JP4793145B2 - Drawing method and drawing apparatus - Google Patents

Description

  The present invention relates to an alignment method, a drawing method, an alignment mechanism, and a drawing apparatus.

  For example, various wirings are formed in a COF (Chip On Film) used in a liquid crystal display device, but in recent years, as a technique for forming wirings on such a film-like substrate, the use of a droplet discharge method tends to expand. is there. In general, a coating technique using a droplet discharge method discharges a functional liquid containing a metal material as a droplet from a plurality of nozzles provided in the droplet discharge head while relatively moving the substrate and the droplet discharge head. The liquid droplets are repeatedly deposited on the substrate to draw and form a coating film. The consumption of functional liquid is less wasteful, and any pattern can be directly applied without using means such as photolithography. Has advantages.

  In this type of wiring formation, a belt-like work (for example, a film carrier tape) is first transported by a reel-to-reel method or the like and fixed on a stage. Then, after performing a so-called alignment for finely adjusting the position of the stage (that is, the workpiece fixed thereto) and adjusting the relative positional relationship between the workpiece and the droplet discharge head, the droplet is discharged onto the workpiece. Is common. As a method for conveying a workpiece, for example, a method described in Patent Document 1 is known.

JP 2001-267373 A

  However, if the stage and the workpiece fixed to it are moved for alignment in a state where the workpiece is not slack, the workpiece is twisted or bent, the wiring formed on the workpiece is disconnected, or the workpiece itself is deformed, It was sometimes damaged.

  In view of the above problems, an object of the present invention is to provide an alignment method and an alignment mechanism that do not easily damage the workpiece and the wiring formed on the workpiece, and almost damage the workpiece and the wiring formed on the workpiece. It is an object of the present invention to provide a drawing method and a drawing apparatus that do not give the above.

  The alignment method of the present invention is an alignment method for aligning strip-shaped workpieces, wherein the workpieces spanned on a conveyance path from the unwinding reel to the take-up reel are arranged in order on the conveyance path. The holding mechanism, the second holding mechanism, the third holding mechanism, the step held by the fourth holding mechanism, and the first holding mechanism and the fourth holding mechanism are moved in a direction to reduce the distance between them. A step of causing a slack in the workpiece between the first holding mechanism and the second holding mechanism and between the third holding mechanism and the fourth holding mechanism; and Moving the holding mechanism and the third holding mechanism integrally with the workpiece to perform alignment of the workpiece.

  According to this method, before the workpiece is moved together with the second holding mechanism and the third holding mechanism for alignment, slack can be generated in front of and behind the portion related to the alignment of the workpiece. For this reason, excessive tension, twisting, bending, or the like hardly occurs in the workpiece during alignment, and deformation or damage of the workpiece and the pattern formed on the workpiece can be prevented. Here, “hold” refers to fixing at least the work so as not to move in the transport direction at that position.

  The alignment method of the present invention is an alignment method for aligning strip-shaped workpieces, wherein the workpiece spanned on the conveyance path from the unwinding reel to the take-up reel is transferred to the first conveyance path. A step of conveying using a roller and a second conveying roller disposed on the downstream side of the first conveying roller in the conveying path; and the workpiece, the first conveying roller and the second conveying roller. A step of placing the workpiece on a stage arranged between the conveying rollers; a first clamp arranged on the upstream side of the first conveying roller; and a downstream side of the second conveying rollers. A step of holding by the disposed second clamp, and moving the first clamp and the second clamp in a direction to reduce the distance between each other, thereby moving the first clamp. And loosening the workpiece between the first clamp roller and the first transport roller, and between the second clamp and the second transport roller, and the first transport roller and the second transport roller. And a step of aligning the workpiece by moving the roller and the stage integrally with the workpiece.

  According to this method, before the workpiece is moved together with the stage and the conveyance roller for alignment, slack can be generated in front of and behind the portion related to the alignment of the workpiece. For this reason, excessive tension, twisting, bending, or the like hardly occurs in the workpiece during alignment, and deformation or damage of the workpiece and the pattern formed on the workpiece can be prevented.

  In the alignment method, it is preferable that the step of placing the workpiece on the stage includes a step of the stage adsorbing the workpiece. According to this method, since the work and the stage behave integrally, the work can be accurately aligned by moving the stage.

  In the alignment method, it is preferable that at least in the step of causing the workpiece to sag, the first conveyance roller and the second conveyance roller fix the workpiece in the conveyance direction. According to this method, the work between the first clamp and the first transport roller and between the second clamp and the second transport roller can surely be loosened, and the first It is possible to prevent the workpiece between the second conveying roller and the second conveying roller from becoming slack.

  In the alignment method, the step of causing the workpiece to be loosened includes the first clamp and the second clamp so that the looseness remains even if the workpiece moves to any position within the movable range of the alignment. Preferably, the method includes a step of moving the clamp. According to this method, since the slack remains regardless of how the work moves during alignment, excessive tension, twisting, bending, etc. are unlikely to occur in the work, deformation of the work and the pattern formed on the work, Damage or the like can be prevented.

The drawing method of the present invention is a drawing method for drawing a pattern on a strip-shaped workpiece, wherein the workpiece spanned on a conveyance path from the unwinding reel to the take-up reel is arranged in the conveyance path. And a second conveying roller disposed on the downstream side of the first conveying roller in the conveying path, and the workpiece is transferred to the first conveying roller and the first conveying roller. A stage placed between two transport rollers, a first clamp disposed upstream of the first transport roller, and a downstream of the second transport roller. A step of holding by the second clamp disposed on the side, and moving the first clamp and the second clamp in a direction to reduce the distance between them, so that the first clamp and the first clamp of A step of causing slack in the work between the feed roller and between the second clamp and the second transport roller, and the first transport roller, the second transport roller, and the stage. And a step of aligning the work by moving it relative to the droplet discharge head disposed opposite to the stage integrally with the workpiece; and from the droplet discharge head to the pattern on the workpiece. Discharging the functional liquid to a corresponding position, and in the step of aligning the workpiece, the stage is positioned above the uppermost portions of the first transport roller and the second transport roller. It is characterized by.

  According to this method, before the workpiece is moved together with the stage and the conveyance roller for alignment, slack can be generated in front of and behind the portion related to the alignment of the workpiece. For this reason, excessive tension, twisting, bending, or the like hardly occurs in the workpiece during alignment, and deformation or damage of the workpiece and the pattern formed on the workpiece can be prevented. In addition, a pattern can be accurately drawn on the workpiece thus aligned.

  In the drawing method, it is preferable that the step of placing the work on the stage includes a step of sucking the work by the stage. In the drawing method, at least in the step of causing the workpiece to sag, it is preferable that the first conveyance roller and the second conveyance roller fix the workpiece in the conveyance direction. Further, in the drawing method, the step of causing the workpiece to loosen includes the first clamp and the step so that the looseness remains even if the workpiece moves to any position within a range in which the workpiece can move by the alignment. Preferably, the method includes moving the second clamp.

  The alignment mechanism of the present invention is an alignment mechanism for aligning a strip-shaped workpiece, and includes an unwinding reel for unwinding the workpiece, a winding reel for winding the workpiece, and the unwinding reel to the winding reel. The first holding mechanism, the second holding mechanism, the third holding mechanism, the fourth holding mechanism, the first holding mechanism, the first holding mechanism, and the first holding mechanism that are arranged in order on the transfer path and configured to hold the workpiece. 2 holding mechanism, the third holding mechanism, the control unit for controlling the operation of the fourth holding mechanism, the first holding mechanism, the second holding mechanism, the third holding mechanism, The step of the fourth holding mechanism holding the workpiece, the first holding mechanism and the fourth holding mechanism are moved in a direction of reducing the distance between them, and the first holding mechanism and the Between the second holding mechanism And a step of causing the workpiece between the third holding mechanism and the fourth holding mechanism to loosen, and moving the second holding mechanism and the third holding mechanism integrally with the workpiece. And a step of performing at least the step of aligning the workpiece.

  According to this configuration, before the workpiece is moved together with the second holding mechanism and the third holding mechanism to perform alignment, slack can be generated in advance before and after the portion related to the alignment of the workpiece. For this reason, excessive tension, twisting, bending, or the like hardly occurs in the workpiece during alignment, and deformation or damage of the workpiece and the pattern formed on the workpiece can be prevented.

  The alignment mechanism of the present invention is an alignment mechanism for aligning a strip-shaped workpiece, and includes an unwinding reel for unwinding the workpiece, a winding reel for winding the workpiece, and the unwinding reel to the winding reel. A first conveying roller disposed in the conveying path; a second conveying roller disposed downstream of the first conveying roller in the conveying path; the first conveying roller and the second conveying roller; A stage on which the workpiece is placed, a first clamp that is arranged upstream of the first transport roller and is movable along the transport path, and the second transport A second clamp disposed downstream of the roller and movable along the transport path; the first transport roller; the second transport roller; the stage; the first clamp; A controller for controlling the operation of the second clamp, wherein the first transport roller and the second transport roller transport the workpiece, and the first clamp and the second clamp are Holding the workpiece, moving the first clamp and the second clamp in a direction to reduce the distance between each other, between the first clamp and the first transport roller, and the first A step of causing slack in the work between the second clamp and the second transport roller, and moving the first transport roller, the second transport roller, and the stage integrally with the work. And a step of performing at least the step of aligning the workpiece.

  According to this configuration, before the alignment is performed by moving the workpiece together with the stage and the conveyance roller, it is possible to cause slack in advance before and after the portion related to the alignment of the workpiece. For this reason, excessive tension, twisting, bending, or the like hardly occurs in the workpiece during alignment, and deformation or damage of the workpiece and the pattern formed on the workpiece can be prevented.

  In the alignment mechanism, it is preferable that the stage has a suction mechanism and is configured to suck the workpiece. According to this configuration, since the work and the stage behave integrally, the work can be accurately aligned by moving the stage.

  In the alignment mechanism, at least in the step of causing the workpiece to sag, it is preferable that the first conveyance roller and the second conveyance roller fix the workpiece in the conveyance direction. According to this configuration, the work between the first clamp and the first transport roller and between the second clamp and the second transport roller can surely be loosened, and the first It is possible to prevent the workpiece between the second conveying roller and the second conveying roller from becoming slack.

  In the alignment mechanism, the step of causing the workpiece to loosen includes the first clamp and the second clamp so that the looseness remains even if the workpiece moves to any position within the range in which the workpiece can move by the alignment. Preferably, the method includes a step of moving the clamp. According to this configuration, since the slack remains regardless of how the workpiece moves during alignment, excessive tension, twisting, bending, etc. are unlikely to occur in the workpiece, and deformation of the workpiece and the pattern formed on the workpiece, Damage or the like can be prevented.

The drawing apparatus of the present invention is a drawing apparatus for drawing a pattern on a strip-shaped workpiece, the winding reel for unwinding the workpiece, the winding reel for winding the workpiece, and the winding reel from the winding reel. A first transport roller disposed on the transport path leading to the second transport roller, a second transport roller disposed downstream of the first transport roller in the transport path, the first transport roller, and the second transport roller. A stage on which the work is placed, a first clamp disposed upstream of the first transport roller and movable along the transport path, and the second; A second clamp that is disposed on the downstream side of the transport roller and is movable along the transport path, a droplet discharge head that discharges a functional liquid onto the work placed on the stage, and the first Front of transport roller, A control unit that controls operations of the second transport roller, the stage, the first clamp, the second clamp, and the droplet discharge head, wherein the first transport roller and the second transport roller Transporting the workpiece, the first clamp and the second clamp holding the workpiece, and the first clamp and the second clamp in a direction to reduce the distance between them. Moving to cause the workpiece between the first clamp and the first transport roller and between the second clamp and the second transport roller to be slack, and the first Moving the transfer roller, the second transfer roller, and the stage integrally with the work relative to the droplet discharge head, and aligning the work; A step of ejecting the functional liquid from the droplet ejection head to a position corresponding to the pattern on the workpiece, in the step of performing the alignment of the workpiece, the said stage first conveying roller and the second conveyance roller And a control unit that executes at least moving above the uppermost part of the head.

  According to this configuration, before the alignment is performed by moving the workpiece together with the stage and the conveyance roller, it is possible to cause slack in advance before and after the portion related to the alignment of the workpiece. For this reason, excessive tension, twisting, bending, or the like hardly occurs in the workpiece during alignment, and deformation or damage of the workpiece and the pattern formed on the workpiece can be prevented. In addition, a pattern can be accurately drawn on the workpiece thus aligned.

  In the drawing apparatus, it is preferable that the stage attracts the workpiece placed thereon. In the drawing apparatus, at least in the step of causing the workpiece to sag, it is preferable that the first conveyance roller and the second conveyance roller fix the workpiece in the conveyance direction. Further, in the drawing apparatus, the step of causing the workpiece to loosen includes the first clamp and the step so that the looseness remains even if the workpiece moves to any location within the range in which the workpiece can move by the alignment. Preferably, the method includes moving the second clamp.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings shown below, the dimensions and ratios of the components are appropriately different from the actual ones in order to make the components large enough to be recognized on the drawings.

(A. Drawing device)
FIG. 1 is a schematic side view of a drawing apparatus 1 according to an embodiment of the present invention. The drawing apparatus 1 includes a base 11, a take-up reel 84, a take-up reel 85, a stage 50, a droplet discharge head 90, and the like disposed on the base 11. The drawing device 1 is a device that draws a pattern by discharging droplets from a droplet discharge head 90 onto a tape 80 that is stretched over a conveyance path from the take-out reel 84 to the take-up reel 85. The tape 80 corresponds to the strip-shaped workpiece in the present invention. In this paper, when comparing two points on the transport path, the side near the unwinding reel 84 is called the upstream side, and the side near the winding reel 85 is called the downstream side.

  Here, the tape 80 will be described. FIG. 2 is a partial plan view of various tapes (TAB tapes; workpieces) 81 to 83 which are one embodiment of the strip-shaped workpiece in the present invention. The tape 80 described above may be any of these tapes 81 to 83, and may be in any other form as long as it is a strip-shaped workpiece.

  Sprocket holes 86 for transporting and winding the tape are continuously formed at both ends in the width direction of the tape 81, and a semiconductor device is mounted and wiring is formed at the center in the width direction of the tape 81. The work area 88 is continuously formed. This work area 88 is set for each device, for example. The drawing apparatus 1 draws and forms a wiring pattern in the work area 88.

  There are a plurality of types of tapes 81, 82, and 83 having different width dimensions corresponding to the size of the work area 88 described above and the number of work areas 88 arranged in the width direction. Here, the width dimension can be set to 48 mm, 70 mm, 150 mm, or the like, for example.

  For example, three alignment marks AM that are observed when the tapes 81 to 83 are positioned are formed in each work area 88 of each tape 81 to 83. The alignment mark AM has various shapes depending on the measurement method or the like. Here, the alignment mark AM is a circular mark and is illustrated as being arranged at three corners of the rectangular work area 88.

  Returning to FIG. 1, the configuration of the drawing apparatus 1 will be described in detail. The unwinding reel 84 is a reel that rotates in accordance with the conveyance of the tape 80 and sequentially unwinds the tape 80. On the other hand, the take-up reel is a reel that rotates in accordance with the conveyance of the tape 80 and takes up the tape 80. The tape 80 is stretched over a conveyance path from the unwinding reel 84 to the take-up reel 85, and its traveling direction (positive conveyance direction) is the positive direction of the Y axis in the drawing. In other words, the direction from the upstream side to the downstream side is the normal conveyance direction. In this paper, the “forward transport direction” refers to the positive direction of the Y-axis and the direction of rotation of the sprocket (or roller) that transports the tape 80 in the positive direction of the Y-axis. Further, the “reverse transport direction” indicates the negative direction of the Y axis and the direction of rotation of the sprocket (or roller) that transports the tape 80 in the negative direction of the Y axis.

  The auxiliary roller 75, clamp 77, sprocket 71 and counter roller 73, stage 50 and droplet discharge head 90, sprocket 72 and counter roller 74, clamp 78, sprocket 76 are arranged on the transport path from the side closer to the take-out reel 84. Is arranged. These components are attached to the base 11 directly or indirectly.

  The sprockets 71, 72, and 76 can convey the tape 80 by rotating with their teeth hooked on the sprocket holes 86 of the tape 80 (see FIG. 4). Alternatively, when the tape 80 is fixed, tension can be applied to the tape 80 by applying torque with the teeth applied to the sprocket holes 86 of the tape 80. The sprockets 71, 72, and 76 are driven by a servo motor (not shown). The sprockets 71 and 72 correspond to the first transport roller and the second transport roller in the present invention, respectively. Opposing rollers 73 and 74 are arranged at positions facing the sprockets 71 and 72, respectively. The opposing rollers 73 and 74 serve to prevent the tape 80 from being detached from the sprockets 71 and 72 by sandwiching the tape 80 between the sprockets 71 and 72.

  Among the plurality of sprockets, the sprocket 76 is constantly applied with a constant torque in the forward conveyance direction, and the sprocket 71 is always applied with a torque in the reverse conveyance direction of approximately the same magnitude as this. . Such a mechanism is realized by adjusting the driving force of the servo motor connected to the sprockets 76 and 71 by an electromagnetic clutch (not shown). With the above configuration, when the action of other components is not considered, the tape 80 is stationary with a certain tension (tension) between the sprocket 76 and the sprocket 71. By rotating the sprocket 72 in the normal conveyance direction in this state, the tape 80 can be conveyed in the normal conveyance direction.

  The auxiliary roller 75 is a roller that receives no driving force and rotates freely to support the tape 80. Further, the tape 80 located between the take-out reel 84 and the auxiliary roller 75 and between the sprocket 76 and the take-up reel 85 is loosened. Thereby, when the tape 80 is conveyed as described above, it is possible to prevent the tape from being excessively tensioned and deformed or damaged.

  The clamps 77 and 78 can hold both ends of the tape 80. Here, the both end portions of the tape 80 are the end portions when the sprocket holes 86 are arranged when viewed in the width direction and do not include the work area 88. The clamp 77 (78) includes a support part 77b (78b) that supports the tape 80 from below and a pressing part 77a (78a) that is movable in the Z-axis direction. The support part 77b (78b) and the pressing part The tape 80 is held by sandwiching the tape 80 with 77a (78a). The clamps 77 and 78 are attached to a clamp slider 13 provided on the base 11, and can be moved in the Y-axis direction by the clamp slider 13.

  Note that the clamp 77, the sprocket 71, the sprocket 72, and the clamp 78 correspond to the first holding mechanism, the second holding mechanism, the third holding mechanism, and the fourth holding mechanism in this order in this order.

  Next, components arranged around the stage 50 will be described. FIG. 3 is a plan view showing the stage 50 and various units arranged in the vicinity thereof. The stage 50 includes a suction mechanism, and can place the tape 80 and hold the tape 80 by suction. A pattern is drawn on a portion of the tape 80 placed on the stage 50. A pair of frames 20 extending in the X-axis direction are arranged above the stage 50. A drawing unit 22, an alignment unit 24, and a UV irradiation unit 26 that are independently driven in the X-axis direction by a driving device such as a linear motor are installed on the frame 20. A droplet discharge head 90 is mounted on the drawing unit 22, cameras 32 and 33 are mounted on the alignment unit 24, and a UV irradiation device 27 is mounted on the UV irradiation unit 26.

  FIG. 4 is an external perspective view of the stage 50 and the alignment unit 24. The stage 50 is configured by disposing (embedding) the porous plate 51 on the surface of the surface plate 60 so that the tape 80 described above can be adsorbed on the surface of the porous plate 51. The suction position of the tape 80 is the central portion in the width direction of the porous plate 51, and the center line of the tape 80 is set to a position where it matches the center line of the porous plate 51. As a result, the setup change of the drawing apparatus 1 accompanying the change in the size of the tape 80 can be minimized.

  The porous plate 51 is composed of a resin sintered material obtained by sintering a resin material. Sinter molding is a technique in which raw material powder is filled in a mold and heated, and the surface layers of the raw material powder are fused (sintered) to form while leaving the space between the powders. As the raw material powder, polyethylene (PE), polypropylene (PP), polystyrene (PS), polyvinyl chloride (PVC), polycarbonate (PC), polyamide (PA), acrylic resin (PMMA), fluororesin (PVDF, PTFE) It is possible to employ a thermoplastic resin material such as. In this way, by configuring the porous plate 51 with a resin material, damage to the tape 80 adsorbed on the surface of the porous plate 51 can be prevented.

  A negative pressure suction device (not shown) as an adsorption mechanism in the present invention is connected to the porous plate 51, and a negative pressure is supplied almost uniformly over the entire surface of the porous plate 51. Accordingly, even a plurality of types of tapes 80 having different widths can be uniformly sucked and held.

  The stage 50 is fixed to the movable plate 18 disposed below the stage 50. The movable plate 18 can be rotated by the motor 16 in the θz direction (rotation direction around the Z axis). The motor 16 is fixed to the slider 14. The slider 14 can move on the surface of the base plate 12 in the Y-axis direction. As a result, the stage 50 can move in the θz direction and the Y-axis direction with respect to the base plate 12. Here, the base plate 12 is fixed to the base 11 (FIG. 1).

  The movable plate 18 is also attached with sprockets 71 and 72 and opposing rollers 73 and 74 disposed so as to face them. Then, since the stage 50, the sprockets 71 and 72, and the opposing rollers 73 and 74 are all attached to the movable plate 18, when the movable plate 18 moves, the stage 50, the sprockets 71 and 72 move while maintaining their relative positional relationship. . At this time, if the tape 80 is attracted to the stage 50 and the rotation of the sprockets 71 and 72 is stopped, the portion of the tape 80 fixed to the stage 50 and the sprockets 71 and 72 moves together with the movable plate 18. Become.

  The alignment unit 24 includes a moving frame 31 that moves along the frame 20 described above, cameras 32 and 33 mounted on the moving frame 31, a pressing mechanism 34, and the like. The cameras 32 and 33 are constituted by a CCD camera or the like, measure the alignment mark AM (see FIG. 2) formed on the tape 80, and output it to the control unit 99. The control unit 99 drives the motor 16 and the slider 14 based on the measurement results of the cameras 32 and 33 to control the operation of the movable stage 18 (stage 50), and also controls the operation of the pressing mechanism 34. Further, the control unit 99 controls driving of the take-out reel 84, the take-up reel 85, the sprockets 71, 72, 76, the clamps 77, 78, and the droplet discharge head 90 (FIG. 1).

  Here, a mechanism including the control unit 99 and the components (excluding the droplet discharge head 90) shown in FIG. 1 corresponds to the alignment mechanism in the present invention. That is, the mechanism including the base 11 and the take-up reel 84, the take-up reel 85, the sprockets 71, 72, and 76, the clamps 77 and 78, the stage 50, and the movable stage 18 disposed on the base 11 are aligned in the present invention. Corresponds to the mechanism.

  Returning to FIG. 4, the camera 32 is integrally fixed to the moving frame 31, but the camera 33 is mounted on a slider 35 that is movable with respect to the moving frame 31 in the Y-axis direction. Under the control of the control unit 99, the camera 32 can move in the Y-axis direction.

  The pressing mechanism 34 has a pair of pressing members 36 extending in the Y-axis direction, and is configured to be movable along the guide frame 41 in the Z-axis direction as a whole. Here, the guide frame 41 is provided on the moving frame 31 so as to extend in the Z-axis direction. Of the pair of (−X side, + X side) pressing members 36, the + X side pressing member 36 is configured to be movable in the X-axis direction with respect to the guide frame 41. That is, the width of the pair of pressing members 36 can be changed as appropriate.

  The movement of the camera 33 in the Y-axis direction, the movement of the entire pressing mechanism 34 in the Z-axis direction, and the movement of the + X-side pressing member 36 in the X-axis direction are performed by a linear motor or the like driven by the control of the control unit 99. This is done by the driving device.

  Returning to FIG. 3, a droplet discharge head 90 is mounted on the drawing unit 22. The droplet discharge head 90 can discharge droplets onto the tape 80 placed on the stage 50 while moving in the main scanning direction. Here, the main scanning direction is substantially parallel to the X-axis direction and is a direction orthogonal to the length direction of the tape 80. FIG. 5 is a side sectional view of the droplet discharge head 90. The droplet discharge head 90 mainly includes a head main body 90A, a nozzle plate 92 attached to one surface of the head main body 90A, and a piezo element 98 attached to the other surface of the head main body 90A.

  A plurality of nozzles 91 for discharging droplets are arranged in an array on the nozzle plate 92 constituting the droplet discharge surface. The head main body 90 </ b> A is formed with a plurality of pressure chambers 93 communicating with the nozzles 91. Each pressure chamber 93 is connected to a reservoir 95, and the reservoir 95 is connected to a functional liquid inlet 96. The functional liquid 9 is supplied to each pressure chamber 93 from the functional liquid introduction port 96 through the reservoir 95. On the other hand, a flexible diaphragm 94 is attached to the upper end surface of the head main body 90A. Piezo elements 98 are provided on opposite sides of the pressure chambers 93 with the diaphragm 94 interposed therebetween. The piezo element 98 is obtained by sandwiching a piezoelectric material such as PZT (registered trademark) between electrodes. The electrode is connected to the control unit 99.

  When a driving voltage is applied from the control unit 99 to the piezo element 98, the piezo element 98 is expanded or contracted. When the piezoelectric element 98 contracts and deforms, the pressure in the pressure chamber 93 decreases, and the functional liquid 9 flows from the reservoir 95 into the pressure chamber 93. Further, when the piezo element 98 expands and deforms, the pressure in the pressure chamber 93 increases, and the droplet of the functional liquid 9 is ejected from the nozzle 91. The droplet discharge conditions can be controlled by controlling the driving voltage applied to the piezo element 98.

  Here, the functional liquid 9 will be described. The functional liquid 9 used for forming the wiring pattern is a dispersion liquid in which conductive fine particles are dispersed in a dispersion medium. In the present embodiment, as the conductive fine particles, for example, metal oxides containing at least one of gold, silver, copper, aluminum, palladium, and nickel, these oxides, conductive polymers, Superconductor fine particles are used. These conductive fine particles can be used by coating the surface with an organic substance or the like in order to improve dispersibility. The particle diameter of the conductive fine particles is preferably 1 nm or more and 1.0 μm or less. If it is larger than 1.0 μm, the nozzle 91 of the droplet discharge head 90 may be clogged. On the other hand, if the thickness is smaller than 1 nm, the volume ratio of the coating agent to the conductive fine particles is increased, and the ratio of organic substances in the obtained film becomes excessive.

  The dispersion medium is not particularly limited as long as it can disperse the conductive fine particles and does not cause aggregation. For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydro Hydrocarbon compounds such as naphthalene and cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2- Methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ- Butyrolactone, N- methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, can be exemplified polar compounds such as cyclohexanone. Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferable and more preferable dispersion media in terms of fine particle dispersibility, dispersion stability, and ease of application to the droplet discharge method. Examples thereof include water and hydrocarbon compounds.

  The surface tension of the conductive fine particle dispersion is preferably in the range of 0.02 N / m to 0.07 N / m. When discharging the functional liquid 9 by the droplet discharge method, if the surface tension is less than 0.02 N / m, the wettability of the functional liquid 9 with respect to the nozzle surface increases, and thus flight bending easily occurs. If it exceeds m, the shape of the meniscus at the tip of the nozzle 91 is not stable, and it becomes difficult to control the discharge amount and the discharge timing. In order to adjust the surface tension, it is preferable to add a small amount of a surface tension adjusting agent such as a fluorine-based, silicone-based, or nonionic-based material to the above-described dispersion within a range that does not significantly reduce the contact angle with the surface to be discharged. The nonionic surface tension adjusting agent improves the wettability of the functional liquid 9 to the surface to be discharged, improves the leveling property of the film, and helps prevent the occurrence of fine irregularities on the film. The surface tension modifier may contain an organic compound such as alcohol, ether, ester, or ketone, if necessary.

  The viscosity of the dispersion is preferably 1 mPa · s to 50 mPa · s. When the functional liquid 9 is ejected as droplets using the droplet ejection method, if the viscosity is less than 1 mPa · s, the peripheral portion of the nozzle 91 is easily contaminated by the outflow of the functional liquid 9, and the viscosity is 50 mPa · s. If it is larger, the clogging frequency of the nozzle 91 is increased and it is difficult to smoothly discharge the functional liquid 9.

  In addition to the above-described piezo method for changing the pressure in the pressure chamber by deformation of the piezo element, a method for changing the pressure in the pressure chamber by generating bubbles by heating the functional liquid, etc. Various known techniques can be applied. Of these, the piezo method is superior in that it does not adversely affect the composition of the material because the functional liquid is not heated.

  The UV irradiation unit 26 is equipped with a UV irradiation device 27 having a UV lamp or the like for drying the functional liquid 9.

  The drawing apparatus 1 of the present embodiment is configured as described above.

(B. Drawing method)
Next, a drawing method using the drawing apparatus 1 described above will be described with reference to FIGS. FIG. 6 is a process diagram of the drawing method according to the present embodiment. FIG. 7 is a cross-sectional view of the drawing apparatus 1 and the tape 80 in each step (process) of the drawing method according to the present embodiment. Hereinafter, it demonstrates along the process drawing shown in FIG.

  First, in step S1, the tape 80 is transported by the operation of the sprockets 71, 72, and 76 so that the portion of the tape 80 where the pattern is to be drawn is located on the stage 50 (FIG. 7A). As described above, this step is performed by rotating the sprocket 72 in the forward conveyance direction while applying a torque of a constant size and a reverse direction to the sprockets 71 and 76 and maintaining the tape 80 in a state of having a constant tension. Do. At the same time, the take-up reel 84 and the take-up reel 85 are appropriately rotated according to the transport amount of the tape 80 to feed out the tape 80 from the take-up reel 84 by a necessary amount, and the tape 80 is taken up by the take-up reel 85. In this step, the clamps 77 and 78 are opened. After this step is completed and the tape 80 moves to a predetermined position, the sprockets 71 and 72 are fixed, and the tape 80 between the sprockets 71 and 72 is maintained in that state.

  Next, in step S <b> 2, the tape 80 is adsorbed on the surface of the stage 50 (porous plate 51), and the tape 80 is placed on the stage 50. This step is performed as follows, for example.

  First, the alignment unit 24 is moved along the frame 20 (see FIG. 3), and the pressing mechanism 34 included in the alignment unit 24 is disposed at a position facing the stage 50. Next, by lowering the support frame 40 along the guide frame 41, the pressing members 36 of the pressing mechanism 34 are brought into contact with both ends of the tape 80 (see FIG. 4) and pressed toward the stage 50. At this time, the position of the pressing member 36 is adjusted in advance so as to contact both end portions of the tape 80 in the width direction. As described above, the pressing mechanism 34 presses both ends of the tape 80, so that even when the tape 80 is warped, the pressing mechanism 34 comes into close contact with the stage 50 in a state where the warp is corrected. Further, according to such a method, since only the both ends of the tape 80 are pressed and the pressing member 36 does not come into contact with the work area 88, the area where the functional liquid 9 on the work area 88 should be discharged is not damaged. No dents are generated.

  In this state, the stage 50 sucks the tape 80. That is, the tape 80 is adsorbed to the stage 50 by operating the negative pressure suction device of the stage 50 to adsorb and hold the tape 80 on the surface of the porous plate 51. Next, the support frame 40 is raised along the guide frame 41 to release the pressing of the pressing mechanism 34 against the tape 80. Here, when the pressing by the pressing mechanism 34 is released, the tape 80 is attracted to the stage 50, so that the tape 80 is not warped again.

  Next, in step S3, the clamps 77 and 78 hold the tape 80 (FIG. 7B). This step is performed by pressing the pressing portion 77a (78a) of the clamp 77 (78) against the support portion 77b (78b) via the tape 80. At this time, the portions of the tape 80 with which the clamps 77 and 78 abut are both end portions not including the work area 88. Thereby, it is possible to prevent the work area 88 from being damaged or dents in the area where the functional liquid 9 is to be discharged.

  Next, in step S4, the clamps 77 and 78 are moved in a direction to reduce the distance between them, and the tape 80 between the clamp 77 and the sprocket 71 and between the sprocket 72 and the clamp 78 is slackened. (FIG. 7 (c)). This step is performed by moving the clamp 77 along the clamp slider 13 in the forward conveyance direction and moving the clamp 78 along the clamp slider 13 in the reverse conveyance direction. At this time, since the clamps 77 and 78 hold the tape 80, the tape 80 is also deformed as the clamps 77 and 78 move. On the other hand, since the tape 80 is fixed by the sprockets 71 and 72 at the positions of the sprockets 71 and 72, the slack as described above can be caused by the movement of the clamps 77 and 78.

  Next, in step S5, the alignment marks AM on the tape 80 are photographed by the cameras 32 and 33. For example, if the tape 80 has a shape like the tape 81 shown in FIG. 2, the alignment mark AM1 is photographed and measured by the camera 32, and the alignment mark AM2 is photographed and measured by the camera 33. At this time, since the tape 80 is attracted to the stage 50 in a state where the warp has been corrected through step S2, it is possible to accurately photograph and measure the alignment mark AM.

  In order to simultaneously photograph the alignment mark AM with the two cameras 32 and 33 as described above, the cameras 32 and 33 are moved in advance as follows before step S5. That is, the position in the X-axis direction of the moving frame 31 is adjusted so that the alignment mark AM1 is positioned in the measurement range of the camera 32, and the distance corresponding to the relative positional relationship between the alignment marks AM1 and AM2 is set via the slider 35. The camera 33 is moved in the Y axis direction.

  From these photographing results, the control unit 99 calculates the current position of the work area 88 of the tape 80, and further calculates the offset amount from the predetermined position.

  Next, in step S6, based on the calculation result, the movable stage 18 (stage 50) is moved to align the tape 80. More specifically, the control unit 99 drives the slider 14 and the motor 16 based on the calculation result to move the movable stage 18 in the Y-axis direction and the θz direction (see FIG. 4), and is attracted to the surface of the stage 50. The aligned tape 80 is moved relative to the droplet discharge head 90 for alignment. This alignment is performed such that, for example, a straight line connecting the alignment mark AM1 and the alignment mark AM2 is in a state orthogonal to the main scanning direction of the droplet discharge head 90. Note that the alignment of the tape 80 in the X-axis direction is performed by adjusting the movement amount of the drawing unit 22.

  During the alignment, the stage 50 fixed to the movable stage 18, the sprockets 71 and 72, and the opposing rollers 73 and 74 also move together with the movable stage 18. Since the tape 80 is also attracted to the stage 50 and fixed by the sprockets 71 and 72, the part from the sprocket 71 to the sprocket 72 moves together with the movable plate 18.

  At this time, since the slack is generated in the tape 80 in step S5, even if the tape 80 moves with the movable stage 18, the slack absorbs deformation due to the movement. For this reason, it is possible to prevent the tape 80 from being excessively tensioned, twisted, bent, or the like, and to perform alignment without causing deformation or damage to the tape 80 and the wiring formed on the tape 80. .

  Retrospectively, in step S4, it is preferable to move the clamps 77 and 78 so that the slack remains even if the tape 80 moves to any position within the range that can be moved by alignment. In other words, in step S4, it is preferable to generate the slack so that the slack remains regardless of how the tape 80 moves due to the alignment. On the other hand, it is also preferable to minimize slack while satisfying these conditions. This is because if the slack is too large, the tape 80 is greatly deformed, and as a result, the wiring formed on the tape 80 may be deformed or damaged.

  The steps so far are a part of the embodiment of the drawing method according to the present invention and are also an aspect of the alignment method according to the present invention. According to the alignment method of the present invention, excessive tension, twisting, bending, and the like hardly occur in the tape 80 during alignment, and deformation and damage of the pattern formed on the tape 80 and the tape 80 can be prevented.

  Next, in step S7, the functional liquid 9 is discharged from the droplet discharge head 90 to the tape 80 (FIG. 7D). More specifically, first, when the alignment of the tape 80 in step S6 is completed, the alignment unit 24 is moved along the frame 20 to be retracted from the position facing the stage 50 (that is, the tape 80), and the drawing unit 22 is moved. It is moved in the X-axis direction and arranged at a position facing the stage 50. Then, by discharging the functional liquid 9 from the droplet discharge head 90, the functional liquid 9 is disposed at a position where a wiring pattern is to be formed in the work area 88 of the tape 80.

  Next, in step S <b> 8, the functional liquid 9 discharged in step S <b> 7 is dried to form a wiring pattern on the tape 80. More specifically, first, when the droplet discharge process on the tape 80 in step S7 is completed, the drawing unit 22 is moved along the frame 20 to be retracted from the position facing the stage 50 (that is, the tape 80), and the UV is discharged. The irradiation unit 26 is moved in the X-axis direction and disposed at a position facing the stage 50. Then, the functional liquid 9 discharged onto the tape 80 is dried by irradiating UV from the UV irradiation device 27. As a result, the solvent contained in the functional liquid 9 is removed by evaporation, and the conductive material remains on the tape 80 to form a wiring pattern made of the conductive material.

  In addition, it is possible to laminate | stack the same kind or different kind of film by repeating step S7 and step S8 which were mentioned above. In the case of stacking different types of films, a plurality of droplet discharge heads 90 that discharge different functional liquids 9 may be mounted on one drawing unit 22, or droplet discharge heads that discharge different functional liquids 9. A plurality of drawing units 22 including 90 may be provided. Further, the functional liquid 9 may not necessarily be dried by the UV irradiation unit 26 provided in the drawing apparatus 1, and may be configured to be dried by another drying apparatus provided on the conveyance path of the tape 80.

  Sprockets 71, 72, 76, clamps 77, 78, holding mechanism 34, support frame 40, movable stage 18, stage 50, cameras 32, 33, droplet discharge head 90, UV irradiation device in steps S1 to S8 described above. Operations of various components included in the drawing apparatus 1 such as 27 are performed under the control of the control unit 99.

  Through the above steps, a wiring pattern is formed on the tape 80 by the drawing apparatus 1.

  Thereafter, the clamps 77 and 78 release the tape 80, and the drawing method including Step 1 to Step 8 is repeatedly performed, whereby wiring patterns can be sequentially formed on the tape 80. When the drawing process for all the work areas 88 of the tape 80 is completed, the tape 80 is exchanged together with the take-up reel 84 and the take-up reel 85.

  As described above, in the drawing method using the drawing apparatus 1 of the present embodiment, excessive tension, twisting, bending, and the like are not easily generated in the tape 80 during alignment, and the tape 80 and the pattern formed on the tape 80 are not affected. Deformation, damage, etc. can be prevented. Further, a pattern can be accurately drawn on the tape 80 thus aligned.

(C. Liquid crystal display device)
Next, the liquid crystal display device 101 having the circuit board 103 on which the wiring pattern 112 is formed by the drawing apparatus 1 will be described with reference to FIG.

  FIG. 8 is an exploded perspective view of the liquid crystal display device 101 which is an electro-optical device. The liquid crystal display device 101 includes a liquid crystal panel 102 capable of color display and a circuit board 103 connected to the liquid crystal panel 102. Further, an illumination device such as a backlight and other incidental devices are attached to the liquid crystal panel 102 as necessary.

  The liquid crystal panel 102 includes a pair of substrates 105a and 105b bonded by a sealing material 104, and liquid crystal is sealed in a gap formed between the substrates 105a and 105b, a so-called cell gap. . These substrates 105a and 105b are generally formed of a light-transmitting material such as glass or synthetic resin. A polarizing plate 106a and a polarizing plate 106b are attached to the outer surfaces of the substrate 105a and the substrate 105b. In FIG. 8, illustration of the polarizing plate 106b is omitted.

  An electrode 107a is formed on the inner surface of the substrate 105a, and an electrode 107b is formed on the inner surface of the substrate 105b. These electrodes 107a and 107b are formed in stripes or letters, numbers, or other appropriate patterns. The electrodes 107a and 107b are made of a light-transmitting material such as ITO (Indium Tin Oxide).

  The substrate 105a has an extended portion that protrudes from the substrate 105b, and a plurality of terminals 108 are formed on the extended portion. These terminals 108 are formed simultaneously with the electrode 107a when the electrode 107a is formed on the substrate 105a. Therefore, these terminals 108 are made of, for example, ITO. These terminals 108 include one that extends integrally from the electrode 107a and one that is connected to the electrode 107b via a conductive material (not shown).

  Note that a large number of the actual electrodes 107a and 107b and the terminals 108 are formed on the substrate 105a and the substrate 105b with extremely narrow intervals, respectively, but in FIG. 8, the structure of the liquid crystal panel 102 is easily understood. For this reason, the intervals are schematically shown in an enlarged manner, and only a few of them are illustrated, and other portions are omitted. Further, the connection state between the terminal 108 and the electrode 107a and the connection state between the terminal 108 and the electrode 107b are not shown in FIG.

  A semiconductor element 100 as a liquid crystal driving IC is mounted on the circuit board 103 at a predetermined position on the wiring board 109. The wiring substrate 109 is manufactured by forming a wiring pattern 112 by patterning a metal film such as Cu formed on a flexible base substrate 111 such as polyimide.

  Note that a large number of actual wiring patterns 112 are formed on the base substrate 111 with extremely narrow intervals. In FIG. 8, in order to make the structure easy to understand, the intervals are enlarged and schematically illustrated. In addition, the structure is simplified and illustrated. Although not shown, a resistor, a capacitor, and other chip components may be mounted at predetermined positions other than the portion where the semiconductor element 100 is mounted.

  In the present embodiment, the circuit board 103 is manufactured by cutting the tape 80 on which the wiring pattern 112 is formed by the drawing apparatus 1 described above for each device.

  In the liquid crystal display device 101 according to the present embodiment, since the circuit board 103 included in the liquid crystal display device 101 is manufactured using the drawing device 1 described above, a high-quality liquid crystal display device in which the wiring pattern 112 is formed with high accuracy. 101 can be obtained.

  As mentioned above, although embodiment of this invention was described, various deformation | transformation can be added with respect to the said embodiment in the range which does not deviate from the meaning of this invention. As modifications, for example, the following can be considered.

(Modification 1)
In the drawing method of the above embodiment, the stage 50 is moved in parallel to the side on which the tape 80 is placed between the step S1 for transporting the tape 80 and the step S2 for attracting the tape 80 to the stage 50. Further steps may be included.

  FIG. 9 is a cross-sectional view of the drawing apparatus 1 and the tape 80 for explaining this step. As shown in this figure, the tape 80 is fixed at the positions of the sprockets 71 and 72, and the stage 50 is stretched in a state where a larger tension is applied by translation in the + Z direction. As a result, even when the tape 80 has an upwardly convex or downwardly convex warp, the warp of the tape 80 on the stage 50 can be corrected or reduced.

  Even if the warp cannot be completely corrected only by the parallel movement of the stage 50 described above, it can be corrected by pressing the tape 80 by the pressing mechanism 34 thereafter. The warpage of the tape 80 can be corrected more easily by reducing the warpage by parallel movement of the stage 50 in advance.

(Modification 2)
In the above embodiment, as shown in FIG. 10A, a tape guide 70 may be appropriately disposed in the transport path of the tape 80. In this modification, tape guides 70 are disposed on the upstream side of the sprocket 71 and the downstream side of the sprocket 72, respectively.

  FIG. 11A shows a cross-sectional view of the tape guide 70 in FIG. 10A in the XZ plane. As shown in this figure, one tape guide 70 is disposed on each side of the tape 80, and each has an upper block 70a and a lower block 70b. The tape guide 70 is a member for maintaining the posture of the tape 80 in a desired state by guiding the tape 80 into a space provided between the upper block 70a and the lower block 70b.

  FIG. 11B is a cross-sectional view of a conventionally known tape guide 170. The tape guide 170 also includes an upper block 170a and a lower block 170b. Since the tape guide 170 has a boundary between the upper block 170a and the lower block 170b substantially on the extended line of the space where the tape 80 is to be located, the boundary between the upper block 170a and the lower block 170b, that is, the upper block 170a. In some cases, the tape 80 may get caught in the gap.

  On the other hand, in the tape guide 70 of the present embodiment, the boundary between the upper block 70a and the lower block 70b exists in a direction perpendicular to the space in which the tape 80 is to be located. Therefore, the tape 80 enters the boundary. It has the advantage of not being

  When the tape guide 70 is arranged as shown in FIG. 10A, if slack is generated in the tape 80 in step S4, as shown in FIG. 10B, between the clamp 77 and the tape guide 70, And a slack is created between the tape guide 70 and the clamp 78. Even when alignment is performed in this state, the deformation of the tape 80 accompanying the alignment can be absorbed by the slack. In this case, it is preferable to fix the tape guide 70 to the movable stage 18 and to move the tape guide 70 together with the movable stage 18 and the like during alignment.

(Modification 3)
In the above embodiment, the sprockets 71 and 72 are used as the first transport roller and the second transport roller in the present invention. However, the present invention is not limited to this, and instead, for example, the tape 80 is applied by frictional force. You may use the conveyance roller etc. which convey. Further, the clamps 77 and 78 can take various forms as long as they can hold the tape 80 in addition to the one that physically holds the tape 80 as in the present embodiment. For example, a device having a transport function such as a sprocket or a transport roller, which can hold the tape 80 by fixing its rotation, or a device that holds the tape 80 by electromagnetic force may be used.

1 is a schematic side view of a drawing apparatus according to an embodiment of the present invention. The partial top view of the various tapes which are one aspect | mode of the strip | belt-shaped workpiece | work in this invention. The top view which shows the stage and the various units arrange | positioned around it. The external appearance perspective view of a stage and an alignment unit. FIG. 3 is a side sectional view of a droplet discharge head. FIG. 6 is a process diagram of a drawing method according to the present embodiment. FIGS. 4A to 4D are cross-sectional views of a drawing apparatus and a tape in each step (process) of the drawing method according to the present embodiment. The disassembled perspective view of a liquid crystal display device. Sectional drawing of the drawing apparatus and tape in the modification of this invention. (A) And (b) is sectional drawing of the drawing apparatus and tape in the modification of this invention. (A) And (b) is sectional drawing of the tape guide which concerns on the modification of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Drawing apparatus, 9 ... Functional liquid, 11 ... Base, 18 ... Movable plate, 22 ... Drawing unit, 24 ... Alignment unit, 26 ... UV irradiation unit, 32, 33 ... Camera, 34 ... Pressing mechanism, 36 ... Pressing Members, 50 ... stage, 70 ... tape guide, 71,72,76 ... sprocket as a transport roller, 73,74 ... opposite roller, 75 ... auxiliary roller, 77,78 ... clamp, 80 ... tape as a strip-shaped workpiece, 84: Unwinding reel, 85: Take-up reel, 90 ... Droplet discharge head, 99 ... Control unit, 101 ... Liquid crystal display device.

Claims (2)

A drawing method for drawing a pattern on a strip-shaped workpiece,
The workpiece spanned on a transport path from the unwinding reel to the take-up reel is disposed on the downstream side of the first transport roller in the transport path, and a first transport roller disposed in the transport path. A second conveying roller, and a step of conveying using the second conveying roller;
Placing the workpiece on a stage disposed between the first transport roller and the second transport roller;
Holding the workpiece by a first clamp disposed upstream of the first transport roller and a second clamp disposed downstream of the second transport roller;
The first clamp and the second clamp are moved in a direction to reduce the distance between them, and between the first clamp and the first transport roller, and between the second clamp and the second clamp. Producing a slack in the workpiece between the transfer rollers;
The first transport roller, the second transport roller, and the stage are moved integrally with the work with respect to a droplet discharge head disposed opposite to the stage to align the work. Steps to do,
Discharging functional liquid from the droplet discharge head to a position corresponding to the pattern on the workpiece;
Have
In the step of aligning the workpiece, the drawing method is characterized in that the stage is positioned above the uppermost portions of the first transport roller and the second transport roller . A drawing device for drawing a pattern on a strip-shaped workpiece,
An unwinding reel for unwinding the workpiece;
A take-up reel for winding the workpiece;
A first transport roller disposed in a transport path from the unwind reel to the take-up reel;
A second transport roller disposed on the downstream side of the first transport roller in the transport path;
A stage on which the workpiece is placed, disposed between the first transport roller and the second transport roller;
A first clamp disposed upstream of the first transport roller and movable along the transport path;
A second clamp disposed downstream of the second transport roller and movable along the transport path;
A liquid droplet ejection head that ejects a functional liquid onto the workpiece placed on the stage;
A controller that controls operations of the first transport roller, the second transport roller, the stage, the first clamp, the second clamp, and the droplet discharge head;
The first conveying roller and the second conveying roller conveying the workpiece;
The first clamp and the second clamp hold the workpiece;
The first clamp and the second clamp are moved in a direction to reduce the distance between them, and between the first clamp and the first transport roller, and between the second clamp and the second clamp. Producing a slack in the workpiece between the transfer rollers;
Moving the first transport roller, the second transport roller, and the stage relative to the droplet discharge head integrally with the work, and aligning the work;
Discharging functional liquid from the droplet discharge head to a position corresponding to the pattern on the workpiece;
In the step of aligning the workpiece, the stage moves above the uppermost portions of the first transport roller and the second transport roller;
A control unit that executes at least
A drawing apparatus comprising:

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