JP2007061734A - Plotting apparatus and plotting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To precisely aligning a work to a droplet discharge head. <P>SOLUTION: This plotting apparatus has the discharge head for discharging the droplets to the belt-like work 81 and an imaging apparatus 32 for imaging a mark formed on the work 81 and measuring relative positional relation between the discharge head and the work 81 and is further provided with a second imaging apparatus 33 freely relatively movable to the imaging apparatus 32 in the direction along the surface of the work 81 and for imaging a second mark formed on the work 81. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a drawing apparatus and a drawing method.

  For example, various wirings are formed in a COF (Chip On Film) used in a liquid crystal display device, but in recent years, the use of a liquid ejection method has been increasing as a metal wiring forming technique. In general, a coating technique based on a liquid discharge method discharges a liquid material containing a metal material as droplets from a plurality of nozzles provided in a liquid discharge head while relatively moving the substrate and the liquid discharge head. The film is drawn and formed by repeatedly depositing droplets on the substrate, and there is an advantage that the liquid material is less wasted and an arbitrary pattern can be applied directly without using means such as photolithography. is doing.

  In this type of wiring formation, a metal wiring may be formed by discharging droplets containing a metal material by a droplet discharge method onto a film on which wiring has been formed in the previous step. At this time, in order to align the position with the wiring formed in advance, the alignment mark formed on the film is measured by the alignment camera, and the relative positional relationship between the film and the droplet discharge head is adjusted based on the measurement result. The

Patent Document 1 discloses an example of the configuration of an alignment camera.
JP-A-5-323249

  However, the following problems exist in the conventional technology as described above.

  Usually, since the alignment mark is measured at two or more places, when alignment is performed by one alignment camera, the alignment camera and the film are relatively moved.

  In this case, the movement error when the alignment camera and the film are moved relative to each other adversely affects the alignment accuracy, resulting in a problem that the drawing accuracy of the wiring pattern or the like is reduced.

  In addition, when using an alignment camera that moves in one axis, only alignment marks arranged along this moving direction can be recognized. For example, a plurality of devices are set on the film in the direction crossing the moving direction, and each is aligned. When wiring is formed for each device in which a mark is formed, it is difficult to perform alignment.

  The present invention has been made in consideration of the above points, and an object of the present invention is to provide a drawing apparatus and a drawing method capable of aligning a workpiece with a droplet discharge head with high accuracy.

  In order to achieve the above object, the present invention employs the following configuration.

  A drawing apparatus according to the present invention includes an ejection head that ejects droplets to a strip-shaped workpiece, an imaging device that images a mark formed on the workpiece and measures a relative positional relationship between the ejection head and the workpiece, And a second imaging device that is capable of moving relative to the imaging device in a direction along the surface of the workpiece and that images a second mark formed on the workpiece. To do.

  Therefore, in the drawing device of the present invention, the imaging device is positioned at a position for imaging the mark in advance, and the second imaging device is positioned at the position for imaging the second mark, so that the imaging after the workpiece is positioned is performed. Sometimes it is not necessary to move the imaging device and the second imaging device relative to each other. Therefore, it is possible to measure the relative positional relationship between the work and the discharge head, which causes a movement error when the image pickup apparatus and the second image pickup apparatus are relatively moved, and to improve the drawing accuracy. become.

  In the present invention, since the second imaging device is movable in the direction along the surface of the workpiece, marks formed apart in the direction intersecting the length direction of the workpiece also move the second imaging device. Thus, it is possible to easily take an image, and it is possible to easily cope with a so-called two-item product in which a plurality of devices are set in the intersecting direction.

  Moreover, in this invention, the structure which has a drive device which drives the said imaging device and 2nd imaging device integrally in the direction which cross | intersects the length direction of the said workpiece | work can also be employ | adopted suitably.

  In the configuration in which the driving device moves the imaging device, the second imaging device, and the ejection head independently from each other in the intersecting direction, after measuring the position of the workpiece by the imaging device and the second imaging device, By retracting the imaging device and the second imaging device from a position facing the workpiece and moving the ejection head to a position facing the workpiece, it is possible to quickly eject droplets onto the workpiece to form a pattern. It becomes possible.

  Moreover, in this invention, the structure which has a control apparatus which controls the movement of a said 2nd imaging device based on the positional information on the said mark and the said 2nd mark according to the said workpiece | work can also be employ | adopted suitably.

  Thereby, in this invention, even when the kind of workpiece | work changes, it becomes possible to move the 2nd imaging device smoothly to the position of the 2nd mark according to the workpiece | work after a change.

  Moreover, in this invention, the structure which has a porous board which forms the adsorption | suction surface of the said workpiece | work can also be employ | adopted suitably.

  As a result, in the present invention, even when the type of workpiece changes and the width fluctuates, it is possible to reliably attract the surface with the suction surface, and to maintain a smooth surface for discharging the droplets. It can contribute to improvement.

  On the other hand, in the drawing method of the present invention, the step of measuring the relative positional relationship between the workpiece and the ejection head by imaging the mark formed on the strip-shaped workpiece with an imaging device, and the ejection head based on the relative positional relationship. And a step of ejecting droplets from the workpiece to the workpiece, the second imaging device being relatively movable in the direction along the surface of the workpiece relative to the imaging device, and formed on the workpiece A step of moving the second imaging device relative to the imaging device at a position where the second mark is measured.

  Therefore, in the present invention, the imaging device is positioned at a position for imaging the mark in advance, and the second imaging device is positioned at the position for imaging the second mark, so that the imaging device can be used for imaging after the workpiece is positioned. And it is not necessary to relatively move the second imaging device. Therefore, it is possible to measure the relative positional relationship between the work and the discharge head, which causes a movement error when the image pickup apparatus and the second image pickup apparatus are relatively moved, and to improve the drawing accuracy. become.

  In the present invention, a procedure for relatively moving the second imaging device based on the position information of the mark and the second mark corresponding to the workpiece can also be suitably employed.

  Thereby, in this invention, even when the kind of workpiece | work changes, it becomes possible to move the 2nd imaging device smoothly to the position of the 2nd mark according to the workpiece | work after a change.

  Further, in the present invention, the step of integrally driving the imaging device and the second imaging device in a direction intersecting the length direction of the workpiece, and the imaging device and the A procedure including a step of moving independently of the second imaging device is also suitable.

  In this case, it is preferable that the imaging device, the second imaging device, and the ejection head are independently moved between a facing position facing the workpiece and a retracted retracted position separated from the facing position. It is.

  Therefore, in the present invention, after the position of the workpiece is measured by the imaging device and the second imaging device, the imaging device and the second imaging device are retracted from the position facing the workpiece, and the ejection head is moved to the position facing the workpiece. By moving it, it is possible to quickly eject droplets onto the workpiece to form a pattern.

  Embodiments of a drawing apparatus and a drawing method of the present invention will be described below with reference to FIGS. In each drawing used for the following description, the scale of each member is appropriately changed to make each member a recognizable size.

  FIG. 1 is a plan view of the drawing apparatus 1.

  The drawing device 1 draws and forms a pattern such as wiring on a strip-shaped tape (work) 80 sent along the Y direction. The drawing device 1 sucks and holds the tape 80, and above the suction device. A pair of frames 20 provided extending in the X direction, a drawing unit 22, an alignment unit 24, and a UV irradiation unit 26 that are installed on the frame 20 and are independently driven in the X direction by a driving device such as a linear motor (not shown). The feeding roller 84 for feeding out the tape 80 and the winding roller 85 for taking up the tape 80 are mainly configured.

  The tape 80 is stretched between the feeding roller 84 and the take-up roller 85, and is placed on the upper surface of the suction device 50 between the two.

  FIG. 2 is an external perspective view of the suction device 50 and the alignment unit 24.

  The adsorption device 50 is configured by disposing (embedding) the porous plate 51 on the surface of the surface plate 60, and can adsorb the tape 80 described above on the surface of the porous plate 51. The suction position of the 80 tape is the central portion in the width direction of the porous plate 51, and the center line of the tape is set to a position where it matches the center line of the porous plate 51. As a result, it is possible to minimize the changeover of the drawing apparatus accompanying the change in the tape size.

  The porous plate 51 is composed of a resin sintered material obtained by sintering a resin material. Sinter molding is a technique in which raw material powder is filled in a mold and heated, and the surface layers of the raw material powder are fused (sintered) to form while leaving the space between the powders. As the raw material powder, polyethylene (PE), polypropylene (PP), polystyrene (PS), polyvinyl chloride (PVC), polycarbonate (PC), polyamide (PA), acrylic resin (PMMA), fluororesin (PVDF, PTFE) It is possible to employ a thermoplastic resin material such as. Thus, by comprising the porous board 51 with a resin material, damage to the tape adsorbed on the surface of the porous board 51 can be prevented.

  A negative pressure suction device (not shown) is connected to the porous plate 51, and the negative pressure is supplied almost uniformly over the entire surface of the porous plate 51. Therefore, even a plurality of types of tapes having different widths can be sucked and held uniformly.

  Further, the suction device 50 is fixed to the intermediate plate 18 disposed below the suction device 50. The intermediate plate 18 can be rotated by the motor 16 in the θz direction (rotation direction around the z axis). The motor 16 is fixed to the slider 14. The slider 14 can move on the surface of the base plate 12 in the Y direction. Accordingly, the suction device 50 can move in the θz direction and the Y direction with respect to the base plate 12.

  The alignment unit 24 includes a moving frame 31 that moves along the frame 20 described above, a camera (imaging device) 32 mounted on the moving frame 31, a camera (second imaging device) 33, and a tape pressing device 34. . The cameras 32 and 33 are constituted by a CCD camera or the like, measure marks (described later) formed on the tape 80, and output the marks to the control unit 99. The control unit 99 controls driving of the motor 16, the slider 14, the feeding roller 84, and the take-up roller 85 based on the measurement results of the cameras 32 and 33.

  The camera 32 is integrally fixed to the moving frame 31, but the camera 33 is mounted on a slider 35 that is movable in the Y-axis direction with respect to the moving frame 31, thereby controlling the control unit. Under the control of 99, the camera 32 moves in the Y-axis direction.

  3 is a right side view in FIG.

  The tape pressing device 34 includes a pair of pressing portions 36 that extend in the Y-axis direction, and a support frame 38 that extends in the Y-axis direction and supports one (−Y side) of the pressing portion 36 from above via a support column 37. The support frame 39 has a support frame 40 that supports the other side (+ Y side) of the pressing portion 36 from above and supports the support frame 38 so as to be extendable in the Y-axis direction.

  The support frame 38 is configured to move in the Y-axis direction with respect to the support frame 40 by a drive device such as a linear motion motor that is driven by the control of the control unit 99.

  The support frame 40 is configured to move in the Z-axis direction along a guide frame 41 provided on the moving frame 31 so as to extend in the Z direction by a driving device such as a linear motor driven by the control of the control unit 99. Yes.

  Returning to FIG. 1, the drawing unit 22 includes a droplet discharge head (discharge head) 90. FIG. 4 is a side sectional view of the droplet discharge head. The ejection head 90 mainly includes a head main body 90A, a nozzle plate 92 mounted on one surface of the head main body 90A, and a piezo element 98 mounted on the other surface of the head main body 90A.

  A plurality of nozzles 91 for discharging droplets are arranged in an array on the nozzle plate 92 that forms the ink discharge surface. The head body 90 </ b> A is formed with a plurality of pressure chambers 93 that communicate with the nozzles 91. Each pressure chamber 93 is connected to a reservoir 95, and the reservoir 95 is connected to an ink inlet 96. The ink 9 is supplied from the ink introduction port 96 through the reservoir 95 to each pressure chamber 93. On the other hand, a flexible diaphragm 94 is attached to the upper end surface of the head main body 90A. Piezo elements 98 are provided on opposite sides of the pressure chambers 93 with the diaphragm 94 interposed therebetween. The piezo element 98 is obtained by sandwiching a piezoelectric material such as PZT between electrodes. The electrode is connected to the control unit 99.

  When a driving voltage is applied from the control unit 99 to the piezo element 98, the piezo element 98 is expanded or contracted. When the piezoelectric element 98 contracts and deforms, the pressure in the pressure chamber 93 decreases, and the ink 9 flows from the reservoir 95 into the pressure chamber 93. Further, when the piezo element 98 is expanded and deformed, the pressure in the pressure chamber 93 is increased, and the droplet of the ink 9 is ejected from the nozzle 91. The droplet discharge conditions can be controlled by controlling the driving voltage applied to the piezo element 98.

  In addition to the above-described piezo method for changing the pressure in the pressure chamber by deformation of the piezo element, a method for changing the pressure in the pressure chamber by heating the ink to generate bubbles (bubbles), etc. Various known techniques can be applied. Of these, the piezo method is superior in that it does not adversely affect the composition of the material because the ink is not heated.

  The UV irradiation unit 26 includes a UV irradiation device 27 such as a UV lamp.

  The drawing apparatus 1 of the present embodiment is configured as described above.

  Next, a description will be given of the tape 80 on which a pattern is formed by discharging droplets from the drawing apparatus 1.

  FIG. 5 is a partial plan view of various tapes (TAB tape; work) 81-83. Sprocket holes 86 for winding the tape are continuously formed at both ends in the width direction of the tape 81, and a work area 88 for forming a semiconductor device is continuously formed at the center in the width direction of the tape 81. . This work area 88 is set for each device, for example.

  The drawing device 1 draws and forms a metal wiring pattern in the work area 88, and the suction device of this embodiment sucks and holds a tape on which the metal wiring pattern is to be drawn.

  There are a plurality of types of tapes 81, 82, and 83 having different width dimensions corresponding to the size of the work area 88 described above and the number of work areas 88 arranged in the width direction.

  For example, three alignment marks (marks) AM that are observed when the tapes 81 to 83 are positioned are formed in each work area 88 of each tape 81 to 83. The alignment mark AM has various shapes depending on the measurement method or the like. Here, the alignment mark AM is a circular mark and is illustrated as being arranged at three corners of the rectangular work area 88.

  Next, the usage method of the drawing apparatus 1 mentioned above is demonstrated.

  Here, description will be made assuming that the tape 81 described above is used.

  Further, in the present embodiment, drawing processing is performed collectively on a work area 88 ′ composed of four work areas 88, and an alignment mark AM1 located on one end side (+ Y side) in the work area 88 ′ The tape 81 is positioned by measuring an alignment mark (second mark) AM2 located on the other end side (−Y side) and in the same row (same X position) as the alignment mark AM1.

  First, the tape 80 (here, the tape 81) is stretched between the feeding roller 84 and the take-up roller 85 shown in FIG. 2, and the tape 81 is placed on the surface of the suction device 50 (the porous plate 51) disposed therebetween. Is placed.

  Next, when the drawing unit 22 or the UV irradiation unit 26 is at a position facing the suction device 50, the unit is retracted in advance from the position facing the suction device 50.

  Subsequently, the alignment unit 24 is moved along the frame 20 and positioned at a position facing the suction device 50 as shown in FIG.

  At this time, the position of the moving frame 31 in the X direction is adjusted so that the alignment mark AM1 is positioned in the measurement range of the camera 32. Further, since the relative positional relationship between the alignment marks AM1 and AM2 is known, the camera 33 is moved in the Y-axis direction via the slider 35 by a distance corresponding to the relative positional relationship.

  Next, the support frame 40 is lowered along the guide frame 41 to bring the pressing portion 36 into contact with the tape 81 as shown in FIG. At this time, the pressing portion 36 is adjusted so as to contact the side edge in the width direction of the tape 81 by moving the support frame 38 in the X-axis direction with respect to the support frame 40 in advance.

  Thereafter, the negative pressure suction device is operated to adsorb and hold the tape 81 on the surface of the porous plate 51. Since both sides of the tape 81 are pressed by the pressing portion 36, even when the tape warps or bends, the tape 81 is corrected and is smoothly held by suction on the surface of the porous plate 51 without causing floating or the like. .

  When the tape 81 is sucked and held by the suction device 50, the camera 32 captures and measures the alignment mark AM1, and the camera 33 captures and measures the alignment mark AM2. From these photographing results, the control unit 99 calculates the current position of the work area of the tape 81, and further calculates the offset amount from the predetermined position. Based on the calculation result, the slider 14 and the motor 16 are driven to move the suction device 50 in the Y direction and the θz direction, and the tape 81 sucked on the surface of the suction device 50 (with respect to the droplet discharge head 90). ) Align. The alignment of the tape 81 in the X direction is performed by adjusting the movement amount of the drawing unit 22.

  When the alignment of the tape 81 is completed, the alignment unit 24 is moved along the frame 20 to be retracted from the position facing the suction device 50 (that is, the tape 81), and the drawing unit 22 is moved in the X direction for suction. It arrange | positions in the position facing the apparatus 50. FIG. Then, by ejecting ink from the droplet ejection head 90, a predetermined pattern of metal wiring or the like is drawn in the work area 88 of the tape 81 so as to be connected to, for example, an already formed wiring pattern.

  When the droplet discharge process on the tape 81 is completed, the drawing unit 22 is moved along the frame 20 to be retracted from the position facing the suction device 50 (that is, the tape 81), and the UV irradiation unit 26 is moved in the X direction. And disposed at a position facing the suction device 50. Then, the ink discharged onto the tape 81 is dried by irradiating UV from the UV irradiation device 27.

  In addition, it is possible to laminate | stack the same kind or different kind of film by repeating the droplet discharge process and UV irradiation process mentioned above. When different types of films are stacked, a plurality of droplet discharge heads that discharge different inks may be mounted on one drawing unit, or a plurality of drawings that include droplet discharge heads that discharge different inks. A unit may be provided.

  As described above, when the drawing process for the work area is completed, the tape 81 is sent to place the unprocessed work area on the surface of the suction device 50, and the above-described drawing process is repeated.

  When the drawing process for all the work areas of the tape 81 is completed, the tape 81 is exchanged together with the feeding roller 84 and the take-up roller 85 shown in FIG. Even when the tape size (width dimension) is changed, the center line in the width direction of the tape is made to coincide with the center line of the suction device 50. As a result, it is possible to minimize the changeover of the drawing apparatus accompanying the change in the tape size.

  As described above, in the drawing apparatus 1 according to the present embodiment, the cameras 32 and 33 are not moved while the alignment marks AM1 and AM2 are imaged and the positions are measured. The position / orientation of the tape 81 can be measured with high accuracy. Therefore, in this embodiment, the tape 81 and the droplet discharge head 90 can be aligned with high accuracy, and the drawing accuracy of the pattern formed on the tape 81 can be improved.

  In the present embodiment, since the cameras 32 and 33 move integrally in the X direction, the relative positional relationship in the X direction can be kept constant, which can contribute to improvement in measurement accuracy. Further, when the camera 33 moves relative to the camera 32 in the Y-axis direction, it can easily cope with various tapes having different mark positions, and versatility can be improved.

  Furthermore, in this embodiment, since the tape 81 is adsorbed by the porous plate 51, it is possible to easily cope with various tapes having different widths, and the work involved in changing the type of the tape can be made efficient. .

In addition, in the present embodiment, since the side edge of the tape 81 is pressed by the tape pressing device 34, even if the tape 81 is warped and bent, the porous plate is corrected without being lifted. The surface 51 can be sucked and held smoothly, the alignment mark can be measured with high accuracy, and the pattern can be formed at a predetermined position with high accuracy.
(Liquid crystal display device)
Next, a liquid crystal display device having a tape on which a wiring pattern is formed by the drawing device 1 will be described.

  FIG. 6 is an exploded perspective view of a liquid crystal display device which is an electro-optical device.

  A liquid crystal display device (electro-optical device) 101 shown in this figure is roughly provided with a color liquid crystal panel (electro-optical panel) 102 and a circuit board 103 connected to the liquid crystal panel 102. In addition, an illumination device such as a backlight and other incidental devices are attached to the liquid crystal panel 102 as necessary.

  The liquid crystal panel 102 includes a pair of substrates 105a and 105b bonded by a sealing material 104, and liquid crystal is sealed in a gap formed between the substrates 105b and 105b, a so-called cell gap. . These substrate 105a and substrate 105b are generally formed of a light-transmitting material such as glass or synthetic resin. A polarizing plate 106a and a polarizing plate 106b are attached to the outer surfaces of the substrate 105a and the substrate 105b. In FIG. 6, illustration of the polarizing plate 106b is omitted.

  An electrode 107a is formed on the inner surface of the substrate 105a, and an electrode 107b is formed on the inner surface of the substrate 105b. These electrodes 107a and 107b are formed in stripes or letters, numbers, or other appropriate patterns. The electrodes 107a and 107b are made of a light-transmitting material such as ITO (Indium Tin Oxide).

  The substrate 105a has an extended portion that protrudes from the substrate 105b, and a plurality of terminals 108 are formed on the extended portion. These terminals 108 are formed simultaneously with the electrode 107a when the electrode 107a is formed on the substrate 105a. Therefore, these terminals 108 are made of, for example, ITO. These terminals 108 include one that extends integrally from the electrode 107a and one that is connected to the electrode 107b via a conductive material (not shown).

  Note that a large number of actual electrodes 107a and 107b and terminals 108 are formed on the substrate 105a and the substrate 105b, respectively, with extremely narrow intervals. However, in FIG. 6, the structure of the liquid crystal panel 102 is easily understood. For this reason, the intervals are schematically shown in an enlarged manner, and only a few of them are illustrated, and other portions are omitted. Further, the connection state between the terminal 108 and the electrode 107a and the connection state between the terminal 108 and the electrode 107b are not shown in FIG.

  In addition, a semiconductor element (semiconductor device) 100 as a liquid crystal driving IC is mounted on the circuit board 103 at a predetermined position on the wiring board (wiring) 109. The wiring substrate 109 is manufactured by patterning a metal film such as Cu formed on a flexible base substrate (substrate) 111 such as polyimide to form a wiring pattern 112.

  Note that a large number of actual wiring patterns 112 are formed on the base substrate 111 with an extremely narrow interval. In FIG. 6, in order to facilitate understanding of the structure, the interval is enlarged and schematically illustrated. In addition, the structure is simplified and illustrated. Although not shown, a resistor, a capacitor, and other chip components may be mounted at predetermined positions other than the portion where the semiconductor element 100 is mounted.

  In this embodiment, the circuit board 103 is manufactured by cutting the tape on which the pattern is formed by the drawing apparatus 1 described above for each device.

In the liquid crystal display device according to the present embodiment, since the circuit board 3 is manufactured using the drawing device 1 described above, a high-quality liquid crystal display device in which a wiring pattern is formed with high accuracy can be obtained.
(Electronics)
7A to 7C are diagrams illustrating an embodiment of an electronic apparatus having the liquid crystal display device described above.

  FIG. 7A is a perspective view showing an example of a mobile phone. In FIG. 7A, reference numeral 1000 denotes a mobile phone body (electronic device), and reference numeral 1001 denotes a display unit.

  FIG. 7B is a perspective view showing an example of a wristwatch type electronic device. In FIG. 7B, reference numeral 1100 indicates a watch body (electronic device), and reference numeral 1101 indicates a display unit.

  FIG. 7C is a perspective view illustrating an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 7C, reference numeral 1200 denotes an information processing apparatus (electronic device), reference numeral 1202 denotes an input unit such as a keyboard, reference numeral 1204 denotes an information processing apparatus body, and reference numeral 1206 denotes a display unit.

  Each of the electronic devices shown in FIGS. 7A to 7C includes a liquid crystal display device manufactured by using the drawing apparatus and the drawing method of the present invention, so that high-quality wiring pattern drawing accuracy is improved. It becomes an electronic device.

  In the above-described embodiment, a mobile phone, a wristwatch, and an information processing apparatus have been described as examples of electronic devices. However, the present invention is not limited to these, and a liquid crystal projector, a multimedia-compatible personal computer (PC), and an engineering workstation. (EWS), pager, word processor, television, viewfinder type or monitor direct-view type video tape recorder, electronic notebook, electronic desk calculator, car navigation device, POS terminal, and apparatus equipped with a touch panel. Is possible.

  As described above, the preferred embodiments according to the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, in the above-described embodiment, after the tape 81 is pressed by the tape pressing device 34, the negative pressure suction device is operated and held on the surface of the porous plate 51. However, the reverse procedure may be used. .

  In the above embodiment, the camera 33 is configured to be relatively movable with respect to the camera 32 by one axis in the Y-axis direction. However, the present invention is not limited to this, and two axes in the Y-axis direction and the X-axis direction are used. The configuration may be such that relative movement is possible.

  In the present invention, the type of tape and the position of the alignment mark corresponding to the type are stored in association with the control unit 99 in advance, and when the tape is exchanged, the control unit 99 The camera 33 may be automatically moved according to the type of tape.

  By adopting this configuration, it is possible to easily cope with the case where the alignment marks are arranged on diagonal lines that are separated in both the X-axis direction and the Y-axis direction.

It is a top view of the drawing apparatus which concerns on this invention. It is an external appearance perspective view of a suction device and an alignment unit. It is a figure which shows the structure and operation | movement of a tape pressing device. It is side surface sectional drawing of a droplet discharge head. It is a partial top view of various TAB tapes. It is a disassembled perspective view of a liquid crystal display device. It is a figure which shows the example of an electronic device.

Explanation of symbols

  AM, AM1 ... alignment mark (mark), AM2 ... alignment mark (second mark), CONT ... control device, 1 ... drawing device, 32 ... camera (imaging device), 33 ... camera (second imaging device), 50 ... Adsorption device, 51 ... porous plate, 80-83 ... tape (work), 90 ... droplet ejection head (ejection head)

Claims (9)

A drawing apparatus comprising: a discharge head that discharges droplets to a strip-shaped workpiece; and an imaging device that images a mark formed on the workpiece and measures a relative positional relationship between the discharge head and the workpiece. ,
A drawing apparatus comprising: a second imaging device that is relatively movable in a direction along a surface of the workpiece with respect to the imaging device and that images a second mark formed on the workpiece. The drawing apparatus according to claim 1,
A drawing apparatus comprising: a driving device that integrally drives the imaging device and the second imaging device in a direction intersecting a length direction of the workpiece. The drawing apparatus according to claim 2, wherein
The drawing device, wherein the driving device moves the imaging device, the second imaging device, and the ejection head independently of each other in the intersecting direction. The drawing apparatus according to any one of claims 1 to 3,
A drawing apparatus comprising: a control device that controls movement of the second imaging device based on position information of the mark and the second mark according to the workpiece. The drawing apparatus according to claim 1,
A drawing apparatus comprising a porous plate forming an adsorption surface of the workpiece. A step of measuring the relative positional relationship between the workpiece and the ejection head by imaging a mark formed on the belt-shaped workpiece with an imaging device, and ejecting droplets from the ejection head to the workpiece based on the relative positional relationship A drawing method comprising the steps of:
A second imaging device that is movable relative to the imaging device in a direction along the surface of the workpiece;
A drawing method comprising: a step of moving the second imaging device relative to the imaging device at a position where the second mark formed on the workpiece is measured. The drawing method according to claim 6.
A drawing method, wherein the second imaging device is relatively moved based on position information of the mark and the second mark corresponding to the workpiece. The drawing method according to claim 6 or 7,
A step of integrally driving the imaging device and the second imaging device in a direction intersecting a length direction of the workpiece;
And a step of moving the ejection head in the intersecting direction independently of the imaging device and the second imaging device. The drawing method according to claim 8.
Rendering characterized in that the imaging device, the second imaging device, and the ejection head are independently moved between a facing position facing the workpiece and a retracted position separated from the facing position. Method.

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