JP4785245B2 - Micro object inspection system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a micro object inspection apparatus that inspects the appearance, dimensions, and the like of a micro object such as a capacitor chip and classifies the micro object into a non-defective product and a defective product based on an inspection result.
[0002]
[Prior art]
The inspection apparatus for minute objects aligns the minute objects conveyed from the feeder, separates them one by one, sucks them downstream, floats the minute objects by air current conveyance, and conveys the minute objects by the camera. The image data is inspected for defects, dimensions, etc. on the appearance of the minute object, and based on the result of the inspection, the separation device is used to separate the minute object into a good product storage section. Each is sorted into a defective product storage.
[0003]
In the inspection apparatus described above, in order to separate a minute object determined as a non-defective product from a minute object determined as a defective product, a single airflow conveyance path is introduced from the tip serving as a discharge unit for the minute object of the feeder. A blocking plate for switching the branch between the good product storage unit and the defective product storage unit is provided at a branch position between the good product storage unit and the defective product storage unit in the airflow conveyance path.
[0004]
Therefore, the inspection apparatus sucks air from the non-defective product storage unit and the defective product storage unit, and when a minute object determined to be non-defective is sucked, the airflow conveyance path that branches to the defective product storage unit is blocked by a blocking plate. When a minute object that is closed and determined to be defective has been sucked, the airflow conveyance path that branches to the non-defective product storage section is closed with a closing plate.
[0005]
[Problems to be solved by the invention]
However, in the conventional inspection apparatus described above, since each airflow conveyance path branched into the non-defective product storage unit and the defective product storage unit is closed by the blocking plate, the inspection itself can be performed in a very short time, and the air In order to open and close the closing plate in a timely manner in response to the minute objects that have been inspected in the airflow in spite of the fact that the suction capability of the airflow can be increased, the airflow conveyance speed should be relatively low. As a result, there is a problem that a large amount of minute objects cannot be processed efficiently in a short time.
[0006]
The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide a micro object inspection apparatus that is capable of separating a good product and a defective product efficiently at high speed with a simple structure. Yes.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, a first object is conveyed to a first rotating table and a first fixed table by a first feeder, and the surface of the minute object is conveyed by the first rotating table and the first fixed table. The second feeder is separated from the first rotary table and the first fixed table to the second rotary table and the second fixed table by the first feeder, and is separated from the non-defective product by the first rotary table and the first fixed table. Appearance inspection of the remaining surfaces of the minute object was performed. By doing so, the inspection of the minute object can be speeded up, and the appearance inspection can be performed on all the surfaces of the minute object, so that the non-defective product and the defective product can be reliably separated.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
The minute object inspection apparatus of the present invention is provided with a first feeder that conveys a minute object, a tip provided at a distance from the first feeder, and is rotatable, and a pocket penetrating the front and back surfaces has an arc shape. A plurality of circular first rotary tables formed at intervals, provided on the back surface of the first rotary table, sequentially in a circular arc shape, facing the tip of the first feeder, and provided at a horizontal position, A suction opening connected to the back side of a suction device for sucking a minute object, provided through the front and back surfaces at a position rotated by 180 ° from the suction opening, And a first fixed table that is provided at any position before and after the non-defective product delivery opening in the rotational direction and configured to send out a separated defective fine object, and a good product of the first fixed table. A second feeder that is connected to the exit opening on the back surface side and conveys a minute object while being aligned, and is provided with a distance at the tip of the second feeder and is rotatable, and has a pocket that penetrates the front and back surfaces. A plurality of circular second rotary tables formed in a circular arc shape at intervals, and provided on the back surface of the second rotary table, sequentially facing the tip of the second feeder in a circular arc shape and at a horizontal position A suction device that is provided and sucks a minute object is connected to the back side of the suction device, and is provided through the front and rear surfaces at a position rotated from the suction opening, and a good product delivery opening that sends out separated fine objects. And a second fixed table that is provided at any position before and after the non-defective product delivery opening in the rotational direction and that is configured with a defective product delivery opening for delivering a separated defective micro object. An imaging aperture is formed downstream from the suction aperture of the first fixed table in the direction of rotation of the bull, and the imaging aperture, immediately before the first rotary table of the first feeder, and immediately before the second rotary table of the second feeder, In addition, cameras are arranged at positions where images can be taken in the pockets on the downstream side of the suction openings of the second rotary table.
[0009]
In the present invention, the first feeder, for example, vibrates the conveyance path up to the tip and aligns the micro objects. The tip of the first feeder is in a non-vibrating state in order to prevent the posture of the minute object from collapsing.
[0010]
The pocket of the first rotary table is located at a position slightly away from the tip of the first feeder (which may be 1.52 times the length of a minute object, but depends on the output of a suction device described later). An opening is located, and a suction opening is formed at a position facing the tip of the first feeder of the first fixed table via the pocket (first fixed table). The first rotary table and the first fixed table are vertically arranged with respect to the horizontal arrangement surface, and the suction opening is formed at a horizontal position on the first fixed table and is conveyed by the first feeder. The fine object is sucked by the suction device and received horizontally in the pocket of the first rotary table.
[0011]
At this time, for example, the upper surface and the left and right surfaces of the minute object conveyed by the first feeder are imaged by a camera installed at the front end of the first feeder, and an appearance inspection is performed. Thereafter, the front surface of the minute object sucked into the pocket of the first rotary table is imaged by a camera embedded in an imaging opening provided downstream of the suction opening of the first fixed table in the rotation direction of the first rotary table. Visual inspection is performed.
[0012]
And now, in the first rotary table and the first fixed table, the appearance inspection is performed on the upper surface, the left and right surfaces, and the front surface of the minute object, and if there is no abnormality as a result of the appearance inspection, it is formed on the first fixed table. It is sent out from the non-defective product delivery opening and conveyed to the second rotary table and the second fixed table by the second feeder.
[0013]
In the first fixed table, the non-defective delivery opening is provided at a position rotated by 180 ° with respect to the suction opening. Therefore, the upper surface of the minute object sucked into the pocket of the first rotary table through the suction opening is sent to the second feeder when the lower surface reaches the non-defective product delivery opening. Here, when there is an abnormality in any of the upper surface, the left and right surfaces, and the front surface, the defective product is sent out from the defective product delivery opening in the first fixed table to the defective product storage unit.
[0014]
The minute object sent to the second rotary table and the second fixed table by the second feeder has a camera on the upper surface (lower surface when sucking the first rotary table) and the rear surface of the minute object immediately before reaching the second rotary table. Take an image and perform an appearance inspection. And when there is no abnormality in this external appearance inspection, it sends out to the good quality storage part from the good quality delivery opening in the 2nd fixed table. Here, when there is an abnormality on either the upper surface or the rear surface, it is sent out to the defective product storage section of the second fixed table.
[0015]
As described above, the micro object inspection apparatus of the present invention inspects the appearance of the top surface and the left and right surfaces of the micro object immediately before the first rotary table and the first fixed table, and the front surface of the micro object in the pocket of the first rotary table. The external inspection is performed and the products separated from the non-defective products are sent from the non-defective product delivery opening of the second fixed table to the second rotary table and the second fixed table through the second feeder. In addition, the appearance of the lower surface (in this case, the upper surface) of the minute object and the rear surface are inspected immediately before the second fixed table, and those that are separated from the non-defective products by these inspection results are non-defective products of the second fixed table. Since it is made to send out from a sending opening, the appearance inspection of all six surfaces of a minute object can be performed reliably.
[0016]
Further, the present invention, in the above configuration, in the first and second fixed tables, at a position adjacent to the non-defective product delivery opening or the non-defective product delivery opening corresponding to the most downstream position in the rotation direction of the first and second rotary tables. A photoelectric sensor is embedded. In this way, it is possible to grasp whether or not the sorted minute objects are properly sorted into non-defective products or defective products, and unidentified minute objects remaining in the pockets of the first and second rotary tables Can be found.
[0017]
Further, in the above-described configuration, the present invention forms a plurality of defective product delivery openings, and sorts out defective product delivery openings for each minute object abnormality.
[0018]
According to the above configuration, in the first fixed table, for example, a minute object having a defect on the upper surface, a minute object having a defect on the left and right surfaces, and a minute object having a defect on the front surface are separated and each defective product. On the other hand, in the second fixed table, for example, a minute object having a defect on the lower surface (in this case, the upper surface) and a minute object having a defect on the rear surface are separated and each defective product is sent out. Thus, it is possible to grasp which surface of the minute object sent to each defective product storage unit has an abnormality without sorting after the inspection is finished.
[0019]
Further, in the above-described configuration, the present invention is configured such that each of the first and second fixed tables is opposed to the distal end portions of the first and second feeders, and the respective pockets of the first and second rotary tables are interposed. A nozzle in which the lower half of the cylindrical cross section is cut off is provided in communication with the respective suction openings of the first and second fixed tables.
[0020]
The minute object moves in the air from the first and second feeders to the respective pockets of the first and second rotary tables by a suction device provided on the back surfaces of the first and second fixed tables. In this configuration, the nozzle is provided in order to stabilize the moving posture of the minute object moving in the air, accurately image the minute object, and more accurately discriminate between the non-defective product and the defective product.
[0021]
The nozzles communicate with the respective suction openings of the first and second fixed tables through the respective pockets of the first and second rotary tables at positions opposed to the front end portions of the first and second feeders. Provided for the first and second fixed tables. That is, the nozzle is fixedly provided to face the front end portions of the first and second feeders without accompanying the rotation of the first and second rotary tables. As a result, it is possible to easily suck a minute object with a suction device that is smaller than when no nozzle is provided.
[0022]
And this nozzle is made into the state by which the lower half of the cross section was excised. This is because if the nozzle is cylindrical, a minute object at the tip of the first and second feeders is easily sucked from the cylindrical tip opening, but only the surface of the minute object facing the nozzle is sucked. Therefore, the aerial attitude is likely to be collapsed (prone to a forward tilt attitude), and in some cases, the aerial attitude is unstable, so that a non-defective product may be misidentified.
[0023]
Therefore, by setting the nozzle in a state where the lower half of the cylindrical cross section is cut, a minute object can be sucked from the two directions of the portion where the lower half of the cross section of the nozzle is cut off and the tip portion, As a result, the sucked minute object is sucked from the two surfaces, the surface facing the nozzle and the lower surface, and the lower surface of the minute object moving in the air is supported and stabilized by the sucked air. Therefore, by doing in this way, the aerial posture of the minute object is stabilized, and the image pickup by the camera is also stabilized, and the erroneous determination is suppressed and the inspection accuracy is improved as compared with the state where the nozzle is not provided.
[0024]
【Example】
Embodiments of a minute object inspection apparatus according to the present invention will be described below with reference to the drawings.
1 and 2 show a schematic configuration of a minute object inspection apparatus of the present invention. FIG. 3 shows the first and second rotary tables in the minute object inspection apparatus of the present invention. FIG. 4 shows a first fixed table in the minute object inspection apparatus of the present invention. FIG. 5 shows a second fixed table in the minute object inspection apparatus of the present invention. FIG. 6 shows a changed portion in the minute object inspection apparatus of the present invention provided with a nozzle according to a modified example. FIG. 7 shows a nozzle portion in a very small object inspection apparatus according to a modification. Although the minute object is very small and the actual device is small and compact, it is enlarged and exaggerated in the drawing.
[0025]
In the figure, reference numeral 1 denotes a micro object inspection apparatus (hereinafter, referred to as a non-defective product) that inspects the appearance and dimensions of a micro object W (hereinafter, referred to as a workpiece W) such as a capacitor chip and classifies it into a non-defective product and a defective product. This is called an inspection device, and is configured as follows.
[0026]
Reference numeral 2 denotes a first feeder that uses, for example, high-frequency vibration as a thrust. The first feeder 2 applies high-frequency vibration to the workpiece W, for example, a conveyance path 2a in which a groove is formed, to the discharge portion 2b at the tip. Align by conveying. The discharge unit 2b is in a non-vibrating state so that the posture of the workpiece W does not collapse.
[0027]
The 1st feeder 2 is made into the horizontal shape with respect to the arrangement | positioning surface, for example, the discharge part 2b of the 1st feeder 2 in a present Example is made into the colorless and transparent state, for example using sapphire glass. The first feeder 2 has a camera C1 that images the upper surface of the workpiece W at a position above the discharge portion 2b, and cameras C2 and C3 that image the left and right surfaces of the workpiece W at the left and right positions of the discharge portion 2b (FIG. 1). Are omitted). In the detection apparatus 1 of the present invention, the discharge unit 2b of the first feeder 2 is configured as described above, so that illumination or the like is not reflected by the discharge unit 2b during imaging by the cameras C1 to C3. Accuracy can be improved.
[0028]
3, as shown in FIG. 3, it is separated from the discharge part 2 b of the first feeder 2 by a length corresponding to one workpiece W, and is erected vertically with respect to the arrangement surface and can be rotated by the motor M <b> 1. The first rotary table has a circular shape in which a plurality of pockets 3a penetrating the front and back surfaces are formed in a circular arc shape at a predetermined interval. The pocket 3a has a size slightly larger than that of the workpiece W so that the posture of the workpiece W inserted therein does not collapse.
[0029]
Reference numeral 4 denotes a first fixed table that is erected on the back surface of the first rotary table 3 so as to be perpendicular to the arrangement surface. As shown in FIG. 4, the first fixed table 4 is successively moved in an arc shape so that each moved pocket 3 a is positioned when the first rotary table 3 is rotated by a predetermined angle at the end surface. The components described in (1) are provided.
[0030]
On the end surface of the first fixed table 4, a suction opening 4 </ b> A for sucking the workpiece W is provided at a horizontal position with respect to the arrangement surface facing the discharge portion 2 b of the first feeder 2. The suction opening 4A is designed to be smaller than the workpiece W, and the suction device V1 (FIG. 2) is connected to the surface of the first fixed table 4 opposite to the side on which the first rotary table 3 is located. .
[0031]
An imaging opening 4B for imaging the front surface of the work W is provided at a position adjacent to the position of the suction opening 4A. A colorless and transparent glass 4Ba is placed on the imaging opening 4B on the first turntable 3 side. Further, a camera C4 described later is provided on the back surface side of the first fixed table at the position where the imaging opening 4B is provided.
[0032]
From the position of the suction opening 4A, the position where the first rotary table 3 is rotated by 180 ° penetrates the front and back surfaces, and in this embodiment, it is determined to be a non-defective product after visual inspection of the upper surface, left and right surfaces, and front surface of the workpiece W. A non-defective product delivery opening 4C is provided for delivering the workpiece W to a second rotary table 7 and a second fixed table 8 described later. A second feeder 6 described later is provided on the back surface of the first fixed table 4 in the non-defective product delivery opening 4C.
[0033]
In the present embodiment, when the first rotary table 3 is rotated by a predetermined interval from the position of the non-defective product delivery opening 4C, in the present embodiment, the dimensions and appearance of each of the top, left, and front surfaces of the workpiece W are inspected. Are provided with defective product delivery openings 4D to 4F for sorting out and sending out the workpiece W determined to be a defective product for each of the inspected surfaces. The defective product delivery openings 4 </ b> D to 4 </ b> F have a defective product storage unit 4 a connected to the back surface of the first fixed table 4 at this position.
[0034]
A photoelectric sensor 5 that detects whether or not the workpiece W remains in the pocket 3a of the first turntable 3 is located at a position adjacent to the rotation direction of the first turntable 3 from the position of the defective product delivery opening 4F. The photoelectric sensor 5 is embedded, for example, when the workpiece W remains in the pocket 3a, the light irradiated by the workpiece W is reflected and detected to that effect.
[0035]
6 is connected to the non-defective product delivery opening of the first fixed table 4 on the back side, and is separated from the non-defective product through the first rotary table 3 and the first fixed table 4 in the appearance inspection of the upper surface, the left and right surfaces, and the front surface of the workpiece W. It is the 2nd feeder which conveys a thing while aligning. The second feeder 6 has the same structure as that of the first feeder 2, and is provided with a transport path 6a and a discharge portion 6b at the tip thereof.
[0036]
The second feeder 6 has a camera C5 that images the lower surface (upper surface in this case) of the work W at a position above the discharge unit 6b, and the second rotary table 7 at the downstream side in the transport direction of the work W of the discharge unit 6b. Each camera C6 is provided for imaging the rear surface of the workpiece W in the pocket 7a.
[0037]
7 is provided in the discharge part 6b of the second feeder 6 so as to be separated by a length corresponding to one workpiece W and is erected in a vertical state with respect to the arrangement surface, and can be rotated by the motor M2, and the front and back surfaces are This is a circular second rotary table in which a plurality of penetrating pockets 7a are formed in a circular arc shape at a predetermined interval. The structure of the second turntable 7 is the same as that of the first turntable 3 as shown in FIG.
[0038]
Reference numeral 8 denotes a second fixed table that is erected on the back surface of the second rotary table 7 so as to be perpendicular to the arrangement surface. As shown in FIG. 5, the second fixed table 8 is successively moved in an arc shape so that each of the moved pockets 7a is positioned when the second rotary table 7 is rotated by a predetermined angle on the end surface thereof. The components described in (1) are provided.
[0039]
On the end surface of the second fixed table 8, a suction opening 8 </ b> A for sucking the workpiece W is provided at a position facing the discharge portion 6 b of the second feeder 6 and at a horizontal position with respect to the arrangement surface. The suction opening 8A is designed to be smaller than the workpiece W, and the suction device V2 (FIG. 2) is connected to the surface of the second fixed table 8 opposite to the side on which the second rotary table 7 is located. .
[0040]
From the position of the suction opening 8A, for example, the position where the second rotary table 7 is rotated by 180 ° penetrates the front and back surfaces, and in this embodiment, after the appearance inspection of the lower surface (imaging position is the upper surface) and the rear surface of the workpiece W. A non-defective product sending opening 8 </ b> C is provided for sending the work W determined to be non-defective to the next process.
[0041]
In the present embodiment, at the position where the second turntable 7 is rotated by a predetermined interval from the position of the non-defective product delivery opening 8C, the lower surface of the workpiece W (imaging position is the upper surface) and the rear surface are respectively inspected. Defective product delivery openings 8D and 8E are provided for sorting out and sending workpieces W whose dimensions and appearance are judged as defective products for each of the inspected surfaces. The defective product delivery openings 8 </ b> D and 8 </ b> E are connected to the defective product storage portion 8 a on the back surface of the second fixed table 8 at this position.
[0042]
A photoelectric sensor 9 that detects whether or not the workpiece W remains in the pocket 7a of the second turntable 7 is located at a position adjacent to the rotation direction of the second turntable 7 from the position of the defective product delivery opening 8E. Buried.
[0043]
Next, operation | movement of the inspection apparatus 1 of the said structure is demonstrated.
In the first feeder 2, the workpieces W are sequentially moved along the conveyance path 2a and are conveyed to the discharge unit 2b. The suction device V1 is always in the suction state, and when the first rotary table 3 rotates and the suction opening 4A and the pocket 3a are in communication with each other, the suction force of the suction device V1 is reduced between the suction opening 4A and the rotary table 3. The workpiece W located in the discharge portion 2b reaches the workpiece W through the pocket 3a and is sucked.
[0044]
Therefore, the inspection apparatus 1 according to the present invention does not suck the work W when the pocket 3a is not positioned on the suction opening 4A when the first turntable 3 is rotated. No mechanism is required.
[0045]
When the workpiece W moves from the first feeder 2 to the pocket 3a, the upper and left and right surfaces of the workpiece W are imaged by the cameras C1 to C3, and this imaging data is sent to the determination unit via an image processing unit (not shown). .
[0046]
The determination unit stores in which pocket 3a the workpiece W that has been imaged is stored. The imaging data of the upper surface and the left and right surfaces of the workpiece W thus stored is followed by the imaging data of the front surface of the workpiece W that is performed subsequently. Are sequentially added and stored.
[0047]
The workpiece W stored in the pocket 3a is conveyed to the position of the imaging opening 4B where the camera C4 is arranged by the rotation of the first rotary table 3, where the front surface of the workpiece W is imaged and the same as above. The imaging data is sent to the determination unit via the image processing unit.
[0048]
While the workpiece W has finished the appearance inspection and is further rotated, the determination unit determines the appearance inspection results of the upper surface, the left and right surfaces, and the front surface of the workpiece W existing in the pocket, and the result is a control (not shown). Sent to the department. When the determination result of the determination unit is a non-defective product, the control unit sends the workpiece W to the second feeder 6 through the non-defective product delivery opening 4C.
[0049]
On the other hand, when the determination result of the determination unit is a defective appearance, the control unit, for example, from the defective product delivery opening 4D when there is a defect on the upper surface, from the defective product delivery opening 4E when there is a defect on the left and right surfaces, If there is a defect, the defective workpiece W is sent out from the defective product delivery opening 4F and stored in the defective product storage section 4a.
[0050]
Thereafter, whether or not the workpiece W remains in the pocket 3a of the first rotary table 3 is confirmed by the photoelectric sensor 5, and the processing is sequentially continued.
[0051]
Now, the non-defective work W sent out from the non-defective output opening 4C of the first fixed table 4 is inverted 180 ° from the state positioned at the suction opening 4A, that is, picked up by the discharge portion 2b of the first feeder 2. The upper surface becomes the lower surface when being sent out from the non-defective product delivery opening 4C.
[0052]
Therefore, the upper surface of the workpiece W conveyed through the second feeder 6 is conveyed with the lower surface that has not yet undergone visual inspection as the upper surface, and is imaged by the camera C5 at the discharge portion 6b of the second feeder 6, and the workpiece The appearance of the lower surface of W is inspected.
[0053]
Subsequently, the work W sucked into the pocket 7a of the second turntable 7 from the second feeder 6 was immediately inspected for the rear surface by the camera C6, and finally the appearance inspection of all six surfaces of the work W was completed. It becomes.
[0054]
As a result of the appearance inspection, if there is no abnormality in the appearance of all six surfaces of the stored workpiece W, the workpiece W is conveyed to the next process from the non-defective product delivery opening 8C. On the other hand, for example, when there is a defect on the lower surface of the workpiece W, the defective workpiece W is sent out from the defective product delivery opening 8D, and when there is a defect on the rear surface, the defective workpiece W is sent out from the defective product delivery opening 8E. Store.
[0055]
Thereafter, whether or not the workpiece W remains in the pocket 7a of the second turntable 7 is confirmed by the photoelectric sensor 9, and the processing is sequentially continued.
[0056]
Thus, in the inspection apparatus 1 of the present invention, the first and second rotary tables 3 and 7 and the first and second fixed tables 8 are erected vertically to the arrangement surface, and the work W is rotated in the first and second rotations. Since the pockets 3a and 7a provided in the arc shape on the end surfaces of the tables 3 and 7 are accommodated, the conveying speed of the first and second feeders 2 and 6 can be increased.
[0057]
Furthermore, the inspection apparatus 1 of the present invention further increases the rotation speed of the first and second rotary tables 3 and 7 by separating the appearance inspection before and after the workpiece W from the separation determination position of the non-defective product and the defective product, for example. Even if it is changed, the determination time can be secured.
[0058]
Furthermore, in the inspection apparatus 1 of the present invention, the size of the pockets 3a and 7a of the first and second rotary tables 3 and 7 is slightly larger than the size of the workpiece W, so that the workpiece W is placed in the pockets 3a and 7a. In addition, the non-defective product delivery opening 4C of the first fixed table 4 is positioned at a position where the first rotary table 3 is rotated 180 ° from the suction opening 4A. Therefore, the appearance inspection can be reliably performed on all the six surfaces of the workpiece W.
[0059]
Furthermore, since the defective product delivery openings 4D to 4F, 8D, and 8E are sent out for every defect in the appearance inspection, it is easy to check the defective products later, and the pockets of the first and second rotary tables 3 and 7 are used. Since the photoelectric sensors 5 and 9 for confirming whether or not the workpiece W remains on the 3a and 7a are provided, a stable operation can be realized without causing a processing error.
[0060]
Further, the inspection apparatus 1 of the present invention may appropriately set the number of pockets 3a, 7a and the intervals between the suction openings 4A, 8A, the imaging opening 4B, and the defective product delivery openings 4D-4F, 8D, 8E, The defective product delivery openings 4D to 4F, 8D, and 8E may be positioned upstream of the non-defective product delivery openings 4C and 8C in the rotation direction of the first and second rotary tables 4 and 8.
[0061]
In the above-described embodiment, an aspect in which claims 2 and 3 are added to claim 1 of the present invention is shown. However, an aspect in which only claim 1 is added, an aspect in which claim 2 is added to claim 1, and claim 1 Even with the aspect added with claim 3, the appearance inspection can be performed efficiently and reliably.
[0062]
Next, an embodiment in which claim 4 is added to the embodiment in which claims 2 and 3 are added to claim 1 of the present invention will be described. That is, in this embodiment, as shown in FIGS. 5 and 6, in the above-described inspection apparatus 1, the tip portions of the first and second feeders 2 and 6 are provided on the first and second fixed tables 4 and 8, respectively. The suction openings 4A and 8A of the first and second fixed tables 4 and 8 through the pockets 3a and 7a of the first and second rotary tables 3 and 7, respectively, facing the (discharge portions 2b and 6b); A nozzle 10 in which the lower half of the cylindrical cross section is cut out is provided in communication.
[0063]
Since the lower half of the cross section of the nozzle 10 is cut away, the workpiece W is sucked from the two directions of the portion A and the tip end portion B of the lower half of the cross section of the nozzle 10 as shown in FIG. As a result, the workpiece W to be sucked is supported by the sucked air on the two surfaces, the surface facing the nozzle 10 and the lower surface, and the lower surface of the minute object moving in the air is supported by the sucked air. By using this, the tip of the workpiece W in the suction direction is stably and horizontally sucked without being tilted downward (forward tilted state).
[0064]
Therefore, by adding this nozzle 10 to the inspection apparatus 1 in the above embodiment, the aerial posture of the workpiece W is stabilized, and the camera C1 to C6 is stabilized without being shaken. Compared to a state where 10 is not provided, erroneous determination is suppressed and inspection accuracy is improved.
[0065]
【The invention's effect】
As described above, the minute object inspection apparatus of the present invention performs an appearance inspection on a predetermined surface of a minute object on the first rotary table and the first fixed table, and if there is no abnormality as a result of the appearance inspection, the minute object inspection apparatus The object is reversed 180 ° and conveyed to the second rotary table and the second fixed table by the second feeder, and the appearance inspection is performed on the remaining surface by the second rotary table and the second fixed table by the second feeder. The visual inspection of all six sides can be performed reliably.
[0066]
Further, the present invention, in the above configuration, in the first and second fixed tables, at a position adjacent to the non-defective product delivery opening or the non-defective product delivery opening corresponding to the most downstream position in the rotation direction of the first and second rotary tables. Since the photoelectric sensor is embedded, it is possible to grasp whether the separated minute objects are properly sorted into non-defective products or defective products, and the unidentified minute objects remaining in the pockets of the first and second rotary tables Can be found.
[0067]
Further, according to the present invention, in the above-described configuration, a plurality of defective product delivery openings are formed, and the appearance inspection of a minute object is performed, and the defective product delivery openings are sent out differently depending on which surface is abnormal. It is possible to grasp which surface of the minute object sent out to the non-defective product storage unit is abnormal without sorting later.
[0068]
Further, in the above-described configuration, the present invention is configured such that each of the first and second fixed tables is opposed to the distal end portions of the first and second feeders, and the respective pockets of the first and second rotary tables are interposed. Since the nozzles in which the lower half of the cylindrical cross section is cut off are provided in communication with the respective suction openings of the first and second fixed tables, a minute object is sucked from the front end direction and the lower surface in the suction direction. The attitude of the minute object in the air is stable, and the image picked up by the camera is also stable. Therefore, erroneous discrimination is suppressed and the inspection accuracy is improved.
[Brief description of the drawings]
FIG. 1 is a side view showing a schematic configuration of a minute object inspection apparatus of the present invention.
FIG. 2 is a top view showing a schematic configuration of a minute object inspection apparatus of the present invention.
FIG. 3 is a diagram showing first and second rotary tables of the minute object inspection apparatus of the present invention.
FIG. 4 is a view showing a first fixed table in the minute object inspection apparatus of the present invention.
FIG. 5 is a diagram showing a second fixed table in the minute object inspection apparatus of the present invention.
6A and 6B show a changed portion in the micro object inspection apparatus of the present invention to which a nozzle is added, in which FIG.
FIG. 7 shows only a nozzle portion in the minute object inspection apparatus of the present invention to which a nozzle is added, (a) is a perspective view showing a state in which a minute object is sucked by the nozzle, and (b) is a side view of (a). FIG.
[Explanation of symbols]
1 (micro object) inspection device
2 First feeder
2a Discharge part
3 First rotary table
3a pocket
4 First fixed table
4A Suction opening
4C non-defective delivery opening
4D defective product delivery opening
4E Defective product delivery opening
4F Defective product delivery opening
5 Photoelectric sensor
6 Second feeder
7 Second turntable
7a pocket
8 Second fixed table
8A Suction opening
8C quality product opening
8D defective product delivery opening
8E Defective product delivery opening
9 Photoelectric sensor
10 nozzles
C1-C6 camera

Claims (4)

A micro object inspection apparatus for visually inspecting micro objects and classifying them into non-defective products and defective products, and a first feeder that conveys micro objects, and a tip provided at a distance from the tip of the first feeder and rotating. A first rotary table having a plurality of pockets penetrating the front and back surfaces formed in a circular arc shape at intervals, and a first feeder provided on the back surface of the first rotary table and sequentially in a circular arc shape. A suction device that is provided in a horizontal position and that faces the tip of the suction hole is connected to the back side of the suction device, and is provided through the front and back surfaces at a position rotated 180 ° from the suction opening. A non-defective product delivery opening for delivering a separated fine product, and a defective product delivery aperture provided at any position before and after the rotational direction with respect to the non-defective product delivery opening, for delivering the separated fine product. A fixed table, a second feeder that is connected to the non-defective product delivery opening of the first fixed table on the back side and conveys a minute object while being aligned, and a distal end portion of the second feeder is provided at a distance and rotated. A second rotary table having a plurality of pockets penetrating the front and back surfaces formed in a circular arc shape at intervals, and a second feeder provided on the back surface of the second rotary table and sequentially in a circular arc shape. A suction device that is disposed in a horizontal position and that faces the tip of the suction hole is connected to the back side of the suction device, and is provided through the front and back surfaces at a position rotated from the suction opening. The non-defective product sending opening for sending the non-defective fine object, and the defective product sending opening for sending the sorted non-defective fine object is provided at any position before and after the rotational direction with respect to the non-defective product sending opening. And an imaging opening formed downstream from the suction opening of the first fixed table in the direction of rotation of the rotary table, and the imaging opening and the first rotary table of the first feeder. And a minute object in which a camera is disposed at a position at which imaging can be performed immediately before the second rotary table of the second feeder and in the pocket on the downstream side of the suction opening of the second rotary table. Inspection device. In the first and second fixed tables, a photoelectric sensor is embedded at a position adjacent to a non-defective product sending opening or a defective product sending opening corresponding to the most downstream position in the rotation direction of the first and second rotating tables. The micro object inspection apparatus according to claim 1. 3. The micro object inspection apparatus according to claim 1, wherein a plurality of defective product delivery openings are formed, and the defective product delivery openings are sorted and sent out for each abnormality of the micro object. Each of the first and second fixed tables is opposed to the front ends of the first and second feeders, and each of the first and second fixed tables is inserted through the pockets of the first and second rotary tables. The minute object inspection apparatus according to any one of claims 1 to 3, further comprising a nozzle in communication with the suction opening and having a cylindrical lower half cut off.

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