JP4842527B2 - Manufacturing method of semiconductor device - Google Patents

Description

  The present invention relates to a semiconductor device and a manufacturing method thereof.

Wide band gap semiconductors are attracting attention as semiconductor materials for semiconductor devices (power devices) that have a high withstand voltage and allow a large current to flow. Among wide band gap semiconductors, silicon carbide (silicon carbide: SiC) has a particularly high breakdown electric field, and is expected to be applied to the next generation low-loss power devices and the like. Since a high-quality silicon dioxide (SiO ₂ ) film can be formed on SiC by thermal oxidation, development of an insulated gate type SiC power device using such a SiO ₂ film as a gate insulating film has been advanced.

When a SiO ₂ film formed by thermal oxidation on SiC is used as a gate insulating film, the breakdown electric field of SiC is extremely large (2 to 3 MV / cm), but a high breakdown voltage as expected from the breakdown electric field strength. In order to realize this device, it is necessary to improve the insulating characteristics (insulation breakdown voltage) of the SiO ₂ film.

On the other hand, conventionally, it is known that a SiO ₂ film having a high withstand voltage can be formed on SiC by performing a thermal oxidation process on SiC at a high temperature of 1200 ° C. or higher and then further performing a heat treatment in an argon atmosphere. It has been. Since the SiO ₂ film formed by this method has a breakdown electric field of, for example, 11 MV / cm or more, reliability equivalent to that of the SiO ₂ film formed on the Si substrate by thermal oxidation can be realized.

However, the dielectric breakdown voltage of the SiO ₂ film formed on the SiC by thermal oxidation is extremely dependent on the surface state and crystal state of the SiC. Therefore, depending on the surface state and crystal state of the SiC, the high dielectric breakdown as described above. There is a problem that an SiO ₂ film having an electric field cannot be formed. In a general insulated gate MOSFET, a part of the gate insulating film is formed on a SiC region (source region) in which impurities are highly doped. Since the surface of the source region has relatively large irregularities and many crystal defects exist in the source region, it is extremely difficult to form a high breakdown voltage SiO ₂ film on the surface.

  Hereinafter, the above problem will be described in more detail with reference to the drawings.

  First, the configuration of a general gate type MOSFET will be described by taking a vertical MOSFET as an example.

The MOSFET shown in FIG. 8 includes a silicon carbide epitaxial layer 32 formed on the main surface of SiC substrate 31, a gate electrode 38 and a source electrode 36 provided on silicon carbide epitaxial layer 32, and a back surface of SiC substrate 31. And a drain electrode 34 provided thereon. Silicon carbide epitaxial layer 32 has n ⁻ type drift region 33, p type well region 35, n ⁺⁺ type source region 37, and p ⁺⁺ type contact region 40. The source region 37 is connected to the source electrode 36. The well region 35 is electrically connected to the source electrode 36 through a p ⁺⁺ type contact region 40. Gate insulating film 39 is formed on a region other than the region where source electrode 36 is formed on the surface of silicon carbide epitaxial layer 32. A gate electrode 38 is provided on the silicon carbide epitaxial layer 32 via a gate oxide film 39.

  In the MOSFET having the configuration as shown in FIG. 8, when a voltage is applied to the gate electrode 38, an inversion channel is formed on the surface of the well region 35 below the gate electrode 38. Thus, a current can flow to the source electrode 36.

  In order to form the inversion channel, the surface of the well region 35 (the portion where the inversion channel is formed) located between the source region 37 and the drift region 33 needs to be covered with the gate electrode 38. The gate electrode 38 is disposed so as to overlap not only the surface of the well region 35 but also a part of the source region 37.

  In the MOSFET as shown in FIG. 8, dielectric breakdown is likely to occur in a portion of the gate insulating film 39 located between the source region 37 and the gate electrode 38, which is a factor of reducing the reliability of the MOSFET.

As described above, since the surface of the source region 37 doped with an impurity having a dose of 10 ¹⁵ cm ⁻³ or more has irregularities, the crystal plane orientation of the surface is not constant. Since the thermal oxidation rate depends on the plane orientation, when the gate insulating film 39 is formed by thermally oxidizing the surface of the source region 37, the thickness of the gate insulating film (thermal oxide film) 39 is caused by the crystal plane distribution. As a result, the withstand voltage is lowered in the thin portion of the gate insulating film 39. Further, since there are many defects (dislocations) due to impurities in the source region 37 doped with impurities at a high concentration, a thermal oxide film having excellent insulating characteristics can be formed on the source region 37. Have difficulty. Such a problem is a physical property problem of SiC, and it is difficult to overcome this and improve the reliability of the gate insulating film.

  On the other hand, the level difference (step) between the surface of the source region 37 and the surface of the well region 35 causes a problem that the withstand voltage of the gate insulating film 39 formed thereon is lowered.

In order to dope impurities into the epitaxially grown silicon carbide epitaxial layer 32, it is essential to implant impurity ions into the silicon carbide epitaxial layer 32. Further, it is necessary to activate the impurities by performing an annealing process after ion implantation. At this time, for example, if annealing is performed on a region in which n-type impurity ions are implanted at a dose of 1 × 10 ¹⁵ cm ⁻² or more, a large strain is generated in the crystal. As a result, FIG. As shown, a step of 1 nm or more is formed at the boundary portion 39b between the surface of the source region 37 and the surface of the well region 35 into which impurity ions are implanted at a high concentration.

  When gate insulating film 39 is formed by thermally oxidizing the surface of silicon carbide epitaxial layer 32 having such a step, since the oxidation rate depends on the plane orientation, boundary portion 39b of the surface of silicon carbide epitaxial layer 32 is formed. As a result, the gate insulating film 39 becomes thinner on the step of the boundary portion 39b.

  Therefore, as shown in the drawing, a portion (necking) where the gate insulating film 39 is particularly thin is formed on the boundary portion 39b. In FIG. 8B, “necking” is emphasized for easy understanding, but the actual constriction is gentler than this figure. As shown in FIG. 8B, since the thermal oxidation rate of the source region 37 having a high impurity concentration is higher than that of the well region 35 having a relatively low impurity concentration (accelerated oxidation), the gate insulating film 39 is thick on the source region 37 and thin on the well region 35. This accelerated oxidation can be one of the factors that cause the above-mentioned constriction.

  In the region where the impurity concentration is high, the oxide film is thicker than the well region and it is difficult to break down the dielectric, so there is an advantage. However, in reality, the breakdown voltage is significantly deteriorated due to the influence of crystal defects and the like.

  Further, when a voltage is applied to the gate electrode 38, the electric field concentrates on the constricted portion of the gate insulating film 39, and dielectric breakdown is likely to occur. Furthermore, there is a problem that an inversion channel is hardly formed at the interface between the constricted portion of the gate insulating film 39 and the well region 35.

In order to suppress the lowering of the surface state and the constricted by the breakdown voltage of the source region 37, for example, Patent Documents 1 and 2, SiC epitaxial layer between the gate insulating film and the source region (n ^- -type epitaxial layer and channel The structure which arrange | positions a layer is disclosed. According to this configuration, since the gate insulating film is formed on the n ⁻ -type epi layer and the channel layer, the influence of the surface state of the source region on the withstand voltage of the gate insulating film can be reduced. However, it is not possible to sufficiently suppress a decrease in dielectric strength caused by crystal defects in the source region. That is, the portion of the SiC epitaxial layer located on the source region is inferior in crystallinity to the portion located on the other region, and it is difficult to form a high-quality gate insulating film thereon.
JP 2002-270838 A JP 2002-270837 A

  As described above, in a conventional semiconductor device, it is difficult to form a gate insulating film having excellent insulating characteristics due to a surface state or a crystal state in a source region containing impurities at a high concentration.

  The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide a highly reliable semiconductor device by improving the withstand voltage in a gate insulating film.

  The semiconductor device of the present invention is electrically connected to a substrate, a first semiconductor layer provided on the main surface of the substrate, a second semiconductor layer formed on the first semiconductor layer, and the first semiconductor layer. And a gate electrode capable of changing an electric resistance of a predetermined region in the second semiconductor layer and electrically connected via the second semiconductor layer according to the electric resistance of the predetermined region. A semiconductor device comprising a source electrode and a drain electrode to be obtained, and a gate insulating film provided between the second semiconductor layer and the gate electrode, wherein the first conductivity type formed in the first semiconductor layer A well region, at least part of which is formed inside the well region, a source region of a second conductivity type that is in electrical contact with the source electrode, and the well region of the first semiconductor layer is formed. No part And a predetermined region in the second semiconductor layer is a storage channel region including a second conductivity type layer, and the first semiconductor layer is formed inside the well region. And having a second conductivity type auxiliary source region in contact with the source region, the source region not being overlapped by the gate electrode, and a part of the auxiliary source region being the gate electrode The total dose amount of the auxiliary source region is smaller than the total dose amount of the source region.

  In a preferred embodiment, the first semiconductor layer includes silicon carbide.

  The size in the gate length direction of the portion of the auxiliary source region that is overlapped by the gate electrode is preferably smaller than the gate length.

  It is preferable that a step at a boundary portion between a region located on the auxiliary source region and a region located on the well region in the surface of the first semiconductor layer is 1 nm or less.

  The auxiliary source region may be thinner than the source region.

  The auxiliary source region may be thicker than the source region.

The dose of the auxiliary source region may be 10 ¹³ cm ⁻² or more and 10 ¹⁵ cm ⁻² or less.

  The source region may contain nitrogen as an impurity.

  The auxiliary source region may include phosphorus as an impurity.

  The second semiconductor layer has a stacked structure of the second conductivity type layer and another semiconductor layer, the other semiconductor layer has a dopant concentration lower than that of the second conductivity type layer, and It may be thicker than the second conductivity type layer.

  In a preferred embodiment, the substrate is a semiconductor substrate of a second conductivity type, the first semiconductor layer is formed on the main surface of the semiconductor substrate, and the drain electrode is formed on the back surface of the semiconductor substrate.

  The method for manufacturing a semiconductor device of the present invention includes (A) a step of forming a first semiconductor layer on a substrate, and (B) ion implantation of a first conductivity type impurity into a selected region of the first semiconductor layer. Forming a first conductivity type ion implantation region; (C) implanting a second conductivity type impurity into a selected region of the first conductivity type ion implantation region; Forming a high concentration ion implantation region in which a second conductivity type impurity is ion implanted at a higher concentration than the first conductivity type ion implantation region; and (D) performing an activation annealing process on the first semiconductor layer. And forming an auxiliary source region and a source region from the second conductivity type ion implantation region and the high concentration ion implantation region, respectively, and the auxiliary source region and the source region of the first conductivity type ion implantation region. (E) forming a second semiconductor layer including a second conductivity type layer on the first semiconductor layer; and (F) the second step. A step of forming a gate insulating film on the semiconductor layer; and (G) on the gate insulating film so as to cover a region to be a storage channel region in the second semiconductor layer and a part of the auxiliary source region. Forming a gate electrode.

  In a preferred embodiment, the step (B) includes a step of forming a well region formation mask on the first semiconductor layer, and the step (C) includes a gate length on the well region formation mask. Forming a film having a thickness that defines a thickness of the first conductive type ion implantation region of the first conductive type ion implantation region through the film; and Using the step of forming a source region formation mask having an opening defining the source region and the source region formation mask, ion implantation of a second conductivity type impurity is performed in the first conductivity type ion implantation region. Process.

  According to the semiconductor device of the present invention, the gate insulating film is formed on the first semiconductor layer with reduced surface roughness and high crystallinity via the second semiconductor layer including the accumulation channel region. The insulating properties of the insulating film can be improved. Since the dielectric breakdown electric field of the gate insulating film can be improved while suppressing loss (on-resistance) during energization, a semiconductor device with higher reliability than the conventional one can be provided.

  According to the present invention, a highly reliable semiconductor device can be manufactured without complicating the manufacturing process. Furthermore, if an auxiliary source region having a smaller dose than the source region is formed by utilizing self-alignment, the gate length can be kept smaller than before, and a highly reliable and high performance semiconductor device can be manufactured. It is advantageous.

  The semiconductor device according to the present invention has an auxiliary source region electrically connected to the source region and having a smaller total impurity dose than the source region. A gate insulating film is formed on the auxiliary source region via a semiconductor layer (channel layer) including the accumulation channel region. The gate electrode is disposed on the gate insulating film so as to overlap a part of the auxiliary source region.

  Hereinafter, a vertical MOSFET which is a preferred embodiment of a semiconductor device according to the present invention will be described with reference to FIGS. FIGS. 1A and 1B are schematic cross-sectional views showing a part of a vertical MOSFET. The semiconductor device of the present invention may be a DIMOSFET (Double Implanted Metal-Oxide-Semiconductor Field-Effect Transistor), and is not limited to a vertical MOSFET.

A semiconductor device 100 shown in FIG. 1A includes a first semiconductor layer 42 formed on the main surface of the semiconductor substrate 1, a second semiconductor layer (channel layer) 44 provided on the semiconductor layer 42, A source electrode 51 and a gate electrode 53 and a drain electrode 55 provided on the back surface of the semiconductor substrate 41 are provided. The semiconductor substrate 41 is, for example, a low resistance n ⁺ -type silicon carbide substrate, and the first semiconductor layer 42 and the second semiconductor layer 44 are, for example, silicon carbide epitaxial layers.

The first semiconductor layer 42 includes a well region 45 having a conductivity type (here, p-type) different from that of the semiconductor substrate 41 and a portion of the first semiconductor layer 42 where the well region 45 is not formed. And a drift region 43. Although a single well region 45 is shown in FIG. 1, the semiconductor device 100 typically has a plurality of well regions 45. The drift region 43 is, for example, an n ⁻ type silicon carbide layer containing an n type impurity at a lower concentration than the semiconductor substrate 41.

Inside the well region 45, a source region 47, an auxiliary source region 48, and a contact region 50 are formed. The source region 47 is in ohmic contact with the source electrode 51. The source region 47 includes an impurity having the same conductivity type (for example, n ⁺⁺ type) as the drift region 43 at a high concentration of, for example, 1 × 10 ¹⁸ cm ⁻³ or more in order to form a good ohmic contact with the source electrode 51. . On the other hand, the auxiliary source region 48 is disposed so as to be in contact with the source region 47, and contains impurities of the same conductivity type (for example, n-type) as the source region 47 with a dose amount smaller than that of the source region 47. Therefore, the auxiliary source region 48 has a flatter surface than the source region 47, and crystal defects in the auxiliary source region 48 are less than crystal defects in the source region 47. The contact region 50 has the same conductivity type as the well region 45 (here, p ⁺⁺ type), and is provided to electrically connect the source electrode 51 and the well region 45.

  The second semiconductor layer 44 is formed on the first semiconductor layer 42 so as to cover the well region 45 located between the drift region 43 and the auxiliary source region 48. The second semiconductor layer 44 also covers at least a part of the auxiliary source region 48. The second semiconductor layer 44 includes a layer doped with impurities of the same conductivity type (for example, n-type) as the source region 47.

  The gate electrode 53 is provided on the second semiconductor layer 44 via a gate insulating film 49 and is disposed so as to cover a region of the second semiconductor layer 44 where the storage channel region is formed. The gate electrode 53 is arranged so as to overlap a part of the auxiliary source region 48 but not the source region 51.

  Next, the operation of the semiconductor device 100 will be described. Here, a case where the semiconductor device 100 is a normally-off type will be described. When the voltage applied to the gate electrode 53 is zero, the portion of the second semiconductor layer 44 located above the well region 45 (accumulation channel region) is depleted, and the electric resistance of the accumulation channel region increases. The semiconductor device 100 is turned off. On the other hand, when a voltage equal to or higher than the threshold voltage is applied to the gate electrode 53, carriers included in the second semiconductor layer 44 can move in the storage channel region, and the electrical resistance of the storage channel region is lowered. At this time, current can flow from the drain electrode 55 to the source electrode 51 through the storage channel region, so that the semiconductor device 100 is turned on.

  The semiconductor device 100 is not limited to the normally-off type that is turned off when the gate voltage is zero, but is normally-on type that is turned on when the voltage (gate voltage) applied to the gate electrode 53 is zero. However, it is preferably a normally-off type.

  The semiconductor device 100 has the following advantages compared to the conventional semiconductor device as shown in FIG.

  As described above, in the conventional semiconductor device, since the gate insulating film is formed on the source region containing impurities at a high concentration, the gate insulating film is formed on the gate insulating film due to a step between the source region surface and the well region surface. Necking is likely to cause dielectric breakdown. In addition, it is difficult to obtain a gate insulating film having excellent insulating characteristics due to surface unevenness and crystallinity in the source region. Further, when the gate insulating film is a thermal oxide film, the thickness of the thermal oxide film is likely to change due to accelerated oxidation at the boundary portion 39b shown in FIG. 8B, which may contribute to the formation of a constriction.

  In contrast, in the semiconductor device 100, the gate insulating film is formed on the auxiliary source region 48 having a smaller dose than the source region 47 via the second semiconductor layer 44. Since the difference in impurity concentration between the auxiliary source region 48 and the well region 45 is reduced, the step as shown in FIG. Further, the surface unevenness of the auxiliary source region 48 is also reduced. When the second semiconductor layer 44 is formed on the first semiconductor layer 42 as described above, the surface of the second semiconductor layer 44 becomes substantially flat, and the gate insulating film with reduced thickness variation is formed on the second semiconductor layer 44. 49 can be formed. Further, when the gate insulating film 49 is a thermal oxide film, since the thermal oxide film is formed on the surface of the second semiconductor layer 44, the thermal oxide film by accelerated oxidation as described with reference to FIG. 8B. Therefore, the formation of the constriction can be suppressed.

  On the other hand, since the crystal strain due to the impurity in the auxiliary source region 48 is also lower than the crystal strain in the source region 47, the second semiconductor layer 44 having excellent crystallinity can be formed on the auxiliary source region 48. Accordingly, the gate insulating film 49 having higher reliability can be formed on the second semiconductor layer 44.

  As described above, it is possible to suppress the deterioration of the insulating characteristics of the gate insulating film 49 due to the surface state or crystal state of the semiconductor layer (second semiconductor layer 44) serving as a base, and the long-term reliability of the semiconductor device 100 can be improved.

  Further, since the semiconductor device 100 has a storage channel structure, a current flows in a deeper region from the MOS interface as compared with the inversion channel layer as shown in FIG. In particular, MOSFETs using silicon carbide have conventionally had a problem of low channel mobility due to high interface order density. However, by providing the second semiconductor layer 44 functioning as a storage channel, There is also an advantage that mobility can be improved.

In the present invention, the auxiliary source region 48 contains impurities at a sufficiently low concentration so as to ensure the withstand voltage of the gate insulating film 49, while having a sufficiently low sheet resistance so as not to become a parasitic resistance of the semiconductor device 100. It is desirable. Therefore, the total dose of the auxiliary source region 48 is preferably smaller than the total dose of the source region 47, for example, 1 × 10 ¹⁸ cm ⁻³ or less. On the other hand, in order to suppress the sheet resistance of the auxiliary source region 48, for example, when phosphorus is used as the impurity of the auxiliary source region 48, the dose amount of phosphorus in the auxiliary source region 48 is 1 × 10 ¹² cm ⁻³ or more. preferable.

  Furthermore, it is desirable that the impurity concentration (here, n-type impurity concentration) in the auxiliary source region 48 is set to be lower than the impurity concentration (here, p-type impurity concentration) in the well region 45. When the impurity concentration in the auxiliary source region 48 is low, the influence of dislocation defects in the auxiliary source region 48 on the insulating characteristics of the gate insulating film 49 can be effectively suppressed.

  The semiconductor device 100 can be manufactured without complicating the manufacturing process. As will be described later, when the auxiliary source region 48 is formed by utilizing self-alignment, it is advantageous because the gate length can be made smaller than before. Although depending on the dose and thickness of the auxiliary source region 48, the gate length can be reduced to, for example, 1 μm or less, more preferably 0.5 μm or less.

  In order to prevent the constriction generated in the gate insulating film 49 more reliably, the surface of the auxiliary source region 48 (interface between the auxiliary source region 48 and the gate insulating film 49) and the surface of the well region 45 (well region 45 and gate). The step difference from the interface with the insulating film 49 is preferably 1 nm or less. Such a step can be realized by controlling the dose amount of the well region 45 and the auxiliary source region 48, the formation method (impurity ion implantation method, etc.) and the formation conditions of the auxiliary source region 48, and the like.

  The kind of impurity doped in the auxiliary source region 48 (n-type impurity in the present embodiment) is not particularly limited. However, when the first semiconductor layer 42 is a silicon carbide layer, it is preferable to use phosphorus as the impurity. . This is because the diffusion coefficient of phosphorus with respect to silicon carbide is relatively high, so that the sheet resistance of the auxiliary source region 48 can be further reduced even when the concentration of phosphorus is low. In contrast, the impurity (n-type impurity) that is soaped into the source region 47 preferably has a low diffusion coefficient with respect to silicon carbide so as not to evaporate by heat treatment when forming a contact with the source electrode 51. For example, nitrogen can be used as such an impurity. As a result, a source region 47 having a low contact resistance is obtained.

  Although the thickness of the auxiliary source region 48 is not particularly limited, when the auxiliary source region 48 is thinner than the source region 47 as shown in FIG. 1A, the auxiliary source region 48 is easily formed by self-alignment as will be described later. There is an advantage that you can. The thickness of the auxiliary source region 48 is preferably 1 μm or less, more preferably 0.5 μm or less. For example, in order to form an electrode with low contact resistance in the source region 47, the thickness of the source region 47 may be set to 300 nm or more, and the thickness of the auxiliary source region 48 may be set to about 200 nm, for example.

  Conversely, the auxiliary source region 48 may be thicker than the source region 47. A configuration of the semiconductor device 100 in this case is shown in FIG. This configuration has an advantage that the sheet resistance in the auxiliary source region 48 can be reduced.

  When manufacturing the semiconductor device 100 shown in FIGS. 1A and 1B, the source region 47 and the auxiliary source region 48 can be formed by ion implantation and activation annealing for the semiconductor layer 42, as will be described later. Thereafter, when the second semiconductor layer 44 is formed on the semiconductor layer 42, there is no need to perform impurity ion implantation or activation annealing on the second semiconductor layer 44, and the surface flatness of the second semiconductor layer 42 can be improved. This is advantageous because it can be held well.

  Instead of the configuration shown in FIGS. 1A and 1B, as shown in FIG. 1C, the auxiliary source region 48 is made thicker than the source region 47, and a part of the source region 47 is made to be a second semiconductor. The layer 44 may be formed. With such a configuration, the on-resistance of the semiconductor device 100 can be reduced.

  When the semiconductor device 100 having the configuration shown in FIG. 1C is manufactured, the auxiliary source region 48 can be formed by ion implantation and activation annealing for the semiconductor layer 42. On the other hand, in the source region 47, after the second semiconductor layer 44 is formed on the semiconductor layer 42 on which the well region 45, the auxiliary source region 48, and the like are formed, a predetermined region in the first semiconductor layer 42 and the second semiconductor layer 44 is formed. It is obtained by implanting impurity ions into the region.

  The auxiliary source region 48 may have an impurity concentration distribution in the depth direction. For example, when the impurity concentration of the auxiliary source region 48 is controlled to be high in the region near the interface with the second semiconductor layer (channel layer) 44, the on-resistance of the semiconductor device 100 can be suppressed low.

  Even when the dose in the auxiliary source region 48 is suppressed, the auxiliary source region 48 contains a larger amount of impurities (n-type and p-type impurities) than the well region 45. The insulating property of the portion 49 s formed on the region 48 is slightly lower than the insulating property of the portion 49 w formed on the well region 5. Therefore, it is preferable to keep the area of the auxiliary source region 8 overlapped by the gate electrode 13 small. As a result, the area of the portion 49s where the potential difference occurs, that is, the area sandwiched between the auxiliary source region 48 and the gate electrode 53 can be reduced, so that the reliability of the gate insulating film 49 can be further increased.

  Specifically, the size b in the gate length direction in the portion of the auxiliary source region 48 that is overlapped by the gate electrode 53 is preferably smaller, and is preferably smaller than the gate length a, for example. However, considering that the development of a silicon carbide MOSFET having a short gate structure with a gate length a of 1 μm or less is in progress, the size b has only to be kept small enough to allow processing, and the gate length a It may be the above.

  The second semiconductor layer 44 only needs to have a doped layer of the same conductivity type (here, n-type) as the source region 47, and may be a single layer or a laminated structure. The impurity concentration in the doped layer may be substantially uniform in the thickness direction of the doped layer, or may have a desired gradient. Further, when the second semiconductor layer 44 has a laminated structure, it may have, for example, a δ-doped layer structure as described later. The formation method of the second semiconductor layer 44 is not particularly limited, but is preferably a layer formed by epitaxial growth on the first semiconductor layer 42 after activation annealing on the first semiconductor layer 42.

The gate insulating film 49 may be a thermal oxide film (SiO ₂ film) formed by thermal oxidation of the second semiconductor layer 44 such as a silicon carbide layer, or may be formed on the second semiconductor layer 44 by a CVD method or the like. A deposited film may be deposited. In any case, it is possible to prevent the deterioration of the characteristics of the gate insulating film 49 due to the surface state or crystal state of the semiconductor layer serving as a base.

(Embodiment 1)
Hereinafter, a semiconductor device according to a first embodiment of the present invention will be described with reference to the drawings. This embodiment is a vertical MOSFET using silicon carbide.

  The MOSFET of the present embodiment includes a plurality of unit cells, and FIG. 2A is a plan view showing the configuration of four of the unit cells. FIG. 2B is a top view of the silicon carbide layer (first epitaxial layer) in the MOSFET shown in FIG. FIG. 2C is a cross-sectional view taken along the line I-I ′ in FIGS.

  The MOSFET of the present embodiment includes a first epitaxial layer (thickness: 10 μm, for example) 2 formed on the main surface of the low-resistance silicon carbide substrate 1, and a channel layer ( (Second epitaxial layer) 4, source electrode 11 provided on first epitaxial layer 2, gate electrode 13 provided on second epitaxial layer 4 via gate insulating film 9, and silicon carbide substrate 1 and a drain electrode 15 provided on the back surface of the first electrode.

The silicon carbide substrate 1 is an off-angle substrate made of, for example, 4H—SiC and having a main surface inclined by 8 ° (off-angle) from the (0001) plane toward the <11-20> direction. Silicon carbide substrate 1 has n-type conductivity, and the n-type impurity doping concentration is about 1 × 10 ¹⁸ cm ^{−3 to} 5 × 10 ¹⁹ cm ⁻³ .

The first epitaxial layer 2 has a plurality of p-type well regions (thickness: 800 nm, for example) 5 and a drift region 3. Drift region 3 is formed by epitaxially growing n-type SiC. The doping concentration of the n-type impurity in the drift region 3 is lower than the doping concentration of the silicon carbide substrate 1, and is set to about 1 × 10 ¹⁵ cm ⁻³ to 1 × 10 ¹⁶ cm ^{−3 in} the case of a MOSFET with a withstand voltage of 600 V, for example. The The plurality of well regions 5 are provided in selected regions near the surface of the first epitaxial layer 2, and the doping concentration of the p-type impurity is preferably 1 × 10 ¹⁸ cm ⁻³ or less, for example, 5 × 10 ¹⁷ cm ^-3 or so is set.

Inside the well region 5, an n-type source region (thickness 7 d: 200 nm, for example) 7 containing nitrogen as an n-type impurity, and a p ⁺⁺ contact region for connecting the well region 5 and the source electrode 11 10 are formed. The nitrogen concentration in the source region 7 is, for example, 1 × 10 ¹⁸ cm ⁻³ or more.

Around the source region 7, an n-type auxiliary source region (thickness 8d: 100 nm, for example) 8 containing phosphorus as an n-type impurity is formed. The phosphorus concentration of the auxiliary source region 8 is, for example, 1 × 10 ¹⁷ cm ⁻³ . At this time, if the thickness 8 d of the auxiliary source region 8 is, for example, 10 nm, the auxiliary source region 8 is interposed between the source region 7 and the storage channel region. By inserting the region 8, it is possible to prevent the on-resistance of the entire MOSFET from increasing. The impurity concentration and thickness 8d of the auxiliary source region 8 are not limited to the above-described concentration and thickness, and the ratio of the sheet resistance of the auxiliary source region 8 to the on-resistance of the entire MOSFET is sufficiently small (for example, 10% or less). It is preferable to set as follows. The size 8s of the auxiliary source region 8 in the gate length direction is, for example, 5 μm. The distance (gate length) a between the outer edge of the auxiliary source region 8 and the end of the well region 5 is, for example, 1 μm.

The second epitaxial layer 4 in the present embodiment is formed on the well region 5 between the auxiliary source region 8 and the drift region 3 and on at least a part of the auxiliary source region 8. The second epitaxial layer 4 is an epitaxial layer having a thickness of 300 nm doped with n-type impurities at an average concentration of 2 × 10 ¹⁷ cm ⁻³ . Alternatively, the second epitaxial layer 4 may have a laminated structure including an n-type doped layer, for example, a δ-doped layered structure as disclosed in the patent application 2002-544789 by the applicant. It may be.

  FIG. 3 is an enlarged schematic view of the second epitaxial layer 4 having a δ-doped layered structure. As shown in FIG. 3, the “δ-doped layered structure” is a structure in which undoped SiC layers 4a and n-type doped layers (δ-doped layers) 4b formed without intentional doping are alternately stacked. Say. The n-type doped layer (thickness: about 10 nm, for example) 4b is thinner than the undoped SiC layer (thickness: about 40 nm, for example) 4a, and contains a dopant at a higher concentration than the undoped SiC layer 4a. Further, the uppermost layer and the lowermost layer of the δ-doped layer structure are undoped SiC layers 4a. Each of these layers 4a and 4b is formed by epitaxial growth. According to such a structure, carriers in the δ-doped layer 4b are supplied to the undoped SiC layer 4a with less impurities and travel through the undoped SiC layer 4a with less impurity scattering than the δ-doped layer 4b, so that the channel mobility can be improved. .

  The source electrode 11 is provided so as to be in contact with at least a part of the source region 7 and at least a part of the contact region 10, and an ohmic contact is formed between the source electrode 11 and these regions 7 and 10.

The gate insulating film 9 is formed on the second epitaxial layer 4. The gate insulating film 9 in the present embodiment is a thermal oxide film (SiO ₂ film) formed by thermally oxidizing the second epitaxial layer 4. The thickness of the gate insulating film 9 varies depending on the gate voltage when the MOSFET device is driven, but is several 80 nm, for example. The gate insulating film 9 is formed over a region other than the region where the source electrode 11 is formed on the surface of the second epitaxial layer 4. However, the gate insulating film 9 is preferably not in contact with the source electrode 11. When in contact with the source electrode 11, Ni or the like diffuses from the source electrode (for example, Ni electrode) 11 to the gate insulating film 9, and there is a possibility that the withstand voltage of the gate insulating film 9 is lowered.

  The gate electrode 13 is provided on the gate insulating film 9 so as to overlap a part of the auxiliary source region 8 and a region of the second epitaxial layer 4 where the storage channel is formed. The size b in the gate direction of the portion of the auxiliary source region 8 that is overlapped by the gate electrode 13 is, for example, 0.5 μm.

  Hereinafter, a method for manufacturing the MOSFET of the present embodiment will be described with reference to the drawings. 4 to 6 are schematic cross-sectional views for explaining the method for manufacturing the MOSFET of this embodiment. The size of each component in these figures does not correspond to the actual size. For example, in FIG. 4, the implantation mask 21 is shown as being thinner than the ion implantation region 23, but actually it is formed thicker than the ion implantation region 23.

  First, as shown in FIG. 4A, a first implantation mask 21 is formed on the surface of the first epitaxial layer 2 formed on the main surface of the silicon carbide substrate 1 by the CVD method. The first implantation mask 21 has an opening that defines a region of the first epitaxial layer 2 where a first conductivity type (here, p-type) impurity is implanted. The first implantation mask 21 can be formed by depositing, for example, a TEOS (tetra-ethoxysilane) film on the first epitaxial layer 2 and then patterning the TEOS film by photolithography and etching processes. When patterning the TEOS film, if only dry etching is performed, a step larger than 1 nm may be generated on the surface of the first epitaxial layer 2. Therefore, it is desirable to apply an etching method in which dry etching is combined with wet etching. Specifically, most of the region of the TEOS film that is not covered with a resist mask (not shown) is removed by dry etching, and then the portion that remains thin on the first epitaxial layer 2 is removed by wet etching. When such a method is used, damage to the surface of the first epitaxial layer 2 can be suppressed by forming the first implantation mask 21. The thickness of the first implantation mask 21 is determined by its material and implantation conditions, but is preferably set sufficiently larger than the implantation range, for example, 2 μm.

  Next, as shown in FIG. 4B, p-type impurity ions (for example, Al ions) 22 are implanted into the first epitaxial layer 2 from above the first implantation mask 21. Impurity ion implantation may be performed in multiple stages. As a result, a first conductivity type ion implantation region 23 in which p-type impurity ions are implanted is formed in the first epitaxial layer 2. In addition, the region of the first epitaxial layer 2 that remains without being implanted with impurity ions becomes the n-type drift region 3.

  Subsequently, as illustrated in FIG. 4C, a second implantation mask 24 made of, for example, a TEOS film is formed on the first implantation mask 21 and the first epitaxial layer 2. The thickness of the second implantation mask 24 is, for example, 1 μm, and the gate length of the MOSFET is defined by this thickness. For example, if the thickness of the second implantation mask 24 is smaller than 1 μm (for example, 0.5 μm), a MOSFET having a gate length smaller than 1 μm can be easily manufactured.

  The second implantation mask 24 is a portion other than the portion of the TEOS film that covers the side wall of the first implantation mask 21 after the TEOS film is formed over the surfaces of the first epitaxial layer 2 and the first implantation mask 21. These portions may be removed (etched back).

Thereafter, as shown in FIG. 4D, second conductivity type (here, n-type) impurity ions 25 are implanted into silicon carbide epitaxial 2 from above second implantation mask 24. As the impurity ions 25, it is preferable to use an impurity that easily diffuses into silicon carbide such as phosphorus. At this time, it is necessary to adjust the acceleration voltage in the ion implantation so that impurity ions are not implanted under the first implantation mask 21 and the second implantation mask 24 covering the side wall of the first epitaxial layer 2. is there. Such an acceleration voltage depends on the type of the impurity ions 25, but can be set to about 200 keV, for example, when phosphorus is used. Since the impurity ions 25 need only be implanted relatively shallowly (for example, a depth of 200 nm or less from the surface of the first epitaxial layer 2), the low acceleration voltage as described above may be used. The dose is selected so as to be smaller than the dose in ion implantation for forming a source region described later, and is, for example, 10 ¹³ cm ⁻² or more and 10 ¹⁵ cm ⁻² or less. Thereby, a part of the first conductivity type ion implantation region 23 becomes the second conductivity type ion implantation region 26.

  After the impurity ions 25 are implanted, the first and second implantation masks 21 and 24 are removed. Subsequently, as shown in FIG. 4E, a third implantation mask (thickness: 1.5 μm, for example) 27 made of, for example, a TEOS film is formed on the first epitaxial layer 2. The third implantation mask has an opening that defines a region to be a source region in the first epitaxial layer 2. The third implantation mask 27 is formed by a method similar to that of the first implantation mask 21, for example.

Next, as shown in FIG. 5A, impurity ions 28 are implanted into a region of the first epitaxial layer 2 exposed by the third implantation mask 27, and a high concentration ion implantation region 7 ′ serving as a source region is formed. Form. In the present embodiment, nitrogen is used as the impurity ions 28. At this time, the high-concentration ion implantation region 7 ′ is formed inside the first conductivity type ion implantation region 23 and has a sufficient thickness (for example, 200 nm or more) so as to form a good contact with the source electrode. Next, injection conditions such as acceleration voltage are set. The dose amount is selected so as to be larger than the dose amount in the ion implantation at the time of forming the second conductivity type ion implantation region 26 described above, and is, for example, 10 ¹⁴ cm ⁻² or more and 10 ¹⁵ cm ⁻² or less. After the ion implantation, the third implantation mask 27 is removed.

Thereafter, as shown in FIG. 5B, a fourth implantation mask 30 having an opening defining a p ⁺⁺ type contact region is formed on silicon carbide epitaxial layer 2, and the fourth implantation mask is formed. A first conductivity type (here, p-type) impurity (for example, Al) is ion-implanted from above 30. The dose amount is, for example, 10 ¹⁵ cm ⁻² . As a result, a high-concentration ion-implanted region 10 ′ serving as a p ⁺⁺ type contact region is formed. After the ion implantation, the fourth implantation mask 30 is removed.

  Next, as shown in FIG. 5C, a cap layer 29 is formed on the surface of the silicon carbide epitaxial layer 2. Cap layer 29 is formed to prevent surface roughness of silicon carbide epitaxial layer 2 in an activation annealing step to be described later, and is preferably a carbon film. The carbon film can be deposited using a sputtering method or the like.

  Subsequently, as shown in FIG. 5D, activation annealing for recovering the crystal is performed on the silicon carbide epitaxial layer 2 into which the impurity ions are implanted, and then the cap layer 29 is removed.

The activation annealing can be performed while the cap layer 29 is formed and is kept in the chamber of the heating furnace. For example, the silicon carbide epitaxial layer 2 is heated at a temperature of 1750 ° C. for about 30 minutes while supplying argon gas to the chamber at a flow rate of 0.5 liter / min. At this time, the pressure in the chamber is constant at 91 kPa. Thereby, the source region 7 and the p ⁺⁺ type contact region 10 are formed from the high concentration ion implantation regions 7 ′ and 10 ′, respectively. Further, the auxiliary source region 8 is formed from the region of the second conductivity type ion implantation region 26 that is left without the impurity ions 28 being implanted, and the source region 7 and the auxiliary source region 8 of the first conductivity type ion implantation region 23 are formed. The region where no is formed becomes the well region 5.

  Although the removal method of cap layer 29 is not particularly limited, if cap layer 29 is a carbon film, it is applied to the surface of silicon carbide epitaxial layer 2 by performing thermal oxidation of cap layer 29 while it is installed in the chamber of the heating furnace. The cap layer 29 can be easily removed while suppressing damage. Specifically, the temperature in the chamber of the heating furnace is kept constant at 800 ° C., and heat treatment is performed for 30 minutes while supplying oxygen at a flow rate of 5 liters / minute. Note that the cap layer 29 may be removed using a method other than thermal oxidation such as plasma treatment or ozone treatment.

  FIG. 7 is an enlarged view of the surface state of the first epitaxial layer 2 shown in FIG. In the present embodiment, ion implantation and activation annealing using a cap are performed in the steps as described above, so that the step L at the boundary between the surface of the source region 7 and the surface of the auxiliary source region 8 is suppressed to 1 nm or less. It has been. Although the surface of the source region 7 is slightly uneven, the surfaces of the auxiliary source region 8 and the well region 5 are substantially flat.

  Next, as shown in FIG. 6A, silicon carbide is epitaxially grown on the surface of the first epitaxial layer 2 to form the second epitaxial layer 4 having a thickness of, for example, 300 nm. The formation of the second epitaxial layer 4 can be carried out while being installed in the chamber of the heating furnace after the activation annealing.

When forming the second epitaxial layer 4 having the δ-doped layered structure as shown in FIG. 3, first, an undoped SiC containing no dopant is supplied while supplying a Si source gas and a carbon source gas into the chamber. The layer 4a is epitaxially grown, and then the δ-doped layer 4b containing nitrogen as an n-type impurity is epitaxially grown while supplying nitrogen gas into the chamber in addition to the source gas. After repeating this a predetermined number of times, an undoped SiC layer 4a is formed as the uppermost layer. The impurity concentration (nitrogen concentration) in the δ-doped layer 4b is, for example, 1 × 10 ¹⁸ cm ⁻³ , and the impurity concentration (nitrogen concentration) in the undoped SiC layer 4a is, for example, 1 × 10 ¹⁶ cm ⁻³ or less. The formed second epitaxial layer 4 is not affected by the step L shown in FIG. 7 and has a substantially flat surface.

  Thereafter, as shown in FIG. 6B, a thermal oxide film 9 ′ is formed on the second epitaxial layer 4. In the present embodiment, the second epitaxial layer 4 is thermally oxidized at a temperature of 1200 ° C. in a dry oxygen atmosphere to form a thermal oxide film 9 ′ having a thickness of, for example, 80 nm, and the obtained thermal oxide film 9 ′. On the other hand, heat treatment is performed for 30 minutes at the same temperature (1200 ° C.) in an argon atmosphere.

  Subsequently, as shown in FIG. 6C, the second epitaxial layer 4 and a part of the thermal oxide film 9 'are etched by, for example, the RIE method to expose the surface of the source region 7. Thereby, the gate insulating film 9 is obtained from the thermal oxide film 9 '.

  Next, as shown in FIG. 6D, the gate electrode 13, the source electrode 11, and the drain electrode 15 are formed. The source electrode 11 and the drain electrode 15 can be formed as follows. First, a Ni film is deposited on part of the exposed surfaces of the source region 7 and the contact region 10 using an electron beam (EB) vapor deposition apparatus. A Ni film is also deposited on the back surface of silicon carbide substrate 1. Subsequently, when these Ni films were heated at a temperature of 1000 ° C. using a heating furnace, they were ohmic-bonded to the source electrode 11 that was ohmic-bonded to the source region 7 and the contact region 10 and to the back surface of the silicon carbide substrate 1. A drain electrode 15 is obtained. On the other hand, the gate electrode 13 can be formed on the gate insulating film 9 using aluminum, polysilicon or the like. The gate electrode 13 is disposed so as to cover a region of the second epitaxial layer 4 where the storage channel is formed. The gate electrode 13 also covers a part of the auxiliary source region 8, and the size b in the gate length direction of the portion where the gate electrode 13 and the auxiliary source region 8 overlap is, for example, 0.5 μm. In this way, a silicon carbide MOSFET is obtained.

The silicon carbide MOSFET with a withstand voltage of 600 V formed by the above method has a low on-resistance of, for example, 5 mΩcm ² or less because the resistance of the source region 7 and the auxiliary source region 8 is kept small, and the gate Since the deterioration of the characteristics of the insulating film 9 is suppressed, it has reliability that can withstand continuous use for 10 years.

  In the above method, the auxiliary source region 8 is formed by self-alignment, but ion implantation is performed using a mask having an opening that defines a region to be the auxiliary source region 8 separately from the first mask 21. The auxiliary source region 8 may be formed. However, in this case, since mask alignment is required, it is difficult to suppress the gate length a to less than 1 μm, for example, in consideration of mask alignment accuracy. On the other hand, if self-alignment is used as in the above method, mask alignment is not necessary, and the gate length a can be shortened compared to the prior art.

  A method for manufacturing a short gate transistor by forming a source region by self-alignment has been proposed (for example, Japanese Patent Application Laid-Open No. 2002-299620), but when forming a source region, impurity ions are implanted at a high acceleration voltage. Therefore, it is necessary to thicken the first mask (for example, 1.5 μm or more) used when implanting the first conductivity type impurity ions. Therefore, the mask film cannot be reliably deposited on the side wall of the mask unless the mask film to be deposited on the mask is thickened to some extent (for example, more than 1 μm). Since the thickness of the mask film defines the gate length, it is difficult to reduce the gate length to less than 1 μm.

  On the other hand, when the auxiliary source region 8 is formed by self-alignment as in the present embodiment, the acceleration voltage when the source region is formed by using the first implantation mask 21 and the second implantation mask 24 is used. Since ion implantation may be performed with a low acceleration voltage, the first implantation mask 21 can be made thinner than the first mask used in the above-described conventional method. Therefore, there is an advantage that the thickness of the mask film (second implantation mask) 24 provided on the first implantation mask 21 can be further reduced. The thickness of the second mask 24 is 1 μm in the above method, but is preferably 0.8 μm or less, and may be 0.5 μm, for example.

  The manufacturing method of the semiconductor device of the present invention is not limited to the above method.

  When forming the second conductivity type ion implantation region 26 to be the auxiliary source region, multistage implantation may be performed to control the concentration profile of the impurity ions 25 in the second conductivity type ion implantation region 26. For example, the concentration of the impurity ions 25 in the second conductivity type ion implantation region 26 may be controlled so as to decrease as the depth increases. As a result, the resistance at the interface between the auxiliary source region 8 and the storage channel region can be kept small while keeping the crystal state of the auxiliary source region 8 in good condition.

Although the gate insulating film 9 is formed by thermal oxidation in the above method, the gate insulating film 9 made of, for example, SiO ₂ may be formed by a known thin film deposition method instead of thermal oxidation. Even in this case, since the surface irregularities and steps of the first epitaxial layer 2 are reduced, it is possible to form the gate insulating film 9 having high insulation characteristics with reduced variation in thickness.

In the above method, the activation annealing is performed after all the ion implantation steps for the silicon carbide epitaxial layer 2 are performed. However, the activation annealing is performed after performing a part of the ion implantation step, and then the remaining ion implantation is performed. You may perform activation annealing again after performing a process. For example, the activation annealing step shown in FIGS. 4C and 4D can be performed before the ion implantation step into the region to be the p ⁺⁺ type contact region shown in FIG. 4B. In this case, after this activation annealing, ion implantation may be performed on a region to be a p ⁺⁺ type contact region, and then activation annealing may be performed again.

  Further, in the above method, the second epitaxial layer 4 is etched to bring the source region 7 and the source electrode 11 into contact with each other, but the second epitaxial layer 4 is not etched, and the source electrode 11 is removed from the second epitaxial layer 4. You may form on. In this case, after depositing a Ni film on the second epitaxial layer 4 existing on the source region 7, the Ni film is silicided by performing a heat treatment at a high temperature, whereby the source electrode 11 containing Ni silicide and the source When the region 7 is brought into contact, the contact resistance can be kept low. However, when the second epitaxial layer 4 is etched to expose a part of the source region 7 and the source electrode 11 is formed on the exposed surface of the source region 7 as in the above method, the contact resistance is more reliably suppressed. This is advantageous.

  The semiconductor device of the present invention is not limited to a MOSFET, and can be applied to various insulated gate transistors. For example, it can be suitably used for a planar type or trench type insulated gate transistor.

  Furthermore, the present invention can be applied to a semiconductor device using a semiconductor other than silicon carbide, for example, a MOSFET using another wide gap semiconductor such as GaN. When applied to a MOSFET using GaN, a substrate other than a semiconductor substrate such as a sapphire substrate may be used as a substrate for forming a semiconductor layer (GaN layer).

  The present invention can be applied to various insulated gate semiconductor devices including vertical MOSFETs and lateral MOSFETs. In particular, it is advantageous for use in a semiconductor device using a wide gap semiconductor such as SiC. Such a semiconductor device can be used for a low-loss power device that can be used for various electric power / electric equipment such as home appliances, automobiles, electric power transportation / conversion devices, and industrial equipment.

(A)-(c) is a cross-sectional schematic diagram of the semiconductor device of preferable embodiment by this invention. (A) is a top view of MOSFET of embodiment by this invention, (b) is a top view of the 1st epitaxial layer in embodiment, (c) is II 'sectional drawing of (a). is there. It is an expansion schematic diagram for demonstrating the structural example of the storage channel area | region in embodiment of this invention. (A)-(e) is process sectional drawing for demonstrating the manufacturing method of MOSFET of embodiment by this invention. (A)-(d) is process sectional drawing for demonstrating the manufacturing method of MOSFET of embodiment by this invention. (A)-(d) is process sectional drawing for demonstrating the manufacturing method of MOSFET of embodiment by this invention. It is sectional drawing for demonstrating the surface state of the 1st epitaxial layer shown in FIG.5 (d). (A) is a cross-sectional schematic diagram showing the configuration of a conventional vertical MOSFET, and (b) is an enlarged cross-sectional view of a gate insulating film in the conventional vertical MOSFET.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Semiconductor substrate 2 1st epitaxial layer 4 2nd epitaxial layer 41 Substrate 42 1st semiconductor layer 44 2nd semiconductor layer 43, 3 Drift region 45, 5 Well region 47, 7 Source region 48, 8 Auxiliary source region 49, 9 Gate Insulating film 50, 10 contact region 51, 11 source electrode 53, 13 gate electrode 55, 15 drain electrode 100 semiconductor device

Claims (4)

(A) forming a first semiconductor layer on the substrate;
(B) forming a first conductivity type ion implantation region by ion implantation of a first conductivity type impurity into a selected region of the first semiconductor layer;
(C) A second conductivity type impurity is ion-implanted into a selected region of the first conductivity type ion implantation region so that the concentration is higher than that of the second conductivity type ion implantation region and the second conductivity type ion implantation region. And (D) performing an activation annealing process on the first semiconductor layer to form the second conductivity type ion implantation region and the step of forming a high concentration ion implantation region into which the second conductivity type impurity is ion-implanted, respectively. Forming an auxiliary source region and a source region from the high-concentration ion implantation region, and forming a well region from a region of the first conductivity type ion implantation region where the auxiliary source region and the source region are not formed. (E) after performing the step (D) , forming a second semiconductor layer including a second conductivity type layer on the first semiconductor layer;
(F) forming a gate insulating film on the second semiconductor layer;
(G) including a step of forming a gate electrode on the gate insulating film so as to cover a region to be a storage channel region in the second semiconductor layer and a part of the auxiliary source region;
In the step (B), a well region formation mask is formed on the first semiconductor layer, and the first conductivity type impurities are ion-implanted by using the well region formation mask to ionize the first conductivity type ions. Forming an implantation region ;
The step (C)
Forming a film having a thickness defining a gate length on the well region forming mask and the first semiconductor layer ;
Impurity ions are not implanted under the well region forming mask and under the portion of the film covering the side wall of the well region forming mask via the film on the first semiconductor layer . There line ion implantation of the second conductivity type impurity into first conductive type ion implantation region, and forming the second conductive type ion implantation region,
Forming a source region forming mask having an opening defining the source region on the first semiconductor layer;
Using said source region forming mask, have rows of ion implantation of the second conductivity type impurity into the first conductive type ion implantation region, encompasses the step of forming the high-concentration ion implantation region,
Manufacturing method of the thickness of the auxiliary source region smaller semiconductor device than the thickness of the source region.   The method of manufacturing a semiconductor device according to claim 1, wherein a thickness of the film having a thickness that defines the gate length is 1 μm or less.   The method of manufacturing a semiconductor device according to claim 2, wherein a thickness of the film having a thickness that defines the gate length is 0.8 μm or less. The first semiconductor layer includes silicon carbide;
In the step of performing ion implantation of the second conductivity type impurity into the first conductivity type ion implantation region through the film, phosphorus is used as the second conductivity type impurity,
4. The method according to claim 1, wherein nitrogen is used as the second conductivity type impurity in the step of performing ion implantation of the second conductivity type impurity in the first conductivity type ion implantation region using the source region formation mask. A method for manufacturing the semiconductor device according to claim 1.