JP4801242B2 - 半導体装置の作製方法 - Google Patents
半導体装置の作製方法 Download PDFInfo
- Publication number
- JP4801242B2 JP4801242B2 JP2000232507A JP2000232507A JP4801242B2 JP 4801242 B2 JP4801242 B2 JP 4801242B2 JP 2000232507 A JP2000232507 A JP 2000232507A JP 2000232507 A JP2000232507 A JP 2000232507A JP 4801242 B2 JP4801242 B2 JP 4801242B2
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- Prior art keywords
- semiconductor layer
- island
- shaped semiconductor
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- tft
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- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 3
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- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- 230000009471 action Effects 0.000 description 1
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- 229910052783 alkali metal Inorganic materials 0.000 description 1
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- 229910045601 alloy Inorganic materials 0.000 description 1
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- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
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- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
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- 150000003376 silicon Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
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- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000232507A JP4801242B2 (ja) | 2000-07-31 | 2000-07-31 | 半導体装置の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000232507A JP4801242B2 (ja) | 2000-07-31 | 2000-07-31 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002050761A JP2002050761A (ja) | 2002-02-15 |
| JP2002050761A5 JP2002050761A5 (enExample) | 2007-09-20 |
| JP4801242B2 true JP4801242B2 (ja) | 2011-10-26 |
Family
ID=18725181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000232507A Expired - Fee Related JP4801242B2 (ja) | 2000-07-31 | 2000-07-31 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4801242B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100224878A1 (en) | 2009-03-05 | 2010-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| WO2014021356A1 (en) * | 2012-08-03 | 2014-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| TWI575663B (zh) | 2012-08-31 | 2017-03-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
| KR102691397B1 (ko) | 2012-09-13 | 2024-08-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
| US9905585B2 (en) | 2012-12-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising capacitor |
| WO2014103900A1 (en) | 2012-12-25 | 2014-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| DE112014006046T5 (de) * | 2013-12-27 | 2016-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Licht emittierende Vorrichtung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3137839B2 (ja) * | 1994-07-30 | 2001-02-26 | 株式会社半導体エネルギー研究所 | アクティブマトリクス回路 |
| JPH1195256A (ja) * | 1997-09-25 | 1999-04-09 | Sharp Corp | アクティブマトリクス基板 |
-
2000
- 2000-07-31 JP JP2000232507A patent/JP4801242B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002050761A (ja) | 2002-02-15 |
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