JP4039505B2 - Appearance inspection device - Google Patents

Appearance inspection device Download PDF

Info

Publication number
JP4039505B2
JP4039505B2 JP06966499A JP6966499A JP4039505B2 JP 4039505 B2 JP4039505 B2 JP 4039505B2 JP 06966499 A JP06966499 A JP 06966499A JP 6966499 A JP6966499 A JP 6966499A JP 4039505 B2 JP4039505 B2 JP 4039505B2
Authority
JP
Japan
Prior art keywords
electronic component
transport
cameras
transport mechanism
reversing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP06966499A
Other languages
Japanese (ja)
Other versions
JP2000266521A (en
Inventor
勲 岡野
Original Assignee
オカノ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オカノ電機株式会社 filed Critical オカノ電機株式会社
Priority to JP06966499A priority Critical patent/JP4039505B2/en
Publication of JP2000266521A publication Critical patent/JP2000266521A/en
Application granted granted Critical
Publication of JP4039505B2 publication Critical patent/JP4039505B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

【0001】
【発明の属する技術分野】
本発明は、例えば一辺が数mm〜数cm程度の大型の電子部品のみならず、例えば0.3mm(H)×0.3mm(W)×0.6mm(L)なる寸法形状の微小なチップ状の電子部品であっても、これらの電子部品を高速に搬送しながらその外観を効率的に検査し、その良否に応じて分別するに好適な外観検査装置に関する。
【0002】
【関連する背景技術】
近時、各種電子回路ユニットの小型化や高密度実装化に伴い、例えば一辺が3〜4mm程度の大きさのチップ状の電子部品が多く用いられている。特に最近では、例えばセラミック製の抵抗やコンデンサ等からなる、例えば図1に示すような直方体または略直方体形状の微小な電子部品P、具体的には[1005]と称される1.0mm(L)×0.5mm(H)×0.5mm(W)なる寸法形状の、更には[0603]と称される0.6mm(L)×0.3mm(H)×0.3mm(W)なる寸法形状の微小なチップ状の電子部品も数多く用いられるようになってきた。
【0003】
ところでこの種の電子部品の品質を保証する手法として、その表面に傷を有して電子部品としての機能が損なわれている虞のあるものや、電極が欠けたもの等をその外観から検査し、部品供給に先立って不良品を排除することが行われる。ちなみにこの外観検査は、従来一般的には上述した小型形状の電子部品の外観を、その6面(上面、下面、右側面、左側面、前端面、後端面)に亘って検査するべく、或いはその主体をなす4つの面(上面、下面、右側面、左側面)を検査するべく、例えばカメラの前に導かれた電子部品をハンドリング機構にて把持して、或いは真空チャックにて吸着保持してその姿勢を縦横に変換しながら、各姿勢において電子部品の各面を順次撮像するようにしている。
【0004】
【発明が解決しようとする課題】
しかしながら電子部品を保持して該電子部品の或る面を撮像する都度、その姿勢を変換して別の面をカメラに向けるには手間が掛かる上、その姿勢制御や位置制御が煩雑であり、検査効率が非常に悪いと言う問題がある。まして前述した[0603]と称される微小な電子部品にあっては、該電子部品をハンドリング機構にて把持すること自体、或いは真空チャックにて吸着保持すること自体が非常に困難であると言う問題がある。
【0005】
しかも複数の電子部品を1個ずつ順次搬送しながらその外観検査を高速に連続して行う場合、その撮像姿勢を変えるべく前記ハンドリング機構や真空チャックを用いて電子部品を保持するには、該ハンドリング機構や真空チャックの高速な動作と、高精度なタイミング制御とが必要となり、装置構成が相当大掛かりなものとなると言う不具合がある。まして毎分1000〜1500個程度の電子部品を検査しようとすると、その実現が著しく困難となる。
【0006】
本発明はこのような事情を考慮してなされたもので、その目的は、ハンドリング機構や真空チャック等を用いて電子部品の姿勢を変えることなく、電子部品を高速に搬送しながらその外観を効率的に検査することのできる簡易な構成の外観検査装置を提供することにある。
【0007】
【課題を解決するための手段】
上述した目的を達成するべく本発明に係る外観検査装置は、例えばボールフィーダおよび直進フィーダからなり、直方体または略直方体形状をなす複数の電子部品を整列させて順次1個ずつ供給する供給機構と、
この供給機構から順次供給された電子部品を載置して搬送する回転テーブルやリニアコンベア等からなり、その搬送方向と直角な方向の該電子部品における互いに異なる第1面および第2面を、第1および第2のカメラによる撮像に供する第1の搬送機構と、
この第1の搬送機構を介して搬送された電子部品を導く半円弧状または捻り形状を有するガイドを備え、このガイドに沿わせて電子部品を搬送して該電子部品をその搬送方向と直交する向きに反転させて前記電子部品の下側となる面を180°または90°反転させる反転機構と、
この反転機構を介して向きが反転された電子部品を載置して搬送する回転テーブルやリニアコンベア等からなり、その搬送方向と直角な方向の該電子部品における前記第1面および第2面とはそれぞれ異なる第3面および第4面を、第3および第4のカメラによる撮像に供する第2の搬送機構と、
前記各カメラにてそれぞれ撮像された前記電子部品の互いに異なる第1面乃至第4面の画像からその外観の良否を判定する画像処理手段と
を備えたことを特徴としている。
【0008】
本発明の好ましい態様は、請求項2に記載するように前記第1および第2のカメラを、前記第1の搬送機構に載置されて搬送される電子部品の上面と該第1の搬送機構がなす搬送路の一側部に向く面とをそれぞれ撮像するように設け、また前記第3および第4のカメラを、前記第2の搬送機構に載置されて搬送される電子部品の上面と該第2の搬送機構がなす搬送路の一側部に向く面とをそれぞれ撮像するように設ける。そして前記反転機構を、前記第1の搬送機構を介して搬送された電子部品の下側となる面を180°反転させて前記第2の搬送機構に導くように、そのガイドを下方に向けて半円弧状に曲がる形状のものとして構成することを特徴としている。この場合、請求項3に記載するように前記第1および第2の搬送機構が、それぞれ回転テーブルとして実現されるときに好都合である。
【0009】
また本発明の別の好ましい態様は、請求項4に記載するように前記第1および第2のカメラを、前記第1の搬送機構に載置された電子部品の該第1の搬送機構がなす搬送路の両側部にそれぞれ向く2つの面をそれぞれ撮像するように設け、また前記第3および第4のカメラを、前記第2の搬送機構に載置された電子部品の該第2の搬送機構がなす搬送路の両側部にそれぞれ向く2つの面をそれぞれ撮像するように設ける。そして前記反転機構を上記第1の搬送機構を介して搬送された電子部品の下側となる面を90°反転させて前記第2の搬送機構に導くように、そのガイドをその搬送方向と直角方向に捻りを有する形状のものとして構成することを特徴としている。この場合、請求項5に記載するように前記第1および第2の搬送機構が、それぞれリニアコンベアとして実現されるときに好都合である。
【0010】
【発明の実施の形態】
以下、図面を参照して本発明の実施形態に係る電子部品の外観検査装置について、[1005]や[0603]と称される微小なチップ状の電子部品用の外観検査装置を例に説明する。尚、一辺が数mm〜数cm程度の比較的大型の電子部品を検査する外観検査装置に適用可能なことは言うまでもない。
【0011】
図2は第1の実施形態に係る外観検査装置の概略的な構成を示す斜視図であり、図3はその平面配置構成を示している。この外観検査装置は、大略的には略直方体形状の電子部品Pを整列させて順次1個ずつ連続して供給する供給機構10と、この供給機構10から供給された電子部品Pを載置して搬送する第1の搬送機構20、そしてこの第1の搬送機構20を介して搬送された電子部品Pの向き、特に該電子部品Pの下側となる面を180°反転させる反転機構30と、この反転機構30を介して向きが反転された電子部品Pを載置して搬送する第2の搬送機構40とからなる。
【0012】
上記供給機構10は、ホッパ11から供給される複数の電子部品Pを収容するすり鉢状の容器を備え、遠心力を利用して上記容器内の電子部品Pその周壁に沿って整列させながら1個ずつ送り出すボールフィーダ12と、このボールフィーダ12から送り出された電子部品Pを前記第1の搬送機構20に向けて順次に送り出す直進(リニア)フィーダ13とからなる。
【0013】
しかして前記第1の搬送機構20および前記第2の搬送機構40は、例えば直径200mm程度の回転テーブル21,41からなり、図示しない駆動モータにより一定速度で回転駆動されてその上面の周縁部に載置された電子部品Pを略半周に亘ってそれぞれ搬送する如く構成される。特にこれらの回転テーブル21,41は、後述するように前記反転機構30が電子部品Pの向きを反転させる際の、該電子部品Pの搬送高さの変位に合わせて所定の高低差を持たせて配置されている。ちなみに第1の搬送機構20をなす回転テーブル21は、その上面に載置して搬送する電子部品Pを第1および第2のカメラ51,52による撮像に供するものであり、また第2の搬送機構40をなす回転テーブル41は、同様にその上面に載置して搬送する電子部品Pを第3および第4のカメラ53,54による撮像に供するものである。
【0014】
尚、第1のカメラ51は、回転テーブル21に載置された電子部品Pの上面(第1面)を撮像する如く設けられ、また第2のカメラ52は該電子部品Pの前記回転テーブル21の外周側に向く面(第2面)を撮像する如く設けられる。更に第3のカメラ53は、回転テーブル41に載置された電子部品Pの上面(第3面)を撮像する如く設けられ、また第4のカメラ54は該電子部品Pの前記回転テーブル41の外周側に向く面(第4面)を撮像する如く設けられる。特に前記第1および第2のカメラ51,52、また第3および第4のカメラ53,54は、前記各回転テーブル21,41の周方向にそれぞれ所定距離だけ離間した位置に配置され、前記電子部品Pの各面をそれぞれ撮像する如く設けられている。このようなカメラ配置により、回転テーブル21,41に載置されて搬送される電子部品Pは、第1のカメラ51乃至第4のカメラ54により前述した各面が順次撮像されるようになっている。
【0015】
ここで前記反転機構30について説明すると、該反転機構30は図4にその側面から見た構造を示すように、上下方向に半円弧状の通路を形成したガイド孔31を備えた反転機構本体32と、前記回転テーブル21に載置されて略半周に亘って搬送された電子部品Pを該回転テーブル21上から離脱させて受け取り、上記反転機構本体32の上部に位置付けられたガイド孔31の入口に該電子部品Pを導く第1のリニアフィーダ33を備えている。更に反転機構30は、前記反転機構本体32の下部に位置付けられたガイド孔31の出口から排出される電子部品Pを前記回転テーブル41上に導く第2のリニアフィーダ34とを備えて構成される。前記第1および第2のリニアフィーダ33,34は、それぞれ所定の振動が加えられて該リニアフィーダ33,34上の電子部品Pを所定の速度で搬送する機能を備える。また前記反転機構本体32も、例えば前記リニアフィーダ34と同じ振動が加えられ、そのガイド孔31内に導かれた電子部品Pをその壁面に沿わせて導くことで、該電子部品Pの上下面を反転させる役割を担う。つまり反転機構本体32は、電子部品Pの下側となる面を180°反転させて裏返しにする役割を担っている。
【0016】
反転機構30は上述した反転機構本体32と、前記ガイド孔31の同一方向に向けられた入口および出口にそれぞれ連結された第1および第2のリニアフィーダ33,34により、第1の回転機構20(回転テーブル21)を介して搬送された電子部品Pの下側となる面、およびその搬送方向を反転することで前記第2の回転機構40(回転テーブル41)上に載置する電子部品Pの向きを反転させている。具体的には前記第1のカメラ51にて撮像された上面(第1面)に対向する面(第3面)を上面として位置付け、且つ前記第2のカメラ52にて撮像された側面(第2面)に対向する面(第4面)を回転テーブル41の外周側に向けて該回転テーブル41上に導くものとなっている。この結果、回転テーブル41上に載置されて搬送される電子部品Pの第3面が第3のカメラ53により撮像され、またその第4面が第4のカメラ54により撮像されるようになる。
【0017】
ところで搬送制御部60は、前記供給機構10からの電子部品Pの供給速度と、前記第1および第2の搬送機構20,40による電子部品Pの搬送速度、更には反転機構30による電子部品Pの搬送速度とをそれぞれ制御している。特に搬送制御部60は、供給機構10からの電子部品Pの供給速度と前記第1の搬送機構20による電子部品Pの搬送速度とを適正に調整し、また反転機構30による電子部品Pの搬送速度と前記第2の搬送機構40による電子部品Pの搬送速度とを適正に調整することで、例えば各回転テーブル21,41上に載置されて搬送される電子部品Pが、順次所定の配列ピッチで順次並べられるように制御している。
【0018】
また前述した第1乃至第4のカメラ51,52,53,54を制御する検査部70は、例えばマイクロプロセッサを主体として構成される。そして上述した如く所定の配列ピッチで搬送される回転テーブル21,41上の電子部品Pの搬送位置に応じて、例えばその搬送タイミングに同期させて前記各カメラ51,52,53,54を作動させることで、各搬送位置における電子部品Pをそれぞれ確実に撮像するものとなっている。
【0019】
しかして検査部70は画像処理部71と選別部72とを備えている。画像処理部71は、前記各カメラ51,52,53,54にてそれぞれ撮像された電子部品Pの側面像を画像処理し、該電子部品Pの各面における傷や欠けの有無を判定する役割を担う。また選別部72は、上記画像処理部71による判定結果に基づいて、その電子部品Pを分別制御する役割を担う。
【0020】
この電子部品Pの分別について説明すると、前記各回転テーブル21,41の周囲には、前記各カメラ51,52,53,54による電子部品Pの撮像位置の下流側にそれぞれ位置して不良品排出用のシュート81,82,83,84と、判定不能品搬出用のシュート85,86,87,88とがそれぞれ設けられている。またこれらの各シュート81,82,〜88に対向させて、前記各回転テーブル21,41上から各シュート81,82,〜88に向けて電子部品Pを吹き落とすエアノズル91,92,〜98が前記各回転テーブル21,41の内周部上方にそれぞれ設けられている。これらの各エアノズル91,92,〜98は、前記選別部72により選択的に駆動されるもので、特に前記画像から電子部品Pの不良が検出されたとき、および画像から良品であるとの確信が得られないとき(判定不能)に駆動される。
【0021】
しかして第1乃至第4のカメラ51,52,53,54による外観検査に供された電子部品Pは、その判定結果に応じて、不良品であるならば前記シュート81,82,83,84に、また判定不能であるならば前記シュート85,86,87,88にそれぞれ落とし込まれることで、随時、回転テーブル21,41上から排除される。換言すれば各カメラ51,52,53,54による外観検査に順に供された電子部品Pは、良品であると判定された場合にだけ回転テーブル21,41上に残され、その搬送方向下流側における次のカメラによる外観検査に供せられる。そして前記各カメラ51,52,53,54による外観検査の全てにおいて良品として判定された電子部品Pは、前記シュート88の下流側において第2の回転テーブル41上から、ガイド15を介して排出シュート16内に落とし込まれて排出される。
【0022】
かくして上述した如く構成された外観検査装置によれば、真空チャック等にて吸着すること自体が困難な微小な電子部品Pを第1および第2の搬送機構20,40をなす回転テーブル21,41上に載置して搬送し、更に回転テーブル21から回転テーブル41に乗せ換える際、反転機構30を介して電子部品Pの向きを反転させるので、該電子部品Pの互いに異なる面を前述した第1乃至第4のカメラ51,52,53,54にそれぞれ向けることができる。従って電子部品Pの互いに異なる4つの面(第1面乃至第4面)の外観をそれぞれ効率的に検査することができる。
【0023】
しかも電子部品Pを回転テーブル21,41上に載置して搬送するだけであり、電子部品Pを把持する等してその姿勢を変える必要がなく、電子部品Pに対する高精度な姿勢制御や位置制御が不要であるから、その制御が非常に簡単である。更には電子部品Pを回転テーブル21,41に載置して搬送しながら、その搬送位置に合わせてカメラ51,52,53,54による撮像タイミングを制御するだけで良いので、複数の電子部品Pをパイプライン的に並列処理して各電子部品Pの各面を外観検査することができ、例えば毎分1000〜1500個程度の電子部品Pを高速に検査する場合にも十分に対応可能である等の効果が奏せられる。
【0024】
特に反転機構30は、半円弧状のガイド孔31内に電子部品Pを導いてその姿勢を縦方向に反転させると言う簡易な構成なので、上記ガイド孔31を電子部品Pの大きさに応じたものとしておけば、搬送姿勢の乱れを殆ど招くことなくその姿勢を確実に180°反転させ、同時にその搬送方向も反転させることができる。この結果、電子部品Pの互いに異なる面を簡易に所定のカメラ方向に向けることができ、しかも電子部品Pの連続した搬送を妨げる虞もない等の効果が奏せられる。
【0025】
ところで上述した実施形態は、第1および第2の搬送機構20,40を回転テーブル21,41を用いて実現したが、図5に示すようにリニアコンベア22,42を用いて実現することもできる。この場合、リニアコンベア22,42の両側にそれぞれカメラを配置することができるので、リニアコンベア22,42上に載置されて搬送される電子部品Pの搬送方向と直交する2つの側面をそれぞれ検査するように第1乃至第4のカメラ51,52,53,54を配置するようにすれば良い。そしてこの場合には前記反転機構30を、例えば図6に示すように電子部品Pをその搬送方向と直交する方向に90°反転させるように、そのガイド孔34を捻り形状を有するものとして実現するようにすれば良い。このような反転機構30を用いて電子部品Pを、その搬送方向と直交する方向に90°反転させるようにすれば、リニアコンベア22上において上下に位置付けられていた電子部品Pの面が、両側に位置付けられて第2のリニアコンベア42上に導かれることになる。従って先の実施形態と同様に電子部品Pの外観検査を効率的に行うことが可能となる。
【0026】
尚、本発明は上述した各実施形態に限定されるものではない。例えば回転テーブルとリニアコンベアとを組み合わせて第1および第2の搬送機構20,40を構成することも可能である。また第1および第2の搬送機構20,40に載置されて搬送される電子部品Pのどの面をカメラより撮像するかは、仕様に応じて定めれば良く、またその撮像面に応じて反転機構30により電子部品Pを180°反転させるか、90゜反転させるかを決定すれば良い。
【0027】
更には電子部品Pの6面を検査する必要がある場合には、例えば回転テーブル41上から電子部品Pを取り出して搬送するリニアフィーダを設け、更にこのリニアフィーダと直交するリニアフィーダに電子部品を載せ換えることで、今まで前端部および後端部として位置付けられていた電子部品の面をその搬送方向に対する側面として位置付けて、その面を検査すると言う手法もある。また第1の搬送機構20上に載置された電子部品Pの互いに異なる3面を外観検査した後、その姿勢を反転させて第2の搬送機構40上で、更に異なる3面の外観検査を行うようにしても良いことは言うまでもない。更には第1の搬送機構20上にて電子部品Pの互いに異なる4面の外観を検査した後、姿勢を反転させた第2の搬送機構40上で残された2面の外観を検査することも可能である。この場合には第1および第2の搬送機構20,40において各カメラにより撮像する電子部品Pの面と、電子部品Pの反転方向とを予め適切に設定しておけば良い。更には前述したように一辺が数cm程度の比較的大型の電子部品を外観検査する場合にも同様に適用可能である。その他、本発明はその要旨を逸脱しない範囲で種々変形して実施することができる。
【0028】
【発明の効果】
以上説明したように本発明によれば、第1および第2の搬送機構上に電子部品を載置して搬送しながら、また反転機構を介して電子部品の姿勢を反転させて搬送機構への載せ換えを行って、前記各搬送機構上における電子部品の各面をそれぞれ外観検査するので、その検査効率を向上させることができ、しかもその制御自体も大幅に簡素化することができる。更には複数の電子部品を高速に搬送しながらその外観検査を実行することができる上、装置全体の構成の大幅な簡素化を図り得る等の実用上多大なる効果が奏せられる。
【図面の簡単な説明】
【図1】電子部品の形状を示す図。
【図2】本発明の第1の実施形態に係る外観検査装置の概略構成を示す斜視図。
【図3】図1に示す外観検査装置における電子部品の搬送系とカメラの配置を示す平面図。
【図4】図1に示す外観検査装置における反転機構の構成例を示す図。
【図5】本発明の第2の実施形態に係る外観検査装置における電子部品の搬送系とカメラの配置を示す平面図。
【図6】図5に示す外観検査装置における反転機構の構成例を示す図。
【符号の説明】
P 電子部品
10 供給機構
20 第1の搬送機構
21 回転テーブル
22 リニアコンベア
30 反転機構
32 ガイド孔(180°反転用)
34 ガイド孔(90°反転用)
40 第2の搬送機構
41 回転テーブル
42 リニアコンベア
51,52,53,54 カメラ
70 検査部
71 画像処理部
72 選別部
[0001]
BACKGROUND OF THE INVENTION
The present invention is not limited to a large electronic component having a side of, for example, several millimeters to several centimeters. For example, a minute chip having a shape of 0.3 mm (H) × 0.3 mm (W) × 0.6 mm (L) The present invention relates to an appearance inspection apparatus suitable for efficiently inspecting the appearance of such electronic components while conveying them at high speed and sorting them according to their quality.
[0002]
[Related background]
Recently, along with miniaturization and high-density mounting of various electronic circuit units, for example, chip-shaped electronic components having a side of about 3 to 4 mm are often used. Particularly recently, for example, a rectangular or substantially rectangular parallelepiped minute electronic component P made of, for example, a ceramic resistor or capacitor, specifically, 1.0 mm (L ) × 0.5 mm (H) × 0.5 mm (W), and further, 0.6 mm (L) × 0.3 mm (H) × 0.3 mm (W), which is called [0603]. A large number of minute chip-shaped electronic components having a dimensional shape have been used.
[0003]
By the way, as a technique for assuring the quality of this kind of electronic components, inspect the appearance of those that have scratches on the surface and whose functions as electronic components may be impaired, or those that lack electrodes. Prior to supplying parts, defective products are eliminated. By the way, this external appearance inspection is to generally inspect the external appearance of the above-mentioned small-sized electronic component over its six surfaces (upper surface, lower surface, right side surface, left side surface, front end surface, rear end surface), or In order to inspect the four main surfaces (upper surface, lower surface, right side surface, left side surface), for example, an electronic component guided in front of the camera is gripped by a handling mechanism or sucked and held by a vacuum chuck. In this way, each surface of the electronic component is sequentially imaged in each posture while converting the posture into vertical and horizontal directions.
[0004]
[Problems to be solved by the invention]
However, each time an electronic component is held and an image of a certain surface of the electronic component is taken, it takes time to change the posture and direct another surface to the camera, and the posture control and position control are complicated. There is a problem that inspection efficiency is very bad. Furthermore, it is said that it is very difficult to hold the electronic component by the handling mechanism or to hold the electronic component by suction with the vacuum chuck in the minute electronic component called [0603] described above. There's a problem.
[0005]
In addition, when the appearance inspection is performed continuously at a high speed while sequentially transporting a plurality of electronic components one by one, the handling mechanism is used to hold the electronic components using the handling mechanism or the vacuum chuck in order to change the imaging posture. There is a problem that a high-speed operation of the mechanism and the vacuum chuck and high-precision timing control are required, and the apparatus configuration becomes considerably large. Furthermore, if it is intended to inspect about 1000 to 1500 electronic parts per minute, it will be extremely difficult to realize.
[0006]
The present invention has been made in consideration of such circumstances, and its purpose is to improve the appearance of the electronic component while transporting it at high speed without changing the posture of the electronic component using a handling mechanism or a vacuum chuck. It is an object of the present invention to provide an appearance inspection apparatus having a simple configuration that can be inspected automatically.
[0007]
[Means for Solving the Problems]
In order to achieve the above-described object, an appearance inspection apparatus according to the present invention includes, for example, a ball feeder and a linear feeder, a supply mechanism that supplies a plurality of electronic components having a rectangular parallelepiped shape or a substantially rectangular parallelepiped shape and supplies them one by one in sequence.
A rotating table, a linear conveyor, or the like that places and conveys electronic components sequentially supplied from the supply mechanism, and includes different first and second surfaces of the electronic components in a direction perpendicular to the conveying direction. A first transport mechanism for imaging by the first and second cameras;
A guide having a semicircular arc shape or a twisted shape for guiding the electronic component conveyed through the first conveying mechanism is provided, the electronic component is conveyed along the guide, and the electronic component is orthogonal to the conveying direction. A reversing mechanism for reversing the direction and reversing the lower surface of the electronic component by 180 ° or 90 °;
The first surface and the second surface of the electronic component in a direction perpendicular to the conveying direction, such as a rotary table or a linear conveyor that places and conveys the electronic component whose direction is reversed via the reversing mechanism, Is a second transport mechanism for providing different third and fourth surfaces for imaging by the third and fourth cameras,
Image processing means for determining whether the appearance is good or bad from images of the first to fourth surfaces of the electronic parts captured by the cameras are different from each other.
[0008]
According to a preferred aspect of the present invention, as described in claim 2, the first and second cameras are mounted on the first transport mechanism and transported from the upper surface of the electronic component and the first transport mechanism. And a surface facing the one side of the transport path formed by the camera, and the third camera and the fourth camera are mounted on the second transport mechanism and transported on the upper surface of the electronic component. A surface facing the one side portion of the transport path formed by the second transport mechanism is provided so as to capture an image. The reversing mechanism has its guide directed downward so that the lower surface of the electronic component conveyed via the first conveying mechanism is inverted 180 ° and guided to the second conveying mechanism. It is characterized by having a shape that bends in a semicircular arc shape. In this case, as described in claim 3, it is convenient when the first and second transport mechanisms are each realized as a rotary table.
[0009]
According to another preferable aspect of the present invention, the first and second cameras are formed by the first transport mechanism of the electronic component placed on the first transport mechanism as described in claim 4. The second transport mechanism of the electronic component provided so as to pick up images of two surfaces respectively facing both sides of the transport path, and the third and fourth cameras mounted on the second transport mechanism The two surfaces facing each side of the conveyance path formed by each are respectively imaged. Then, the guide is moved at a right angle to the transport direction so that the reversing mechanism reverses the lower surface of the electronic component transported via the first transport mechanism by 90 ° and guides it to the second transport mechanism. It is characterized by having a shape having a twist in the direction. In this case, as described in claim 5, it is convenient when the first and second transport mechanisms are each realized as a linear conveyor.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an appearance inspection apparatus for an electronic component according to an embodiment of the present invention will be described with reference to the drawings, taking an appearance inspection apparatus for a minute chip-shaped electronic component called [1005] or [0603] as an example. . Needless to say, the present invention can be applied to an appearance inspection apparatus for inspecting a relatively large electronic component having a side of several mm to several cm.
[0011]
FIG. 2 is a perspective view showing a schematic configuration of the appearance inspection apparatus according to the first embodiment, and FIG. 3 shows a planar arrangement configuration thereof. This visual inspection apparatus is arranged with a supply mechanism 10 that roughly aligns the substantially rectangular parallelepiped-shaped electronic components P and sequentially supplies them one by one and the electronic components P supplied from the supply mechanism 10. And a reversing mechanism 30 for reversing the orientation of the electronic component P conveyed through the first conveying mechanism 20, in particular, the lower surface of the electronic component P by 180 °. The second transport mechanism 40 is configured to place and transport the electronic component P whose direction is reversed via the reversing mechanism 30.
[0012]
The supply mechanism 10 includes a mortar-shaped container that accommodates a plurality of electronic components P supplied from the hopper 11, and uses a centrifugal force to align the electronic components P in the container along the peripheral wall thereof. It consists of a ball feeder 12 that feeds out one by one and a linear (linear) feeder 13 that sends out the electronic components P sent out from the ball feeder 12 sequentially toward the first transport mechanism 20.
[0013]
Thus, the first transport mechanism 20 and the second transport mechanism 40 are composed of, for example, turntables 21 and 41 having a diameter of about 200 mm, and are rotated at a constant speed by a drive motor (not shown) to the peripheral portion on the upper surface thereof. The mounted electronic component P is configured to be transported over a substantially half circumference. In particular, the rotary tables 21 and 41 have a predetermined height difference in accordance with the displacement of the conveying height of the electronic component P when the reversing mechanism 30 reverses the direction of the electronic component P as will be described later. Are arranged. Incidentally, the rotary table 21 constituting the first transport mechanism 20 serves to pick up the electronic component P placed and transported on the upper surface thereof for imaging by the first and second cameras 51 and 52, and also the second transport. Similarly, the rotary table 41 constituting the mechanism 40 serves to pick up the electronic component P, which is placed and transported on the upper surface thereof, for imaging by the third and fourth cameras 53 and 54.
[0014]
The first camera 51 is provided so as to take an image of the upper surface (first surface) of the electronic component P placed on the rotary table 21, and the second camera 52 is provided on the rotary table 21 of the electronic component P. Is provided so as to image a surface (second surface) facing the outer peripheral side of the lens. Further, the third camera 53 is provided so as to take an image of the upper surface (third surface) of the electronic component P placed on the rotary table 41, and the fourth camera 54 is provided on the rotary table 41 of the electronic component P. It is provided so as to image a surface (fourth surface) facing the outer peripheral side. In particular, the first and second cameras 51 and 52, and the third and fourth cameras 53 and 54 are arranged at positions separated from each other by a predetermined distance in the circumferential direction of the rotary tables 21 and 41, respectively. It is provided so that each surface of the part P is imaged. With such a camera arrangement, the electronic parts P placed and conveyed on the turntables 21 and 41 are sequentially imaged on the respective surfaces by the first camera 51 to the fourth camera 54. Yes.
[0015]
The reversing mechanism 30 will now be described. The reversing mechanism 30 has a reversing mechanism main body 32 having a guide hole 31 in which a semicircular arc-shaped passage is formed in the vertical direction, as shown in FIG. The electronic component P placed on the rotary table 21 and transported over a substantially half circumference is separated from the rotary table 21 and received, and the inlet of the guide hole 31 positioned at the upper part of the reversing mechanism main body 32 is received. The first linear feeder 33 for guiding the electronic component P is provided. Further, the reversing mechanism 30 includes a second linear feeder 34 that guides the electronic component P discharged from the exit of the guide hole 31 positioned below the reversing mechanism main body 32 onto the rotary table 41. . Each of the first and second linear feeders 33 and 34 has a function of transporting the electronic component P on the linear feeders 33 and 34 at a predetermined speed when a predetermined vibration is applied thereto. Further, the reversing mechanism main body 32 is also subjected to the same vibration as the linear feeder 34, for example, and guides the electronic component P guided into the guide hole 31 along the wall surface thereof, so that the upper and lower surfaces of the electronic component P are guided. It plays a role to reverse. In other words, the reversing mechanism main body 32 plays a role of reversing the surface on the lower side of the electronic component P by 180 °.
[0016]
The reversing mechanism 30 includes the above-described reversing mechanism main body 32 and the first rotating mechanism 20 by the first and second linear feeders 33 and 34 respectively connected to the inlet and outlet of the guide hole 31 directed in the same direction. The electronic component P placed on the second rotation mechanism 40 (rotary table 41) by reversing the surface on the lower side of the electronic component P conveyed via the (rotary table 21) and the conveying direction thereof. The direction of is reversed. Specifically, a surface (third surface) opposite to the upper surface (first surface) imaged by the first camera 51 is positioned as the upper surface, and the side surface (first image) captured by the second camera 52 The surface (fourth surface) opposite to the second surface) is directed onto the turntable 41 with the turntable 41 facing the outer peripheral side. As a result, the third surface of the electronic component P placed and transported on the rotary table 41 is imaged by the third camera 53, and the fourth surface is imaged by the fourth camera 54. .
[0017]
By the way, the transport control unit 60 supplies the electronic component P from the supply mechanism 10, the transport speed of the electronic component P by the first and second transport mechanisms 20 and 40, and the electronic component P by the reversing mechanism 30. Are controlled respectively. In particular, the transport control unit 60 appropriately adjusts the supply speed of the electronic component P from the supply mechanism 10 and the transport speed of the electronic component P by the first transport mechanism 20, and transports the electronic component P by the reversing mechanism 30. By appropriately adjusting the speed and the transport speed of the electronic parts P by the second transport mechanism 40, for example, the electronic parts P placed and transported on the respective rotary tables 21 and 41 are sequentially arranged in a predetermined array. They are controlled so that they are sequentially arranged at a pitch.
[0018]
In addition, the inspection unit 70 that controls the first to fourth cameras 51, 52, 53, 54 described above is configured mainly with a microprocessor, for example. Then, as described above, the cameras 51, 52, 53, 54 are operated in synchronization with the transport timing, for example, in accordance with the transport position of the electronic component P on the turntables 21, 41 transported at a predetermined arrangement pitch. Thus, the electronic component P at each conveyance position is reliably imaged.
[0019]
Therefore, the inspection unit 70 includes an image processing unit 71 and a selection unit 72. The image processing unit 71 performs image processing on the side images of the electronic components P captured by the cameras 51, 52, 53, and 54, and determines the presence or absence of scratches or chips on each surface of the electronic components P. Take on. In addition, the sorting unit 72 plays a role of performing separation control of the electronic component P based on the determination result by the image processing unit 71.
[0020]
The separation of the electronic parts P will be described. Around the rotary tables 21 and 41, defective products are discharged by being positioned downstream of the imaging positions of the electronic parts P by the cameras 51, 52, 53, and 54, respectively. Chutes 81, 82, 83, and 84, and chutes 85, 86, 87, and 88 for carrying out undecidable items are provided, respectively. Air nozzles 91, 92, and 98 for blowing the electronic component P from the rotary tables 21 and 41 toward the chutes 81, 82, and 88 are opposed to the chutes 81, 82, and 88, respectively. The rotary tables 21 and 41 are provided above the inner peripheral portions of the rotary tables 21 and 41, respectively. Each of these air nozzles 91, 92, to 98 is selectively driven by the sorting unit 72, and particularly when a defect of the electronic component P is detected from the image and from the image, it is convinced that it is a non-defective product. It is driven when cannot be obtained (determination is impossible).
[0021]
Therefore, if the electronic component P subjected to the appearance inspection by the first to fourth cameras 51, 52, 53, 54 is a defective product according to the determination result, the chute 81, 82, 83, 84 is used. In addition, if it is impossible to determine, it is dropped from the rotary tables 21 and 41 at any time by being dropped onto the chutes 85, 86, 87 and 88, respectively. In other words, the electronic component P subjected to the visual inspection by the cameras 51, 52, 53, and 54 is left on the rotary tables 21 and 41 only when it is determined to be a non-defective product, and is downstream in the transport direction. It will be used for visual inspection by the next camera. The electronic component P determined as a non-defective product in all the visual inspections by the cameras 51, 52, 53, 54 is discharged from the second rotary table 41 on the downstream side of the chute 88 via the guide 15. It is dropped into 16 and discharged.
[0022]
Thus, according to the appearance inspection apparatus configured as described above, the rotary tables 21 and 41 that form the first and second transport mechanisms 20 and 40 are arranged for the minute electronic components P that are difficult to be sucked by a vacuum chuck or the like. Since the orientation of the electronic component P is reversed via the reversing mechanism 30 when the plate is placed on the top and transported, and further transferred from the rotary table 21 to the rotary table 41, different surfaces of the electronic component P are different from each other as described above. The first to fourth cameras 51, 52, 53, and 54 can be directed, respectively. Accordingly, it is possible to efficiently inspect the appearance of four different surfaces (first surface to fourth surface) of the electronic component P.
[0023]
In addition, the electronic component P is simply placed on the rotary tables 21 and 41 and transported, and there is no need to change the posture of the electronic component P by gripping it. Since no control is required, the control is very simple. Furthermore, since the electronic component P is placed on the rotary tables 21 and 41 and transported, it is only necessary to control the imaging timing of the cameras 51, 52, 53, and 54 in accordance with the transport position. Can be processed in parallel in a pipeline manner, and each surface of each electronic component P can be visually inspected. For example, about 1000 to 1500 electronic components P per minute can be sufficiently inspected. Etc. are produced.
[0024]
In particular, the reversing mechanism 30 has a simple configuration in which the electronic component P is guided into the semicircular arc-shaped guide hole 31 and the posture thereof is reversed in the vertical direction. Therefore, the guide hole 31 is adapted to the size of the electronic component P. In this case, the posture can be reliably reversed by 180 ° with almost no disturbance in the conveying posture, and at the same time, the conveying direction can be reversed. As a result, different surfaces of the electronic component P can be easily directed in a predetermined camera direction, and there is an effect that there is no possibility of preventing the electronic component P from being continuously conveyed.
[0025]
In the above-described embodiment, the first and second transport mechanisms 20 and 40 are realized by using the rotary tables 21 and 41. However, the linear conveyors 22 and 42 can also be realized as shown in FIG. . In this case, since the cameras can be arranged on both sides of the linear conveyors 22 and 42, the two side surfaces orthogonal to the transport direction of the electronic component P placed and transported on the linear conveyors 22 and 42 are inspected. In this way, the first to fourth cameras 51, 52, 53, 54 may be arranged. In this case, the reversing mechanism 30 is realized with the guide hole 34 having a twisted shape so that the electronic component P is reversed by 90 ° in a direction perpendicular to the conveying direction as shown in FIG. You can do that. If the electronic component P is reversed 90 ° in the direction orthogonal to the conveying direction using such a reversing mechanism 30, the surface of the electronic component P positioned up and down on the linear conveyor 22 is positioned on both sides. To be guided onto the second linear conveyor 42. Therefore, the appearance inspection of the electronic component P can be efficiently performed as in the previous embodiment.
[0026]
In addition, this invention is not limited to each embodiment mentioned above. For example, the first and second transport mechanisms 20 and 40 can be configured by combining a rotary table and a linear conveyor. Moreover, what surface of the electronic component P placed and transported by the first and second transport mechanisms 20 and 40 is to be imaged from the camera may be determined according to the specification, and according to the imaging surface. The reversing mechanism 30 may determine whether the electronic component P is reversed 180 ° or 90 °.
[0027]
Further, when it is necessary to inspect six surfaces of the electronic component P, for example, a linear feeder is provided to take out the electronic component P from the rotary table 41 and convey it, and the electronic component is placed on the linear feeder orthogonal to the linear feeder. There is also a technique in which the surface of the electronic component that has been positioned as the front end portion and the rear end portion is positioned as a side surface with respect to the transport direction and the surfaces are inspected. In addition, after visual inspection of three different surfaces of the electronic component P placed on the first transport mechanism 20, the posture is reversed and further visual inspection of three different surfaces is performed on the second transport mechanism 40. It goes without saying that it may be done. Furthermore, after inspecting the external appearances of the four different surfaces of the electronic component P on the first transport mechanism 20, the external appearances of the two surfaces remaining on the second transport mechanism 40 whose posture is reversed are inspected. Is also possible. In this case, the surface of the electronic component P imaged by each camera in the first and second transport mechanisms 20 and 40 and the reverse direction of the electronic component P may be set appropriately in advance. Further, as described above, the present invention can be similarly applied to the case of visual inspection of a relatively large electronic component having a side of about several centimeters. In addition, the present invention can be variously modified and implemented without departing from the scope of the invention.
[0028]
【The invention's effect】
As described above, according to the present invention, the electronic component is placed on and transported on the first and second transport mechanisms, and the posture of the electronic component is reversed via the reversing mechanism. Since the appearance is inspected for each surface of the electronic component on each of the transport mechanisms after the replacement, the inspection efficiency can be improved, and the control itself can be greatly simplified. Furthermore, it is possible to carry out appearance inspection while conveying a plurality of electronic components at high speed, and to achieve a great practical effect such as greatly simplifying the configuration of the entire apparatus.
[Brief description of the drawings]
FIG. 1 is a diagram showing a shape of an electronic component.
FIG. 2 is a perspective view showing a schematic configuration of an appearance inspection apparatus according to the first embodiment of the present invention.
FIG. 3 is a plan view showing the arrangement of an electronic component transport system and a camera in the appearance inspection apparatus shown in FIG. 1;
4 is a diagram showing a configuration example of a reversing mechanism in the appearance inspection apparatus shown in FIG. 1. FIG.
FIG. 5 is a plan view showing the arrangement of an electronic component transport system and a camera in an appearance inspection apparatus according to a second embodiment of the present invention.
6 is a diagram showing a configuration example of a reversing mechanism in the appearance inspection apparatus shown in FIG.
[Explanation of symbols]
P Electronic component 10 Supply mechanism 20 First transport mechanism 21 Rotary table 22 Linear conveyor 30 Reversing mechanism 32 Guide hole (for 180 ° reversal)
34 Guide hole (for 90 ° inversion)
40 Second transport mechanism 41 Rotary table 42 Linear conveyor 51, 52, 53, 54 Camera 70 Inspection unit 71 Image processing unit 72 Selection unit

Claims (5)

直方体または略直方体形状をなす複数の電子部品を整列させて順次1個ずつ供給する供給機構と、
この供給機構から供給された電子部品を載置して搬送し、該電子部品の搬送方向と直角な方向の互いに異なる第1面および第2面を、第1および第2のカメラによる撮像に供する第1の搬送機構と、
この第1の搬送機構を介して搬送された電子部品を導くガイドを備え、このガイドに沿わせて電子部品を搬送して該電子部品をその搬送方向と直交する向きに反転させて前記電子部品の下側となる面を90°または180°反転させる反転機構と、
この反転機構を介して向きが反転された電子部品を載置して搬送し、該電子部品の搬送方向と直角な方向の前記第1面および第2面とはそれぞれ異なる第3面および第4面を、第3および第4のカメラによる撮像に供する第2の搬送機構と、
前記各カメラにてそれぞれ撮像された前記電子部品の互いに異なる第1面乃至第4面の画像からその外観の良否を判定する画像処理手段と
を具備したことを特徴とする外観検査装置。
A supply mechanism for aligning a plurality of electronic components having a rectangular parallelepiped shape or a substantially rectangular parallelepiped shape and sequentially supplying one by one;
The electronic component supplied from the supply mechanism is placed and transported, and the first and second surfaces different from each other in the direction perpendicular to the transport direction of the electronic component are subjected to imaging by the first and second cameras. A first transport mechanism;
The electronic component includes a guide for guiding the electronic component conveyed through the first conveyance mechanism, conveys the electronic component along the guide, and reverses the electronic component in a direction orthogonal to the conveying direction. A reversing mechanism for reversing the lower surface by 90 ° or 180 °,
Through this reversing mechanism, the electronic component whose direction is reversed is placed and conveyed, and the third surface and the fourth surface are different from the first surface and the second surface in the direction perpendicular to the conveying direction of the electronic component, respectively. A second transport mechanism for subjecting the surface to imaging by the third and fourth cameras;
An appearance inspection apparatus comprising: an image processing unit that determines the quality of an appearance from images of first to fourth surfaces of the electronic components captured by the cameras.
前記第1および第2のカメラは、前記第1の搬送機構に載置された電子部品の上面と該第1の搬送機構がなす搬送路の一側部に向く面とをそれぞれ撮像し、前記第3および第4のカメラは、前記第2の搬送機構に載置された電子部品の上面と該第2の搬送機構がなす搬送路の一側部に向く面とをそれぞれ撮像するものであって、
前記反転機構は、前記第1の搬送機構を介して搬送された電子部品の下側となる面を180°反転させて前記第2の搬送機構に導くことを特徴とする請求項1に記載の外観検査装置。
The first and second cameras respectively capture an upper surface of an electronic component placed on the first transport mechanism and a surface facing one side of a transport path formed by the first transport mechanism, The third and fourth cameras respectively capture images of the upper surface of the electronic component placed on the second transport mechanism and the surface facing one side of the transport path formed by the second transport mechanism. And
2. The reversing mechanism according to claim 1, wherein the lower surface of the electronic component conveyed via the first conveying mechanism is inverted 180 ° and guided to the second conveying mechanism. Appearance inspection device.
前記第1および第2の搬送機構は、それぞれ回転テーブルからなることを特徴とする請求項2に記載の外観検査装置。The appearance inspection apparatus according to claim 2, wherein each of the first and second transport mechanisms includes a rotary table. 前記第1および第2のカメラは、前記第1の搬送機構に載置された電子部品の該第1の搬送機構がなす搬送路の両側部にそれぞれ向く2つの面をそれぞれ撮像し、前記第3および第4のカメラは、前記第2の搬送機構に載置された電子部品の該第2の搬送機構がなす搬送路の両側部にそれぞれ向く2つの面をそれぞれ撮像するものであって、
前記反転機構は上記第1の搬送機構を介して搬送された電子部品の下側となる面を90°反転させて前記第2の搬送機構に導くことを特徴とする請求項1に記載の外観検査装置。
The first and second cameras respectively capture images of two surfaces of the electronic component placed on the first transport mechanism facing the both sides of the transport path formed by the first transport mechanism, and The third and fourth cameras respectively capture two surfaces of the electronic components placed on the second transport mechanism that face the both sides of the transport path formed by the second transport mechanism,
2. The appearance according to claim 1, wherein the reversing mechanism reverses a surface on the lower side of the electronic component conveyed through the first conveying mechanism by 90 ° and guides it to the second conveying mechanism. Inspection device.
前記第1および第2の搬送機構は、それぞれリニアコンベアからなることを特徴とする請求項2に記載の外観検査装置。The appearance inspection apparatus according to claim 2, wherein each of the first and second transport mechanisms includes a linear conveyor.
JP06966499A 1999-03-16 1999-03-16 Appearance inspection device Expired - Lifetime JP4039505B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP06966499A JP4039505B2 (en) 1999-03-16 1999-03-16 Appearance inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06966499A JP4039505B2 (en) 1999-03-16 1999-03-16 Appearance inspection device

Publications (2)

Publication Number Publication Date
JP2000266521A JP2000266521A (en) 2000-09-29
JP4039505B2 true JP4039505B2 (en) 2008-01-30

Family

ID=13409336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06966499A Expired - Lifetime JP4039505B2 (en) 1999-03-16 1999-03-16 Appearance inspection device

Country Status (1)

Country Link
JP (1) JP4039505B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353681A (en) * 2011-06-08 2012-02-15 新昌县航达机械制造有限公司 Array apparatus for finished capsule checking machine

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL147702A0 (en) * 2000-05-23 2002-08-14 Electro Scient Ind Inc Inspection machine for surface mount passive component
JP3822859B2 (en) * 2002-11-06 2006-09-20 日本リトル株式会社 Transport device
WO2005100215A1 (en) 2004-04-13 2005-10-27 Tdk Corporation Chip component carrying method and system, and visual inspection method and system
NO327576B1 (en) * 2006-06-01 2009-08-17 Ana Tec As Method and apparatus for analyzing objects
JP4977421B2 (en) * 2006-09-22 2012-07-18 日東精工株式会社 Parts inspection device
JP5008933B2 (en) * 2006-09-25 2012-08-22 日東精工株式会社 Parts inspection device
JP2009216698A (en) * 2008-02-07 2009-09-24 Camtek Ltd Apparatus and method for imaging multiple sides of object
KR101007307B1 (en) 2008-04-07 2011-01-13 영텍 일렉트로닉스 코포레이션 Electronic device inspection system and method
JP5586072B2 (en) * 2010-11-30 2014-09-10 上野精機株式会社 Electronic component inspection device and parts feeder
JP5286615B2 (en) * 2011-04-21 2013-09-11 有限会社山本機械精工 Appearance inspection machine
JP6109509B2 (en) * 2012-08-29 2017-04-05 株式会社川島製作所 Article alignment supply device
WO2014168241A1 (en) * 2013-04-12 2014-10-16 株式会社オーテックメカニカル Component supply device, and component supply control method
CN103920650B (en) * 2014-03-19 2016-01-13 浙江歌瑞新材料有限公司 A kind of automatic detection device
CN104406516B (en) * 2014-11-05 2017-07-21 大族激光科技产业集团股份有限公司 Workpiece abnormity size detecting device
KR101776002B1 (en) 2016-04-05 2017-09-07 권내형 System for inspecting tapered roller
CN107611053A (en) * 2016-07-12 2018-01-19 泰科电子(上海)有限公司 Chip sorting and packaging platform
CN113042403B (en) * 2021-03-10 2022-11-18 深圳市金辉翔电子有限公司 Cuboid charger check out test set
CN113731871A (en) * 2021-09-16 2021-12-03 浙江怡亚信智能科技有限公司 Small article waste detection equipment
CN114371177A (en) * 2021-12-03 2022-04-19 桂林芯隆科技有限公司 Method and device for detecting surface defects of DFB laser chip
CN114850057A (en) * 2022-05-10 2022-08-05 苏州天准科技股份有限公司 Electrode comprehensive detection equipment and detection method
CN115684166B (en) * 2023-01-03 2023-03-21 中储粮成都储藏研究院有限公司 Soybean detector
CN116559182B (en) * 2023-07-07 2023-09-19 湖南师范大学 Visual detection device for thermistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353681A (en) * 2011-06-08 2012-02-15 新昌县航达机械制造有限公司 Array apparatus for finished capsule checking machine

Also Published As

Publication number Publication date
JP2000266521A (en) 2000-09-29

Similar Documents

Publication Publication Date Title
JP4039505B2 (en) Appearance inspection device
JP3671789B2 (en) Parts handling equipment and handling method
JP2585133B2 (en) Parts appearance sorting device
US8056698B2 (en) Tray handling apparatus and semiconductor device inspecting method using the same
JP3515435B2 (en) Work inspection device and inspection method
JP2008105811A (en) Visual inspection device of workpiece
JP2009208963A (en) Conveyor reversing device, and inspection device using the same
JPH08168727A (en) Apparatus for inspecting small articles
WO2001038013A1 (en) Work inspection device
JPH0565405B2 (en)
JPH08136463A (en) Appearance inspection device
JP2004361223A (en) Visual inspection device for cap
JP2018117949A (en) Tablet printing apparatus
TW593973B (en) Exterior inspection apparatus for workpieces and exterior inspection method
JP3464990B2 (en) Small object inspection equipment
JP2000097865A (en) Appearance inspecting device for tablet
JP4264155B2 (en) Small object appearance inspection device
JPH08336784A (en) Article handling device
JP4251307B2 (en) Appearance inspection device
JP4337418B2 (en) Chip type electronic component handling apparatus and chip type electronic component handling method
JP4050942B2 (en) Appearance inspection device
JP2002243654A (en) Equipment for inspecting product, and method for inspecting product using the same
JPH0834759B2 (en) Conveyed object inspection method and apparatus
JP2006320779A (en) Visual inspection device for flat tablet
JP4152128B2 (en) Inspection equipment for rectangular parallelepiped articles

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060127

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20071003

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20071010

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7426

Effective date: 20071031

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20071031

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101116

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131116

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term