JP4782783B2 - タイ層を有する被覆研磨物品、および同物品の製造方法と使用方法 - Google Patents
タイ層を有する被覆研磨物品、および同物品の製造方法と使用方法 Download PDFInfo
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- JP4782783B2 JP4782783B2 JP2007516476A JP2007516476A JP4782783B2 JP 4782783 B2 JP4782783 B2 JP 4782783B2 JP 2007516476 A JP2007516476 A JP 2007516476A JP 2007516476 A JP2007516476 A JP 2007516476A JP 4782783 B2 JP4782783 B2 JP 4782783B2
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- 239000004115 Sodium Silicate Substances 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
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- FYAMXEPQQLNQDM-UHFFFAOYSA-N Tris(1-aziridinyl)phosphine oxide Chemical compound C1CN1P(N1CC1)(=O)N1CC1 FYAMXEPQQLNQDM-UHFFFAOYSA-N 0.000 description 1
- AVUYXHYHTTVPRX-UHFFFAOYSA-N Tris(2-methyl-1-aziridinyl)phosphine oxide Chemical compound CC1CN1P(=O)(N1C(C1)C)N1C(C)C1 AVUYXHYHTTVPRX-UHFFFAOYSA-N 0.000 description 1
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- GZCGUPFRVQAUEE-SLPGGIOYSA-N aldehydo-D-glucose Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C=O GZCGUPFRVQAUEE-SLPGGIOYSA-N 0.000 description 1
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
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- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 235000012241 calcium silicate Nutrition 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
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- 235000011132 calcium sulphate Nutrition 0.000 description 1
- 235000010261 calcium sulphite Nutrition 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
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- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
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- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- BLCKNMAZFRMCJJ-UHFFFAOYSA-N cyclohexyl cyclohexyloxycarbonyloxy carbonate Chemical compound C1CCCCC1OC(=O)OOC(=O)OC1CCCCC1 BLCKNMAZFRMCJJ-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
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- 239000000945 filler Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- IVJISJACKSSFGE-UHFFFAOYSA-N formaldehyde;1,3,5-triazine-2,4,6-triamine Chemical compound O=C.NC1=NC(N)=NC(N)=N1 IVJISJACKSSFGE-UHFFFAOYSA-N 0.000 description 1
- 239000003205 fragrance Substances 0.000 description 1
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- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 150000002432 hydroperoxides Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- LDHQCZJRKDOVOX-IHWYPQMZSA-N isocrotonic acid Chemical compound C\C=C/C(O)=O LDHQCZJRKDOVOX-IHWYPQMZSA-N 0.000 description 1
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- 239000002923 metal particle Substances 0.000 description 1
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- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
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- 229910052618 mica group Inorganic materials 0.000 description 1
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- BPLYVSYSBPLDOA-GYOJGHLZSA-N n-[(2r,3r)-1,3-dihydroxyoctadecan-2-yl]tetracosanamide Chemical compound CCCCCCCCCCCCCCCCCCCCCCCC(=O)N[C@H](CO)[C@H](O)CCCCCCCCCCCCCCC BPLYVSYSBPLDOA-GYOJGHLZSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
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- 150000002978 peroxides Chemical class 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
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- 238000007517 polishing process Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
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- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011496 polyurethane foam Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 239000000429 sodium aluminium silicate Substances 0.000 description 1
- 235000012217 sodium aluminium silicate Nutrition 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 235000019794 sodium silicate Nutrition 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000000375 suspending agent Substances 0.000 description 1
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- 229910052623 talc Inorganic materials 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- GJBRNHKUVLOCEB-UHFFFAOYSA-N tert-butyl benzenecarboperoxoate Chemical compound CC(C)(C)OOC(=O)C1=CC=CC=C1 GJBRNHKUVLOCEB-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
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- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 230000009974 thixotropic effect Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical compound OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
- B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
- B24D3/004—Flexible supporting members, e.g. paper, woven, plastic materials with special coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/871,455 US7150770B2 (en) | 2004-06-18 | 2004-06-18 | Coated abrasive article with tie layer, and method of making and using the same |
| US10/871,455 | 2004-06-18 | ||
| PCT/US2005/013087 WO2006006999A1 (en) | 2004-06-18 | 2005-04-19 | Coated abrasive article with tie layer, and method of making and using the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008502492A JP2008502492A (ja) | 2008-01-31 |
| JP2008502492A5 JP2008502492A5 (OSRAM) | 2008-05-29 |
| JP4782783B2 true JP4782783B2 (ja) | 2011-09-28 |
Family
ID=34967709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007516476A Expired - Fee Related JP4782783B2 (ja) | 2004-06-18 | 2005-04-19 | タイ層を有する被覆研磨物品、および同物品の製造方法と使用方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US7150770B2 (OSRAM) |
| EP (1) | EP1776209B1 (OSRAM) |
| JP (1) | JP4782783B2 (OSRAM) |
| KR (1) | KR101106912B1 (OSRAM) |
| CN (1) | CN100522488C (OSRAM) |
| AT (1) | ATE390247T1 (OSRAM) |
| BR (1) | BRPI0512059B1 (OSRAM) |
| CA (1) | CA2569870A1 (OSRAM) |
| DE (1) | DE602005005682T2 (OSRAM) |
| WO (1) | WO2006006999A1 (OSRAM) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050282029A1 (en) * | 2004-06-18 | 2005-12-22 | 3M Innovative Properties Company | Polymerizable composition and articles therefrom |
| EP2305426A1 (de) * | 2005-12-07 | 2011-04-06 | sia Abrasives Industries AG | Schleifwerkzeug |
| US7875388B2 (en) | 2007-02-06 | 2011-01-25 | 3M Innovative Properties Company | Electrodes including polyacrylate binders and methods of making and using the same |
| US8038750B2 (en) | 2007-07-13 | 2011-10-18 | 3M Innovative Properties Company | Structured abrasive with overlayer, and method of making and using the same |
| KR101464800B1 (ko) * | 2007-08-13 | 2014-11-24 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 코팅된 연마 라미네이트 디스크 및 그의 제조 방법 |
| US20090111022A1 (en) * | 2007-10-24 | 2009-04-30 | 3M Innovative Properties Company | Electrode compositions and methods |
| US20100011672A1 (en) * | 2008-07-16 | 2010-01-21 | Kincaid Don H | Coated abrasive article and method of making and using the same |
| WO2010057076A2 (en) * | 2008-11-17 | 2010-05-20 | Saint-Gobain Abrasives, Inc. | Acrylate color-stabilized phenolic bound abrasive products and methods for making same |
| US7857080B2 (en) | 2009-01-19 | 2010-12-28 | Hitachi Automotive Products (Usa), Inc. | System for selectively consuming and storing electrical energy in a hybrid vehicle |
| CN101704224B (zh) * | 2009-11-06 | 2011-05-04 | 南京航空航天大学 | 带有过渡层和粘接层的固结磨料研磨抛光垫 |
| EP2869969A2 (en) | 2012-07-06 | 2015-05-13 | 3M Innovative Properties Company | Coated abrasive article |
| CN102862128B (zh) * | 2012-09-20 | 2015-10-21 | 北京国瑞升科技股份有限公司 | 一种凹凸结构磨料制品及其制备方法 |
| AR093483A1 (es) * | 2012-11-20 | 2015-06-10 | Saint Gobain Abrasives Inc | Articulo abrasivo que comprende particulas abrasivas de una composicion compuesta |
| BR112016006779A2 (pt) * | 2014-05-01 | 2017-08-01 | 3M Innovative Properties Co | artigos abrasivos flexíveis e método de abrasão de uma peça de trabalho |
| US9844853B2 (en) | 2014-12-30 | 2017-12-19 | Saint-Gobain Abrasives, Inc./Saint-Gobain Abrasifs | Abrasive tools and methods for forming same |
| BR112018013258A2 (pt) * | 2015-12-30 | 2018-12-11 | Saint Gobain Abrasifs Sa | ferramentas abrasivas e métodos para formar as mesmas |
| CN116460755A (zh) * | 2016-03-28 | 2023-07-21 | 圣戈班磨料磨具有限公司 | 包括包装的研磨制品 |
| EP3519137A4 (en) * | 2016-09-30 | 2020-06-10 | 3M Innovative Properties Company | ABRASIVE ARTICLES AND METHOD FOR THE PRODUCTION THEREOF |
| CN109843509A (zh) * | 2016-10-25 | 2019-06-04 | 3M创新有限公司 | 结构化磨料制品及其制备方法 |
| EP3532561B1 (en) | 2016-10-25 | 2021-04-28 | 3M Innovative Properties Company | Magnetizable abrasive particles and abrasive articles including them |
| WO2018080799A1 (en) | 2016-10-25 | 2018-05-03 | 3M Innovative Properties Company | Magnetizable abrasive particle and method of making the same |
| CN109863568B (zh) | 2016-10-25 | 2020-05-15 | 3M创新有限公司 | 制备可磁化磨料颗粒的方法 |
| WO2020021457A1 (en) | 2018-07-23 | 2020-01-30 | 3M Innovative Properties Company | Articles including polyester backing and primer layer and related methods |
| WO2020035764A1 (en) | 2018-08-13 | 2020-02-20 | 3M Innovative Properties Company | Structured abrasive article and method of making the same |
| CN112839772A (zh) | 2018-10-09 | 2021-05-25 | 3M创新有限公司 | 经处理的背衬和包括该经处理的背衬的经涂覆的磨料制品 |
| WO2021116882A1 (en) | 2019-12-09 | 2021-06-17 | 3M Innovative Properties Company | Abrasive article |
| US11638979B2 (en) | 2020-06-09 | 2023-05-02 | Applied Materials, Inc. | Additive manufacturing of polishing pads |
| US11612978B2 (en) | 2020-06-09 | 2023-03-28 | Applied Materials, Inc. | Additive manufacturing of polishing pads |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002515350A (ja) * | 1998-05-19 | 2002-05-28 | スリーエム イノベイティブ プロパティズ カンパニー | 遮蔽コーティングを含む研磨物品 |
Family Cites Families (86)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US556437A (en) * | 1896-03-17 | Electkio abo lamp | ||
| US3225013A (en) | 1964-10-12 | 1965-12-21 | Minnesota Mining & Mfg | Curable compositions of an organic acid anhydride and an alkylenimine derivative |
| US4314827A (en) | 1979-06-29 | 1982-02-09 | Minnesota Mining And Manufacturing Company | Non-fused aluminum oxide-based abrasive mineral |
| US4518397A (en) | 1979-06-29 | 1985-05-21 | Minnesota Mining And Manufacturing Company | Articles containing non-fused aluminum oxide-based abrasive mineral |
| US4588419A (en) | 1980-10-08 | 1986-05-13 | Carborundum Abrasives Company | Resin systems for high energy electron curable resin coated webs |
| US4623364A (en) | 1984-03-23 | 1986-11-18 | Norton Company | Abrasive material and method for preparing the same |
| US4525232A (en) | 1984-04-16 | 1985-06-25 | Loctite (Ireland) Ltd. | Polymerizable acrylic compositions having vinyl ether additive |
| CA1266568A (en) | 1984-05-09 | 1990-03-13 | Minnesota Mining And Manufacturing Company | Coated abrasive product incorporating selective mineral substitution |
| CA1266569A (en) | 1984-05-09 | 1990-03-13 | Minnesota Mining And Manufacturing Company | Coated abrasive product incorporating selective mineral substitution |
| US4598269A (en) | 1984-06-13 | 1986-07-01 | Tektronix, Inc. | Method and apparatus for processing an analog signal |
| US5227104A (en) | 1984-06-14 | 1993-07-13 | Norton Company | High solids content gels and a process for producing them |
| CA1254238A (en) | 1985-04-30 | 1989-05-16 | Alvin P. Gerk | Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products |
| US4820745A (en) | 1985-05-07 | 1989-04-11 | Huels Troisdorf Aktiengesellschaft | Pressure-sensitive adhesives based on radiation-curable polyesters containing (meth)acrylic groups |
| US4652275A (en) | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4749617A (en) | 1985-12-18 | 1988-06-07 | Minnesota Mining And Manufacturing Company | Composite article containing rigid layers |
| US4770671A (en) | 1985-12-30 | 1988-09-13 | Minnesota Mining And Manufacturing Company | Abrasive grits formed of ceramic containing oxides of aluminum and yttrium, method of making and using the same and products made therewith |
| US4751138A (en) | 1986-08-11 | 1988-06-14 | Minnesota Mining And Manufacturing Company | Coated abrasive having radiation curable binder |
| US4799939A (en) | 1987-02-26 | 1989-01-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4881951A (en) | 1987-05-27 | 1989-11-21 | Minnesota Mining And Manufacturing Co. | Abrasive grits formed of ceramic containing oxides of aluminum and rare earth metal, method of making and products made therewith |
| US4939008A (en) | 1988-08-16 | 1990-07-03 | Minnesota Mining And Manufacturing Company | Composite film |
| US4927431A (en) | 1988-09-08 | 1990-05-22 | Minnesota Mining And Manufacturing Company | Binder for coated abrasives |
| US5011508A (en) | 1988-10-14 | 1991-04-30 | Minnesota Mining And Manufacturing Company | Shelling-resistant abrasive grain, a method of making the same, and abrasive products |
| US5108463B1 (en) | 1989-08-21 | 1996-08-13 | Minnesota Mining & Mfg | Conductive coated abrasives |
| US5139978A (en) | 1990-07-16 | 1992-08-18 | Minnesota Mining And Manufacturing Company | Impregnation method for transformation of transition alumina to a alpha alumina |
| US5137542A (en) | 1990-08-08 | 1992-08-11 | Minnesota Mining And Manufacturing Company | Abrasive printed with an electrically conductive ink |
| US5078753A (en) | 1990-10-09 | 1992-01-07 | Minnesota Mining And Manufacturing Company | Coated abrasive containing erodable agglomerates |
| CA2054554A1 (en) | 1990-11-14 | 1992-05-15 | Chong Soo Lee | Coated abrasive having an overcoating of an epoxy resin coatable from water and a grinding aid |
| US5090968A (en) | 1991-01-08 | 1992-02-25 | Norton Company | Process for the manufacture of filamentary abrasive particles |
| US5152917B1 (en) | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| US5378251A (en) | 1991-02-06 | 1995-01-03 | Minnesota Mining And Manufacturing Company | Abrasive articles and methods of making and using same |
| US5316812A (en) | 1991-12-20 | 1994-05-31 | Minnesota Mining And Manufacturing Company | Coated abrasive backing |
| BR9206806A (pt) | 1991-12-20 | 1995-10-31 | Minnesota Mining & Mfg | Suporte abrasivo revestido e abrasivo revestido |
| JPH0791396B2 (ja) * | 1992-02-07 | 1995-10-04 | ソマール株式会社 | 研磨用フイルム |
| AU3617593A (en) | 1992-02-12 | 1993-09-03 | Minnesota Mining And Manufacturing Company | A coated abrasive article containing an electrically conductive backing |
| US5203884A (en) | 1992-06-04 | 1993-04-20 | Minnesota Mining And Manufacturing Company | Abrasive article having vanadium oxide incorporated therein |
| DE4220958C2 (de) | 1992-06-25 | 1994-04-28 | Ivoclar Ag Schaan | Dentalmaterial |
| US5366523A (en) | 1992-07-23 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Abrasive article containing shaped abrasive particles |
| US5201916A (en) | 1992-07-23 | 1993-04-13 | Minnesota Mining And Manufacturing Company | Shaped abrasive particles and method of making same |
| US5328716A (en) | 1992-08-11 | 1994-07-12 | Minnesota Mining And Manufacturing Company | Method of making a coated abrasive article containing a conductive backing |
| US5344688A (en) | 1992-08-19 | 1994-09-06 | Minnesota Mining And Manufacturing Company | Coated abrasive article and a method of making same |
| US5611825A (en) | 1992-09-15 | 1997-03-18 | Minnesota Mining And Manufacturing Company | Abrasive articles and methods of making same |
| US5551961A (en) | 1992-09-15 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive articles and methods of making same |
| BR9307112A (pt) | 1992-09-25 | 1999-03-30 | Minnesota Mining & Mfg | Processo para preparação de material de grão abrasivo grão abrasivo e artigo abrasivo |
| DE69302582T2 (de) | 1992-09-25 | 1996-10-31 | Minnesota Mining & Mfg | Verfahren zur herstellung von aluminiumoxid und ceroxid enthaltendem schleifkorn |
| DE69327111T2 (de) | 1992-09-25 | 2000-04-20 | Minnesota Mining And Mfg. Co. | Seltenes erdoxid enthaltendes schleifkorn |
| US5304224A (en) | 1992-10-01 | 1994-04-19 | Minnesota Mining And Manufacturing Company | Coated abrasive article having a tear resistant backing |
| CA2115889A1 (en) | 1993-03-18 | 1994-09-19 | David E. Broberg | Coated abrasive article having diluent particles and shaped abrasive particles |
| US5436063A (en) | 1993-04-15 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Coated abrasive article incorporating an energy cured hot melt make coat |
| US5441549A (en) | 1993-04-19 | 1995-08-15 | Minnesota Mining And Manufacturing Company | Abrasive articles comprising a grinding aid dispersed in a polymeric blend binder |
| US5306319A (en) | 1993-05-12 | 1994-04-26 | Minnesota Mining And Manufacturing Company | Surface treating articles and methods of making same |
| CN1124472A (zh) | 1993-05-26 | 1996-06-12 | 美国3M公司 | 在加工件上形成光滑表面的方法 |
| US5549962A (en) | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
| RU2124978C1 (ru) * | 1993-09-13 | 1999-01-20 | Миннесота Майнинг Энд Мэнюфекчуринг Компани | Абразивное изделие, способ его производства, способ его использования для чистовой обработки и рабочий инструмент для его производства |
| KR100372204B1 (ko) | 1993-10-19 | 2003-04-11 | 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 | 적층에의해적용되는메이크코트를포함하는연마용품및그제조방법 |
| CA2134156A1 (en) | 1993-11-22 | 1995-05-23 | Thomas P. Klun | Coatable compositions, abrasive articles made therefrom, and methods of making and using same |
| US5505747A (en) | 1994-01-13 | 1996-04-09 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| US5534391A (en) | 1994-01-28 | 1996-07-09 | Minnesota Mining And Manufacturing Company | Aziridine primer for flexographic printing plates |
| KR100372592B1 (ko) | 1994-09-30 | 2003-05-16 | 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 | 코팅된연마용물품,이의제조방법및사용방법 |
| US5578095A (en) | 1994-11-21 | 1996-11-26 | Minnesota Mining And Manufacturing Company | Coated abrasive article |
| DE69622734T2 (de) | 1995-10-20 | 2003-04-24 | Minnesota Mining And Mfg. Co., Saint Paul | Schleifmittel mit anorganischem metallischen orthophosphat |
| US5853632A (en) | 1995-12-29 | 1998-12-29 | The Procter & Gamble Company | Process for making improved microwave susceptor comprising a dielectric silicate foam substance coated with a microwave active coating |
| US5643669A (en) | 1996-02-08 | 1997-07-01 | Minnesota Mining And Manufacturing Company | Curable water-based coating compositions and cured products thereof |
| US5700302A (en) | 1996-03-15 | 1997-12-23 | Minnesota Mining And Manufacturing Company | Radiation curable abrasive article with tie coat and method |
| US5754338A (en) | 1996-04-01 | 1998-05-19 | Minnesota Mining And Manufacturing Company | Structured retroreflective sheeting having a rivet-like connection |
| US5784197A (en) | 1996-04-01 | 1998-07-21 | Minnesota Mining And Manufacturing Company | Ultra-flexible retroreflective sheeting with coated back surface |
| US5882796A (en) | 1996-04-01 | 1999-03-16 | Minnesota Mining And Manufacturing Company | Bonded structured retroreflective sheeting |
| BR9708934A (pt) | 1996-05-08 | 1999-08-03 | Minnesota Mining & Mfg | Artigo abrasivo abrasivo e processo para produzir um artigo abrasivo |
| US6200666B1 (en) | 1996-07-25 | 2001-03-13 | 3M Innovative Properties Company | Thermal transfer compositions, articles, and graphic articles made with same |
| CN1085575C (zh) * | 1996-09-11 | 2002-05-29 | 美国3M公司 | 磨料制品及其制造方法 |
| US6475253B2 (en) | 1996-09-11 | 2002-11-05 | 3M Innovative Properties Company | Abrasive article and method of making |
| AU721046B2 (en) | 1996-12-19 | 2000-06-22 | Rohm And Haas Company | Coating substrates |
| US5876268A (en) | 1997-01-03 | 1999-03-02 | Minnesota Mining And Manufacturing Company | Method and article for the production of optical quality surfaces on glass |
| US5851247A (en) | 1997-02-24 | 1998-12-22 | Minnesota Mining & Manufacturing Company | Structured abrasive article adapted to abrade a mild steel workpiece |
| US5942015A (en) | 1997-09-16 | 1999-08-24 | 3M Innovative Properties Company | Abrasive slurries and abrasive articles comprising multiple abrasive particle grades |
| US6139594A (en) | 1998-04-13 | 2000-10-31 | 3M Innovative Properties Company | Abrasive article with tie coat and method |
| US6248815B1 (en) | 1998-06-04 | 2001-06-19 | H. B. Fuller Licensing & Financing, Inc. | Dry bond film laminate employing acrylic emulsion adhesives with improved crosslinker |
| US6261682B1 (en) | 1998-06-30 | 2001-07-17 | 3M Innovative Properties | Abrasive articles including an antiloading composition |
| US6059850A (en) | 1998-07-15 | 2000-05-09 | 3M Innovative Properties Company | Resilient abrasive article with hard anti-loading size coating |
| US6239049B1 (en) | 1998-12-22 | 2001-05-29 | 3M Innovative Properties Company | Aminoplast resin/thermoplastic polyamide presize coatings for abrasive article backings |
| EP1144515A1 (en) | 1998-12-22 | 2001-10-17 | 3M Innovative Properties Company | Acrylated oligomer/thermoplastic polyamide presize coatings for abrasive article backings |
| US6234875B1 (en) | 1999-06-09 | 2001-05-22 | 3M Innovative Properties Company | Method of modifying a surface |
| WO2001094452A2 (en) | 2000-06-08 | 2001-12-13 | Lord Corporation | Uv curable coating for golf balls |
| US6645624B2 (en) | 2000-11-10 | 2003-11-11 | 3M Innovative Properties Company | Composite abrasive particles and method of manufacture |
| US20040029511A1 (en) | 2001-03-20 | 2004-02-12 | Kincaid Don H. | Abrasive articles having a polymeric material |
| US6833014B2 (en) | 2002-07-26 | 2004-12-21 | 3M Innovative Properties Company | Abrasive product, method of making and using the same, and apparatus for making the same |
| AU2002338066A1 (en) | 2002-09-13 | 2004-04-30 | Komatsu Seiren Co., Ltd. | Modified fabric and process for its production |
-
2004
- 2004-06-18 US US10/871,455 patent/US7150770B2/en not_active Expired - Lifetime
-
2005
- 2005-04-19 AT AT05741860T patent/ATE390247T1/de not_active IP Right Cessation
- 2005-04-19 BR BRPI0512059-4B1A patent/BRPI0512059B1/pt not_active IP Right Cessation
- 2005-04-19 WO PCT/US2005/013087 patent/WO2006006999A1/en not_active Ceased
- 2005-04-19 CN CNB2005800197199A patent/CN100522488C/zh not_active Expired - Fee Related
- 2005-04-19 DE DE602005005682T patent/DE602005005682T2/de not_active Expired - Lifetime
- 2005-04-19 KR KR1020067026516A patent/KR101106912B1/ko not_active Expired - Fee Related
- 2005-04-19 EP EP05741860A patent/EP1776209B1/en not_active Expired - Lifetime
- 2005-04-19 JP JP2007516476A patent/JP4782783B2/ja not_active Expired - Fee Related
- 2005-04-19 CA CA002569870A patent/CA2569870A1/en not_active Abandoned
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002515350A (ja) * | 1998-05-19 | 2002-05-28 | スリーエム イノベイティブ プロパティズ カンパニー | 遮蔽コーティングを含む研磨物品 |
Also Published As
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|---|---|
| EP1776209A1 (en) | 2007-04-25 |
| BRPI0512059A (pt) | 2008-02-06 |
| US7150770B2 (en) | 2006-12-19 |
| WO2006006999A1 (en) | 2006-01-19 |
| DE602005005682T2 (de) | 2009-05-07 |
| US20050279028A1 (en) | 2005-12-22 |
| CN1968786A (zh) | 2007-05-23 |
| BRPI0512059B1 (pt) | 2013-12-10 |
| ATE390247T1 (de) | 2008-04-15 |
| CA2569870A1 (en) | 2006-01-19 |
| DE602005005682D1 (de) | 2008-05-08 |
| EP1776209B1 (en) | 2008-03-26 |
| KR20070027586A (ko) | 2007-03-09 |
| KR101106912B1 (ko) | 2012-01-25 |
| CN100522488C (zh) | 2009-08-05 |
| JP2008502492A (ja) | 2008-01-31 |
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