JP4835885B2 - エキシマランプ - Google Patents
エキシマランプ Download PDFInfo
- Publication number
- JP4835885B2 JP4835885B2 JP2009254483A JP2009254483A JP4835885B2 JP 4835885 B2 JP4835885 B2 JP 4835885B2 JP 2009254483 A JP2009254483 A JP 2009254483A JP 2009254483 A JP2009254483 A JP 2009254483A JP 4835885 B2 JP4835885 B2 JP 4835885B2
- Authority
- JP
- Japan
- Prior art keywords
- illuminance
- fluorine
- arc tube
- excimer lamp
- excimer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
Description
図1は、本実施形態に係るエキシマランプ1の概略構成を示す図であり、図2は、図1のA−A切断面から見たエキシマランプ1の断面図、図3は、図1、2に示したエキシマランプ1とは発光管の形状が異なるエキシマランプ1の断面図である。
図1、2に示したエキシマランプ1ついて言えば、これらの図に示すように、エキシマランプ1の発光管2は、直管状の透光性セラミックスのサファイア(φ10×φ8×200mm)からなるものである。発光管2は、サファイアの他に、多結晶アルミナ、YAG、MgF2、CaF2、LiF2等を用いても良い。発光管2の長手方向における両端は開放されており、その両端に封止用の金属製、例えば、ニッケル(Ni)やニッケルを主成分とする合金からなるキャップ21、22が銀−銅ロウでロウ付されている。
この放電ギャップ(G)の適用範囲を数式で示すと、2.5+0.5log(CF)≦G≦14−4log(CF)で示される。なお、この式におけるlogの底は10である。
2 発光管
21、22 キャップ
23 ガス管
3 外部電極
G 放電ギャップ
Claims (1)
- 透光性セラミックスよりなる発光管の内部に希ガスとフッ素が封入され、前記発光管の外面に外部電極が設けられてなるエキシマランプにおいて、
前記発光管内の放電ギャップをG(mm)、フッ素のモル濃度をCF(%)とし、0.1≦CF≦10において、2.5+0.5log(CF)≦G≦14−4log(CF)を満たすことを特徴とするエキシマランプ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009254483A JP4835885B2 (ja) | 2009-11-06 | 2009-11-06 | エキシマランプ |
KR1020100098839A KR20110050354A (ko) | 2009-11-06 | 2010-10-11 | 엑시머 램프 |
US12/926,020 US8183779B2 (en) | 2009-11-06 | 2010-10-21 | Escimer lamp having discharge gap controlled by fluorine concentration |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009254483A JP4835885B2 (ja) | 2009-11-06 | 2009-11-06 | エキシマランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011100620A JP2011100620A (ja) | 2011-05-19 |
JP4835885B2 true JP4835885B2 (ja) | 2011-12-14 |
Family
ID=43973641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009254483A Expired - Fee Related JP4835885B2 (ja) | 2009-11-06 | 2009-11-06 | エキシマランプ |
Country Status (3)
Country | Link |
---|---|
US (1) | US8183779B2 (ja) |
JP (1) | JP4835885B2 (ja) |
KR (1) | KR20110050354A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI747073B (zh) * | 2019-11-01 | 2021-11-21 | 崇翌科技股份有限公司 | 準分子燈 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6379024B1 (en) * | 1999-11-29 | 2002-04-30 | Hoya-Schott Corporation | Dielectric barrier excimer lamp and ultraviolet light beam irradiating apparatus with the lamp |
JP2006040867A (ja) * | 2004-06-23 | 2006-02-09 | Hoya Candeo Optronics株式会社 | エキシマランプ装置 |
JP4424394B2 (ja) * | 2007-08-31 | 2010-03-03 | ウシオ電機株式会社 | エキシマランプ |
JP4462448B2 (ja) * | 2007-12-29 | 2010-05-12 | ウシオ電機株式会社 | エキシマランプ |
JP4569636B2 (ja) * | 2008-01-22 | 2010-10-27 | ウシオ電機株式会社 | エキシマ放電ランプ |
JP2009187873A (ja) * | 2008-02-08 | 2009-08-20 | Ushio Inc | エキシマランプ点灯装置 |
-
2009
- 2009-11-06 JP JP2009254483A patent/JP4835885B2/ja not_active Expired - Fee Related
-
2010
- 2010-10-11 KR KR1020100098839A patent/KR20110050354A/ko not_active Application Discontinuation
- 2010-10-21 US US12/926,020 patent/US8183779B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2011100620A (ja) | 2011-05-19 |
KR20110050354A (ko) | 2011-05-13 |
US20110109225A1 (en) | 2011-05-12 |
US8183779B2 (en) | 2012-05-22 |
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