JP2008003330A5 - - Google Patents

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Publication number
JP2008003330A5
JP2008003330A5 JP2006173126A JP2006173126A JP2008003330A5 JP 2008003330 A5 JP2008003330 A5 JP 2008003330A5 JP 2006173126 A JP2006173126 A JP 2006173126A JP 2006173126 A JP2006173126 A JP 2006173126A JP 2008003330 A5 JP2008003330 A5 JP 2008003330A5
Authority
JP
Japan
Prior art keywords
mass
piezoresistive element
elastic
drive
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006173126A
Other languages
English (en)
Japanese (ja)
Other versions
JP4816282B2 (ja
JP2008003330A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006173126A priority Critical patent/JP4816282B2/ja
Priority claimed from JP2006173126A external-priority patent/JP4816282B2/ja
Publication of JP2008003330A publication Critical patent/JP2008003330A/ja
Publication of JP2008003330A5 publication Critical patent/JP2008003330A5/ja
Application granted granted Critical
Publication of JP4816282B2 publication Critical patent/JP4816282B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006173126A 2006-06-22 2006-06-22 アクチュエータ Expired - Fee Related JP4816282B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006173126A JP4816282B2 (ja) 2006-06-22 2006-06-22 アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006173126A JP4816282B2 (ja) 2006-06-22 2006-06-22 アクチュエータ

Publications (3)

Publication Number Publication Date
JP2008003330A JP2008003330A (ja) 2008-01-10
JP2008003330A5 true JP2008003330A5 (https=) 2009-08-06
JP4816282B2 JP4816282B2 (ja) 2011-11-16

Family

ID=39007762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006173126A Expired - Fee Related JP4816282B2 (ja) 2006-06-22 2006-06-22 アクチュエータ

Country Status (1)

Country Link
JP (1) JP4816282B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7986449B2 (en) * 2008-05-16 2011-07-26 Microvision, Inc. Induced resonance comb drive scanner
JP5634705B2 (ja) * 2009-12-14 2014-12-03 日本信号株式会社 プレーナ型アクチュエータ
JP6149516B2 (ja) * 2013-06-03 2017-06-21 ミツミ電機株式会社 光走査装置、光走査制御装置及び光走査ユニット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005326463A (ja) * 2004-05-12 2005-11-24 Canon Inc ひずみ検出による共振駆動保持機構を持った光偏向器
JP2006067706A (ja) * 2004-08-26 2006-03-09 Seiko Epson Corp アクチュエータ
JP2006171182A (ja) * 2004-12-14 2006-06-29 Olympus Corp 光偏向器

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