JP4820882B2 - Piezoelectric motor, electronic device with piezoelectric motor, and stage equipped with piezoelectric motor - Google Patents

Description

  The present invention relates to a piezoelectric motor, an electronic device with a piezoelectric motor, and a stage.

  In recent years, a piezoelectric actuator that frictionally drives a moving body in contact with a vibration body having a piezoelectric element, that is, a so-called ultrasonic motor, has attracted attention as a means for achieving ultra-precise positioning. In particular, those using rectangular plate vibrators are expected to be applied in a wide range of fields as linear motors.

  As a method of supporting a rectangular plate vibrating body, as shown in FIG. 15, there is known a structure in which the periphery of a rectangular plate vibrating body 100 made of piezoelectric elements is supported by an elastic member 101 (for example, Patent Documents). 1).

Japanese Patent No. 2980541 (pages 10-11, FIG. 11)

  However, when the structure is sandwiched and supported by the elastic member, the elastic member may be deformed by itself after the positioning is completed, and the position of the operating part may be shifted. In addition, the support portion is deformed by a reaction force from the moving body at the time of starting or stopping, and hysteresis is easily generated in the driving characteristic moving amount. Therefore, as a result, there is a problem that the position of the moving body is likely to shift and it is difficult to realize high-accuracy positioning.

  In addition, there is an example in which an elastic body is used to support by engaging members such as metals, but in this case as well, if there is play in the engaging portion, the same result may be caused.

  Furthermore, if the support conditions (restraint force, etc.) fluctuate, as in the case of support by an elastic member, not only will the motor characteristics vary greatly, but the characteristics may also change significantly depending on the external environmental temperature. It was.

Therefore, according to a first aspect of the present invention, a vibrating body having a piezoelectric element, a friction member provided on a lower surface of the vibrating body, a contact member in contact with the friction member, and a contact between the friction member and the contact member are provided. Two extending portions extending from vibration nodes of the vibrating body in two directions orthogonal to each other, an inclined portion that narrows in the extending direction of the extending portion, and the inclined portion A support member that engages with the vibration member and enables the vibrating body only to rotate about the center line of the extension portion; and a guide member that guides the support member so as to be movable in the contact direction between the friction member and the contact member; The piezoelectric motor has
A second aspect of the present invention is a piezoelectric motor that generates a driving force by vibration of a vibrating body having a piezoelectric element, and a member for heat dissipation made of metal is provided at a vibration node of the vibrating body. The piezoelectric motor is characterized by the following.

  A third aspect of the present invention includes the piezoelectric motor according to any one of the first to second aspects, and includes a transmission mechanism that operates integrally with the moving body, and an output mechanism that operates based on the operation of the transmission mechanism. It is in electronic equipment with a piezoelectric motor.

  According to a fourth aspect of the present invention, there is provided a transmission mechanism having the piezoelectric motor according to any one of the first to second aspects and operating integrally with a moving body, and an output mechanism operated based on the operation of the transmission mechanism. It is in the stage provided with the piezoelectric motor which has.

  According to the present invention, in the piezoelectric motor that operates the contact member in contact with the vibrating body or the vibrating body itself by the vibration of the vibrating body having the piezoelectric element, the plurality of recessed portions provided in the vibrating body and the plurality of recessed portions that engage with the recessed portion. A support member having a convex portion is provided. Moreover, the support member which has the some convex part provided in the vibrating body and the some recessed part engaged with a convex part is provided. According to this, a stable contact state is obtained between the vibrating body and the contact portion, and the movement of the vibrating body is restricted in the other direction.

  Further, by providing the convex portion or the concave portion in the vicinity of the position of the vibration node excited by the vibrating body, the vibration of the vibrating body is not hindered.

  Further, by providing the friction member provided on the vibrating body with a portion protruding from the vibrating body, the position of the vibrating body can be stably maintained even when the vibrating body is not tilted against the pressurization from the support member.

  In addition, the vibration member includes a support member that extends in a contact direction between the vibration member and the contact member, and a guide member that guides the support member. The support member and the guide member contact the vibration member of the vibration member. By regulating the movement other than the contact direction with the member, simple and stable support can be obtained.

  A support member that extends in a contact direction between the vibration body and the contact member; a guide member that guides the support member; and a spring member that applies a contact pressure between the vibration body and the contact member. The support member and the guide member are guided so as to be movable in the contact direction between the vibration body of the vibration body and the contact member, and the vibration body is supported by the spring member and the spring guide portion engaged with the spring member. The same effect can be obtained by restricting the rotation around the member.

  Further, it comprises a single support member having a guide portion provided on the vibrating body and an engaging portion that engages with the guide portion. By applying pressure to the support member, the contact pressure between the vibrating body and the contact member is increased. With the structure obtained, a stable contact state can be obtained between the vibrating body and the contact portion, and movement of the vibrating body is restricted in other directions, so that stable support without backlash is possible.

  Further, by providing the guide portion in the vicinity of the position of the vibration node excited by the vibrating body, stable support is possible without hindering the vibration of the vibrating body.

  Further, by pressing the extension portion provided on the vibrating body with the support member, the contact pressure between the friction member and the contact member is obtained, and the extension portion engages with the support member, and the center line of the extension portion is obtained. By making the extension part and the shape of the support member so as to be restricted except for the rotation operation, stable support without backlash is possible.

  Further, by making the friction member a hemisphere or a semi-cylindrical shape, a difference in dimensions of the plurality of support portions is absorbed, and a stable contact state can be obtained between the vibrating body and the contact portion.

  In addition, the vibrating body is supported by a rotating shaft provided on the vibrating body so that the vibrating body can rotate, and by applying pressure from the spring member, a contact pressure is applied between the vibrating body and the moving body. A structure without backlash is possible.

  Further, by applying the pressure force from the spring member in the vicinity of the vibration node excited by the vibrating body, an efficient motor can be realized without impeding the vibration of the vibrating body.

  In addition, the structure is such that the applied pressure from the spring member acts as the rotational force of the rotating shaft, so there is no loss because pressurization does not act directly on the vibrating body, high efficiency, and small variations in individual motor characteristics. Become.

  In addition, an electronic device with a piezoelectric motor on which any one of the above-described piezoelectric motors is mounted can drive a movable part that has a quick response and a high positioning resolution, and can realize an electronic device with low power consumption.

  In addition, the stage including any one of the above-described piezoelectric motors can provide a stage including a piezoelectric motor that has a simple and small mechanism and can be used even in an environment where magnetization is avoided. As described above, according to the present invention, there is no mechanical backlash at the support portion, or even if there is, it is held by the frictional force between the vibrating body and the moving body, so that highly accurate and stable positioning control is possible. It becomes. Further, the loss of vibration at the support portion is extremely small, and good contact is obtained between the vibrating body and the moving body, so that a piezoelectric motor with high efficiency and long life can be obtained.

It is a figure which shows the support structure of the piezoelectric motor concerning Embodiment 1 of this invention. It is a figure which shows another example of the support structure of the piezoelectric motor concerning Embodiment 1 of this invention. It is a figure which shows another example of the support structure of the piezoelectric motor concerning Embodiment 1 of this invention. It is a figure which shows another example of the support structure of the piezoelectric motor concerning Embodiment 1 of this invention. It is a figure which shows the support structure of the piezoelectric motor concerning Embodiment 2 of this invention. It is a figure which shows another example of the support structure of the piezoelectric motor concerning Embodiment 2 of this invention. It is a figure which shows the vibrating body periphery part of the piezoelectric motor concerning Embodiment 3 of this invention. It is a figure which shows the example of the supporting member of the piezoelectric motor concerning Embodiment 3 of this invention. It is a figure which shows another example of the support structure of the piezoelectric motor concerning Embodiment 3 of this invention. It is a figure which shows the support structure of the piezoelectric motor concerning Embodiment 4 of this invention. It is a figure which shows another example of the supporting member of the piezoelectric motor concerning Embodiment 4 of this invention. It is a figure which shows the example of the application to the supporting member and electronic device of the piezoelectric motor concerning Embodiment 5 of this invention. It is a figure which shows another example of the application to the supporting member and electronic device of the piezoelectric motor concerning Embodiment 5 of this invention. It is the block diagram which showed the electronic device using the piezoelectric motor concerning this invention. It is a figure which shows the example of the conventional support structure.

Hereinafter, an embodiment to which the present invention is applied will be described with reference to FIGS.
(Embodiment 1)
FIG. 1 shows a piezoelectric motor according to Embodiment 1 of the present invention. In particular, FIGS. 1B and 1C show the vibration amplitude in the longitudinal direction of the vibrating body 1, that is, the amplitude distribution.

  As shown in FIG. 1 (b), the vibrating body 1 having a piezoelectric element in FIG. 1 (a) has a longitudinal vibration that has a maximum amplitude at both ends and a vibration node at the center, and FIG. 1 (c). As shown, bending vibration is performed along the thickness of the vibrator 1. When these are excited so as to have different phases, the point of maximum bending vibration, for example, the friction member 3 joined to the vibrating body 1 makes an elliptical motion. Move in the direction. Here, the vibrating body may be a piezoelectric element bonded to an elastic body such as metal, or only the piezoelectric element, for example, a laminated piezoelectric element may be used. Moreover, the electrode to be used is also arbitrary.

  Here, two hemispherical recesses 1a are provided in the vicinity of a point located on the upper surface of the vibrating body 1 and the vibration node. A pin-shaped support member 2 having two hemispherical convex portions that engage with the concave portion 1a is provided at the tip from above the vibrating body 1. As shown in FIG. 1D, the support member 2 is guided by the guide member 4 and can move only in the contact pressure direction between the vibration member 1 or the friction member 3 provided on the vibration member 1 and the contact member 5. . For example, a contact pressure acts between the friction member 3 and the contact member 5 by applying pressure to one end of the support member 2. At this time, the vibration body 1 is regulated so that the friction member 3 and the contact member 5 are in good contact with each other, but the movement in the other direction is restricted. Therefore, a piezoelectric motor having high efficiency, excellent durability, and high positioning resolution can be realized.

  As the friction member 3, for example, engineering plastic containing carbon fiber, ceramic such as alumina, hard metal such as stainless steel, and hard metal such as stainless steel and ceramic such as alumina are used as the contact member.

  A modification of the first embodiment will be described with reference to FIG. The vibrating body 1 is the same as that of FIG. 1, but the vibrating body 1 is provided with two hemispherical convex portions 1b instead of the hemispherical concave portions. And the support member 6 is united, is divided into two parts from the middle, and has two hemispherical recessed parts engaged with the convex part 1b provided in the front-end | tip. According to this, as in the configuration of FIG. 1, a stable contact state can be obtained between the vibrating body and the contact portion, and the movement of the vibrating body is restricted in the other direction.

FIG. 3 shows another example of the piezoelectric motor according to the first embodiment. In particular, FIGS. 3B and 3C show the state of vibration amplitude in the longitudinal direction of the vibrating body, that is, the distribution of amplitude.
As shown in FIG. 3 (b), the vibrating body 7 having a piezoelectric element in FIG. 3 (a) has a maximum vibration at both ends and a longitudinal vibration that becomes a vibration node at the center, and FIG. As shown, bending vibration is performed along the thickness of the vibrator 1. When these are excited so as to have different phases, the bending vibration becomes maximum, for example, the friction member 8 joined to the vibrating body 7 makes an elliptical motion. Move in the direction. Here, the vibrating body 7 may be a piezoelectric element bonded to an elastic body such as a metal, or only the piezoelectric element, for example, a laminated piezoelectric element may be used. Moreover, the electrode to be used is also arbitrary.

  Here, a receiving member 10 having two hemispherical recesses 10a is provided in the vicinity of a point located at a bending vibration node of the vibrating body. A pin-shaped support member 9 having two hemispherical convex portions 9a that engage with the concave portions 10a is provided at the tip of the vibrating body 7 from above. As shown in FIG. 3D, the support member 9 is guided by the guide member 4 and can move only in the contact pressure direction between the vibration member 7 or the friction member 8 provided on the vibration member 7 and the contact member 5. . In FIG. 3D, for example, by providing a spring member 11 between the guide member 4 and the receiving member 10, a contact pressure acts between the friction member 8 and the contact member 5. At this time, the vibrating body 7 follows a good contact between the friction material 8 and the contact member 5, but the movement in the other direction is restricted.

  As described above, the convex portion or the concave portion is provided in the vicinity of the position of the vibration node excited by the vibrating body, so that the vibration of the vibrating body is not hindered. Further, by making the friction member 8 long and having a portion protruding from the vibrating body, even when the vibrating body 7 is thin, the vibrating body does not fall down against pressure from the support member 9. Can be kept stable with simple support.

Next, another example of the first embodiment will be described with reference to FIG. The vibrating body 7 in FIG. 4 is the same as that in FIG. Here, as shown in the figure, a support receiving member 13 having an overhanging portion is joined along the side surface in the vicinity of the center portion corresponding to the vibration node of the vibrating body 7. There is a gap between the support receiving member 13 and the side surface of the vibrating body 7 in order to reduce the vibration loss of the vibrating body 7 as much as possible. Of course, the support receiving member 13 may be joined to the side surface of the vibrating body 7. In this case, since the rigidity of the large support portion can be expected, a large pressure is applied to the vibrating body 7 to obtain a large thrust, and the stability at the time of starting and stopping is increased, so that the controllability is excellent. The support receiving member 13 may be made of metal or the like, but is made of a material such as engineering plastic, which has a significantly different elastic modulus and acoustic impedance from the vibrating body 7 and is hardly affected by vibrations on the vibrating body 7. The overhanging portion of the support receiving member 13 is provided with a through hole 13a serving as a concave portion, and as described above, is engaged with and supported by the support member 37 having a conical convex portion 37a at the tip (not shown). The support member 37 is guided by a guide member (not shown) and can be moved only in the contact pressure direction between the vibration member 7 or the friction member 12 provided on the vibration member 7 and the contact member 5. As a result, in addition to the effects shown so far, the distance between the two engaging portions serving as support points can be increased, and the position of the engaging portion can be lowered to a point close to the contact member 5, so that the thickness of the vibrating body 7 can be reduced. Stable support is possible even when it is thin.
(Embodiment 2)
A second embodiment of the present invention will be described with reference to FIGS.

  5 and 6, the vibrating body 7 is the same as that in FIG. 3, so only the differences will be described. In FIG. 5, the vibrating body 7 includes a support member 14 that extends in the contact direction between the vibrating body 7 and the contact member 5, and a guide member 15 that guides the support member 14. The support member 14 has a deformed portion 14 a. Since the guide member 15 has a guide shape that conforms to the guide member 15, movements other than the contact direction between the vibrating body 7 and the contact member 5 are restricted, and the structure is strong and stable with a simple structure. Support is obtained. Therefore, the movement of the vibrating body 7 at the time of starting and stopping can be suppressed, and excellent controllability and highly accurate positioning control can be performed. Since the support member 14 is provided in the vicinity of the vibration node of the vibrating body, the vibration of the vibrating body 7 is not inhibited.

FIG. 6 shows another example of the second embodiment of the present invention. The vibration body 7 includes a support member 19 extending in the contact direction between the vibration body 7 and the contact member 5, and a guide member 4 that guides the support member 19, and the movement in the contact direction between the vibration body 7 and the contact member 5. Then, the movement other than the rotational movement with the support member 19 as the rotation axis is restricted. A pressure spring 17 as a spring member and a regulating member 16 fixed to the pressure spring 17 are provided between the vibrating body 7 and the fixed plate 18 that fixes the guide member 4. The restricting member 16 and the pressure spring 17 are provided with holes so that the support member 19 can pass therethrough. The movement of the pressure spring 17 other than the contact direction between the vibrating body 7 and the contact member 5 is restricted by the guide groove 18a. Since the regulating member 16 is provided with the V-groove 16a, the force of the pressure spring 17 is received and the movement of the vibrating body 7 is also regulated. In this way, a strong and stable support can be obtained with a thin structure including a pressure mechanism. Further, since the support member 19 and the regulating member 16 are provided in the vicinity of the vibration node of the vibrating body, the vibration of the vibrating body 7 is not inhibited.
(Embodiment 3)
A third embodiment of the present invention will be described with reference to FIGS. The vibrating bodies 7 and 20 are the same as those shown in FIG. In FIG. 7A, a receiving member 21 having a V-groove is joined to the upper surface of the vibrating body 7 and in the vicinity of the position where it hits the vibration node. The receiving member 21 may be made of metal or the like, but it is preferable to use, for example, engineering plastic or the like that is greatly different from the vibrating body 7 in acoustic impedance, elastic modulus, and the like. As shown in FIG. 8, the support member 22 is engaged with the V groove 21 a of the receiving member 21. The support member 22 is provided with a deformed portion 22b, and is guided by a guide member (not shown) to support the vibrating body 7 and apply pressure as in the first embodiment. Further, since the support member 22 is engaged by the V groove 21a of the receiving member 21, it is supported without any difficulty. Although the movement of the vibrating body 7 in the width direction is obtained by the frictional force between the support member 22 and the receiving member 21, a stopper 22a is provided as a precaution. Further, it is preferable to select a material or the like so that the frictional force between the support member 22 and the receiving member 21 is larger than the frictional force between the friction member 12 and the contact member 5. As the shape of the support member, as shown in FIG. 8 (c), the support member 24 has a V-groove 24a, and as shown in FIG. 8 (b), a cylindrical stopper instead of the stopper 22a in FIG. 8 (a). The one provided with 23a or a combination thereof may be considered. However, as shown in FIG. 8B, when the support member 23 is used, it is necessary to make a hole in the receiving member 21 in which the stopper 23 a can be accommodated. Further, the support member 23 is provided with a deformed portion 23b, and is guided by a guide member (not shown) so as to support the vibrating body 7 and apply pressure as in the first embodiment. Similarly, the support member 24 is provided with a deformed portion 24b, and is guided by a guide member (not shown) to support the vibrating body 7 and apply pressure as in the first embodiment.

  Although the receiving member 21 is joined to the vibrating body 7 in FIG. 7A, the receiving portion 20a may be provided directly on the vibrating body 20 as shown in FIG. 7B. As described above, the receiving portion 20a and the receiving member 21 are preferably provided on the object with respect to the vibrating bodies 7 and 20. By adopting such a structure, the vibration generated in the vibrating bodies 7 and 20 is also a target shape, and unnecessary vibration is hardly generated.

  As shown in FIG. 9, the shape of the support member 26 having the convex portion 26a may be a + driver shape, and the shape of the receiving portion 25a in the receiving member 25 may be a + groove so as to engage with the support member. .

With such a structure, vibration loss is small and stable support is possible, so that a piezoelectric motor with high efficiency and excellent positioning resolution can be realized.
(Embodiment 4)
The fourth embodiment will be described with reference to FIGS.

  The vibrating body 7 is the same as that shown in FIG. In FIG. 10, an extending portion 28 is provided in the central portion of the side surface of the vibrating body 7, that is, in the vicinity of the position where it hits the vibration node. The extending portion 28 may be bonded to the side surface of the vibrating body 7 with an adhesive or the like, or may be provided with a hole penetrating the vibrating body 7 and coupled with a screw or the like. As shown in the first embodiment, the support member 29 is provided with the deformed portion 29b and a guide member (not shown) for guiding the deformed portion 29b. The tip vibrating body 7 side of the support member 29 is divided into two and has a V-groove 29a. The extending portion 28 is also provided with a V-groove 28a in the circumferential direction so that it can be engaged with the V-groove 29a of the support member without any difficulty. By making the shape of the friction member 27 hemispherical, the displacement of the dimension of the engaging portion between the two V grooves 29a and the extending portion 28 is absorbed, and a stable contact state is obtained between the vibrating body 7 and the contact portion 5. It is done.

As the structure of the extending portion, as shown in FIG. 11, a pin 31a may be provided integrally with a belt-like shape 31b. In this case, the bonding strength between the extending portion 31 and the vibrating body 7 is increased. In this case, since the extending portion 31 is joined over the entire width direction of the vibrating body 7, the vibration of the vibrating body 7 is not affected even if the position of the pin 31a is not centered. For example, the pin 31a By lowering the position to the contact member 5 side, stable support becomes possible. Further, here, the friction member 30 is formed in a semi-cylindrical shape, so that the same effect as in FIG. 10 can be obtained.

  In this way, the friction member has a curved shape at least in the width direction of the vibrating body, so that the pressurization or supporting force that applies contact pressure between the friction member and the contact member is increased in the width direction of the vibrating body. The structure shown in FIG. 4 is not limited as long as it has a structure that works at multiple points. The contact between the friction member and the contact member caused by variations in pressure at multiple points or variations in the dimensions of the support member, etc. Instability can be eliminated.

  In addition, if the friction member is hemispherical, not only these effects but also the influence of dimensional variation or the like occurring at the joint between the friction member and the vibrating body can be eliminated. In this case, the effect can be obtained regardless of the support or pressure structure.

  By the way, it is preferable to use, for example, engineering plastics or the like, which are greatly different in acoustic impedance, elastic modulus, and the like from the vibrating body 7 as the material of the extending portions 28 and 31. In this case, not only does the vibration of the vibrating body 7 not be impaired. In addition, it has the effect of hardly affecting the shape of the vibration mode and hardly causing energy loss due to the support or individual product variations.

However, as long as the extending portion 31 has a joint portion with the vibrating body 7, for example, a belt-like shape portion 31b, a metal having good thermal conductivity, such as a copper alloy or an aluminum alloy, may be used. In this case, since heat generated in the vibrating body 7 can be radiated, a large input can be applied, and a high-output piezoelectric motor can be realized. In particular, in the present embodiment, the heat radiation efficiency is good because it is provided in the vicinity of a vibration node where heat generation is large. In particular, if the pin 31a is provided at the center of the vibrating body 7, it is effective because there is little fear of vibration loss and change in the vibration mode shape due to the attachment of the extending portion.
(Embodiment 5)
A fifth embodiment of the present invention will be described with reference to FIGS. This is an example in which the piezoelectric motor of the present invention is applied to drive a hard disk head.

  In FIG. 12, a rotation shaft 47 is provided near the center of the vibrating body 7, that is, in the vicinity of the position where the vibration node is formed. The rotating shaft 47 is guided by a bearing 38 fixed to the pressing plate 39. Since the rotary shaft 47 is driven and fixed to the inner ring of the bearing 38 and preload is applied to the bearing 38 by a preload spring (not shown), no play is generated on the rotary shaft 47. The friction member 12 provided on the vibration body 7 and the moving body 40a to which the arm 40b having the head 40c is attached are pressurized near the vibration node position of the vibration body 7 by the pressure spring 32 of the spring member. The tip 32a of this is in pressure contact. The arm unit 40 including the moving body 40a, the arm 40b, and the head 40c operates in accordance with the rotation of the moving body 40a, and the head 40c reads information on the disk 41. Since the piezoelectric motor of the present invention has extremely high positioning resolution and excellent responsiveness, it can be applied to future information storage devices such as HDDs and optical discs where the amount of information increases. In addition, since power is not consumed when stationary, the power consumption of the device can be reduced.

  FIG. 13 is a modification of FIG. In FIG. 13, a rotating shaft 42 is provided in the center of the vibrating body 7, that is, in the vicinity of a position that becomes a vibration node. The rotating shaft 42 is guided by a bearing 33 fixed to the pressing plate 34. The rotating shaft 42 is driven and fixed to the inner ring of the bearing 33. Here, instead of applying pressure to the vibrating body 7, the structure is such that the tip 35 a of the pressure receiving member 35 coupled to the rotating shaft 42 is pressed by the spring member 36 to act as the rotational force of the rotating shaft 42. By doing so, there is no loss of vibration because pressure does not directly act on the vibrating body 7, and the variation in individual motor characteristics is reduced with high efficiency.

  Although the first to fifth embodiments have been described above, the present support structure may be applied to a non-resonant type ultrasonic motor, for example, without limiting the shape of the vibrating body, the operating principle, and the like. Also in this case, it is desirable that the support position is a portion where the displacement is small.

Further, the friction member may not be provided, and the contact member and the vibrating body may be directly contacted.
(Embodiment 6)
An example in which an electronic apparatus is configured using the piezoelectric motor according to the first to fifth embodiments of the present invention will be described with reference to FIG.

  FIG. 14 is a block diagram in which a piezoelectric motor 200 driven according to the present invention is applied to a drive source of an electronic device. The vibration member 50, a friction member 51 joined to the vibration member 50, and the friction member 51 are shown. And the moving body 54, a piezoelectric motor 200 including a moving body 54 that is frictionally driven in a pressurized state, a transmission mechanism 52 that operates integrally with the moving body 54, and a transmission mechanism This is an electronic device that includes an output mechanism 53 that is operated based on the operation of 52.

Here, an example in which the moving body is a rotating body and the moving body is rotated will be described.
As the transmission mechanism 52, for example, a transmission wheel such as a gear train or a friction wheel is used. The output mechanism 53 includes a paper feed mechanism in a printer, a shutter drive mechanism, a lens drive mechanism, a film winding mechanism in a camera, a pointer in an electronic device and a measuring instrument, an arm mechanism in a robot, and a machine tool. In this case, a tooth tool feeding mechanism, a processing member feeding mechanism, or the like is used.

  Note that an electronic timepiece, a measuring instrument, a camera, a printer, a printing machine, a robot, a machine tool, a game machine, an optical information device, a medical device, a moving device, and the like can be realized as the electronic device in this embodiment. Furthermore, if the moving body is provided with an output shaft and has a power transmission mechanism for transmitting torque from the output shaft, a piezoelectric motor driving device can be realized. When the stage is configured as a piezoelectric motor driving device, a stage having a piezoelectric motor that is simpler and smaller than a stage using a normal electromagnetic motor and can be used even in an environment avoiding magnetization is provided. can do.

1, 7, 20, 50, 100 Vibrating body 2, 6, 9, 14, 19, 22, 23, 24, 26, 29, 37 Support member 3, 8, 12, 27, 30, 51 Friction member 4, 15 Guide member 5 Contact member 11, 17, 32, 36 Spring member

Claims (7)

A vibrating body having a piezoelectric element, a friction member provided on a lower surface of the vibrating body, a contact member in contact with the friction member,
Two extending portions extending from the vibration node of the vibrating body in two directions opposite to each other perpendicular to the contact direction of the friction member and the contact member, and in the extending direction of the extending portion A sloping portion that narrows, a support member that engages with the sloping portion and allows the vibrating body to rotate only about the center line of the extension portion, and the contact direction of the support member between the friction member and the contact member A piezoelectric motor having a guide member that is movably guided to the motor. The piezoelectric motor according to claim 1, further comprising a pressure spring that pressurizes the support member. The piezoelectric motor according to claim 1, wherein the friction member has a curve with respect to an extending direction of the two extending portions. The piezoelectric motor according to claim 1, wherein the extending portion is made of a metal . 5. The piezoelectric motor according to claim 1, wherein the vibrating body includes a piezoelectric element itself . An electronic apparatus with a piezoelectric motor, comprising the piezoelectric motor according to claim 1. A stage having a piezoelectric motor comprising the piezoelectric motor according to claim 1 .

Images