工具が知られており、そして、前記被覆工具の硬質被覆層は、通常の条件下で、各種の一般鋼や普通鋳鉄などの切削に用いた場合には、すぐれた切削性能を発揮することが知られている。 As one of the coated tools, a nitride of Al and Cr is formed on the surface of a tool base made of tungsten carbide (hereinafter referred to as WC) based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) based cermet. Alternatively, a coated tool formed by physically vapor-depositing a hard coating layer composed of nitrides of Al, Cr, and B is known, and the hard coating layer of the coated tool is made of various general steels under normal conditions. It is known to exhibit excellent cutting performance when used for cutting steel and ordinary cast iron.
さらに、上記のごとき硬質被覆層を有する被覆工具が、例えば図２に概略説明図で示されるアークイオンプレーティング装置に上記の工具基体を装入し、ヒータで装置内を加熱し、窒素ガスを導入して所定雰囲気圧を形成し、アノード電極と所定組成のカソード電極（蒸発源）との間にアーク放電を発生させ、前記工具基体の表面に、所定の硬質被覆層を蒸着することにより製造されることも知られている。
近年の切削加工装置のＦＡ化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴って切削加工は一段と高速化する傾向にあるが、上記の従来被覆工具においては、これを通常条件での切削加工に用いた場合には問題はないが、これを特に高い発熱を伴うＴｉ合金、Ｎｉ合金、Ｆｅ合金等の耐熱合金の高速切削に用いた場合には、硬質被覆層は切削時に発生する高熱によって過熱され、潤滑性が不足したり、また溶着を生じたりするために、偏摩耗の発生、チッピングの発生が避けられず、その結果、比較的短時間で使用寿命に至るのが現状である。 In recent years, the use of FA for cutting devices has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting processing, and along with this, cutting processing tends to be further accelerated. In the case of a coated tool, there is no problem when it is used for cutting under normal conditions. However, when this is used for high-speed cutting of heat-resistant alloys such as Ti alloys, Ni alloys, Fe alloys, etc. with particularly high heat generation. In this case, the hard coating layer is overheated by the high heat generated at the time of cutting, resulting in insufficient lubricity and welding, so that the occurrence of uneven wear and chipping cannot be avoided. The current situation is that the service life is reached in a short time.
そこで、本発明者等は、上述のような観点から、特に高速切削加工で、硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する被覆工具を開発すべく、上記の従来被覆工具に着目し、研究を行った結果、
（イ）例えば図１（ａ）に概略平面図で、同（ｂ）に概略正面図で示される構造の（Ａｌ，Ｃｒ）Ｎ蒸着用アークイオンプレーティング（ＡＩＰ）装置とＣｒ−Ｂ蒸着用マグネトロンスパッタリング（ＳＰ）装置を併設した蒸着装置を用い、装置中央部に工具基体（例えば、超硬基体）装着用回転テーブルを設け、前記回転テーブルを挟んで、一方側に、所定組成のＡｌ−Ｃｒ合金からなるカソード電極（蒸発源）を備えた（Ａｌ，Ｃｒ）Ｎ蒸着用アークイオンプレーティング装置、他方側に、ＣｒＢ２焼結体からなるターゲット（蒸発源）を備えたＣｒ−Ｂ蒸着用マグネトロンスパッタリング装置を対向配設し、また工具基体装着用回転テーブル上に、これの中心軸から半径方向に所定距離離れた位置に複数の工具基体をリング状に装着し、この状態で装置内雰囲気を窒素雰囲気として、前記回転テーブルを回転させると共に、形成される硬質被覆層の層厚均一化を図る目的で工具基体自体も自転させながら、前記の（Ａｌ，Ｃｒ）Ｎ蒸着用アークイオンプレーティング装置のＡｌ−Ｃｒ合金からなるカソード電極（蒸発源）とアノード電極との間にアーク放電を発生させ、それと同時に、対向配設したＣｒ−Ｂ蒸着用マグネトロンスパッタリング装置のＣｒＢ２焼結体からなるターゲット（蒸発源）にパルス電圧を印加しＣｒＢ２をスパッタすると、アークイオンプレーティングとスパッタリングによってＡｌとＣｒとＢの窒化物層（以下、（Ａｌ，Ｃｒ，Ｂ）Ｎ層で示す）が蒸着形成され、そして、上記窒化物層は、回転テーブル上に配置された工具基体が、上記一方側のＡｌ−Ｃｒ合金のカソード電極（蒸発源）に最も接近した位置で、相対的に、蒸着層中のＡｌの含有割合が最大となりＢの含有割合が最小となる領域（以下、Ａｌ最高含有点という）が形成され、また、前記工具基体が、上記他方側のＣｒＢ２焼結体ターゲット（蒸発源）に最も接近した位置で、相対的に、蒸着層中のＢの含有割合が最大となって、Ａｌの含有割合が最小となる領域（以下、Ｂ最高含有点という）が形成され、上記回転テーブルの回転によって層中には層厚方向に沿って、前記Ａｌ最高含有点とＢ最高含有点が回転テーブルの回転速度に応じた所定間隔をもって交互に繰り返し現れると共に、前記Ａｌ最高含有点から前記Ｂ最高含有点、前記Ｂ最高含有点から前記Ａｌ最高含有点へ、Ａｌ、Ｂの含有量がそれぞれ連続的に変化する成分濃度分布構造の蒸着層（以下、組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層という）が形成されること。
In view of the above, in order to develop a coated tool that exhibits excellent chipping resistance and wear resistance with a hard coating layer, particularly in high-speed cutting, the present inventors have developed the above-mentioned conventional coated tool. As a result of paying attention and conducting research,
(A) For example, an (Al, Cr) N deposition arc ion plating (AIP) apparatus and a Cr-B deposition structure having a structure shown in FIG. 1 (a) in a schematic plan view and in FIG. Using a vapor deposition apparatus provided with a magnetron sputtering (SP) apparatus, a rotary table for mounting a tool substrate (for example, a carbide substrate) is provided in the central portion of the apparatus, and an Al− having a predetermined composition is placed on one side of the rotary table. Arc ion plating apparatus for (Al, Cr) N vapor deposition equipped with a cathode electrode (evaporation source) made of a Cr alloy, and Cr—B vapor deposition equipped with a target (evaporation source) made of a CrB 2 sintered body on the other side. A plurality of tool substrates are mounted in a ring shape on a rotary table for mounting a tool substrate on a rotary table for mounting the tool substrate at a position spaced apart from the central axis in a radial direction. In this state, the atmosphere in the apparatus is changed to a nitrogen atmosphere, the rotary table is rotated, and the tool base itself is rotated for the purpose of uniforming the thickness of the hard coating layer to be formed, while the (Al, Cr) An arc discharge is generated between the cathode electrode (evaporation source) and the anode electrode made of an Al—Cr alloy of an arc deposition apparatus for N deposition, and at the same time, a magnetron sputtering apparatus for Cr—B deposition disposed oppositely. When a pulse voltage is applied to a target (evaporation source) made of a CrB 2 sintered body and CrB 2 is sputtered, a nitride layer of Al, Cr, and B (hereinafter referred to as (Al, Cr, B)) by arc ion plating and sputtering. N nitride layer is formed by vapor deposition, and the nitride layer is formed on the one side of the tool base disposed on the rotary table. A region where the Al content in the vapor deposition layer is relatively the largest and the B content is the smallest at the position closest to the cathode electrode (evaporation source) of the 1-Cr alloy (hereinafter referred to as the Al highest content point). In addition, the content ratio of B in the vapor deposition layer is relatively maximum at a position where the tool base is closest to the CrB 2 sintered body target (evaporation source) on the other side. A region where the Al content is minimized (hereinafter referred to as the B highest content point) is formed, and the Al highest content point and the B highest content point are formed in the layer along the layer thickness direction by rotation of the rotary table. Appear alternately and at predetermined intervals according to the rotation speed of the rotary table, and the contents of Al and B from the Al highest content point to the B highest content point and from the B highest content point to the Al highest content point are as follows. Each continuously changing Deposition layer of component concentration distribution structure (hereinafter, compositional change (Al, Cr, B) that N layer) that is formed.
（ロ）上記組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層において、そのＡｌ成分は高温硬さ、耐熱性および耐酸化性を向上させ、同Ｃｒ成分は高温強度を向上させ、また、Ｂ成分は被削材との反応性を低下させると同時に潤滑性を高める作用があり、したがって相対的にＡｌの含有割合が高いＡｌ最高含有点では、上記組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層はすぐれた高温硬さ、耐熱性、耐酸化性と所定の高温強度を有するが、その反面、被削材との反応性が高くまた潤滑性も不十分であるために、耐熱合金の高速切削条件下では溶着、チッピング、偏摩耗を生じやすいことから、上記組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層のＡｌ最高含有点における潤滑性、非反応性の不足を補う目的で、所定の高温強度とすぐれた潤滑性、非反応性を備えたＢ最高含有点を厚さ方向に交互に介在させることによって、上記組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層全体として、すぐれた高温硬さ、耐熱性、耐酸化性、高温強度とともにすぐれた潤滑性および非反応性を具備するようになり、その結果として、高速条件下で耐熱合金の切削加工を行ってもチッピング、溶着、偏摩耗等を生じることなくすぐれた耐摩耗性を発揮するようになること。
以上（イ）、（ロ）に示される研究結果を得たのである。
(B) In the hard coating layer composed of the above composition change (Al, Cr, B) N layer, the Al component improves high temperature hardness, heat resistance and oxidation resistance, and the Cr component improves high temperature strength, Further, the B component has the effect of lowering the reactivity with the work material and at the same time improving the lubricity. Therefore, at the highest Al content point where the Al content is relatively high, the composition change (Al, Cr, B ) Hard coating layer consisting of N layer has excellent high temperature hardness, heat resistance, oxidation resistance and predetermined high temperature strength, but on the other hand, it has high reactivity with the work material and insufficient lubricity. For this reason, welding, chipping, and uneven wear are likely to occur under high-speed cutting conditions of heat-resistant alloys. Therefore, lack of lubricity and non-reactivity at the Al highest content point of the above composition change (Al, Cr, B) N layer. Precise high temperature strength and excellent lubrication to compensate By interposing the highest B content points with non-reactivity alternately in the thickness direction, the entire hard coating layer composed of the above-mentioned composition change (Al, Cr, B) N layer has excellent high temperature hardness and heat resistance. As a result, chipping, welding, uneven wear, etc. occur even when cutting heat-resistant alloys under high-speed conditions. It will show excellent wear resistance without any problems.
The research results shown in (a) and (b) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、
炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体を、一方にカソード電極としてＡｌ−Ｃｒ合金を、また、他方にターゲットのＣｒＢ２焼結材料を設けた蒸着装置の回転テーブル上に載置し、前記工具基体を回転テーブルで回転させながら、Ａｌ−Ｃｒ合金カソード電極側でのアークイオンプレーティングと、ＣｒＢ２焼結材料ターゲット側でのスパッタリングにより、工具基体表面にＡｌとＣｒとＢの窒化物層からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ａ）前記硬質被覆層は１〜８μｍの平均層厚を有し、硬質被覆層の層厚方向に沿って、前記Ａｌ−Ｃｒ合金カソード電極近傍で形成されるＡｌ最高含有点と前記ＣｒＢ２焼結材料ターゲット近傍で形成されるＢ最高含有点とが０．００５〜０．１μｍの間隔をおいて交互に繰り返し存在し、
（ｂ）前記Ａｌ最高含有点から前記Ｂ最高含有点、前記Ｂ最高含有点から前記Ａｌ最高含有点へと、Ａｌ、Ｂの含有割合がそれぞれ連続的に変化する成分濃度分布構造を有し、
（ｃ）前記Ａｌ−Ｃｒ合金カソード電極近傍で形成される前記Ａｌ最高含有点におけるＡｌ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｚで表したときに、Ｘは０．４〜０．６５、Ｙは０．３〜０．５０、Ｚは０．０５〜０．２０で、かつ、Ｘ＋Ｙ＋Ｚ＝１を満足し、
（ｄ）前記ＣｒＢ２焼結材料ターゲット近傍で形成される前記Ｂ最高含有点におけるＡｌ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｚで表したときに、Ｘは０．１５〜０．３５、Ｙは０．２５〜０．４０、Ｚは０．４０〜０．５５で、かつ、Ｘ＋Ｙ＋Ｚ＝１を満足する組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層を蒸着形成してなる、
耐熱合金の高速切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する被覆工具（表面被覆切削工具）に特徴を有するものである。
This invention was made based on the above research results,
A rotary table of a vapor deposition apparatus in which a tungsten carbide based cemented carbide or titanium carbonitride based cermet is provided with an Al—Cr alloy as a cathode electrode on one side and a target CrB 2 sintered material on the other side. While the tool base is rotated on a rotary table, Al and Cr are sputtered on the cathode side of the Al—Cr alloy cathode and sputtering on the target side of the CrB 2 sintered material. In a surface-coated cutting tool in which a hard coating layer composed of a nitride layer of Cr and B is formed by vapor deposition,
(A) The hard coating layer has an average layer thickness of 1 to 8 μm, and the highest Al content point formed in the vicinity of the Al—Cr alloy cathode electrode and the CrB 2 along the thickness direction of the hard coating layer. The B highest content point formed in the vicinity of the sintered material target is alternately present at intervals of 0.005 to 0.1 μm,
(B) From the Al highest content point to the B highest content point, from the B highest content point to the Al highest content point, having a component concentration distribution structure in which the content ratios of Al and B change continuously,
(C) The Al component, the Cr component, and the B component at the Al highest content point formed in the vicinity of the Al—Cr alloy cathode electrode are represented by X, Y, and Z, respectively. X is 0.4 to 0.65, Y is 0.3 to 0.50, Z is 0.05 to 0.20, and X + Y + Z = 1 is satisfied,
(D) The Al component, Cr component, and B component at the B highest content point formed in the vicinity of the CrB 2 sintered material target are represented by X, Y, and Z, respectively. X is 0.15 to 0.35, Y is 0.25 to 0.40, Z is 0.40 to 0.55, and composition change satisfying X + Y + Z = 1 (Al, Cr, B) N layer is formed by vapor deposition.
It is characterized by a coated tool (surface coated cutting tool) that exhibits excellent chipping resistance and wear resistance in a high-speed cutting of a heat-resistant alloy with a hard coating layer.
つぎに、この発明の被覆工具の硬質被覆層を構成する組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層に関し、上記の通りに数値限定した理由を説明する。 Next, the reason why the numerical values of the composition change (Al, Cr, B) N layer constituting the hard coating layer of the coated tool of the present invention are limited as described above will be described.
（ａ）Ａｌ最高含有点のＡｌ含有割合
組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層におけるＡｌは、高温硬さ、耐熱性および耐酸化性を向上させ、同Ｃｒ成分は高温強度を向上させるとともに、また、Ｂ成分は被削材との反応性を低下させると同時に潤滑性を高める作用がある。したがって相対的にＡｌ成分の含有割合が高いＡｌ最高含有点ではすぐれた高温硬さ、耐熱性、耐酸化性を備えるが、Ａｌの含有割合（Ｘ値）が０．４未満の場合には、硬質被覆層として最小限要求される高温硬さ、耐熱性、耐酸化性を維持することはできず、一方、Ａｌの含有割合（Ｘ値）が０．６５を超えたりしたような場合には、Ｃｒの含有割合（Ｙ値）およびＢの含有割合（Ｚ値）が少なくなりすぎて、硬質被覆層のすぐれた高温強度を維持することが困難になるばかりか、反応性の低減および潤滑性の向上を図ることができなくなることから、Ａｌの含有割合（Ｘ値）を０．４〜０．６５（ただし、原子比）とそれぞれ定めた。
なお、組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層におけるＣｒ成分は、アークイオンプレーティングとスパッタリングの双方で供給されるため、アークイオンプレーティングのカソード電極組成あるいはスパッタリング条件等によって影響を受けるものの、他の成分Ａｌ，Ｂに比較すれば、層の厚み方向で大きな含有割合の変化は少なく、しかも、Ｃｒは高温強度を向上させる成分であることから、組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層はその厚み方向全体にわたり、すぐれた高温強度を備えたものとなり、その結果として、耐チッピング性が非常に優れたものとなるが、Ａｌ最高含有点におけるＣｒ成分の含有割合（Ｙ値）は、高温硬さ、耐熱性、耐酸化性を損なわずに所定の高温強度を保持するという点から、０．３≦Ｙ≦０．５０の範囲とする必要があり、さらに、Ａｌ最高含有点におけるＢ成分の含有割合（Ｒ値）は、耐熱合金の高速切削で要求される非反応性、潤滑性を発揮させるためには、０．０５≦Ｚ≦０．２０の範囲とする必要があり、そして、Ｘ、Ｙ、Ｚは、Ｘ＋Ｙ＋Ｚ＝１を満たす数値である。
(A) Al content ratio of Al highest content point Al in composition change (Al, Cr, B) N layer improves high temperature hardness, heat resistance and oxidation resistance, and Cr component improves high temperature strength In addition, the B component has the effect of reducing the reactivity with the work material and at the same time improving the lubricity. Therefore, it has excellent high temperature hardness, heat resistance, and oxidation resistance at the Al highest content point where the content ratio of the Al component is relatively high, but when the Al content ratio (X value) is less than 0.4, If the minimum required high-temperature hardness, heat resistance, and oxidation resistance of the hard coating layer cannot be maintained, on the other hand, if the Al content (X value) exceeds 0.65 , Cr content ratio (Y value) and B content ratio (Z value) become too small, making it difficult to maintain the excellent high temperature strength of the hard coating layer, as well as reducing reactivity and lubricity. Therefore, the Al content (X value) was set to 0.4 to 0.65 (however, the atomic ratio).
In addition, since the Cr component in the composition change (Al, Cr, B) N layer is supplied by both arc ion plating and sputtering, it is influenced by the cathode electrode composition of the arc ion plating or sputtering conditions, Compared to the other components Al and B, the change in composition ratio (Al, Cr, B) N layer is small because there is little change in the content ratio in the thickness direction of the layer, and Cr is a component that improves high temperature strength. Is provided with excellent high-temperature strength throughout its thickness direction, and as a result, the chipping resistance is very excellent, but the content ratio (Y value) of the Cr component at the Al highest content point is: In order to maintain a predetermined high temperature strength without impairing the high temperature hardness, heat resistance and oxidation resistance, it is necessary to make the range 0.3 ≦ Y ≦ 0.50 Furthermore, the content ratio (R value) of the B component at the highest Al content point is 0.05 ≦ Z ≦ 0.O in order to exhibit the non-reactivity and lubricity required in high-speed cutting of heat-resistant alloys. It is necessary to make it into the range of 20, and X, Y, and Z are numerical values satisfying X + Y + Z = 1.
（ｂ）Ｂ最高含有点のＢ含有割合
硬質被覆層のＢ最高含有点において、組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層は所定の高温強度とすぐれた非反応性、潤滑性を備えるが、硬質被覆層は、耐熱合金の高速切削に耐えるに足る最低限の高温硬さ、耐熱性、耐酸化性、高温強度を備える必要があることから、Ｂ最高含有点におけるＣｒ含有割合（Ｙ値）およびＢ含有割合（Ｚ値）を、Ａｌ，Ｃｒ，Ｂの合量に占める割合（原子比）で、それぞれ、０．２５〜０．４、０．４０〜０．５５と定めた。
つまり、Ｃｒ含有割合（Ｙ値）およびＢ含有割合（Ｚ値）が、それぞれ０．４および０．５５を超えると、（Ａｌ，Ｃｒ，Ｂ）Ｎ層中のＣｒ含有割合、Ｂ含有割合が増大する反面、Ａｌ成分の含有量が減少し、その結果、高温硬さ、耐熱性、耐酸化性が不十分となり、耐摩耗性が低下し、一方、Ｃｒ含有割合（Ｙ値）、Ｂ含有割合（Ｚ値）が、それぞれ０．２５未満および０．４０未満になると、（Ａｌ，Ｃｒ，Ｂ）Ｎ層中のＢの含有割合が少なくなり過ぎ、反応性の低減作用および潤滑性改善効果が期待できなくなり、また、Ｃｒ含有割合の減少により、一段と優れた高温強度の向上も望めなくなることから、Ｂ最高含有点におけるＣｒの含有割合（Ｙ値）およびＢの含有割合（Ｚ値）を、それぞれ、０．２５〜０．４、０．４０〜０．５５（いずれも、原子比）に定めた。
なお、Ｂ最高含有点におけるＡｌ成分の含有割合（Ｘ値）は、耐熱合金の高速切削で最低限必要とされる高温硬さ、耐熱性、耐酸化性の点から、０．１５≦Ｘ≦０．３５の範囲であることが必要であり、そして、Ｘ、Ｙ、Ｚは、Ｘ＋Ｙ＋Ｚ＝１を満たす数値である。
(B) B content ratio of B highest content point At the B highest content point of the hard coating layer, the composition change (Al, Cr, B) N layer has a predetermined high temperature strength and excellent non-reactivity and lubricity, The hard coating layer must have the minimum high-temperature hardness, heat resistance, oxidation resistance, and high-temperature strength sufficient to withstand high-speed cutting of a heat-resistant alloy, so the Cr content ratio at the highest B content point (Y value) And B content ratio (Z value) was determined as a ratio (atomic ratio) occupying the total amount of Al, Cr, B as 0.25 to 0.4 and 0.40 to 0.55, respectively.
That is, when the Cr content ratio (Y value) and the B content ratio (Z value) exceed 0.4 and 0.55, respectively, the Cr content ratio and the B content ratio in the (Al, Cr, B) N layer are On the other hand, the content of the Al component decreases, and as a result, the high temperature hardness, heat resistance and oxidation resistance become insufficient, and the wear resistance decreases. On the other hand, the Cr content (Y value) and B content When the ratio (Z value) is less than 0.25 and less than 0.40, respectively, the content ratio of B in the (Al, Cr, B) N layer becomes too small, reducing the reactivity and improving the lubricity. In addition, since it is not possible to expect a further improvement in high-temperature strength due to a decrease in the Cr content ratio, the Cr content ratio (Y value) and the B content ratio (Z value) at the highest B content point 0.25 to 0.4 and 0.40 to 0.5, respectively. (Both atomic ratio) was defined.
In addition, the content ratio (X value) of the Al component at the highest B content point is 0.15 ≦ X ≦ from the viewpoint of the high temperature hardness, heat resistance, and oxidation resistance that are minimum required for high-speed cutting of the heat-resistant alloy. It is necessary to be in the range of 0.35, and X, Y, and Z are numerical values that satisfy X + Y + Z = 1.
（ｃ）Ａｌ最高含有点とＢ最高含有点間の間隔
この発明の硬質被覆層は、その層厚方向に亘って、窒化物を構成する成分の濃度が、Ａｌ最高含有点からＢ最高含有点へと、また、Ｂ最高含有点からＡｌ最高含有点へと連続的に変化するものであるため、例えば、成分濃度が急激に不連続な変化をする複数層の積層構造からなる硬質被覆層に比べると、複数層間での剥離等の恐れは無く硬質被覆層自体の密着強度・接合強度は非常にすぐれたものである。しかし、Ａｌ最高含有点とＢ最高含有点間の間隔が０．００５μm未満ではそれぞれの点を上記の組成で明確に形成することが困難であり、この結果それぞれの層に所望の高温硬さ、高温強度、耐熱性、耐酸化性、非反応性および潤滑性を確保することができなくなり、またその間隔が０．１μmを越えるとそれぞれの点がもつ欠点、すなわちＢ最高含有点であれば高温硬さ、耐酸化性および耐熱性の不足、また、Ａｌ最高含有点であれば非反応性および潤滑性の不足が層内に局部的に現れ、これが原因で摩耗進行が促進されるようになることから、その間隔を０．００５〜０．１μmと定めた。
なお、Ａｌ最高含有点とＢ最高含有点間の間隔は、（Ａｌ，Ｃｒ）Ｎ蒸着用アークイオンプレーティング（ＡＩＰ）装置とＢ蒸着用マグネトロンスパッタリング（ＳＰ）装置を併設した蒸着装置を用い、アークイオンプレーティングとスパッタリングを同時に行って蒸着膜を形成する際に、例えば、工具基体を装着した回転テーブルの回転速度を制御することによって調整することができるので、回転テーブルの回転速度を適宜に設定することにより、Ａｌ最高含有点とＢ最高含有点間の間隔が上記数値範囲内の所望の値となる組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層を容易に形成することができる。
(C) Spacing between Al highest content point and B highest content point In the hard coating layer of the present invention, the concentration of the components constituting the nitride is changed from the Al highest content point to the B highest content point in the layer thickness direction. In addition, since it changes continuously from the highest B content point to the highest Al content point, for example, in a hard coating layer composed of a multi-layer laminated structure in which the component concentration changes rapidly and discontinuously. In comparison, there is no fear of peeling between a plurality of layers, and the adhesion strength and bonding strength of the hard coating layer itself are very excellent. However, if the distance between the Al highest content point and the B highest content point is less than 0.005 μm, it is difficult to clearly form each point with the above composition. As a result, each layer has a desired high-temperature hardness, High temperature strength, heat resistance, oxidation resistance, non-reactivity and lubricity cannot be ensured, and if the distance exceeds 0.1 μm, each point has a defect, that is, if the B highest content point is high Insufficient hardness, oxidation resistance and heat resistance, and if Al is the highest content point, non-reactivity and lack of lubricity will appear locally in the layer, which will promote the progress of wear. Therefore, the interval was determined to be 0.005 to 0.1 μm.
In addition, the space | interval between the Al highest content point and the B highest content point uses the vapor deposition apparatus which provided the arc ion plating (AIP) apparatus for (Al, Cr) N vapor deposition, and the magnetron sputtering (SP) apparatus for B vapor deposition, When forming a vapor deposition film by performing arc ion plating and sputtering simultaneously, for example, it can be adjusted by controlling the rotational speed of the rotary table on which the tool base is mounted. By setting, a composition change (Al, Cr, B) N layer in which the interval between the highest Al content point and the highest B content point is a desired value within the above numerical range can be easily formed.
（ｄ）平均層厚
その平均層厚が１μｍ未満では、硬質被覆層が所望の高温硬さ、高温強度、耐熱性、耐酸化性、非反応性および潤滑性を長期に亘って確保することができず、その結果、耐熱合金の高速切削における耐チッピング性、耐摩耗性の向上を期待することができず、一方、その平均層厚が８μｍを越えると、切刃にチッピングが発生し易くなることから、その平均層厚を１〜８μｍと定めた。
(D) Average layer thickness If the average layer thickness is less than 1 μm, the hard coating layer can ensure the desired high temperature hardness, high temperature strength, heat resistance, oxidation resistance, non-reactivity and lubricity over a long period of time. As a result, improvement in chipping resistance and wear resistance in high-speed cutting of a heat-resistant alloy cannot be expected. On the other hand, if the average layer thickness exceeds 8 μm, chipping tends to occur on the cutting edge. Therefore, the average layer thickness was determined to be 1 to 8 μm.
この発明の被覆工具は、硬質被覆層を構成する組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層が、全体として、すぐれた高温硬さ、高温強度、耐熱性、耐酸化性を有するとともに、さらに、すぐれた非反応性と潤滑性をも具備することから、Ｔｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金を、特に大きな発熱を伴う高速切削条件で加工した場合であっても、すぐれた耐チッピング性を示すとともに、溶着・偏摩耗等を生じることなく長期に亘ってすぐれた耐摩耗性を発揮するものである。 In the coated tool of the present invention, the composition change (Al, Cr, B) N layer constituting the hard coating layer as a whole has excellent high temperature hardness, high temperature strength, heat resistance, and oxidation resistance. Because it has excellent non-reactivity and lubricity, it is excellent even when heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys are processed under high-speed cutting conditions with particularly large heat generation. In addition to exhibiting chipping resistance, it exhibits excellent wear resistance over a long period of time without causing welding or uneven wear.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ３Ｃ２粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、ボールミルで７２時間湿式混合し、乾燥した後、１００ＭＰａ の圧力で圧粉体にプレス成形し、この圧粉体を６Ｐａの真空中、温度：１４００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＷＣ基超硬合金製の工具基体Ａ−１〜Ａ−１０を形成した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended in the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. Medium, sintered at 1400 ° C for 1 hour, after sintering, WC-based carbide with honing of R: 0.03 on the cutting edge and chip shape of ISO standard CNMG120408 Alloy tool bases A-1 to A-10 were formed.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ２Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、１００ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を２ｋＰａの窒素雰囲気中、温度：１５００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣＮ基サーメット製の工具基体Ｂ−１〜Ｂ−６を形成した。 In addition, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, mix these raw material powders into the composition shown in Table 2, wet mix for 24 hours with a ball mill, dry, and press-mold into green compact at 100 MPa pressure The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour. After sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to meet ISO standards / Tool bases B-1 to B-6 made of TiCN base cermet having a chip shape of CNMG120408 were formed.
ついで、上記の工具基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図１に示されるアークイオンプレーティング装置とマグネトロンスパッタリング装置を併設した蒸着装置内の回転テーブル上に外周部に沿って装着し、一方側の前記アークイオンプレーティング装置のカソード電極（蒸発源）として、種々の成分組成をもったＡｌ−Ｃｒ合金、他方側のマグネトロンスパッタリング装置のターゲット（蒸発源）としてＣｒＢ２焼結体を装着し、またボンバード洗浄用金属Ｔｉも装着し、まず装置内を排気して０．５Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、前記回転テーブル上で自転しながら回転する工具基体に−１０００Ｖの直流バイアス電圧を印加して、カソード電極の前記金属Ｔｉとアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって工具基体表面をＴｉボンバード洗浄し、
（ｂ）ついで、装置内に反応ガスとして窒素ガスを導入して２Ｐａの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する工具基体に−１００Ｖの直流バイアス電圧を印加して、カソード電極とアノード電極との間に９０Ａの電流を流してアーク放電を発生させ、
（ｃ）また、それと同時に、ＣｒＢ２焼結体のターゲットにパルス電源を用いて１０Ａ、４３０Ｖのパルス電圧を印加してＣｒＢ２をスパッタし、
（ｄ）前記回転テーブル上で自転しながら回転する工具基体の表面に、表３，４に示される目標組成のＡｌ最高含有点とＢ最高含有点とが交互に、同じく表３、表４に示される目標間隔で繰り返し存在し、また、前記Ａｌ最高含有点から前記Ｂ最高含有点、前記Ｂ最高含有点から前記Ａｌ最高含有点へと、Ａｌ、Ｂの含有割合が連続的に変化する成分濃度分布構造を有し、さらに、同じく表３、表４に示される目標層厚の組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、ＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状の本発明被覆工具１〜１６をそれぞれ製造した。
なお、上記実施例では、Ａｌ最高含有点とＢ最高含有点との目標間隔は、回転テーブルの回転速度を０．５〜１０ｒｐｍの範囲内で変化させることにより、所定の目標間隔値となるように調整した。
Next, each of the tool bases A1 to A10 and B1 to B6 is ultrasonically cleaned in acetone and dried, and the inside of the vapor deposition apparatus provided with the arc ion plating apparatus and the magnetron sputtering apparatus shown in FIG. Of the arc ion plating apparatus on one side, and the cathode electrode (evaporation source) of the arc ion plating apparatus on one side, Al—Cr alloy having various composition, and the magnetron sputtering apparatus on the other side. A CrB 2 sintered body is attached as a target (evaporation source), and a bombard cleaning metal Ti is also attached. First, the inside of the apparatus is evacuated and kept at a vacuum of 0.5 Pa or less, and the inside of the apparatus is heated to 500 ° C. with a heater. Then, a DC bias voltage of −1000 V is applied to the tool base that rotates while rotating on the rotary table. Then, a current of 100 A is passed between the metal Ti of the cathode electrode and the anode electrode to generate an arc discharge, thereby cleaning the tool base surface with Ti bombardment,
(B) Next, nitrogen gas is introduced as a reaction gas into the apparatus to form a reaction atmosphere of 2 Pa, and a DC bias voltage of −100 V is applied to the tool base that rotates while rotating on the rotary table, and the cathode An arc discharge is generated by passing a current of 90 A between the electrode and the anode electrode,
(C) At the same time, a pulse voltage of 10A and 430V is applied to the target of the CrB 2 sintered body using a pulse power source to sputter CrB 2 ,
(D) On the surface of the tool base rotating while rotating on the rotary table, the Al highest content point and the B highest content point of the target composition shown in Tables 3 and 4 are alternately shown in Tables 3 and 4. A component that repeatedly exists at the indicated target interval, and in which the content ratios of Al and B continuously change from the highest Al content point to the highest B content point, from the highest B content point to the highest Al content point. It is defined in ISO / CNMG120408 by depositing a hard coating layer having a concentration distribution structure and further comprising a composition change (Al, Cr, B) N layer of the target layer thickness similarly shown in Tables 3 and 4 The present invention coated tools 1 to 16 each having a throwaway tip shape were produced.
In the above embodiment, the target interval between the highest Al content point and the highest B content point is set to a predetermined target interval value by changing the rotation speed of the rotary table within a range of 0.5 to 10 rpm. Adjusted.
また、比較の目的で、これら工具基体Ａ１〜Ａ１０およびＢ１〜Ｂ６を、アセトン中で超音波洗浄し、乾燥した状態で、それぞれ図２に示される通常のアークイオンプレーティング装置に装入し、カソード電極（蒸発源）として、種々の成分組成をもったＡｌ−Ｃｒ−Ｂ合金を装着し、さらにボンバート洗浄用金属Ｔｉも装着し、装置内を排気して０．５Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、前記工具基体に−１０００Ｖの直流バイアス電圧を印加して、カソード電極の前記金属Ｔｉとアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって工具基体表面をＴｉボンバード洗浄し、ついで装置内に反応ガスとして窒素ガスを導入して２Ｐａの反応雰囲気とすると共に、前記工具基体に印加するバイアス電圧を−１００Ｖに下げて、前記カソード電極とアノード電極との間に９０Ａの電流を流してアーク放電を発生させ、もって前記工具基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれの表面に、表５，６に示される目標組成および目標層厚をもった組成的に均一の（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、同じくスローアウエイチップ形状の従来被覆工具１〜１６をそれぞれ製造した。 Further, for the purpose of comparison, these tool bases A1 to A10 and B1 to B6 were ultrasonically cleaned in acetone and dried, and each was charged into a normal arc ion plating apparatus shown in FIG. As the cathode electrode (evaporation source), an Al—Cr—B alloy having various composition is mounted, and a bombard cleaning metal Ti is also mounted. The inside of the apparatus is evacuated and kept at a vacuum of 0.5 Pa or less. However, after heating the inside of the apparatus to 500 ° C. with a heater, a DC bias voltage of −1000 V was applied to the tool base, and a current of 100 A was passed between the metal Ti of the cathode electrode and the anode electrode to cause arc discharge. Thus, the surface of the tool base is cleaned with Ti bombardment, and then nitrogen gas is introduced into the apparatus as a reaction gas to obtain a reaction atmosphere of 2 Pa. The bias voltage to be applied to is reduced to -100V and a current of 90A is caused to flow between the cathode electrode and the anode electrode to generate an arc discharge. By depositing a hard coating layer composed of a compositionally uniform (Al, Cr, B) N layer having the target composition and target layer thickness shown in Tables 5 and 6, a conventional coating of the same throwaway tip shape is also used. Tools 1-16 were produced respectively.
つぎに、上記の各種の被覆チップを、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆チップ１〜１６および従来被覆チップ１〜１６について、
被削材：Ｔｉ−６wt％Ａｌ−４wt％Ｖの長さ方向等間隔４本縦溝入り丸棒、
切削速度： ７０ ｍ／ｍｉｎ．、
切り込み： １．２ ｍｍ、
送り： ０．３ ｍｍ／ｒｅｖ．、
切削時間： ５ 分、
の条件（切削条件Ａ）でのＴｉ基合金の乾式高速断続切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、
被削材：Ｎｉ−１９wt％Ｃｒ−１８．５wt％Ｆｅ−５．２wt％Ｃｄ−５wt％Ｔａ−３wt％Ｍｏ−０．９wt％Ｔｉ−０．５wt％Ａｌの丸棒、
切削速度： ８０ ｍ／ｍｉｎ．、
切り込み： １．５ ｍｍ、
送り： ０．２ ｍｍ／ｒｅｖ．、
切削時間： ５ 分、
の条件（切削条件Ｂ）でのＮｉ基合金の乾式高速連続切削加工試験（通常の切削速度は、４０ｍ／ｍｉｎ．）、
被削材：Ｃｏ−２３wt％Ｃｒ−６wt％Ｍｏ−２wt％Ｎｉ−１wt％Ｆｅ−０．６wt％Ｓｉ−０．４wt％Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度： ６０ ｍ／ｍｉｎ．、
切り込み： １．２ ｍｍ、
送り： ０．２５ ｍｍ／ｒｅｖ．、
切削時間： １０ 分、
の条件（切削条件Ｃ）でのＣｏ基合金の乾式高速断続切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、を行い、いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表７に示した。
Next, in the state where each of the above-mentioned various coated chips is screwed to the tip of the tool steel tool with a fixing jig, the present coated chips 1-16 and the conventional coated chips 1-16,
Work material: Ti-6wt% Al-4wt% V lengthwise equally spaced round bars with 4 vertical grooves,
Cutting speed: 70 m / min. ,
Cutting depth: 1.2 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 5 minutes,
A dry high-speed intermittent cutting test of a Ti-based alloy under the above conditions (cutting condition A) (normal cutting speed is 30 m / min.),
Work material: Ni-19 wt% Cr-18.5 wt% Fe-5.2 wt% Cd-5 wt% Ta-3 wt% Mo-0.9 wt% Ti-0.5 wt% Al round bar,
Cutting speed: 80 m / min. ,
Cutting depth: 1.5 mm,
Feed: 0.2 mm / rev. ,
Cutting time: 5 minutes,
Dry high-speed continuous cutting test of Ni-based alloy under the conditions (cutting condition B) (normal cutting speed is 40 m / min.),
Work material: Co-23wt% Cr-6wt% Mo-2wt% Ni-1wt% Fe-0.6wt% Si-0.4wt% C lengthwise equally spaced round bars with four longitudinal grooves,
Cutting speed: 60 m / min. ,
Cutting depth: 1.2 mm,
Feed: 0.25 mm / rev. ,
Cutting time: 10 minutes,
The dry high-speed intermittent cutting test (normal cutting speed is 30 m / min.) Of the Co-based alloy under the above conditions (cutting condition C), and measuring the flank wear width of the cutting edge in any cutting test did. The measurement results are shown in Table 7.
原料粉末として、平均粒径：５．５μｍを有する中粗粒ＷＣ粉末、同０．８μｍの微粒ＷＣ粉末、同１．３μｍのＴａＣ粉末、同１．２μｍのＮｂＣ粉末、同１．２μｍのＺｒＣ粉末、同２．３μｍのＣｒ３Ｃ２粉末、同１．５μｍのＶＣ粉末、同１．０μｍの（Ｔｉ，Ｗ）Ｃ［質量比で、ＴｉＣ／ＷＣ＝５０／５０］粉末、および同１．８μｍのＣｏ粉末を用意し、これら原料粉末をそれぞれ表８に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、１００ＭＰａの圧力で所定形状の各種の圧粉体にプレス成形し、これらの圧粉体を、６Ｐａの真空雰囲気中、７℃／分の昇温速度で１３７０〜１４７０℃の範囲内の所定の温度に昇温し、この温度に１時間保持後、炉冷の条件で焼結して、直径が８ｍｍ、１３ｍｍ、および２６ｍｍの３種の工具基体形成用丸棒焼結体を形成し、さらに前記の３種の丸棒焼結体から、研削加工にて、表７に示される組合せで、切刃部の直径×長さがそれぞれ６ｍｍ×１３ｍｍ、１０ｍｍ×２２ｍｍ、および２０ｍｍ×４５ｍｍの寸法、並びにいずれもねじれ角３０度の４枚刃スクエア形状をもったＷＣ基超硬合金製の工具基体（エンドミル）Ｃ−１〜Ｃ−８をそれぞれ製造した。 As raw material powders, medium coarse WC powder having an average particle diameter of 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, NbC powder of 1.2 μm, ZrC of 1.2 μm Powder, 2.3 μm Cr 3 C 2 powder, 1.5 μm VC powder, 1.0 μm (Ti, W) C [by mass ratio, TiC / WC = 50/50] powder, and 1 Prepare 8 μm Co powder, mix these raw material powders with the composition shown in Table 8, add wax, ball mill in acetone for 24 hours, dry under reduced pressure, and press at a pressure of 100 MPa. The green compacts were press-molded, and these green compacts were heated to a predetermined temperature in the range of 1370 to 1470 ° C. at a rate of temperature increase of 7 ° C./min in a 6 Pa vacuum atmosphere. After holding at temperature for 1 hour, sintering under furnace cooling conditions Then, three types of round rod sintered bodies for forming a tool base having diameters of 8 mm, 13 mm, and 26 mm are formed, and further, the three types of round bar sintered bodies are ground and are shown in Table 7. In combination, the diameter x length of the cutting edge is 6 mm x 13 mm, 10 mm x 22 mm, and 20 mm x 45 mm, respectively, and each is made of a WC-based cemented carbide with a 4-flute square shape with a twist angle of 30 degrees Tool bases (end mills) C-1 to C-8 were produced.
ついで、これらの工具基体（エンドミル）Ｃ−１〜Ｃ−８の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図１に示されるアークイオンプレーティング装置とマグネトロンスパッタリング装置を併設した蒸着装置に装入し、上記実施例１と同一の条件で、層厚方向に沿って表９に示される目標組成のＡｌ最高含有点とＢ最高含有点とが交互に、同じく表９に示される目標間隔で繰り返し存在し、かつ前記Ａｌ最高含有点から前記Ｂ最高含有点、前記Ｂ最高含有点から前記Ａｌ最高含有点へと、Ａｌ、Ｂの含有割合が連続的に変化する成分濃度分布構造を有し、かつ同じく表９に示される目標層厚の組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明被覆エンドミル１〜８をそれぞれ製造した。 Next, the surfaces of these tool substrates (end mills) C-1 to C-8 were ultrasonically cleaned in acetone and dried, and the arc ion plating apparatus and magnetron sputtering apparatus shown in FIG. 1 were also provided. In the vapor deposition apparatus, under the same conditions as in Example 1, the highest Al content point and the highest B content point of the target composition shown in Table 9 along the layer thickness direction are shown in Table 9 alternately. Concentration distribution in which the content ratio of Al and B continuously changes from the highest Al content point to the highest B content point and from the highest B content point to the highest Al content point. The coated end mill 1 of the present invention as the coated tool of the present invention is formed by vapor-depositing a hard coating layer having a structure and a composition change (Al, Cr, B) N layer of the target layer thickness also shown in Table 9 8 were prepared, respectively.
また、比較の目的で、上記の工具基体（エンドミル）Ｃ−１〜Ｃ−８の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図２に示される通常のアークイオンプレーティング装置に装入し、上記実施例１と同一の条件で、工具基体（エンドミル）Ｃ−１〜Ｃ−８の表面に、表１０に示される目標組成および目標層厚をもった組成的に均一の（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、従来被覆工具としての従来被覆エンドミル１〜８をそれぞれ製造した。 Further, for the purpose of comparison, the surface of the tool base (end mill) C-1 to C-8 is ultrasonically cleaned in acetone and dried, and the ordinary arc ion plating apparatus shown in FIG. Under the same conditions as in Example 1 above, the surfaces of the tool bases (end mills) C-1 to C-8 were uniformly compositionally provided with the target composition and target layer thickness shown in Table 10. Conventional coated end mills 1 to 8 as conventional coated tools were produced by vapor-depositing a hard coating layer composed of (Al, Cr, B) N layers.
つぎに、上記本発明被覆エンドミル１〜８および従来被覆エンドミル１〜８のうち、
本発明被覆エンドミル１〜３および従来被覆エンドミル１〜３については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＮｉ−１９wt％Ｃｒ−１８．５wt％Ｆｅ−５．２wt％Ｃｄ−５wt％Ｔａ−３wt％Ｍｏ−０．９wt％Ｔｉ−０．５wt％Ａｌの板材、
切削速度： ５０ ｍ／ｍｉｎ．、
溝深さ（切り込み）： ３ ｍｍ、
テーブル送り： ３００ ｍｍ／分、
の条件でのＮｉ基合金の乾式高速溝切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、
本発明被覆エンドミル４〜６および従来被覆エンドミル４〜６については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＣｏ−２３wt％Ｃｒ−６wt％Ｍｏ−２wt％Ｎｉ−１wt％Ｆｅ−０．６wt％Ｓｉ−０．４wt％Ｃの板材、
切削速度： ６０ ｍ／ｍｉｎ．、
溝深さ（切り込み）： ３．５ ｍｍ、
テーブル送り： ２８０ ｍｍ／分、
の条件でのＣｏ基合金の乾式高速溝切削加工試験（通常の切削速度は、３０ｍ／ｍｉｎ．）、
本発明被覆エンドミル７，８および従来被覆エンドミル７，８については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＴｉ−６wt％Ａｌ−４wt％Ｖの板材、
切削速度： ５０ ｍ／ｍｉｎ．、
溝深さ（切り込み）： ６ ｍｍ、
テーブル送り： ２７０ ｍｍ／分、
の条件でのＴｉ基合金の乾式高速溝切削加工試験（通常の切削速度は、２５ｍ／ｍｉｎ．）
をそれぞれ行い、いずれの溝切削加工試験でも切刃部の外周刃の逃げ面摩耗幅が使用寿命の目安とされる０．１ｍｍに至るまでの切削溝長を測定した。この測定結果を表９，１０にそれぞれ示した。
Next, of the present invention coated end mills 1-8 and the conventional coated end mills 1-8,
About this invention coated end mills 1-3 and conventional coated end mills 1-3,
Work material-planar dimension: 100 mm × 250 mm, thickness: 50 mm Ni-19 wt% Cr-18.5 wt% Fe-5.2 wt% Cd-5 wt% Ta-3 wt% Mo-0.9 wt% Ti-0. 5 wt% Al plate material,
Cutting speed: 50 m / min. ,
Groove depth (cut): 3 mm,
Table feed: 300 mm / min,
Ni-base alloy dry high-speed grooving test under the conditions (normal cutting speed is 30 m / min.),
About this invention coated end mills 4-6 and conventional coated end mills 4-6,
Work material-planar dimensions: 100 mm × 250 mm, thickness: 50 mm Co-23 wt% Cr-6 wt% Mo-2 wt% Ni-1 wt% Fe-0.6 wt% Si-0.4 wt% C plate material,
Cutting speed: 60 m / min. ,
Groove depth (cut): 3.5 mm,
Table feed: 280 mm / min,
A dry high-speed grooving test of a Co-based alloy under the conditions (normal cutting speed is 30 m / min.),
For the coated end mills 7 and 8 of the present invention and the conventional coated end mills 7 and 8,
Work material-planar dimension: 100 mm × 250 mm, thickness: 50 mm Ti-6 wt% Al-4 wt% V plate,
Cutting speed: 50 m / min. ,
Groove depth (cut): 6 mm,
Table feed: 270 mm / min,
Ti-base alloy dry high-speed grooving test under normal conditions (normal cutting speed is 25 m / min.)
In each groove cutting test, the cutting groove length was measured until the flank wear width of the outer peripheral edge of the cutting edge reached 0.1 mm, which is a guide for the service life. The measurement results are shown in Tables 9 and 10, respectively.
上記の実施例２で製造した直径が８ｍｍ（工具基体Ｃ−１〜Ｃ−３形成用）、１３ｍｍ（工具基体Ｃ−４〜Ｃ−６形成用）、および２６ｍｍ（工具基体Ｃ−７、Ｃ−８形成用）の３種の丸棒焼結体を用い、この３種の丸棒焼結体から、研削加工にて、溝形成部の直径×長さがそれぞれ４ｍｍ×１３ｍｍ（工具基体Ｄ−１〜Ｄ−３）、８ｍｍ×２２ｍｍ（工具基体Ｄ−４〜Ｄ−６）、および１６ｍｍ×４５ｍｍ（工具基体Ｄ−７、Ｄ−８）の寸法、並びにいずれもねじれ角３０度の２枚刃形状をもったＷＣ基超硬合金製の工具基体（ドリル）Ｄ−１〜Ｄ−８をそれぞれ製造した。 The diameters produced in Example 2 above were 8 mm (for forming the tool bases C-1 to C-3), 13 mm (for forming the tool bases C-4 to C-6), and 26 mm (tool bases C-7 and C). -8 for forming), and from these three types of round bar sintered bodies, the diameter x length of the groove forming part is 4 mm x 13 mm (tool base D) by grinding. −1 to D-3), 8 mm × 22 mm (tool base D-4 to D-6), and 16 mm × 45 mm (tool bases D-7 and D-8), and all having a twist angle of 30 degrees 2 WC-base cemented carbide tool bases (drills) D-1 to D-8 having a single-blade shape were produced, respectively.
ついで、これらの工具基体（ドリル）Ｄ−１〜Ｄ−８の切刃に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図１に示されるアークイオンプレーティング装置とマグネトロンスパッタリング装置を併設した蒸着装置に装入し、上記実施例１と同一の条件で、層厚方向に沿って表１１に示される目標組成のＡｌ最高含有点とＢ最高含有点とが交互に、同じく表１１に示される目標間隔で繰り返し存在し、かつ前記Ａｌ最高含有点から前記Ｂ最高含有点、前記Ｂ最高含有点から前記Ａｌ最高含有点へと、Ａｌ、Ｂの含有割合が連続的に変化する成分濃度分布構造を有し、かつ同じく表１１に示される目標層厚の組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着形成することにより、本発明被覆工具としての本発明被覆ドリル１〜８をそれぞれ製造した。 Then, the cutting edges of these tool bases (drills) D-1 to D-8 are subjected to honing, ultrasonically cleaned in acetone, and dried, and the arc ion plating apparatus shown in FIG. A vapor deposition apparatus equipped with a magnetron sputtering apparatus was inserted, and under the same conditions as in Example 1 above, the Al highest content point and the B highest content point of the target composition shown in Table 11 along the layer thickness direction were alternated. Also, the content ratio of Al and B is continuously present at the target intervals shown in Table 11 and continuously from the highest Al content point to the highest B content point and from the highest B content point to the highest Al content point. As a coated tool of the present invention, a hard coating layer having a compositional concentration distribution structure that changes into the above and having a composition change (Al, Cr, B) N layer of a target layer thickness similarly shown in Table 11 is formed by vapor deposition. of The invention coated drill 1-8 was produced, respectively.
また、比較の目的で、上記の工具基体（ドリル）Ｄ−１〜Ｄ−８の表面に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図２に示される通常のアークイオンプレーティング装置に装入し、上記実施例１と同一の条件で、工具基体（ドリル）Ｄ−１〜Ｄ−８の表面に、表１２に示される目標組成および目標層厚をもった組成的に均一の（Ａｌ，Ｃｒ，Ｂ）Ｎ層からなる硬質被覆層を蒸着することにより、従来被覆工具としての従来被覆ドリル１〜８をそれぞれ製造した。 For comparison purposes, the surfaces of the above-mentioned tool bases (drills) D-1 to D-8 are subjected to honing, ultrasonically cleaned in acetone, and dried, as shown in FIG. The sample was charged into an arc ion plating apparatus, and had the target composition and target layer thickness shown in Table 12 on the surfaces of the tool bases (drills) D-1 to D-8 under the same conditions as in Example 1. Conventionally coated drills 1 to 8 as conventional coated tools were produced by vapor-depositing a hard coating layer composed of a compositionally uniform (Al, Cr, B) N layer.
つぎに、上記本発明被覆ドリル１〜８および従来被覆ドリル１〜８のうち、
本発明被覆ドリル１〜３および従来被覆ドリル１〜３については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＣｏ−２３wt％Ｃｒ−６wt％Ｍｏ−２wt％Ｎｉ−１wt％Ｆｅ−０．６wt％Ｓｉ−０．４wt％Ｃの板材、
切削速度： ４０ ｍ／ｍｉｎ．、
送り： ０．２５ ｍｍ／ｒｅｖ、
穴深さ： ８ ｍｍ、
の条件でのＣｏ基合金の湿式高速穴あけ切削加工試験（通常の切削速度は、２０ｍ／ｍｉｎ．）、
本発明被覆ドリル４〜６および従来被覆ドリル４〜６については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＴｉ−６wt％Ａｌ−４wt％Ｖの板材、
切削速度： ５０ ｍ／ｍｉｎ．、
送り： ０．２０ ｍｍ／ｒｅｖ、
穴深さ： １５ ｍｍ、
の条件でのＴｉ基合金の湿式高速穴あけ切削加工試験（通常の切削速度は、２５ｍ／ｍｉｎ．）、
本発明被覆ドリル７，８および従来被覆ドリル７，８については、
被削材−平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＮｉ−１９wt％Ｃｒ−１８．５wt％Ｆｅ−５．２wt％Ｃｄ−５wt％Ｔａ−３wt％Ｍｏ−０．９wt％Ｔｉ−０．５wt％Ａｌの板材、
切削速度： ６５ ｍ／ｍｉｎ．、
送り： ０．２５ ｍｍ／ｒｅｖ、
穴深さ： ２０ ｍｍ、
の条件でのＮｉ基合金の湿式高速穴あけ切削加工試験（通常の切削速度は、３５ｍ／ｍｉｎ．）、
をそれぞれ行い、
いずれの湿式高速穴あけ切削加工試験（水溶性切削油使用）でも、先端切刃面の逃げ面摩耗幅が０．３ｍｍに至るまでの穴あけ加工数を測定した。この測定結果を表１１，１２にそれぞれ示した。
Next, among the above-mentioned present invention coated drills 1-8 and conventional coated drills 1-8,
About this invention coated drill 1-3 and conventional coated drill 1-3,
Work material-planar dimensions: 100 mm × 250 mm, thickness: 50 mm Co-23 wt% Cr-6 wt% Mo-2 wt% Ni-1 wt% Fe-0.6 wt% Si-0.4 wt% C plate material,
Cutting speed: 40 m / min. ,
Feed: 0.25 mm / rev,
Hole depth: 8 mm,
Wet high-speed drilling test of Co-based alloy under the conditions of (normal cutting speed is 20 m / min.),
About this invention coated drill 4-6 and conventional coated drills 4-6,
Work material-planar dimension: 100 mm × 250 mm, thickness: 50 mm Ti-6 wt% Al-4 wt% V plate,
Cutting speed: 50 m / min. ,
Feed: 0.20 mm / rev,
Hole depth: 15 mm,
A wet high-speed drilling test of a Ti-based alloy under the conditions (normal cutting speed is 25 m / min.),
About this invention covering drills 7 and 8 and conventional covering drills 7 and 8,
Work material-planar dimension: 100 mm × 250 mm, thickness: 50 mm Ni-19 wt% Cr-18.5 wt% Fe-5.2 wt% Cd-5 wt% Ta-3 wt% Mo-0.9 wt% Ti-0. 5 wt% Al plate material,
Cutting speed: 65 m / min. ,
Feed: 0.25 mm / rev,
Hole depth: 20 mm,
Wet high speed drilling cutting test of Ni base alloy under the conditions of (normal cutting speed is 35 m / min.),
Each
In any wet high-speed drilling test (using water-soluble cutting oil), the number of drilling processes until the flank wear width of the cutting edge surface reached 0.3 mm was measured. The measurement results are shown in Tables 11 and 12, respectively.
この結果得られた本発明被覆工具としての本発明被覆チップ１〜１６、本発明被覆エンドミル１〜８、および本発明被覆ドリル１〜８の硬質被覆層を構成する組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層のＡｌ最高含有点およびＢ最高含有点の組成を、透過型電子顕微鏡を用いてのエネルギー分散Ｘ線分析法により測定したところ、それぞれ目標組成のＡｌ最高含有点およびＢ最高含有点と実質的に同じ組成を示した。また、従来被覆工具としての従来被覆チップ１〜１６、従来被覆エンドミル１〜８、および従来被覆ドリル１〜８の硬質被覆層を構成する組成的に均一な（Ａｌ，Ｃｒ，Ｂ）Ｎ層の組成を、透過型電子顕微鏡を用いてのエネルギー分散Ｘ線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。 As a result, the composition change (Al, Cr, B) constituting the hard coating layer of the present coated tips 1-16, the present coated end mills 1-8, and the present coated drills 1-8 as the present coated tool obtained as a result. ) The composition of the highest Al content point and the highest B content point of the N layer was measured by energy dispersive X-ray analysis using a transmission electron microscope. It showed substantially the same composition. Moreover, the compositionally uniform (Al, Cr, B) N layers constituting the hard coating layers of the conventional coated chips 1 to 16, the conventional coated end mills 1 to 8, and the conventional coated drills 1 to 8 as conventional coated tools. When the composition was measured by energy dispersive X-ray analysis using a transmission electron microscope, it showed substantially the same composition as the target composition.
また、上記の硬質被覆層の平均層厚を走査型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値（５ヶ所の平均値）を示した。 Moreover, when the average layer thickness of said hard coating layer was cross-sectional measured using the scanning electron microscope, all showed the average value (average value of five places) substantially the same as target layer thickness.
表７、９〜１２に示される結果から、本発明被覆工具は、Ｔｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の高熱発生を伴う高速条件下での切削加工に用いた場合であっても、硬質被覆層を構成する組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層が、全体として、すぐれた高温硬さ、高温強度、耐熱性、耐酸化性、さらに、すぐれた非反応性と潤滑性を備えていることによって、溶着、チッピング、偏摩耗の発生がなく、長期に亘ってすぐれた耐摩耗性を発揮するのに対して、硬質被覆層が組成的に均一な（Ａｌ，Ｃｒ，Ｂ）Ｎ層で構成された従来被覆工具においては、高速切削加工で高熱発生を伴うことにより、溶着・偏摩耗やチッピングが発生し、これが原因で比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 7 and 9-12, the coated tool of the present invention is used for cutting under high-speed conditions accompanied by high heat generation of heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys. Even so, the composition change (Al, Cr, B) N layer constituting the hard coating layer as a whole has excellent high temperature hardness, high temperature strength, heat resistance, oxidation resistance, and excellent non-reactivity. By providing lubrication, there is no occurrence of welding, chipping, and partial wear, and while exhibiting excellent wear resistance over a long period of time, the hard coating layer is compositionally uniform (Al, Cr , B) In the conventional coated tool composed of N layer, high heat generation is accompanied by high heat generation, which causes welding, uneven wear and chipping, and this can lead to a service life in a relatively short time. it is obvious.
上述のように、この発明の被覆工具は、一般鋼や普通鋳鉄などの切削加工は勿論のこと、高い発熱を伴うＴｉ基合金、Ｎｉ基合金、Ｃｏ基合金等の耐熱合金の高速切削加工に用いた場合でも、長期に亘ってすぐれた耐チッピング性、耐摩耗性を発揮し、すぐれた切削性能を示すものであるから、切削加工装置のＦＡ化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention is suitable for high-speed cutting of heat-resistant alloys such as Ti-base alloys, Ni-base alloys, and Co-base alloys with high heat generation, as well as cutting of general steel and ordinary cast iron. Even when it is used, it exhibits excellent chipping resistance and wear resistance over a long period of time and exhibits excellent cutting performance. Therefore, FA of the cutting device, labor saving and energy saving of cutting processing, Furthermore, it can cope with cost reduction sufficiently satisfactorily.
Claims (1)
（ａ）前記硬質被覆層は１〜８μｍの平均層厚を有し、硬質被覆層の層厚方向に沿って、前記Ａｌ−Ｃｒ合金カソード電極近傍で形成されるＡｌ最高含有点と前記ＣｒＢ２焼結材料ターゲット近傍で形成されるＢ最高含有点とが０．００５〜０．１μｍの間隔をおいて交互に繰り返し存在し、
（ｂ）前記Ａｌ最高含有点から前記Ｂ最高含有点、前記Ｂ最高含有点から前記Ａｌ最高含有点へと、Ａｌ、Ｂの含有割合がそれぞれ連続的に変化する成分濃度分布構造を有し、
（ｃ）前記Ａｌ−Ｃｒ合金カソード電極近傍で形成される前記Ａｌ最高含有点におけるＡｌ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｚで表したときに、Ｘは０．４〜０．６５、Ｙは０．３〜０．５０、Ｚは０．０５〜０．２０で、かつ、Ｘ＋Ｙ＋Ｚ＝１を満足し、
（ｄ）前記ＣｒＢ２焼結材料ターゲット近傍で形成される前記Ｂ最高含有点におけるＡｌ成分、Ｃｒ成分およびＢ成分は、その含有割合（ただし、原子比）を、それぞれＸ、Ｙ、Ｚで表したときに、Ｘは０．１５〜０．３５、Ｙは０．２５〜０．４、Ｚは０．４０〜０．５５で、かつ、Ｘ＋Ｙ＋Ｚ＝１を満足する組成変化（Ａｌ，Ｃｒ，Ｂ）Ｎ層を蒸着形成してなる、
耐熱合金の高速切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具。
A rotary table of a vapor deposition apparatus in which a tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet, an Al—Cr alloy as a cathode electrode on one side, and a CrB 2 sintered material as a target on the other side While the tool base is rotated on a rotary table, Al and Cr are sputtered on the cathode side of the Al—Cr alloy cathode and sputtering on the target side of the CrB 2 sintered material. In a surface-coated cutting tool in which a hard coating layer composed of a nitride layer of Cr and B is formed by vapor deposition,
(A) The hard coating layer has an average layer thickness of 1 to 8 μm, and the highest Al content point formed in the vicinity of the Al—Cr alloy cathode electrode and the CrB 2 along the thickness direction of the hard coating layer. The B highest content point formed in the vicinity of the sintered material target is alternately present at intervals of 0.005 to 0.1 μm,
(B) From the Al highest content point to the B highest content point, from the B highest content point to the Al highest content point, having a component concentration distribution structure in which the content ratios of Al and B change continuously,
(C) The Al component, the Cr component, and the B component at the Al highest content point formed in the vicinity of the Al—Cr alloy cathode electrode are represented by X, Y, and Z, respectively. X is 0.4 to 0.65, Y is 0.3 to 0.50, Z is 0.05 to 0.20, and X + Y + Z = 1 is satisfied,
(D) The Al component, Cr component, and B component at the B highest content point formed in the vicinity of the CrB 2 sintered material target are represented by X, Y, and Z, respectively. X is 0.15 to 0.35, Y is 0.25 to 0.4, Z is 0.40 to 0.55, and composition change satisfying X + Y + Z = 1 (Al, Cr, B) N layer is formed by vapor deposition.
A surface-coated cutting tool that exhibits excellent chipping resistance and wear resistance due to high-speed cutting of heat-resistant alloys.
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