JP3418241B2 - Ultrasonic actuator - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic actuator, and more particularly to an ultrasonic actuator for driving a driven member by generating ultrasonic vibration by an electro-mechanical energy conversion element such as a piezoelectric element or an electrostrictive element.

[0002]

2. Description of the Related Art As a prior art of the present invention, Japanese Patent Application No. 5-7
There is an ultrasonic actuator described in No. 4568 (unpublished). The configuration of this prior art ultrasonic actuator will be described with reference to FIGS. 10 (a) and 10 (b).

The vibrator 102 is a substantially rectangular parallelepiped elastic body 1.
03 and two rectangular cutouts 103a provided at the upper end of the elastic body 103 along the longitudinal direction, and sandwiching and fixing the laminated piezoelectric elements 104, respectively. Two sliding members 105 are fixed to the lower end surface positions that are antinodes of vibration of the elastic body 103. Oscillator 102
The elastic body 103 is provided with a support shaft 106 so as to project to both side surfaces at a position serving as a node of a secondary standing wave and between the two laminated piezoelectric elements 104. . Each of the support shafts 106 is engaged with a locking member 107 having a recess, and the locking member 107 has a base end portion with a screw 1
12. A pair of cantilever leaf springs 111 fixed to a base 114 via a pedestal 113 are attached to the tips of the leaf springs 111 by screws 115. As a result, the vibrator 102 is in a state of being urged toward the driven body 109 via the sliding member 105.

The pair of leaf springs 111 are curved so as to be convex upward in the figure when not in use, and when in use, a preload is applied until the leaf springs become a substantially flat plate and vibrate by the elastic force at that time. The child 102 is urged and brought into close contact with the driven body 109. The driven body 109 is driven by driving the vibrator 102 in this state.

As the prior art of the present invention, Japanese Patent Application No.
No. 245391 (unpublished) describes another ultrasonic actuator. The configuration of this prior art ultrasonic actuator will be described with reference to FIGS. 11 and 12. In these figures, FIG. 11 shows the overall structure of the ultrasonic actuator, and FIG. 12 shows the holder portion used in the ultrasonic actuator.

The ultrasonic vibrator 125 is a laminated piezoelectric element 12.
A brass rectangular parallelepiped resonator 122 in which a pair of 1s are arranged is configured so that resonant longitudinal vibration and resonant bending vibration are simultaneously excited.

The ultrasonic oscillator 125 has a pin 123 made of stainless steel which is press-fitted into the vibration node of the resonator 122 and hardened. Resonator 122
A sliding projection 124 is provided on the bottom surface of the plate, that is, on the vibration antinode position on the side opposite to the surface on which the piezoelectric element is arranged. The protrusion 124 is formed on the casing 132 by a roller 137.
A driven body 138 movably supported in the C direction by
It is in contact with a sliding plate 139 made of ceramics which is fixedly adhered to.

Above the ultrasonic oscillator 125, a holder 127 made of quenched stainless steel and having a substantially U-shape is provided.
Are arranged so as to sandwich. A pair of V grooves 128 are engraved on one side of the lower surface of the holder 127, and an elastic hinge portion 134 having a pair of elastic hinge grooves 134a is formed on the other side of the upper surface of the holder 127. It is integrally extended at right angles to the direction of thrust generation (direction of arrow C). A pair of screw holes 135 a are threaded on the upper surface of the fixing portion 135 of the elastic hinge portion, and the bolt 127 inserted from the upper surface of the housing 132 is screwed into the screw hole 135 a, whereby the holder 127 is It is fixed to the housing 132. Further, the upper surface of the holder 127 has a V groove 128.
A circular recess 131 is formed on the vertical line.

The pin 123 of the ultrasonic oscillator 125 is engaged with the pair of V-grooves 128 of the holder 127, and the housing 1 on the axis 129 of the V-groove 128 of the holder 127 in the direction of the vertical line.
A pressing screw 133 is screwed onto the 32. A pressing spring 130 is fixed to the tip of the pressing screw 133, and the tip of the pressing spring 130 has a holder 127.
Engages with a recess 131 provided on the upper surface of the. Then, by rotating the pressing screw 133 in a predetermined direction, a predetermined biasing force is applied to the holder 127.

The elastic hinge portion 134 of the holder 127.
Has a low rigidity in the A direction and a high rigidity in the B and C directions due to its structure, and holds the ultrasonic vibrator 125.
In this state, the pair of laminated piezoelectric elements 121 of the ultrasonic transducer 125 are out of phase with each other by 90 degrees,
When a drive voltage that matches the resonance frequency of the sliding plate is applied, the sliding protrusion 124 is fixed to the driven body 138 by adhesion.
9, and the driven body 138 is driven in the C direction.

Further, Japanese Patent Laid-Open No. 3-195377 discloses that
An ultrasonic motor having another structure is disclosed. Figure 1
3A and 3B are diagrams showing the ultrasonic motor disclosed in this publication, FIG. 3A is a side sectional view, and FIG. 3B is a front view.

The ultrasonic motor is provided with driving parts 162a and 162b at both ends of the elastic body 151 of the ultrasonic vibrator 141, which gives the maximum amplitude with respect to the longitudinal vibration.
The elastic body 151 includes fixing bolts 154a and 154b.
Thus, it is supported by the support member 163 so as to be movable in the vertical direction, and is crimped to the rail 164 that is the second elastic body.

The crimping mechanism for applying this crimping force includes a leaf spring 165, a spring guide 166 and a spring retainer 167 arranged between the elastic body 151 and the support member 163, a first guide 168, a first bearing 169 and Bolt 17
0a, 170b. This crimping mechanism rotates the spring retainer 167 along the screw groove attached to the spring guide 166 to move the spring retainer 167 up and down and change the height of the leaf spring 165 to adjust the crimping force in the arrow B direction. To do. In addition, in order to prevent lateral displacement of the ultrasonic motor, the second bearing 1
73 is used.

When an AC electric signal is applied to the ultrasonic motor constructed as described above, the driving units 162a and 162 are driven.
A large-amplitude substantially elliptical vibration is generated in b, and as a result, the driving force caused by the frictional force with the rail 164 is received and moves in the direction of arrow C.

[0015]

[Patent Document 1] Japanese Patent Application No. 5-7
The technique described in No. 4568 is such that, in order to apply a predetermined pressing force to the ultrasonic vibrator, support shafts are provided so as to project on both side surfaces of an elastic body forming the vibrator. 2 via a locking member (optional) having a recess that engages with
The ultrasonic vibrator is urged toward the driven body by two leaf springs.

By the way, there is a close relationship between the thrust of the ultrasonic actuator and the pressing force applied to the ultrasonic transducer by the sliding plate fixedly adhered to the driven body.
In order to obtain a high thrust, it is necessary to finely adjust the leaf spring so as to apply an appropriate pressing force to the vibrator. Therefore, Japanese Patent Application No. 5
In the technology described in Japanese Patent No. 74568, in order to obtain a high thrust, two leaf springs must be finely adjusted independently to urge an appropriate pressing force, and both side surfaces of the elastic body are It must be adjusted so that the two supporting shafts projecting from the two can be applied with the same amount of pressing force. In order to finely adjust the two leaf springs independently of each other, independent adjusting mechanisms are required, and in order to apply the same amount of pressing force to the two support shafts, the two support shafts need to be adjusted. It must be adjusted while measuring and comparing the applied pressure.

However, if two adjusting mechanisms are provided, the size of the ultrasonic actuator will be increased, and the number of parts of the adjusting mechanism will increase, resulting in a high price. Furthermore, the adjustment work for applying the same amount of pressing force to the two support shafts is very difficult work without a measuring machine for measuring the pressing force. Therefore, the cost of owning a pressing force measuring device is required, and it takes a lot of time to assemble and adjust while measuring, and as a result, the resulting ultrasonic actuator becomes expensive. turn into.

In the technique described in Japanese Patent Application No. 5-245391, a pressing spring and a pressing screw for urging a predetermined pressing force on an ultrasonic transducer are provided in a state that occupies a large space in the axial direction. Has been. Further, in order to movably support the driven body to which a ceramic sliding plate is adhesively fixed, the case, the roller, and the driven body are installed in the same axial direction in this order. Due to these, the lower limit of the size of the entire ultrasonic actuator is restricted.

Further, when the ultrasonic actuator is driven, the sliding protrusion causes the sliding plate adhered and fixed to the driven body to be frictionally driven to drive the driven body.
As for the sliding protrusion and the sliding plate that are actually causing friction, whichever has the softer hardness is worn away, and fine abrasion powder is generated to scatter around. The scattered abrasion powder enters the space between the roller and the case, or the space between the roller and the driven body, which are arranged directly below the driven body to which the sliding plate is adhered and fixed so as to keep a certain distance. I will end up. These rollers enable the driven body to move in a certain direction, that is, in the prior art, as shown in FIG. Intrusion of fine abrasion powder into the roller hinders smooth rotation of the roller, significantly lowers the positioning accuracy of the ultrasonic actuator, and renders it inoperable for a long period of time.

The technique disclosed in Japanese Patent Application Laid-Open No. 3-195377 is such that the plate thickness and the plate width of the plate spring and the variations in bending strength between the left and right sides, and further, the hole position provided for passing the spring guide are different. Since the respective variations occur, the magnitude of the pressure-bonding force applied to the drive portions at both ends of the ultrasonic transducer due to the leaf spring is different. This ultrasonic motor is driven by a driving force that causes a substantially elliptical vibration in the driving unit and is caused by a frictional force between the driving unit and the rail. Therefore, when a different pressure force is applied to the drive unit, the state of the substantially elliptical vibration generated in the drive unit also changes, resulting in a significant decrease in drive efficiency.

Further, the crimping mechanism for applying a crimping force to the ultrasonic transducer is provided in a state of occupying a large space in the rotation axis direction of the spring retainer, as in the technique described in Japanese Patent Application No. 5-245391. Has been. This limits the lower limit of the overall size of the ultrasonic motor.

Further, due to the friction between the drive portion and the rail, fine abrasion powder is generated as in the technique described in Japanese Patent Application No. 5-245391. This wear powder is the first
By entering into the bearings and the second bearing, the rotation of each bearing is hindered, the positioning accuracy of the ultrasonic motor is significantly lowered, and it becomes impossible to drive in the long term.

It is an object of the present invention to provide an ultrasonic actuator which has a small overall size and is inexpensive (a small number of parts and can be easily adjusted).

Another object of the present invention is to provide an ultrasonic actuator having high driving efficiency.

Further, the present invention provides an ultrasonic actuator in which the positioning accuracy is improved without the fine abrasion powder generated by the friction between the sliding protrusion and the friction plate affecting the guide portion which determines the moving direction. The purpose is to do.

[0026]

In order to solve the above-mentioned problems, an ultrasonic actuator of the present invention includes a resonator having a pair of laminated piezoelectric elements arranged therein, an ultrasonic vibrator including the resonator, A sliding protrusion disposed on the acoustic wave oscillator; a pin provided at a vibration node of the resonator of the ultrasonic oscillator; a holder having a V groove and an elastic hinge portion that engage with the pin; and the holder. A frame member to be held, a driven member including a sliding plate with which the projection for sliding of the ultrasonic transducer abuts, a biasing unit that abuts and presses the holder, and a member that abuts the holder. Adjusting means for adjusting the pressing force of the biasing means, and the contact point between the V groove and the pin and the elastic hinge portion are provided on a straight line parallel to the moving direction of the driven member. It has a feature.

Further, the ultrasonic actuator of the present invention is
A pair of laminated electro-mechanical conversion elements are fixedly arranged on one side surface, and an ultrasonic vibrator including a rectangular parallelepiped resonator that generates standing wave vibration by applying a high frequency voltage, and the ultrasonic vibrator A shape having a protrusion for sliding disposed on the vibration antinode position on the other side surface of the resonator, a pair of pins provided at a node of vibration of the resonator of the ultrasonic vibrator, and an opening in part Is arranged so as to sandwich the resonator of the ultrasonic transducer in the opening, and the tip of the opening is engaged with the pair of pins provided in the resonator of the ultrasonic transducer. A pair of mating V-grooves are engraved, and an elastic hinge portion is formed on the side opposite to the engraved side of the V-groove, the contact point between the V-groove and the pin, and the elastic hinge portion. On a plane parallel to the moving direction of the driven member. And a frame body that holds the holder on the side where the elastic hinge portion of the holder is formed, and a sliding plate that the projection abuts. When a pressing force is applied to the driven member and the holder that move in a dynamic manner, the protrusion of the resonator of the ultrasonic transducer is applied to the protrusion through the pair of pins that engage with the V groove of the holder. It is characterized in that it has an urging means for urging a pressing force against the driven member, and an adjusting means provided between the urging means and the driven member for adjusting the pressing force.

Further, in the ultrasonic actuator of the present invention, a pair of laminated electro-mechanical transducers are fixedly arranged on one side surface, and a rectangular parallelepiped resonator that generates standing wave vibration by applying a high frequency voltage is used. Ultrasonic transducer,
A protrusion for sliding that is arranged at a vibration antinode position on the other side surface of the resonator of the ultrasonic vibrator, a pair of pins provided at a node of vibration in the resonator of the ultrasonic vibrator, and a part thereof. It has a shape having an opening, and is arranged so as to sandwich the resonator of the ultrasonic transducer at the opening, and the resonator provided on the resonator of the ultrasonic transducer is provided at the tip side of the opening. A pair of V grooves that engage with the pair of pins respectively are engraved, and an elastic hinge portion is formed on the opposite side of the V groove engraved side, and a contact point between the V groove and the pin is formed. ,
A holder in which the elastic hinge portion is provided on one plane parallel to the moving direction of the driven member, a frame body that holds the holder on the side of the holder on which the elastic hinge portion is formed, and the protrusion And a driven member that moves relative to the resonator of the ultrasonic transducer and a side of the frame that faces the holder, and a pressing force is applied to the holder. A wide plate that urges a pressing force against the driven member to the protrusion of the resonator of the ultrasonic transducer via the pair of pins that engage with the V groove of the holder. It is characterized in that it has a shape-like urging means and an adjusting means for adjusting the pressing force applied to the holder by the urging means on the side of the frame body where the urging means is held.

A damping member can be provided on the above-mentioned urging means.

[0030]

[Function] Electro-mechanical conversion element (or laminated piezoelectric element)
In the resonator provided with, the protrusion for sliding is biased by the biasing means against the driven member with a predetermined pressing force. A high frequency voltage is applied to the electromechanical conversion element to generate standing wave vibration in the resonator, and the driven member is driven by the vibration. The biasing means is provided with a pressing force adjusting means for adjusting the pressing force, and the pressing force is adjusted by operating this adjusting means.

Further, a sliding projection of the resonator may be brought into contact with the driven member, and the driven member may be driven through the projection by vibrating the resonator.

[0032]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIGS. 1 to 4 are views showing an ultrasonic actuator according to a first embodiment of the present invention. In these figures, FIG. 1 is a front view showing an ultrasonic actuator, and FIG. 2 is a front view showing an ultrasonic transducer used in this ultrasonic actuator.

As shown in FIG. 2, an ultrasonic oscillator 5 applied to an ultrasonic actuator is provided with a brass rectangular parallelepiped resonator 2 in which a pair of laminated piezoelectric elements 1 and 1 are arranged.
The resonator 2 has a shape such that resonant longitudinal vibration and resonant bending vibration are simultaneously excited.

On both sides of the ultrasonic oscillator 5, pins 3 which are holding portions made of quenched stainless steel are press-fitted into the vibration nodes of the resonator 2. Further, sliding projections 4 are provided at the vibration antinode position on the upper surface of the resonator 2, that is, on the side opposite to the surface on which the piezoelectric element 1 is arranged. FIG. 1 is a diagram showing an ultrasonic actuator 6 according to a first embodiment of the present invention, which uses the ultrasonic vibrating element 5 configured as described above.

As shown in FIG. 1, below the ultrasonic transducer 5, a holder 7 (see FIG. 3), which has a shape in which a part of a rectangular parallelepiped is hollowed out and is hardened, has its opening. The ultrasonic transducer is arranged so as to be sandwiched upward. A pair of V-shaped grooves (hereinafter, referred to as V grooves) 8 are engraved on the tip end side of the opening near one side of the upper surface of the holder 7, and on the other side of the holder 7, an elastic member described later is formed. The hinge part 9 is formed. Further, on the lower surface of the holder 7, on the straight line of the V groove 8, there is formed a protrusion 10 described later. The holder 7 configured in this manner is fixed to the frame body 11 via the screws 60, and in this state, the pins 3 of the ultrasonic transducer 5 are engaged with the pair of V grooves 8.
The ultrasonic transducer 5 is held by the holder 7.

A plate spring 12, which is a plate-like urging means, is positioned on the side of the holder 7 opposite to the portion having the ultrasonic transducer 5, and the base end of the plate spring 12 has a screw 13 attached thereto. It is fixed to the cylindrical member 14 through. The cylindrical member 14 is slidably fitted in the frame body 11, and is slidable by a screw 15 screwed through the frame body 11 from the side opposite to the screw 13. It is configured. The screw 15 for sliding the cylindrical member 14 is a leaf spring 12.
And a driven body 16 described later. Also,
The tip end side of the leaf spring 12 whose base end is fixed is in contact with the protrusion 10 of the holder 7. Therefore, by rotating the screw 15 located between the leaf spring 12 and the driven body 16, the biasing force acting on the protrusion 10 of the holder 7 can be adjusted. In this case, if the width of the leaf spring 12 is made wider to substantially match the width of the protrusion 10, the pressing force of the leaf spring 12 on the holder 7 in the width direction becomes uniform,
It becomes more preferable.

A driven body 16 is slidably connected to the frame body 11 so as to face the frame body 11. That is, a plate member 18 having a sliding plate 17 provided on the surface facing the frame body 11 is fixed to the driven body 16 by adhesive fixing or screwing. Is in contact with the sliding protrusion 4.
The driven body 16 has a screw 15 for sliding the cylindrical member 14 when the driven body 16 is slid with respect to the frame body 11.
A hole 19 is formed at a position facing the head of the.

Since the elastic hinge portion 9 of the holder 7 is formed so as to extend in the width direction as shown in FIG. 3, the rotation in the width direction A is restricted, but the vertical direction B,
That is, when the ultrasonic actuator 6 is configured as shown in FIG. 1, it can be rotated in the biasing direction of the leaf spring 12. The position of the elastic hinge portion 9 is provided so that the thrust force of the ultrasonic actuator 6 is in line 20 'with the providing force 20 applied to the holder 7 through the pin 3 engaging with the V groove 8 (see FIG. 4). In FIG. 4, an arrow 21 indicates a force by which the leaf spring 12 presses the holder 7 upward in the drawing, and an arrow 22 indicates a reaction force of the force by which the ultrasonic transducer 5 is pressed by the pressing force 21. Indicates. The arrow 23 indicates the reaction force of the donating force 20. In this way, since the elastic hinge portion 9 is located at the point of action of the thrust of the ultrasonic actuator, it is possible to prevent the generation of the rotation moment due to the thrust and the reaction force.

Next, the operation of the ultrasonic actuator thus constructed will be described. Hole 1 in driven body 16
The driven body 16 is slid so that the position 9 faces the head of the screw 15 that slides the cylindrical member 14. Hole 1
When 9 is aligned with the head of the screw 15, a screwdriver is inserted and the screw 15 is rotated to rotate the cylindrical member 14
Is slidably moved in the direction of the rotation axis of the screw 15. Leaf spring 12
With the movement of the cylindrical member 14, the base end side is moved in the axial direction, so that bending occurs and elastic force is generated. By this elastic force, a pressing force is applied to the protrusion 10 of the holder 7 with which the leaf spring 12 is in contact. When a pressing force is applied to the holder 7 by the leaf spring 12, the pressing force is applied to the ultrasonic vibrator 5 via the pin 3, and the ultrasonic vibrator 5
The sliding projection 4 comes into close contact with the sliding plate 17 with a uniform pressing force. In this case, by rotating the screw 15, the base end portion of the spring 12 is slightly moved in the axial direction, and the pressing force is adjusted so that a predetermined thrust is obtained.

A pair of laminated piezoelectric elements 1 of the ultrasonic transducer 5
When a drive voltage which is 90 degrees out of phase with each other and which matches the resonance frequency of the ultrasonic transducer 5 is applied to 1, the sliding protrusions 4,
4, the sliding plate 17 is frictionally driven, and as a result, the driven body 16 is driven in the C direction in the figure.

According to this embodiment, the pressing force of the sliding projections 4 and 4 of the ultrasonic transducer 5 on the driven body 16 can be given by the leaf spring 12 of one sheet.
The means for adjusting the pressing force of the
It is provided between and. Therefore, the mechanism for adjusting the pressing force is simplified, and in particular, since the adjustment can be performed only by rotating one screw, the adjustment work becomes extremely easy. Further, since the adjusting mechanism has a simple structure, the number of parts is reduced, and it is possible to provide an inexpensive ultrasonic actuator. Further, the adjusting mechanism is provided between the driven body 16 and the leaf spring 12 and is arranged at a position adjacent to the driven body 16 and the ultrasonic transducer 5 at the same time. The size can be reduced.

The ultrasonic vibrator 5 is preferably pressed against the driven member 16 via the holder 7 shown in FIGS. That is, the following effects can be obtained by using the holder 7 as shown in these figures. Since the pin of the ultrasonic oscillator 5 is biased by the V groove 8, there is no play between the ultrasonic oscillator and the holder. Since the holder 7 and the elastic hinge portion 9 are integrally processed, the frame 11 and the holder 7
There is no play between Since the protrusion 10 of the holder with which the leaf spring 12 is in contact and the pin 3 of the ultrasonic transducer that engages with the V groove of the holder are arranged in a straight line, the pressing force of the leaf spring 12 applied to the holder And the reaction force of the pressing force with which the holder pushes the pin 3 of the ultrasonic transducer are in a straight line,
No rotational moment is generated in the holder 7. By providing the contact point between the V groove 8 of the holder and the pin 3 of the ultrasonic transducer and the elastic hinge portion 9 of the holder on a straight line parallel to the moving direction of the driven member 16, the elastic hinge portion 9 is provided. No rotational moment is generated in. As a result, the hinge portion 9
The deformation does not occur, and the lost motion due to the deformation does not occur at the time of minute displacement.

Further, in the driven body 16, the linear guide that determines the driving direction of the ultrasonic actuator and the sliding plate 17 that is in close contact with the ultrasonic vibrator 5 are provided on the same surface side of the driven body 16. The opposite surface and both side surfaces of the driven body 16 can be completely exposed. by this,
When using this ultrasonic actuator as an actuator, there are more surfaces for mounting the necessary parts,
The actuator will be easy to use.

(Second Embodiment) FIG. 5 is a diagram showing an ultrasonic actuator according to a second embodiment of the present invention. Below, the second
Examples will be described. The same components as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

The ultrasonic actuator of this embodiment uses a plate member 24 of the same size having rigidity as the plate-like urging means, instead of the plate spring 12 described in the first embodiment. The plate member 24 having rigidity has a screw 2 at the base end thereof.
It is fixed to the cylindrical member 26 slidably fitted to the frame body 11 by 5. The tip of the plate member 24 has a holder 7 for holding the ultrasonic transducer 5 as in the first embodiment.
Is in contact with the protrusion 10. Plate material 24 of cylindrical member 26
One end of an elastic member 27 composed of, for example, a coil is fixed to the end surface on the opposite side to the end surface. Elastic member 27
A cylindrical body 28 having a threaded hole is fixed to the other end of the cylindrical body 28, and the cylindrical body 28 is slidably held on the frame body 11 by a screw 29. That is, by rotating the screw 29, the cylindrical member 26 is moved to the cylindrical body 28 and the elastic member 2.
It is possible to move in the rotation axis direction via 7.

Next, the operation of the ultrasonic actuator thus constructed will be described. Hole 1 in driven body 16
9 slides the driven body 16 at a position facing the head of the screw 29, inserts a driver into the hole 19 and rotates the screw 29 to move the tubular body 28 in the direction of the rotation axis of the screw 29. . When the cylinder 28 is moved, the elastic member 27 attached thereto expands and contracts, and the plate member 24 fixed to the cylindrical member 26 tries to move in the rotation axis direction of the screw 29. Since the tip end side of the plate member 24 is in contact with the protruding portion 10 of the holder 7, it does not move in the rotation axis direction of the screw 29, and the elastic force due to the expansion and contraction of the elastic member 27 urges the protruding portion of the holder 7. Then, this elastic force is applied to the ultrasonic transducer 5 as a pressing force.

With this structure, the same effect as that of the first embodiment can be obtained, and the pressing force urged by the plate member 24 causes the pin 3 and the protrusion 10 of the holder 7 to be pressed. Since it can be biased in a straight line passing therethrough, it is possible to obtain an effect that a rotational moment to the holder 7 is less likely to occur than when a plate spring of a cantilever is used.

(Third Embodiment) FIG. 6 is a diagram showing an ultrasonic actuator according to a third embodiment of the present invention. Below, the third
Examples will be described. The same components as those in the first and second embodiments are designated by the same reference numerals, and the description thereof will be omitted.

The ultrasonic actuator of this embodiment uses a rigid plate member 24 'as the plate-like urging means, as in the second embodiment. The base end of the plate 24 'is
For example, it is hooked on one end of an elastic member 31 formed of a tension coil spring, and the other end of this elastic member 31 is a cylindrical member 32 slidably fitted to the frame body 11.
Is caught in. A screw hole is threaded in the cylindrical member 32, and the cylindrical member 32 is screwed into the frame 1
1 is slidably held. That is, by rotating the screw 29, the cylindrical member 32 can move in the rotation axis direction.

Further, the holder 7'for holding the ultrasonic transducer 5 is formed with a projecting portion 30 on the lower surface on the fixed side with the elastic hinge portion 9 as a boundary. The tip end of the plate member 24 'whose base end is held as described above is locked to the projecting portion 30, and the plate member 24' with the base end and the tip end supported in this manner. The central part of is the protrusion 1 of the holder 7 '.
It is in contact with 0.

Next, the operation of the ultrasonic actuator thus constructed will be described. Hole 1 in driven body 16
9 slides the driven body 16 at a position facing the head of the screw 29, inserts a driver into the hole 19 and rotates the screw 29, thereby moving the cylindrical member 32 in the rotation axis direction of the screw 29. . When the cylindrical member 32 is moved, the elastic member 31 attached thereto expands and contracts, and the plate member 24 ′ fixed to this elastic member 31 tries to move in the rotation axis direction of the screw 29. Since the central portion of the plate member 24 is in contact with the protruding portion 10 of the holder 7 ', it does not move in the rotation axis direction of the screw 29, and the elastic force due to the expansion and contraction of the elastic member 27 causes the protruding portion 10 of the holder 7'. The elastic force is applied to the ultrasonic transducer 5 as a pressing force.

With this structure, the same effects as those of the first and second embodiments can be obtained, and further, the ultrasonic vibrator 5 has the structure in which the plate member 27 'is supported at both ends.
Can be supported more firmly without backlash, and the positioning accuracy and drive efficiency of the ultrasonic actuator can be further improved.

(Fourth Embodiment) FIG. 7 is a diagram showing an ultrasonic actuator according to a fourth embodiment of the present invention. Below, the third
Examples will be described. The same components as those of the first to third embodiments are designated by the same reference numerals, and the description thereof will be omitted. In this figure (a)
FIG. 3B is a front view showing the ultrasonic actuator, and FIG.
FIG. 4B is a cross-sectional view taken along the line bb in FIG. 7A, which is an ultrasonic actuator including a guide for sliding the driven body with respect to the frame body, a measuring unit for measuring the displacement of the driven body, and the like. It is sectional drawing which shows an example of the whole structure of this.

The ultrasonic transducer 5 in this embodiment is held by a holder 33 having a shape as shown in FIG. The holder 33 is configured such that a part of a rectangular parallelepiped is hollowed out to form an opening, and the ultrasonic transducer 5 is sandwiched in the opening. A stair-like step portion 33a is formed on the tip end side of the opening close to one side of the upper surface of the holder 33, and a pair of V grooves 8 are formed in the step portion similarly to the holder 7 shown in FIG. Also,
An elastic hinge portion 9 is formed on the other side of the holder 33, and on the lower surface of the holder 33, on the straight line of the V groove 8,
A V groove 34 is engraved. The holder 33 configured as described above is fixed to the frame body 11 via the screw 60, and in this state, the pins 3 of the ultrasonic transducer 5 are engaged with the pair of V grooves 8 and The sound wave oscillator 5 is held by the holder 33. An L-shaped member 35 having a substantially L-shape is attached to the end of the holder 33 so as to cover the pins 3 of the ultrasonic transducer 5.

The ultrasonic actuator of this embodiment uses a plate spring 39 formed in the shape of both ends supporting beams as a plate-like urging means. That is, the base end portion of the leaf spring 39 is fixed to the end surface of the cylindrical member 40 slidably fitted to the frame body 11, and the other end portion is to the lower surface of the holder 33 fixed to the frame body 11. It is fixed by screws 43. Further, the central portion of the leaf spring 39 is engaged with the pin 42 fitted in the V groove 34 formed in the holder 33.

The cylindrical member 40 is located between the driven member 16 and the plate spring 39 which is a plate-like urging means, and the outer peripheral surface of the cylindrical member 40 has a sliding direction with respect to the frame 11. A V-shaped groove 41 is formed in a direction orthogonal to the direction. Further, on the side surface of the frame body 11, screw holes 44 and 45 are threaded along the sliding direction from a direction orthogonal to the sliding direction of the slidably fitted cylindrical member 40. . Screw hole 4
4 is formed at a position corresponding to the V groove 41 formed on the outer peripheral surface of the cylindrical member 40, and the screw hole 44 has a V
A screw 46 having a conical tip shape that abuts the slope of the groove 41 is screwed. Further, the cylindrical member 4 is provided in the screw hole 45.
Screw 47 having a flat tip shape that abuts the outer peripheral surface of 0.
Is screwed in.

The overall structure of the frame 11 is, as shown in FIG. 6B, made of a substantially rectangular plate-like member, and is a space 36 for accommodating the holder 33 holding the ultrasonic transducer 5. And a pair of linear guides (for example, cross roller guides) 37 are provided on the left and right of the upper part so as to sandwich the space 36. The driven body 16 is slidably connected to the linear guide 37. In this case, it is preferable that the pair of linear guides 37 be positioned on the upper side in the gravity direction with respect to the ultrasonic transducer 5, and in particular, the protrusions 4 and 4 for sliding and the sliding plate 17 of the driven member 16. It is preferable to dispose above the contact position so as not to be affected by the abrasion powder generated by the contact. In the present embodiment, as shown in the drawing, the driven member 16 is attached to the frame body 1.
1, a groove 38 is formed on the surface facing 1 and a plate member 18 having a slide plate 17 provided in the groove 38 is fixed by adhesive fixing or screwing, which corresponds to the moving range of the resonator 2. It is considered that the linear guides 37 are provided on both sides away from the region directly below the gravity to suppress the influence of the scattered abrasion powder.

The casing 5 having a displacement amount measuring means 48 for measuring the displacement of the driven body 16 on one side of the driven body 16.
0 is provided. The displacement amount measuring means 48 is fixed to the driven body 16 and has a glass substrate 49 having a bright and dark pattern on its surface at regular intervals, and the glass substrate 49.
And a collimator lens 51 that collimates the light emitted from the light source 52. Further, the housing 50 is provided with a detection slit 53 on the side opposite to the light source 52 with the glass substrate 49 interposed therebetween, and the glass substrate 49 that moves with the driving of the driven body 16.
And they are installed side by side in a state where a constant interval is always maintained. Further, a photoelectric element 54 is arranged above the detection slit 53 so as to detect the light from the light source 52 that has passed through the detection slit 53. A cover 55 is provided on the frame body 11 so as to cover the entire displacement amount measuring means 48 thus configured.

Next, the operation of the ultrasonic actuator thus constructed will be described. The leaf spring 39 is a flat plate when not in use, and when in use, the cylindrical member 40 is fixed to the frame body 11 until the sloped surface of the V groove 41 of the cylindrical member 40 contacts the conical tip end of the screw 46. By inserting and inserting, a preload is applied to the leaf spring 39. Then, with the preload applied, the screw 46 is rotated to advance the conical tip end toward the cylindrical member 40, thereby pressing the slope of the V groove 41. Due to the pressing force acting on this slope, a component force is generated in the sliding direction of the cylindrical member 40, whereby the plate spring 39 is further bent, that is, the cylindrical member 40 slides so as to apply a larger pressing force. Be moved.
Further, when the screw 46 is rotated in the opposite direction, the conical tip end thereof separates from the slope of the V groove 41, and the cylindrical member 40 slides in the direction in which the preload of the leaf spring 39 that has already been added weakens. It stops when it comes into contact with. Screw 46
By rotating, the pressing force is finely adjusted so that a predetermined thrust is obtained. After the adjustment of the pressing force is completed, the screw 47 is screwed into the screw hole 45, and the flat end of the screw 47 is tightened so as to abut against the cylindrical member 40 to lock the position of the cylindrical member 40. .

Then, when a drive voltage having a phase difference of 90 degrees from each other and a resonance frequency of the ultrasonic transducer 5 is applied to the pair of laminated piezoelectric elements of the ultrasonic transducer 5, the sliding protrusions provided on this are applied. The sliding plate 17 is frictionally driven by 4,
The driven body 16 is driven in the arrow direction. The drive amount of the driven body 16 can be detected by the displacement amount measuring means 48. That is, the glass substrate 49 moves in the same direction as the driven body 16 is driven. The light emitted from the light source 52 is collimated by the collimator lens 5
By passing 1, the light beam becomes a parallel light beam, and the glass substrate 49 is irradiated with the light beam. Then, this light passes through the bright and dark pattern formed on the surface of the glass substrate 49 at regular intervals and the detection slit 53, and enters the photoelectric element 54 as detection light. The photoelectric element 54 converts the received detection light into an electric signal and reads the electric signal to obtain the glass substrate 4
A displacement of 9 is measured. In this way, the glass substrate 49
By measuring the displacement amount of, it becomes possible to measure the displacement amount of the driven body 16 moving at the same time.

As described above, according to this embodiment, the following effects can be obtained in addition to the effects obtained in the first embodiment.

Since the screw 46 for adjusting the pressing force of the leaf spring 39 is provided along the same direction as the sliding direction of the driven body 16, the pressing force is adjusted while operating the driven body 16. It will be possible. That is, the driven body 16
It is possible to adjust the pressing force while measuring the propulsive force at the time of driving, and it is possible to easily generate the maximum propulsive force of the driven body 16. Further, since the screw 46 is provided along the same direction as the sliding direction of the driven body 16, the sliding plate 17 can be lengthened, and thus the moving stroke can be lengthened. . Further, by using the leaf springs 39 in the shape of both ends supporting beams, the ultrasonic transducer 5 can be supported more firmly without backlash, and the positioning accuracy of the ultrasonic actuator can be improved.

Further, the projections 4 for sliding the ultrasonic vibrator 5 are provided.
4 and the sliding plate 17 of the driven member 16 come into contact with each other, and the abrasion powder scatters. As shown in the figure, the linear guide 37 that determines the moving direction of the ultrasonic actuator is not located immediately below the sliding plate 17 and the sliding protrusions 4 where abrasion powder is generated,
Since they are arranged on both sides so as to sandwich the contact position between them, the abrasion powder does not enter the linear guide 37. Further, since the pin 33 is covered with the L-shaped member 35, it is possible to prevent the abrasion powder from entering between the pin 3 and the V groove 8 of the holder 33. Therefore, it is possible to obtain an ultrasonic actuator with improved positioning accuracy.

Further, the holder 33 is provided with the V groove 34, and the pin 42 is arranged in the V groove 34 so that the biasing force of the leaf spring 39 is applied. The applied pressing force can be urged on a straight line passing through the pins 3 and 42, and the driving force of the resonator 2 can be accurately transmitted to the driven member 18.

(Fifth Embodiment) FIG. 9 is a view showing an ultrasonic actuator according to a fifth embodiment of the present invention, and particularly at an arrangement position of a linear guide provided so as to slide the driven body 16. It is a figure which shows the structure of the ultrasonic actuator which has a characteristic. In this embodiment, only parts different from the above-mentioned embodiments will be described.

As shown in the drawing, the ultrasonic actuator of this embodiment has a direction perpendicular to the direction of gravity (horizontal direction).
Linear guide 3 so that driven body 16 slides on
7'is arranged, and the linear guide 37 'is arranged so that one of the pair of linear guides 37' is in the direction of gravity (lower side) with respect to the other. And the driven body 1
A plate member 18 having a sliding plate 17 provided thereon is fixed to 6 by adhesion or screwing at a position further below the linear guide existing on the lower side in the direction of gravity.

Therefore, the sliding plate 17 and the sliding protrusion 4 are actually
Since the fine abrasion powder generated by the friction of # 1 falls in the direction of gravity, the linear guide 3 provided above the contact position between the sliding plate 17 and the sliding protrusion 4 (in the antigravity direction).
No abrasion powder will enter the 7 '. Even if the linear guides are arranged side by side in the direction of gravity as described above, it is possible to obtain an ultrasonic actuator that is easy to use without causing deterioration in positioning accuracy due to scattering of wear powder.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-mentioned embodiments and can be modified as follows, for example.

In each of the above-mentioned embodiments, the ultrasonic vibrator 5 is held by the holder, but a plate spring or the like which is a plate-like urging means can be used without using such a holder. It may be directly fixed to the ultrasonic transducer 5. In this case, the leaf spring or the like is used for the resonator 2 as follows, for example.
Can be fixed directly to. That is, a leaf spring or the like is fixed using a screw at a surface position (preferably a vibration node position) opposite to the surface where the sliding protrusion 4 of the resonator 2 is provided. Alternatively, a pair of projecting pieces extending in a direction perpendicular to the leaf spring may be formed at the tip of the leaf spring, and the pair of projecting pieces may be formed at the positions of both side surfaces of the resonator 2 (preferably at the vibration nodes). The resonator 2 is sandwiched and fixed by using screws. As described above, when the leaf spring or the like is directly fixed to the resonator 2, it is possible to suppress the lateral shake by increasing the width to some extent.

Although the resonator 2 is provided with the pair of laminated piezoelectric elements 1 and 1, the piezoelectric element provided in the resonator 2 may be a single element.

Furthermore, in the case of the above-mentioned embodiment and the above-mentioned modified example, if a damping member is provided on the leaf spring or the like,
Further, the positioning accuracy and drive efficiency can be improved. That is, normally, in the case of the above-mentioned embodiment, when the leaf spring or the like vibrates, the holder is driven by the driven member 16
It will vibrate in a direction parallel or perpendicular to. This vibration is transmitted to the ultrasonic vibrator 5 via the pin and changes the contact force between the driven member 16 and the ultrasonic vibrator 5, or vibrates the ultrasonic vibrator in the moving direction of the driven member 16. I will let you. This change in pressing force is caused by the ultrasonic transducer 5
Positioning accuracy and drive efficiency will be deteriorated due to external vibrations. For this reason, in the above-mentioned embodiment or the above-mentioned modified example, it is preferable to provide a damping member on the leaf spring or the like.

An example of forming a vibration damping member on a leaf spring or the like will be described below. By utilizing the viscoelasticity of high molecular substances such as plastics and stacking them on a leaf spring made of stainless steel plate or phosphor bronze steel plate, it is possible to damp the vibration generated in the leaf spring itself without impairing the strength of the leaf spring. it can. For example, a three-layer structure in which a thin damping member having a characteristic of suppressing vibration is sandwiched between two leaf springs has excellent damping characteristics, but a damping member is provided on one side of one leaf spring. A damping effect can be obtained even by attaching the two-layer structure. When using a two-layer structure, these damping members are formed into a sheet shape and thermocompression-bonded to a steel plate that is the material of the leaf spring, and this steel plate is punched into a desired shape by a press to form a leaf spring. Form.
In addition, in the state where the polymer substance is dissolved in a solvent, it is applied to one or both sides of the steel plate that is the material of the leaf spring by using a roll coater, etc., and after drying to remove the solvent, this steel plate is pressed into the desired shape Form a leaf spring by punching.

When a leaf spring having a three-layer structure is used, the thin film of the polymer resin restrains both steel plates, and the viscoelastic shear deformation of the polymer substance exerts the vibration damping property. That is, the resin layer undergoes shear deformation along with bending due to vibration, energy is absorbed by viscoelastic behavior of the resin at that time, and even small deformation such as vibration causes large shear deformation, and vibration is absorbed by the resin layer. .

When a leaf spring having a two-layer structure is used, the resin layer expands and contracts due to bending of the steel plate to absorb energy, and the elastic deformation of the polymer resin exerts damping properties.
However, in the case of a leaf spring having a two-layer structure, the polymer substance expands and contracts and the size of the deformation is proportional to the thickness of the resin layer.
The resin layer must be thicker than that of a layered structure. As the above-mentioned polymer substance, there is rubber or resin, and natural rubber or synthetic rubber is known as rubber,
Known resins include vinyl acetate-based resins, acrylic acid ester-based resins, polyester-based resins, polyisobutylene-based resins, and the like.

Alternatively, instead of the polymer substance or resin,
It is also possible to use urethane, acrylic, or silicon-based vibration absorbing paint, or a gel material. In this case, the gel material is in a gel state in which the product is insolubilized during polymer synthesis, and organogel, gel rubber, silicone gel, and fluorine ion exchange resin are known. Further, the leaf spring itself can be made of a fiber reinforced plastic, for example, carbon fiber, as a vibration damping member having a high damping property. The leaf spring can also be made of intergranular corrosion stainless steel obtained by corroding the surface layer of a stainless steel plate with an aqueous solution of sulfuric acid and copper sulfate.

As described above, by using the vibration damping member to suppress the vibration of the leaf spring or the like, it is possible to apply a stable pressing force, and it is possible to firmly lock the ultrasonic vibrator, Furthermore, these effects enable more accurate positioning and the like.

The configuration of the present invention described in the claims of the above-mentioned claims can be embodied as follows.

(1) The ultrasonic actuator according to any one of claims 1 to 4, wherein the biasing means described in claims 1 to 4 is constituted by a leaf spring.

(2) The biasing means described in claims 1 to 5 is constituted by a plate-shaped member having rigidity, and the biasing means described in claims 1 to 4 is elastic. The ultrasonic actuator according to claim 1, further comprising a member.

(3) In the driven member according to any one of claims 1 to 4, the guides of the driven member are arranged on both sides of the resonator.
The ultrasonic actuator according to.

[0081]

As described above, according to the present invention,
The driving efficiency is high, the overall size can be reduced,
In addition, an inexpensive ultrasonic actuator that can be easily adjusted with a simple structure can be obtained. Further, by constructing the guide portion of the driven member as in the present invention, it is possible to eliminate the influence of abrasion powder on the guide portion, and it is possible to obtain an ultrasonic actuator with improved positioning accuracy.

[Brief description of drawings]

FIG. 1 is a front view showing a first embodiment of an ultrasonic actuator according to the present invention.

FIG. 2 is a front view showing an ultrasonic transducer used in the ultrasonic actuator shown in FIG.

FIG. 3 is a perspective view showing a holder used in the ultrasonic actuator shown in FIG.

FIG. 4 is a diagram showing a force acting on a holder.

FIG. 5 is a front view showing a second embodiment of the ultrasonic actuator according to the present invention.

FIG. 6 is a front view showing a third embodiment of the ultrasonic actuator according to the present invention.

FIG. 7A is a front view showing a fourth embodiment of the ultrasonic actuator, and FIG. 7B is a view of b- in FIG. 7A.
Sectional drawing which shows the example of the whole structure of the ultrasonic actuator provided with the guide which slides a to-be-driven body with respect to a frame, the measuring means which measures the amount of displacement of a to-be-driven body, and the sectional view along b. .

8 is a perspective view showing a holder used in the ultrasonic actuator shown in FIG.

FIG. 9 is a diagram showing a fifth embodiment of the ultrasonic actuator according to the present invention.

10A and 10B are views showing an ultrasonic actuator according to a prior art, in which FIG. 10A is a plan view and FIG. 10B is a side view.

FIG. 11 is a side view showing another ultrasonic actuator according to the prior art.

12 is a perspective view showing a holder used in the ultrasonic actuator shown in FIG.

13A and 13B are diagrams showing an ultrasonic motor according to a conventional technique, in which FIG. 13A is a side sectional view and FIG. 13B is a front view.

[Explanation of symbols]

1 ... Piezoelectric element, 2 ... Resonator, 3 ... Pin, 4 ... Sliding protrusion,
5 ... Ultrasonic transducer, 7, 33 ... Holder, 12, 39 ... Leaf spring, 13 ... Screw, 14 ... Cylindrical member, 15 ... Screw, 16
... Driven member, 17 ... Sliding plate, 18 ... Plate material, 24, 2
4 '... plate material, 27, 31 ... elastic member.

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyasu Janeishi 29-16 of Owada-cho, Hachioji-shi, Tokyo 16-29 of Olympus Engineering Co. (72) Inventor Somitsu Watanabe 4-16 of Owada-cho, Hachioji-shi, Tokyo (56) References JP-A-4-344181 (JP, A) JP-A-5-252764 (JP, A) JP-A-4-156282 (JP, A) JP-A-3-230773 (JP, A) JP 5-184165 (JP, A) JP 1-177874 (JP, A) JP 5-137359 (JP, A) JP 4-347587 (JP, A) Kaihei 6-284752 (JP, A) JP-A-7-107758 (JP, A) JP-A-3-195377 (JP, A) Actual Kaihei 5-41399 (JP, U) (58) Fields investigated ( Int.Cl. ⁷ , DB name) H02N 2/00

Claims (15)

(57) [Claims] 1. A resonator having a pair of laminated piezoelectric elements arranged therein, an ultrasonic vibrator including the resonator, a protrusion for sliding arranged on the ultrasonic vibrator, and the resonance of the ultrasonic vibrator. A pin provided at a vibration node in a container, a holder including a V groove and an elastic hinge portion that engages with the pin, a frame body that holds the holder, and the protrusion for sliding the ultrasonic transducer are in contact with each other. A driven member provided with a sliding plate, an urging means for contacting and pressing the holder, and an adjusting means for adjusting the pressing force of the urging means for contacting the holder, the V groove An ultrasonic actuator, wherein a contact point with the pin and the elastic hinge portion are provided on a straight line parallel to a moving direction of the driven member. 2. The ultrasonic actuator according to claim 1, wherein one of the urging means is held by the frame body. 3. An ultrasonic transducer comprising a pair of laminated electro-mechanical transducers fixedly arranged on one side surface, the ultrasonic transducer comprising a rectangular parallelepiped resonator that generates standing wave vibrations by applying a high frequency voltage, A protrusion for sliding that is arranged at a vibration antinode position on the other side surface of the resonator of the ultrasonic vibrator, a pair of pins provided at a node of vibration in the resonator of the ultrasonic vibrator, and an opening at a part thereof. And a pair of parts provided in the resonator of the ultrasonic oscillator at the tip end side of the opening. A pair of V-grooves that engage with the respective pins are formed, and an elastic hinge portion is formed on the side opposite to the side on which the V-grooves are formed, and a contact point between the V-groove and the pin, The elastic hinge portion is flat and parallel to the moving direction of the driven member. The resonance of the ultrasonic transducer includes a holder provided on a surface, a frame body that holds the holder on the side where the elastic hinge portion of the holder is formed, and a slide plate with which the protrusion abuts. When a pressing force is applied to the driven member that moves relative to the container and the holder, the resonance of the ultrasonic transducer is generated via the pair of pins that engage with the V groove of the holder. Urging means for urging a pressing force against the driven member to the protrusion of the container, and adjusting means provided between the urging means and the driven member for adjusting the pressing force. Ultrasonic actuator characterized by. 4. An ultrasonic transducer comprising a pair of laminated electro-mechanical transducers fixedly disposed on one side surface, the ultrasonic transducer comprising a rectangular parallelepiped resonator that generates standing wave vibrations by applying a high frequency voltage, A protrusion for sliding that is arranged at a vibration antinode position on the other side surface of the resonator of the ultrasonic vibrator, a pair of pins provided at a node of vibration in the resonator of the ultrasonic vibrator, and an opening at a part thereof. And a pair of parts provided in the resonator of the ultrasonic oscillator at the tip end side of the opening. A pair of V-grooves that engage with the respective pins are formed, and an elastic hinge portion is formed on the side opposite to the side on which the V-grooves are formed, and a contact point between the V-groove and the pin, The elastic hinge portion is flat and parallel to the moving direction of the driven member. The resonance of the ultrasonic transducer includes a holder provided on a surface, a frame body that holds the holder on the side where the elastic hinge portion of the holder is formed, and a slide plate with which the protrusion abuts. A driven member that moves relative to the container; and a driven member that is held on the side of the frame that faces the holder and that engages with the V groove of the holder when a pressing force is applied to the holder. A wide plate-shaped urging means for urging a pressing force on the driven member to the protrusion of the resonator of the ultrasonic transducer via a pair of pins, and a pressing force on the holder by the urging means. And an adjusting unit that can adjust the pressure on the side of the frame on which the biasing unit is held. 5. The urging means has one end held by the frame body, while the other end is held by the holder. Ultrasonic actuator. 6. The actuator according to claim 1, wherein the urging means is constituted by a plate-shaped member having rigidity. 7. The ultrasonic actuator according to claim 6, wherein the urging means is a leaf spring. 8. The ultrasonic actuator according to claim 7, wherein the width of the leaf spring is substantially equal to the width of the holder. 9. The ultrasonic wave according to claim 1, wherein the adjusting means can be adjusted by a screw through a hole formed in the driven member. Actuator. 10. The adjusting means is adjustable by a screw from a direction orthogonal to a sliding direction of a cylindrical member holding the urging means slidably fitted to the frame body. The ultrasonic actuator according to any one of claims 1, 3, and 4. 11. The holder has a protrusion on one side that is pressed by the biasing means, and the biasing means abuts the projection of the holder to apply a pressing force. Claims 1, 3 and 4 characterized
The ultrasonic actuator according to any one of 1. 12. The V that fits a pin on the side of the holder that is pressed by the biasing means.
5. A groove is engraved, and the biasing means abuts against the pin fitted into the V groove of the holder to apply a pressing force thereto. The ultrasonic actuator according to any one of the above. 13. The holder is provided with an L-shaped member configured in an L shape so as to cover the pin provided on the resonator of the ultrasonic transducer. And the ultrasonic actuator according to any one of 4 and 5. 14. The ultrasonic actuator linearly guides the movement of the driven member, and a position where the protrusion for sliding provided on the resonator and the sliding plate of the driven member come into contact with each other. 2. A guide unit is further provided on the upper side, and the position of the guide unit is located on the upper side in the gravity direction with respect to the ultrasonic transducer.
The ultrasonic actuator according to any one of 3 and 4. 15. The ultrasonic actuator according to claim 14, wherein the guide means of the driven member is arranged on both sides of the resonator.