JP4816282B2 - アクチュエータ - Google Patents

アクチュエータ Download PDF

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Publication number
JP4816282B2
JP4816282B2 JP2006173126A JP2006173126A JP4816282B2 JP 4816282 B2 JP4816282 B2 JP 4816282B2 JP 2006173126 A JP2006173126 A JP 2006173126A JP 2006173126 A JP2006173126 A JP 2006173126A JP 4816282 B2 JP4816282 B2 JP 4816282B2
Authority
JP
Japan
Prior art keywords
mass
piezoresistive element
elastic
piezoresistive
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006173126A
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English (en)
Japanese (ja)
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JP2008003330A5 (https=
JP2008003330A (ja
Inventor
光宏 與田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2006173126A priority Critical patent/JP4816282B2/ja
Publication of JP2008003330A publication Critical patent/JP2008003330A/ja
Publication of JP2008003330A5 publication Critical patent/JP2008003330A5/ja
Application granted granted Critical
Publication of JP4816282B2 publication Critical patent/JP4816282B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Facsimile Heads (AREA)
JP2006173126A 2006-06-22 2006-06-22 アクチュエータ Expired - Fee Related JP4816282B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006173126A JP4816282B2 (ja) 2006-06-22 2006-06-22 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006173126A JP4816282B2 (ja) 2006-06-22 2006-06-22 アクチュエータ

Publications (3)

Publication Number Publication Date
JP2008003330A JP2008003330A (ja) 2008-01-10
JP2008003330A5 JP2008003330A5 (https=) 2009-08-06
JP4816282B2 true JP4816282B2 (ja) 2011-11-16

Family

ID=39007762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006173126A Expired - Fee Related JP4816282B2 (ja) 2006-06-22 2006-06-22 アクチュエータ

Country Status (1)

Country Link
JP (1) JP4816282B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7986449B2 (en) * 2008-05-16 2011-07-26 Microvision, Inc. Induced resonance comb drive scanner
JP5634705B2 (ja) * 2009-12-14 2014-12-03 日本信号株式会社 プレーナ型アクチュエータ
JP6149516B2 (ja) * 2013-06-03 2017-06-21 ミツミ電機株式会社 光走査装置、光走査制御装置及び光走査ユニット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005326463A (ja) * 2004-05-12 2005-11-24 Canon Inc ひずみ検出による共振駆動保持機構を持った光偏向器
JP2006067706A (ja) * 2004-08-26 2006-03-09 Seiko Epson Corp アクチュエータ
JP2006171182A (ja) * 2004-12-14 2006-06-29 Olympus Corp 光偏向器

Also Published As

Publication number Publication date
JP2008003330A (ja) 2008-01-10

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