1276592 (1) 玖、發明說明 【發明所屬之技術領域] 本發明係有關多面體檢查用送料器及多面體檢查裝置 ’尤其’有關適用於檢查成爲電子零件的晶片等之檢查對 象物的面精度（輪廓、側面不規則性）之多面體檢查用送 料器及多面體檢查裝置。 【先前技術】 先前’當在檢查作爲檢查對象物之成晶片狀電子零件 的完工面精度時，乃使用放大透鏡且藉由人工來檢查各面 。然而，如此之檢查時，乃形成拿取一個個晶片而藉由目 視來檢查，使得會看漏細微之傷痕或變形等的瑕疵之情事 爲多，其結果，成爲會混進不良品於製成品之原因。而且 檢查人員會伴隨著疲勞而加重工作負擔，又也具有由熟練 程度而在檢查精度上產生很大偏差的不適宜性。 爲此’本發明人揭不了在朝預定方向移動前述檢查對 象物之過程’適合於可自動地檢查該檢查對象物的完工面 精度用的多面體檢查用送料器（參照日本國專利特許申請 案200 1-127248號）。該送料器係構成爲包括有具備可令該 檢查對象物朝預定方向移動之溝的通道形成構件。該通道 形成構件之溝乃包括有沿著檢查對象物移動方向會變化左 右的傾斜角度的旋轉送料部，以令成多面體之檢查對象物 形成沿著螺旋狀軌跡之形態可旋轉同時可移動，而藉由檢 查完工面用攝像機來攝像，就可實施一定精度的檢查。 -4 - (2) 1276592 然而，前述已揭示之多面體檢查用送料器，雖可從預 定的供應手段成一個個地供應檢查對象物，但未形成爲充 分地保證可保持沿著移動方向的檢查對象物互相之間隔距 離的可靠性。因而當例如位於移動方向前方的檢查對象物 後端面接觸有其次之檢查對象物前端的狀態而成爲二個以 上之檢查對象物成爲連續移動時，就檢查用攝像機並無法 辨識第2個以後的檢查對象物位置，以致會產生檢查遺漏 ，使得會發生並無法確實地排出不良品情事之不適合性。 【發明內容】 本發明係著眼於該不適合性而發明者，其目的係擬供 一種可確實地移動一個個檢查對象物，且可確保檢查精度 可靠性之多面體檢查用送料器及多面體檢查裝置者。 又本發明之另一目的，係擬提供一種在於移動多面體 時的姿勢非正確時，能排除該多面體來迴避產生錯誤判定之 多面體檢查用送料器及多面體檢查裝置者。 爲了達成前述目的，有關本發明之多面體檢查用送料 器係包括有：具備形成檢查對象物通道用之溝的通道形成 構件；及配設成可沿著前述溝移動，同時令前述檢查對象物 檢查面露出於前述溝外側之狀態來卡合於該檢查對象物’ 且搬運於前述溝內的移動手段。 前述通道形成構件乃包括有，在移動檢查對象物之過 程時，能旋轉該檢查對象物成預定角度的旋轉送料部。 前述移動手段乃採用所謂具備有容許前述檢查對象物 -5- (3) 1276592 之前述旋轉的狀態下來一個個予以卡合之卡合區域於每一 所預定的間隔之結構。倘若構成如此時’將使成對應於卡合 區域的相互間隔來卡合於各卡合區域之檢查對象物會成爲 互相具有一定間隔的狀態，使得可確實地防止複數個之檢 查對象物會形成連續狀之虞，而成爲可確保個個檢查對象 物的檢查精度之可靠性。 於本發明，前述移動手段係由捲繞於一對帶輪間之（ 皮）帶所構成，且採用所謂配設收容前述檢查對象物用之 衝孔部於該皮帶面內來形成前述卡合區域的結構。而藉由 該如此之結構來使檢查對象物形成可追隨溝的內面形狀平 滑地旋轉之外，不會隱藏檢查對象物的檢查面之狀態下來 沿著溝移動該檢查對象物。而且藉由攝像機來進行檢查時 ，可防止由圖像所攝入之背景，亦即由溝所引起的照明之 亂反射，因此，可消除由錯誤檢查而排出良品。 前述皮帶理想爲配設成令該皮帶面成朝垂直方向狀態 來通過前述通道形成構件的溝內。構成如此時，當檢查對 象物爲長方體等時’可令檢查面成對稱地露出於皮帶之各 面側’使得能具有效率性地來實施檢查。 又本發明係包括有具備形成檢查對象物通道用之溝的 通道形成構件，及配設成可沿著前述溝移動，同時令前述 檢查對象物檢查面露出於前述溝外側之狀態來卡合於該檢 查對象物用的移動手段之多面體檢查裝置， 包括有在前述通道形成構件上流側成連合配設於前述 移動手段之檢查對象物供應手段，而該供應手段乃採用所 -6 - (4) 1276592 謂具備複數條的供應道於前述移動手段之移動方向的複數 處之結構。構成如此時，可令無法供應檢查對象物的狀態 成爲可儘量地減低，使得可抑制降低檢查效率。 再者，理想爲配設在於卡合於前述移動手段之檢查對 象物形成不正確之卡合姿勢時，可去除該檢查對象物的排 除手段。由而可經常形成僅送出保持成一定姿勢之檢查對 象物於通道形成構件，因而從這一點言，也可抑制降低檢 杳效率。 又理想爲採取所謂具備有前述檢查對象物當到達預定 的檢查位置時，可保持前述檢查面於一定位置用之姿勢維 持手段。而藉由如此之結構來迴避檢查面會產生如搖榥（ 不穩定）之狀態，使能能以高精度來實施檢查。 本發明的旋轉送料部係由剖面形狀爲具有槪略V字型 、槪略U字型及在該等兩型間互相逐漸產生變化來形成爲 成一連串連繫的中間形狀之溝所形成。又作爲檢查對象物 ’長方體或立方體雖會成爲理想的對象物，但其他之立方體 也對於可作爲對象物乙事，並不會產生妨礙。 再者，在本說明書之表示方向或位置的用話，除非有 特別的明述，乃採用圖1作爲基準。 【實施方式】 以下，將說明有關本發明之實施形態。 圖1係顯示有關本實施形態的多面體檢查裝置之正面圖 ’圖2則顯示其平面圖。於該等圖中，多面體檢查裝置1〇係 -7- (5) 1276592 構成爲具備有：配置於框架下上部的供應手段丨丨·，連合配設 方< β供應手1 1之移動手段1 2;與該移動手段丨2互相作用來 移動fe查對象物’在本實施形態爲具備略爲長方體形狀之 陶瓷片狀電谷器（以下簡稱爲切片）用的多面體檢查用送 料器13;沿著該多面體檢查用送料器13所配置之構成爲檢查 手段的第1至第4之攝像機μ、15、ι6、17;及響應於檢查結 果，亦即響應於良品或不良品而區別切片w來回收用的回收 手段1 8。 前述供應手段11係構成爲具備有收容切片W的漏斗2〇 ’及連接於該漏斗20之上端開放部而使切片W滑落於供應道 形成部件2 1側的滑槽器2 2。漏斗2 0系碗形送料器，內側係 具有隨著朝上方之方向而成爲靠外側的螺旋通道2 〇 A，並 賦予藉由未圖示之振動器所產生的振動於收容在該漏斗2 〇 之多數個切片W，而可令切片w依序從上方排出。 前述供應道形成部件2 1係圖3至圖8所示，使用複數個 構件所形成。亦即，由位於滑槽器2 2正下方之同時，藉由 前述振動器來賦予振動的後部部件24，及在於該後部部件 之相反側，亦即位於前面側的前部部件25，及配設於該等 部件24、25間之中間部件所構成。於後部部件24，位於外 框27內側的上面乃形成爲上流側會成爲上方位置之傾斜面 28，且藉由所賦予該後部部件24的振動來使切片W依序跑 上傾斜面28。中間部件26係如圖5所示，作成爲上流側較下 流側形成稍微上方位置之傾斜面29，且在其長軸方向之三 個地方，形成有沿著描畫平穩曲線的軌跡之切片供應道3 1 -8- (6) 1276592 。該等之供應道3 1的一端（後端）係位於後部部件2 4之傾 斜面2 8側，而另一端（前端）則位於前部部件2 5側。而該 中間部件2 6係形成藉由未圖示之振動器來朝與後部部件24 之切片W之移動方向相反側，亦即，從上流側至下流側（ 參照圖4 )移動切片w，而使從前述傾斜面2 8掉落之切片W 掉入供應溝3 1時’該切片W會形成沿著供應溝3〗朝前部部 件2 5側移動。另一方面，未從供應道3丨供予移動手段丨2的 切片W，將從下流側區域轉移至後部部件2 4，而再一次重 複進行跑上後部部件2 4之傾斜面2 8的循環。又如圖7所示， 在前部部件2 5和中間部件2 6之上部之間，形成有略爲V字狀 且連續於支承面3 3、3 4的槽3 5，並收容有構成前述移動手 段之皮帶B槪略下半部區域，而配設成該皮帶B可沿著圖7 中紙面的正交方向行走。1276592 (1) 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓 轮廓, side irregularities) polyhedron inspection feeder and polyhedron inspection device. [Prior Art] In the prior art, when the accuracy of the finished surface of the wafer-shaped electronic component as the object to be inspected was examined, the magnifying lens was used and each surface was inspected manually. However, in such an inspection, it is formed by taking a single wafer and inspecting it by visual inspection, so that there are many cases in which a slight flaw or deformation is observed, and as a result, a defective product is mixed in the finished product. The reason. Moreover, the inspector is burdened with fatigue and has an unfavorable degree of proficiency in the inspection accuracy. For this reason, the present inventors have disclosed that the process of moving the object to be inspected in a predetermined direction is suitable for a polyhedron inspection feeder that can automatically check the accuracy of the surface of the inspection object (refer to Japanese Patent Application No. 200). 1-127248). The feeder is configured to include a channel forming member having a groove for moving the object to be inspected in a predetermined direction. The groove of the channel forming member includes a rotating feed portion that changes the inclination angle of the left and right along the moving direction of the inspection object, so that the object to be examined of the polyhedron is rotatable and movable along the shape of the spiral track. By checking the finished surface and taking a picture with the camera, a certain precision inspection can be performed. -4 - (2) 1276592 However, the above-described disclosed polyhedron inspection feeder can supply the inspection object one by one from a predetermined supply means, but is not formed to sufficiently ensure that the inspection can be maintained along the moving direction. The reliability of the distance between objects. Therefore, for example, when the rear end surface of the inspection object in front of the moving direction is in contact with the second inspection object and the two or more inspection objects are continuously moved, the inspection camera cannot recognize the second and subsequent inspections. The position of the object is such that there is a check for omission, which makes it impossible to reliably discharge the unsuitability of the defective product. SUMMARY OF THE INVENTION The present invention has been made in view of the incompatibility of the present invention, and an object of the present invention is to provide a multi-body inspection feeder and a polyhedron inspection device which can reliably move one object to be inspected and ensure the reliability of inspection accuracy. . Still another object of the present invention is to provide a polyhedron inspection feeder and a polyhedron inspection apparatus which can eliminate the polyhedron from erroneously determining when the posture of the polyhedron is not correct. In order to achieve the above object, the polyhedron inspection feeder according to the present invention includes: a passage forming member having a groove for forming an inspection object passage; and a movement member movable along the groove and allowing the inspection object to be inspected A moving means for engaging the object to be inspected and being conveyed in the groove in a state where the surface is exposed to the outside of the groove. The passage forming member includes a rotary feed portion that can rotate the inspection object at a predetermined angle when the inspection object is moved. In the above-described moving means, an engagement region in which the above-described rotation of the inspection target object -5-(3) 1276592 is allowed to be engaged is provided at each predetermined interval. In this case, the inspection objects that are engaged with the respective engagement regions in accordance with the mutual spacing of the engagement regions are in a state of being spaced apart from each other, so that it is possible to reliably prevent a plurality of inspection objects from being formed. In the case of a continuous shape, it is reliable in ensuring the inspection accuracy of each object to be inspected. In the present invention, the moving means is formed by a (skin) belt wound between a pair of pulleys, and the punching portion for accommodating the inspection object is placed in the belt surface to form the engagement. The structure of the area. By the above-described configuration, the inspection object is smoothly rotated in the shape of the inner surface of the following groove, and the inspection object is moved along the groove without hiding the inspection surface of the inspection object. Further, when the inspection is performed by the camera, it is possible to prevent the background of the image from being ingested, that is, the disordered reflection of the illumination caused by the groove, so that the good product can be eliminated by the error check. Preferably, the belt is disposed such that the belt surface is in a vertical direction to pass through the groove forming member. In this case, when the object to be examined is a rectangular parallelepiped or the like, the inspection surface can be exposed symmetrically on the respective side faces of the belt so that the inspection can be performed efficiently. Further, the present invention includes a channel forming member having a groove for forming an inspection object passage, and is disposed to be movable along the groove, and the inspection object inspection surface is exposed to the outside of the groove to be engaged with The polyhedron inspection apparatus for the moving means for the inspection object includes an inspection object supply means that is disposed on the flow side of the passage forming member and is disposed in the moving means, and the supply means adopts the -6 - (4) 1276592 is a structure in which a plurality of supply channels are provided at a plurality of positions in which the moving means moves. According to this configuration, the state in which the object to be inspected cannot be supplied can be reduced as much as possible, so that the inspection efficiency can be suppressed from being lowered. Further, it is preferable that the means for removing the object to be inspected can be removed when the inspection object that is engaged with the moving means is formed in an incorrect engagement posture. Therefore, it is possible to form the inspection object which is only held and held in a certain posture to the passage forming member, and thus it is possible to suppress the reduction of the inspection efficiency. Further, it is preferable to adopt a posture maintaining means for holding the inspection surface at a predetermined position when the inspection object is placed at a predetermined inspection position. By avoiding the inspection surface by such a structure, a state such as shaking (unstable) is generated, and the inspection can be performed with high precision. The rotary feed portion of the present invention is formed by a groove having a cross-sectional shape having a V-shaped shape, a U-shaped shape, and gradually changing between the two types to form a series of intermediate-shaped grooves. It is also an object to be inspected. 'The cuboid or the cube is an ideal object, but other cubes do not interfere with the object that can be used as an object. In addition, the words indicating the orientation or position in the present specification are based on Fig. 1 unless otherwise specified. [Embodiment] Hereinafter, embodiments of the present invention will be described. Fig. 1 is a front view showing a polyhedral inspection apparatus according to the present embodiment. Fig. 2 is a plan view thereof. In the above figures, the polyhedron inspection apparatus 1-7-(5) 1276592 is configured to include a supply means disposed on the lower portion of the frame, and a moving means for the collocation arrangement <β supply hand 1 1 1 2; interacting with the moving means 丨 2 to move the object to be inspected 'in the present embodiment, a polyhedron inspection feeder 13 for a ceramic chip-shaped electric barn (hereinafter simply referred to as a slice) having a substantially rectangular parallelepiped shape; The first to fourth cameras μ, 15, ι6, and 17 which are disposed along the polyhedron inspection feeder 13 and configured as inspection means; and in response to the inspection result, that is, the slice is distinguished in response to a good or defective product. Recycling means for recycling. The supply means 11 is configured to include a funnel 2'' that houses the slice W, and a chute 2 that is connected to the upper end of the funnel 20 and slides the slice W on the side of the supply path forming member 21. The funnel 20 is a bowl-shaped feeder, and the inner side has a spiral passage 2 〇A that is outward in the upward direction, and is provided in the funnel 2 by vibration generated by a vibrator (not shown). The majority of the slices are W, and the slices w can be sequentially discharged from above. The above-described supply path forming member 2 1 is formed using a plurality of members as shown in Figs. 3 to 8 . That is, the rear member 24 that imparts vibration by the vibrator while being located directly below the chute 22, and the front member 25 on the opposite side of the rear member, that is, on the front side, It is composed of intermediate members provided between the members 24 and 25. In the rear member 24, the upper surface on the inner side of the outer frame 27 is formed as an inclined surface 28 which becomes an upper position on the upstream side, and the slice W is sequentially moved up to the inclined surface 28 by the vibration imparted to the rear member 24. As shown in FIG. 5, the intermediate member 26 is formed as an inclined surface 29 which is formed at a slightly upper position on the upstream side from the downstream side, and a slice supply path along the trajectory in which the smooth curve is drawn is formed in three places in the long axis direction. 3 1 -8- (6) 1276592. One end (rear end) of the supply passages 31 is located on the side of the inclined surface 28 of the rear member 24, and the other end (front end) is located on the side of the front member 25. The intermediate member 26 is formed by a vibrator (not shown) on the side opposite to the moving direction of the slice W of the rear member 24, that is, the slice w is moved from the upstream side to the downstream side (see FIG. 4). When the slice W dropped from the inclined surface 28 is dropped into the supply groove 31, the slice W is formed to move toward the front member 25 side along the supply groove 3. On the other hand, the slice W which is not supplied from the supply path 3 to the moving means 2 is transferred from the downstream side area to the rear part 24, and the cycle of the inclined surface 28 of the rear part 24 is repeated again. . Further, as shown in Fig. 7, between the front member 25 and the upper portion of the intermediate member 26, a groove 35 which is slightly V-shaped and continuous with the support faces 3 3 and 34 is formed, and accommodates the aforementioned configuration. The belt B of the moving means is slightly in the lower half area, and is arranged such that the belt B can travel in the orthogonal direction of the paper surface in FIG.
前述皮帶B係如圖1所示，捲繞於連結在配置於下流端 側上部之馬達Μ的輸出軸而會在略爲水平面內旋轉之驅動帶 輪3 6，和位於上流端側而與前述驅動帶輪能在略爲同一平 面內旋轉的從動帶輪37之間。因此，皮帶Β能使其面形成沿 著略爲垂直面內的姿勢來移動。而在該皮帶Β面內乃如圖4 至圖6所示，形成有相等大小且隔著相等間隔之衝孔3 8成無 端狀。衝孔38係令沿著皮帶Β之移動方向的長度設定成稍微 長於切片W之長尺寸側的尺寸，同時設定成二個切片W以橫 向長之狀態無法同時進入於一個衝孔38的長度。又衝孔38 之上下方向寬度係成爲圖7所示的狀態，設定成可容許切片 W旋轉之寬度。因此，皮帶Β在通過槽3 5的期間，切片W (7) 1276592 會滑動三個供應道3 1之任何其中之一來進入於衝孔3 8內。 該時，切片W的長尺寸側對於衝孔3 8成爲沿著左右方向之 姿勢（圖7所示的姿勢）作爲正確之姿勢’而使該切片W 上部側之二個面形成支承於形成在槽3 5上端側的支承面3 3 、3 4來朝下流側送出。另一方面，如圖8所示，當切片W 之其長尺寸側朝向成爲要穿過衝孔3 8的姿勢時，就視爲不 正確之姿勢，並爲了去除該切片W，配設有排除手段3 9於 前部部件2 5上。 前述排除手段39係構成爲包括有藉由未圖示的空氣泵 來經常吹出（噴出）空氣之噴嘴39A。噴嘴39A係形成爲 可從上方吹空氣於從前述衝孔3 8突出很大的切片W之部分 ，使得切片W可藉由空氣壓而會從衝孔38掉落於中間部件 26側。再者，在中間部件26側予以形成突出部26A (參照 圖5 )，且形成有能使前述掉落成爲容易用之缺口部於該 突出部26A的前述噴嘴39A正下方處。 前述多面體檢查用送料器1 3係連結於前述供應手段1 1 下流側。該多面體檢查用送料器1 3係如圖1及圖2所示，構 成爲具備有：上流側通道形成構件40;連接於該上流側通 道形成構件40下流側之旋轉送料部41 ;及連接於該旋轉送 料部4 1下流側的下流側通道形成構件42。上流側通道形成 構件40和下流側通道形成構件42乃配設成相同形狀。爲此 ，對於上流側通道形成構件來說明時，形成爲如圖9及圖 1 〇所示，上流側通道形成構件4 0係構成爲組合一對之部件 4 5、4 5。亦即，各部件4 5係由底座部件4 6和從該底座部件 (8) 1276592 4 6 —端側朝上方豎立的豎部部件所形成，而使橫向剖面形 狀配設成近似於略爲L字形狀。並在豎立部件47上端部，形 成有外側傾斜面47A及內側傾斜面47B。因此，上流側通道 形成構件40係個別令二個部件45、45的前述豎立部件47、 47配設成背面對背面時，可作成爲略成爲V字狀之溝48於上 端側，由而可形成沿著溝48的切片W之通道。該時，各部件 45、4 5係配置爲能形成稍微大於前述皮帶B厚度尺寸之間隙 S，而容許移動皮帶B於該間隙S內。又在上流側及下流側的 通道40、42，對於前述豎立部件47形成有開通於前述衝孔 3 8下部區域內之構成姿勢維持手段用的真空孔49於對應於第 1至第4的攝像機14〜17之透鏡部的區域，由而藉由真空孔49 來減壓溝48內，就可成爲不會妨礙到切片W移動之程度下吸 著該切片W，使得可保持檢查面位置成爲一定。 前述旋轉送料部4 1係如圖1 〇至圖1 2所示，構成爲具備 有在於卡合切片W於皮帶B之衝孔38來送出的過程，能旋轉 該切片W之溝50。而該旋轉送料部41係溝50的形狀，只有與 前述上流側通道形成構件40和下流側通道形成構件42之溝 4 8有所不同，至於其他部分則形成相同。因此，對於形成旋 轉送料部4 1之部件，將使用對於上流側通道形成構件40所 附上之相同符號，並省略其說明。 形成前述旋轉送料部4 1的溝5 0用之成相對向的傾斜面 50A、50A係在實質上配設成與先前揭示之日本國特許申請 案200 1 - 1 27248號相同的內側面形狀。因此，在此對於剖面 形狀之詳細說明雖會予以省略，但槪略地說明時，溝5 〇之 1276592 Ο) 橫向剖面形狀乃沿著切片W的移動方向配設成能使略爲V字 型和略爲U字型的內側面形狀成交替地連續，且藉由通向於 略爲V字及略爲U字之內側面的中間內側面配設成平穩的曲 面形狀，而令通過溝50之切片W能沿著螺旋軌跡成平滑地旋 轉且能形成直線行進。於本實施例，旋轉送料部4 1係配設 傾斜面50A、50A成一連串地連繫產生逐漸變化之形態，致 使切片W通過時會從初始位置（參照圖1 2中「0 °」位置） 旋轉槪略1 80度。再者，溝50的內側面形狀，只要可旋轉切 片W時，並不僅限定於圖示之結構例而已。 前述第1至第4的攝像機14、15、16、17乃藉由未圖示之 台座來各支承於前述上述側及下流側的通道形成構件40、 42上。第1及第2之攝像機14、15係如圖1及圖2所示，位於上 流側通道形成構件40上，且配置該等的透鏡部互相對於切 片W檢查面成相對向。亦即，形成爲第1攝像機1 4係檢查 切片W檢查面S 1 (參照圖1 2 )，而第2攝像機1 5則檢查切 片W之檢查面S2。又第3及第4的攝像機16、17係位於下流側 通道形成構件42上，且形成爲會對於旋轉切片W1 80度後進 行檢查。亦即，第3攝像機16之透鏡部朝向於切片\^的檢查 面S3並檢查該檢查面S3，同時第4攝像機17之透鏡部則朝向 於切片W的檢查面S4來檢查該檢查面S4。而該等攝像機 1 4〜1 7，將藉由圖像處理裝置來實施預定之圖像處理檢查’ 而判定是否爲良品。 前述回收手段18係如圖1、圖13及圖14所示，由配設於 上流側通道形成構件40區域內的極爲靠近第2攝像機15之下 (10) 1276592 流側的第1吸入管5 1，和配設於下流側通道形成構件4 2區 域內的極爲靠近第4攝像機17之下流側的第2吸入管52，及 配設於該第2吸入管5 2下流側之回收裝置5 3所構成。第1及 第2的吸入管5 1、5 2係用於回收不良品用者’而第3回收裝 置5 3係構成爲回收良品用者。如圖1 3所示，在對應於第1 及第2之吸入管5 1、5 2的前端開口位置之相反側的部件4 5 ，形成有開通於溝4 8內之送空氣孔5 5 ’而從該送空氣孔5 5 吹空氣以令溝4 8內的切片W吹向於吸入管5 1、5 2側，且藉 由該吸入管51、52來回收被判定爲不良品之切片W於各回 收箱56、57。該時，第1及第2的吸入管51、52係形成時常 保持成會吸引（吸取）之狀態，同時前述送空氣孔5 5係形 成依據判定有不良品時，方進行吹空氣。因此，當未從送 空氣孔5 5吹空氣於切片W的狀態時，切片W會成爲不會被 第1及第2之吸入管51、52的吸引入所吸引，而保持成可移 動於溝4 8內之狀態。 第3回收裝置53係如圖14所示，略位於皮帶B所通過的 線上，且構成爲具備有在該皮帶B下方位置具有開口部 60A之筒狀構件60。並成爲從該筒狀構件60上方吹空氣， 而位於皮帶B之衝孔3 8內的作爲良品之切片w會受到該空 氣的吹力，以致消失藉由下流側通道形成42所支承之狀態 ，而掉落於筒狀構件60內且會被回收管62所回收。再者， 圖14中，符號63表示計數器，且藉由該計數器來依序計數 良品之數量。 接著’說明有關本實施形態的多面體檢查裝置1 0之整 (11) 1276592 體動作。 藉由接通預定的電源來使構成移動手段1 2之（皮）帶 B在圖中朝反時針方向轉，同時從供應手段1 1之漏斗20而 經由滑槽器2 2來供應切片W至後部部件2 4上。該後邰邰件 24上之切片W則會跑上傾斜面且一個一個地掉落於中間部 件2 6的供應溝3 1上。而該時，在供應溝3 1前端側’皮帶B 乃成爲有移動之狀態，以致通過供應溝3 1的切片W會逐一 地進入於孔3 8內並卡合於孔3 8內。至於供應溝3 1係配設有 複數例，在本實施形態爲3列，因此，幾乎不會產生對於 衝孔3 8內漏掉送入切片之情事。 當衝孔3 8內之切片W未成爲正確姿勢時，亦即如圖8 所示切片W形成爲如要橫越衝孔3 8之姿勢進入時’會從排 除手段3 9的噴嘴3 9 A吹空氣於其所突出之區域，使得切片 W會從衝孔3 8脫離掉落於下方。因此，經過排除手段3 9的 位置之後的切片W均會成爲保持著正確姿勢狀態來移動至 連接於下流側的多面體檢查用送料器1 3。 而在多面體檢查用送料器1 3，將會在上流側通道形成 構件4 0區域形成爲如圖1 2所示，露出2個檢查面S 1、S 2表 面於溝4 8上方的狀態，且在該狀態下，令第1及2之攝像機 1 4、1 5進行攝像，並藉由圖像處理裝置來進行所定的檢。 當在此，任何一方之檢查面S 1、S 2被判定爲不良品時，會 藉由前述送空氣孔55吹空氣於溝48內來吹走切片W至溝48 外，並藉由經常成吸引（吸取）狀態的吸入管5 1所吸引而 回收於回收箱5 6。 -14- (12) 1276592 至於在上流側通道形成構件40不會認定爲不良品之切 片W，將會通過旋轉送料部4 1且轉動略爲1 8 0度（參照圖 12)。而成爲露出檢查面S3、S4之狀態下來移動切片w至 下流側通道形成構件40的區域。並在此，藉由第3及第4之 攝像機來進行與在上流側通道形成構件40區域同樣的檢查 ’且同樣地令判定爲不良品之切片W經由吸入管5 1來回收 至回收像5 7，而未被吸入管所吸引的良品切片W，將由計 數計63依序計數後，藉由第3回收裝置53來回收。 因此，依據如此之實施形態，因採用了（皮）帶B來 使切片W—個個移動的結構，以致可完整地排除複數個切 片互相接觸成連接狀態移動的情事，使得可令各切片W之 面精度以良好效率且成高精度來檢查。 再者，於前述實施例乃藉由形成衝孔3 8來卡合切片W 且使之可移動，但也可作成爲（皮）帶B上端側成凹狀的 缺口部。又移動手段1 2，只要能使切片W—個個以一定間 隔來移動則可採用，因此，並不僅限定於（皮）帶而己者 。又供應手段1 1的供應溝3 1，並未限定於3列而己，也可 爲三列以下或3列以上。 如以上所說明，依據依申請專利範圍第1項所記載之多 面體檢查用送料器，乃形成對應於配設在移動手段的卡合 區域之相互的間隔，而使被接受且卡合於各卡合區域之檢 查對象物成爲互相隔著一定間隔的狀態，因而，較如先前 之賦予振動來輸送檢查對象物的結構，可確實地防止複數 個之檢查對象物產生連續之虞，由而可確保個個檢查對象 -15- (13) 1276592 物的檢查精度之可靠性。 又依據申請專利範圍第2項所記載之多面體檢查用送料 器，可令檢查對象物形成爲順著溝的內面形狀平滑地旋轉 之外，不會隱藏檢查對象物的檢查面之狀態來使檢查對象 物沿著溝可移動。 再者，依據申請專利範圍第3項所記載之多面體檢查用 送料器，當檢查對象物爲長方體等時，可令檢查面成對稱 地露出檢查面表面於（皮）帶各面側，使得有效率地來實 施檢查。 又依據依申請專利範圍第4項所記載之多面體檢查裝置 ’可令檢查對象物儘量減低不會供予移動手段的卡合區域 之狀態的情事，使得可抑制降低檢查效率。 又，依據依申請專利範圍第5項所記載之多面體檢查裝 置，僅能令經常保持一定姿勢的檢查對象物輸送至通道形 成構件側，因此，以此一點言，也可抑制降低檢查效率。 再者，依據依申請專利範圍第6項所記載之多面體檢查 裝置，可保持檢查對象物的檢查面成爲一定而可實施高精 度之檢查。 【圖式簡單說明】 圖1係顯示有關實施形態的多面體檢查裝置之整體結構 的槪略正面圖。 圖2係前述多面體檢查裝置之槪略平面圖。 圖3係供應手段的槪略平面圖。 (14) 1276592 圖4係供應手段之主要部分槪略斜視（立體）圖。 圖5係省前部部件的供應手段槪略斜視圖。 圖6係顯示前部部件內面側之槪略斜視圖。 圖7係顯示切片以正確姿勢來供應之狀態的剖面圖。 圖8係顯示切片以不正確姿勢來供應之狀態的剖面圖。 圖9係顯示移動切片於通道形成構件之狀態的剖面圖。 圖1 〇係顯示通道形成構件之旋轉送料部的槪略斜視圖 〇 圖Π係旋轉送料部之分解斜視圖。 圖1 2係在旋轉送料部的切片旋轉動作說明圖。 圖1 3係顯示判定爲不良品之切片回收手段的主要部分 剖面圖。 圖14係顯示判定爲良品之切片回收手段的槪略結構圖 〇 [符號之說明] φ 10 :多面體檢查裝置 11 :供應手段 12 :移動手段 13:多面體檢查用送料器 14 :第1攝像機 15 :第2攝像機 16 :第3攝像機 Π :第4攝像機 -17- (15) (15)1276592 1 8 :回收手段 20 :漏斗 20A :螺旋通道 2 1 :供應道形成部件 22 :滑槽器 24 :後部部件 25 :前部部件 26 :中間部件 26A :突出部 26B :缺口部 27 :外框 2 8 :傾斜面 29 :傾斜面 3 1 :供應溝（供應道） 3 3、3 4 :支承面 35 :槽 3 6 :驅動帶輪 3 7 :從動帶輪 3 8 :衝孔 3 9 :排除手段 3 9 A :噴嘴 40 :上流側通道形成構件 4 1 :旋轉送料部 42 :下流側通道形成構件 -18- (16) (16)1276592 4 5 :部件 4 6 :底座部件 47 :豎立部件 47A :外側傾斜面 4 7 B :內側傾斜面 48 :溝 4 9 :真空孔 50 :溝 5 0 A、5 0 B :傾斜面 5 1 :第1吸入管 5 2 :第2吸入管 5 3 :第3回收裝置 5 5 :送空氣孔 5 6 :回收箱 5 7 :回收箱 6 0 :筒狀構件 60A :開口部 62 :回收箱 63 :計數器 B ：(皮）帶 Μ :馬達 S1〜S4 :切片之檢查面 W :切片 -19-As shown in FIG. 1 , the belt B is wound around a drive pulley 3 6 that is coupled to an output shaft of a motor cymbal disposed on an upper portion of the downstream end side, and is rotated in a slightly horizontal plane, and is located on the upstream end side. The drive pulleys are movable between the driven pulleys 37 that rotate in slightly the same plane. Therefore, the belt loop can move its face to form in a slightly vertical plane. In the belt face, as shown in Figs. 4 to 6, punches 8 8 of equal size and equally spaced are formed in an endless shape. The punching hole 38 is set such that the length in the moving direction of the belt loop is slightly longer than the dimension on the long side of the slice W, and is set so that the two slices W cannot enter the length of one punching hole 38 at the same time in the laterally long state. Further, the width of the punching hole 38 in the vertical direction is set to the state shown in Fig. 7, and is set to a width which allows the rotation of the slice W. Therefore, during the passage of the belt raft through the groove 35, the slice W (7) 1276592 slides any one of the three supply passages 3 1 into the punching hole 38. At this time, the long side of the slice W is formed in the posture of the punched hole 38 in the left-right direction (the posture shown in FIG. 7) as the correct posture ′, and the two faces on the upper side of the slice W are formed and supported. The support faces 3 3 and 34 on the upper end side of the groove 3 5 are sent toward the downstream side. On the other hand, as shown in Fig. 8, when the long side of the slice W is oriented to pass through the punch 38, it is regarded as an incorrect posture, and in order to remove the slice W, it is excluded. Means 39 are on the front part 25. The above-mentioned means for removing 39 is configured to include a nozzle 39A which is constantly blown (discharged) by an air pump (not shown). The nozzle 39A is formed so that air can be blown from above to a portion of the slice W protruding from the punching hole 38, so that the slice W can be dropped from the punching hole 38 to the intermediate member 26 side by air pressure. Further, a protruding portion 26A (see Fig. 5) is formed on the side of the intermediate member 26, and a notch portion which can be easily used for dropping is formed directly below the nozzle 39A of the protruding portion 26A. The polyhedron inspection feeder 13 is coupled to the downstream side of the supply means 1 1 . As shown in FIGS. 1 and 2, the polyhedron inspection feeder 13 is configured to include an upstream side passage forming member 40, a rotary feed portion 41 connected to the downstream side of the upstream side passage forming member 40, and a connection to The downstream side passage forming member 42 on the downstream side of the rotary feed portion 41. The upstream side passage forming member 40 and the downstream side passage forming member 42 are disposed in the same shape. For this reason, in the case of the upstream side passage forming member, as shown in Figs. 9 and 1B, the upstream side passage forming member 40 is configured to combine a pair of members 4 5 and 45. That is, each of the members 45 is formed by the base member 46 and a vertical member that is erected upward from the end of the base member (8) 1276592, and the lateral cross-sectional shape is set to be approximately L. Word shape. Further, at the upper end portion of the upright member 47, an outer inclined surface 47A and an inner inclined surface 47B are formed. Therefore, when the up-flow-side passage forming member 40 is disposed such that the upright members 47 and 47 of the two members 45 and 45 are disposed on the back side and the back side, the groove 48 which is slightly V-shaped can be formed on the upper end side. A channel of the slice W along the groove 48 is formed. At this time, the members 45, 45 are arranged such that a gap S slightly larger than the thickness of the belt B can be formed, and the moving belt B is allowed to move in the gap S. Further, in the channels 40 and 42 on the upstream side and the downstream side, the upright member 47 is formed with a vacuum hole 49 for opening the posture maintaining means in the lower region of the punching hole 38, corresponding to the first to fourth cameras. The region of the lens portion of 14 to 17 is decompressed in the groove 48 by the vacuum hole 49, so that the slice W can be sucked so as not to hinder the movement of the slice W, so that the position of the inspection surface can be kept constant. . As shown in Fig. 1 to Fig. 12, the rotary feed unit 4 1 is configured to be provided with a process of feeding the cut piece W to the punching hole 38 of the belt B, and the groove 50 of the slice W can be rotated. Further, the shape of the groove 50 of the rotary feed portion 41 is different from the groove 48 of the upstream side passage forming member 40 and the downstream side passage forming member 42, and the other portions are formed the same. Therefore, the same reference numerals will be used for the components forming the rotary feed portion 41, and the description will be omitted. The inclined faces 50A, 50A for forming the grooves 50 of the rotary feed portion 41 are substantially the same as the inner side shape of the previously disclosed Japanese Patent Application No. 2001-127248. Therefore, the detailed description of the cross-sectional shape will be omitted here, but when it is described in detail, the cross-sectional shape of the groove 5 1271,276,592 Ο) is arranged along the moving direction of the slice W so as to be slightly V-shaped. The shape of the inner side surface of the slightly U-shaped shape is alternately continuous, and the intermediate inner side surface leading to the inner side surface of the slightly V-shaped and slightly U-shaped is provided with a smooth curved shape, and the passage groove 50 is provided. The slice W can smoothly rotate along the spiral trajectory and can form a straight line. In the present embodiment, the rotary feed portion 41 is provided with a gradual change in the series of inclined surfaces 50A, 50A, so that the slice W passes from the initial position when it passes (refer to the "0 °" position in Fig. 12). Rotate slightly 1 80 degrees. Further, the shape of the inner side surface of the groove 50 is not limited to the configuration example shown in the figure as long as the slice W can be rotated. The first to fourth cameras 14, 15, 16, and 17 are supported by the channel forming members 40 and 42 on the side and the downstream side, respectively, by a pedestal (not shown). As shown in Figs. 1 and 2, the first and second cameras 14, 15 are located on the upstream side passage forming member 40, and the lens portions are arranged to face each other with respect to the inspection surface of the cutting piece W. In other words, the first camera 14 is formed to inspect the slice W inspection surface S 1 (see Fig. 12), and the second camera 15 checks the inspection surface S2 of the slice W. Further, the third and fourth cameras 16 and 17 are positioned on the downstream side passage forming member 42, and are formed to be inspected after rotating the slice W1 by 80 degrees. In other words, the lens portion of the third camera 16 faces the inspection surface S3 of the slice and checks the inspection surface S3, and the lens portion of the fourth camera 17 checks the inspection surface S4 toward the inspection surface S4 of the slice W. On the other hand, the cameras 14 4 to 17 will perform a predetermined image processing check by the image processing apparatus to determine whether or not it is a good product. As shown in FIG. 1, FIG. 13, and FIG. 14, the recovery means 18 is disposed in the first suction pipe 5 disposed in the region of the upstream side passage forming member 40 so as to be close to the flow side of the second camera 15 (10) 1276592. 1, and a second suction pipe 52 disposed in the region of the downstream side passage forming member 4 2 so as to be close to the lower flow side of the fourth camera 17, and a recovery device 5 3 disposed on the downstream side of the second suction pipe 5 2 Composition. The first and second suction pipes 5 1 and 5 2 are used to collect defective users, and the third recovery device 5 3 is configured to be used for recycling good products. As shown in Fig. 13, a member 45 that is opposite to the front end opening position of the first and second suction pipes 5 1 and 5 2 is formed with an air supply opening 5 5 ' opened in the groove 48. The air is blown from the air supply port 5 5 so that the slice W in the groove 48 is blown toward the suction pipes 5 1 and 5 2 , and the slice W determined to be defective is recovered by the suction pipes 51 and 52. In each of the collection boxes 56, 57. At this time, the first and second suction pipes 51 and 52 are constantly held in a state of being sucked (absorbed), and the air supply port 5 is formed to blow air in accordance with the determination that there is a defective product. Therefore, when the air is not blown from the air supply hole 55 to the slice W, the slice W is not attracted by the suction of the first and second suction pipes 51 and 52, and is kept movable to the groove 4. The state within 8. As shown in Fig. 14, the third recovery device 53 is located slightly on the line through which the belt B passes, and is configured to include a tubular member 60 having an opening 60A at a position below the belt B. The air is blown from above the cylindrical member 60, and the slice w as a good product located in the punching hole 38 of the belt B is subjected to the blowing force of the air so that the state of being supported by the downstream side passage forming 42 is lost. It falls into the tubular member 60 and is recovered by the recovery pipe 62. Further, in Fig. 14, reference numeral 63 denotes a counter, and the counter is used to sequentially count the number of good products. Next, the overall operation of the polyhedron inspection apparatus 10 of the present embodiment (11) 1276592 will be described. By turning on the predetermined power source, the (skin) tape B constituting the moving means 12 is rotated counterclockwise in the drawing, while the slice W is supplied from the funnel 20 of the supply means 1 1 via the chute 2 2 to The rear part 2 4 is on. The slice W on the rear element 24 runs up the inclined surface and falls one by one on the supply groove 31 of the intermediate member 26. At this time, the belt B is moved to the front end side of the supply groove 31, so that the slice W passing through the supply groove 31 enters the hole 38 one by one and is engaged with the hole 38. The supply groove 31 is provided with a plurality of examples, and in the present embodiment, it is three rows. Therefore, there is almost no leakage of the feed into the punch 38. When the slice W in the punching hole 38 is not in the correct posture, that is, as shown in Fig. 8, the slice W is formed as if it is to enter the posture of the punching hole 38, and the nozzle 3 9 A from the removing means 3 9 The air is blown in the area where it protrudes, so that the slice W will be detached from the punched hole 38 and dropped below. Therefore, the slice W after the position of the removal means 39 is moved to the polyhedron inspection feeder 13 connected to the downstream side while maintaining the correct posture state. On the other hand, the multi-body inspection feeder 13 is formed in the region of the upstream side channel forming member 40 as shown in FIG. 12, exposing the surface of the two inspection surfaces S1, S2 above the groove 48, and In this state, the first and second cameras 14 and 15 are imaged, and the predetermined inspection is performed by the image processing apparatus. When any of the inspection surfaces S1 and S2 is judged to be defective, the air is blown into the groove 48 by the air supply hole 55 to blow off the slice W to the outside of the groove 48, and often The suction pipe 51 of the suction (suction) state is sucked and recovered in the recovery tank 56. -14- (12) 1276592 As for the cut piece W which is not recognized as a defective product in the upstream side passage forming member 40, the feed portion 41 is rotated and rotated slightly by 180 degrees (see Fig. 12). In the state where the inspection faces S3 and S4 are exposed, the slice w is moved to the region of the downstream side channel forming member 40. Here, the same inspection as in the region of the upstream side passage forming member 40 is performed by the third and fourth cameras. Similarly, the slice W determined to be defective is collected to the recovery image 5 via the suction pipe 5 1 . 7. The good slice W that is not attracted by the suction pipe is counted by the counter 63 in order, and then recovered by the third recovery device 53. Therefore, according to such an embodiment, since the (skin) tape B is used to move the slices W one by one, it is possible to completely eliminate the fact that a plurality of slices are in contact with each other to move in a connected state, so that each slice can be made W. The surface accuracy is checked with good efficiency and high precision. Further, in the above embodiment, the slice W is engaged and moved by forming the punched hole 38, but a notch portion having a concave shape on the upper end side of the (skin) tape B may be used. Further, the moving means 1 2 can be used as long as the slices W can be moved at a certain interval, and therefore, it is not limited to the (skin) tape. Further, the supply groove 3 1 of the supply means 1 1 is not limited to three columns, and may be three or less columns or three or more columns. As described above, according to the polyhedron inspection feeder according to the first aspect of the patent application, the gaps corresponding to the engagement regions provided in the moving means are formed so as to be accepted and engaged with the respective cards. Since the inspection target objects in the joint area are in a state of being spaced apart from each other, the structure in which the inspection object is conveyed by vibration is provided as before, and it is possible to surely prevent a plurality of inspection objects from being continuously generated, thereby ensuring Each inspection object -15- (13) 1276592 The reliability of the inspection accuracy of the object. According to the polyhedron inspection feeder according to the second aspect of the invention, the object to be inspected can be smoothly rotated in accordance with the shape of the inner surface of the groove, and the state of the inspection surface of the inspection object is not hidden. The object to be inspected is movable along the groove. In addition, when the object to be inspected is a rectangular parallelepiped or the like, the inspection surface can be symmetrically exposed to the surface of the inspection surface on each side of the (skin) tape, so that the inspection object is symmetrical. Check it out efficiently. Further, according to the polyhedron inspection apparatus described in the fourth aspect of the patent application, the object to be inspected can be minimized as long as the state of the engagement region of the moving means is not reduced, so that the inspection efficiency can be suppressed from being lowered. Further, according to the polyhedron inspection device according to the fifth aspect of the invention, only the inspection object that always maintains a certain posture can be transported to the channel forming member side. Therefore, it is possible to suppress the inspection efficiency from being lowered. In addition, according to the polyhedron inspection device described in the sixth paragraph of the patent application, the inspection surface of the inspection object can be kept constant, and high-precision inspection can be performed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic front view showing the overall configuration of a polyhedral inspection apparatus according to an embodiment. Fig. 2 is a schematic plan view of the aforementioned polyhedron inspection device. Figure 3 is a schematic plan view of the supply means. (14) 1276592 Figure 4 is a schematic squint (stereo) diagram of the main part of the supply means. Fig. 5 is a schematic oblique view of the supply means of the front part. Fig. 6 is a schematic perspective view showing the inner surface side of the front member. Fig. 7 is a cross-sectional view showing a state in which a slice is supplied in a correct posture. Fig. 8 is a cross-sectional view showing a state in which a slice is supplied in an incorrect posture. Figure 9 is a cross-sectional view showing a state in which a moving slice is formed on a channel forming member. Fig. 1 is a schematic oblique view showing the rotary feed portion of the passage forming member. Fig. 1 is an exploded perspective view of the rotary feed portion. Fig. 1 is an explanatory view of a slicing operation of the rotary feed unit. Fig. 1 is a cross-sectional view showing the main part of the slicing recovery means which is judged to be defective. Fig. 14 is a schematic structural view showing a slice collecting means for determining good product 〇 [Description of symbols] φ 10 : Polyhedron inspection device 11 : Supply means 12 : Moving means 13 : Multi-body inspection feeder 14 : First camera 15 : 2nd camera 16 : 3rd camera Π : 4th camera -17- (15) (15) 1276592 1 8 : Recycling means 20 : Funnel 20A : Spiral channel 2 1 : Supply path forming member 22 : Chute 24 : Rear Component 25: Front member 26: Intermediate member 26A: Projection portion 26B: Notch portion 27: Outer frame 2 8: Inclined surface 29: Inclined surface 3 1 : Supply groove (supply channel) 3 3, 3 4 : Support surface 35: Groove 3 6 : drive pulley 3 7 : driven pulley 3 8 : punching 3 9 : removal means 3 9 A : nozzle 40 : upstream side passage forming member 4 1 : rotary feed portion 42 : downstream side passage forming member - 18- (16) (16) 1296592 4 5 : Part 4 6 : Base member 47 : Upright member 47A : Outside inclined surface 4 7 B : Inside inclined surface 48 : Groove 4 9 : Vacuum hole 50 : Groove 5 0 A, 5 0 B : inclined surface 5 1 : first suction pipe 5 2 : second suction pipe 5 3 : third recovery device 5 5 : air supply hole 5 6 : recovery tank 5 7 : recovery tank 6 0 : cylindrical Member 60A: Opening portion 62: Recycling box 63: Counter B: (skin) belt Μ: Motor S1 to S4: Inspection surface for slicing W: Slicing -19-