JP4765607B2 - Impact resistant clean container, sample transfer system - Google Patents

Description

  The present invention relates to an impact resistant clean container.

  Lithographic masks used for transfer of circuit patterns in semiconductor manufacturing or processed products thereof, and processed products of micro electro mechanical systems (MEMS) have a structure that is vulnerable to external impacts, and the outer shape is a wafer shape. Some are the main.

  Specifically, an X-ray lithography mask and a charged particle beam lithography mask. The latter is further divided into a mask for electron beam projection lithography (EPL), a mask for low-acceleration electron beam proximity projection lithography (LEEPL), and a mask for ion beam projection lithography (IPL), all of which are self-supporting films with thin circuit patterns ( It is formed as an absorber pattern or scatterer pattern on the membrane (hereinafter referred to as a membrane) or a through-hole pattern (hereinafter referred to as a stencil pattern) on the membrane, and therefore has a structure that is vulnerable to external impacts. In addition, in-process products of a microelectromechanical system may have a structure that is vulnerable to external impact, such as a diaphragm structure or a cantilever structure.

  Non-patent document 1 describes the EPL method and mask. In particular, the structure of an EPL mask having an outer shape of 200 mm is shown in FIGS. 5 and 6 on page 778 of Non-Patent Document 1 (Non-Patent Document 1).

FIG. 15 shows the structure of the EPL mask.
As shown in FIG. 15, the mask 201 has an outer shape of a 200 mm wafer, and a membrane 203 made of silicon having a length 204 of 1.13 mm and a thickness of 2 μm is formed on the surface. In this structure, a stencil pattern corresponding to the circuit pattern is formed.

  The membrane 203 has 40 pieces with a pitch 211 of 1.3 mm in the x direction, 100 pieces with a pitch 211 of 1.3 mm in the y direction, and a membrane of slightly different size on the outer circumference. A rectangle having a width 207 of 54.43 mm and a length 209 of 132.57 mm occupies one set, and one set is arranged on the left and right so that the interval 205 is 10 mm.

  Non-Patent Document 2 describes the LEEPL method. One example of a LEEPL mask is a structure in which a membrane made of silicon having a thickness of 1 um and a square with a side of 25 mm is formed in the center of a 200 mm substrate, and a stencil pattern corresponding to a circuit pattern is formed on the membrane. Yes (Non-Patent Document 2).

  By the way, since the performance of these processed samples or finished products of these samples is impaired by the adhesion of organic particles or inorganic particles floating in the normal atmosphere, a method for avoiding the adhesion is necessary. As a method for this, a local cleaning technique is employed.

  The local cleaning technology is a technique using a combination of a special container and an opener. More specifically, a sample is stored in a container maintained in an atmosphere of a given cleanliness (hereinafter referred to as a clean container). The sample is transported while the sample is stored in a clean container, and the opener assists the opener in loading and unloading the sample to the processing device or transfer device (hereinafter, the processing device and transfer device are collectively referred to as the processing device). This is a technique to be performed.

  Here, the opener means that the sample is carried in or out of the clean container while keeping the cleanness of the atmosphere in contact with the sample without exposing the sample to the external environment, and the sample is carried out of the clean container and carried into the processing apparatus. In addition, the apparatus can carry out the sample from the processing apparatus and carry it into the clean container.

In addition, in order to enjoy the benefits of standardization of clean containers and openers, SEMI (Semiconductor)
Equipment and Materials International) (location 3081 Zanker Road, San Jose, CA 95134, USA) (hereinafter referred to as SEMI standards).

  The SEMI standard includes a “standard mechanical interface” (hereinafter referred to as SMIF) depending on the difference in mechanical interface when a sample is carried into and out of a clean container (hereinafter referred to as a pod). .) Standard and “Front-Opening Interface Mechanical Standard” (hereinafter referred to as FIMS).

  In SMIF, a pod (hereinafter also referred to as SMIF pod) has a door at the bottom thereof, and a sample is carried into or out of the pod from the bottom of the pod by opening and closing the door. On the other hand, in the FIMS interface, a pod (hereinafter also referred to as “Front-Opening Unified Pod (FOUP))” has a door on its side surface, and the sample is carried into or out of the FOUP from the side surface of the FOUP by opening and closing this door. Therefore, the opener also conforms to each interface.

  The number of samples stored in the pod is usually 25 or 13 for a wafer. There is SEMI E19.4-0998E as a standard for SMIF pods containing 25 wafers having an outer diameter of 200 mm (Non-patent Document 3).

  However, a single pod is prepared for the wafer, and the interface between the pod and the opener is almost the same as the interface between the 25-pod pod and the opener.

When the sample is a 300 mm wafer, FIMS exists for 25 or 13 FOUPs, but the standard for operating a single FOUP in that system is determined by SEMI E103-0704 (Non-Patent Document 4) . As an example of a FOUP containing 1 sheet, the product FOUP for Incam SOLUTIONS (France)
There is One (registered trademark).

  When the sample is an EPL mask having an outer diameter of 200 mm (hereinafter referred to as a 200 mm EPL mask), a dedicated one-piece SMIF pod is practically used. A photograph of the pod taken from the top and a photograph taken from the bottom are listed as FIGURE 10.28 (a) and (b) on page 224 of Non-Patent Document 1, respectively.

  Further, Fig. 9 on page 933 of Non-Patent Document 2 is a photograph of the door portion of a one-sheet SMIF pod and an EPL mask placed thereon. Note that the pressure of the atmosphere in the pod is maintained at atmospheric pressure (the same pressure as the external environment).

  Furthermore, when the sample is a mask for LEEPL, a single vacuum type SMIF pod and a vacuum type opener are practically used. As described in Patent Document 1, this pod has a structure in which, after a sample is inserted in the air, the inside can be evacuated with the help of an opener and the state can be maintained (patent) Reference 1).

  Furthermore, the sample is transported together with the pod without bringing the pressure of the atmosphere in contact with the sample to atmospheric pressure, the sample is unloaded from the pod and loaded into the processing device, and the sample is unloaded from the processing device and the pod. It is possible to carry in. Hereinafter, the pod or opener used at atmospheric pressure is referred to as the atmospheric type only when it is distinguished from the pod or opener by this method. In addition, the degree of vacuum in this method is a low vacuum region (100 to 1000 Pa).

  There are several types of SMIF pods with one vacuum type. Regarding one of these pods, the top photo, bottom photo, and opener photo of the pod are shown as Figure 15 (b), (c), and (a) on page 609 of Non-Patent Document 4, respectively. Yes.

  Further, regarding another type of pod, a photograph of the top surface and a photograph of the bottom surface thereof are shown as FIGURE 10.28 (c) and (d) on page 224 of Non-Patent Document 1, respectively. Note that both the EPL mask and the LEEPL mask can use an atmospheric type or vacuum type one-piece SMIF pod.

  When the sample is an EPL mask or a LEEPL mask, a dedicated one-sheet FOUP has not yet been put to practical use. However, it is possible to produce such a product.

Here, the structure of the one-piece SMIF pod dedicated to the EPL mask and the sample loading and unloading operations by the opener will be described.
FIG. 16 is a perspective view showing the structure of the SMIF pod 131, and FIG. 17 is a cross-sectional view of the pod taken along line A1-A1. FIG. 18 is a view as viewed in the direction B1 in FIG.

As shown in FIGS. 16 and 17, the appearance of the SMIF pod 131 has a shape in which a part below the rectangular parallelepiped protrudes in a band shape and has a container 133.
As shown in FIGS. 16 to 18, the container 133 includes an upper portion 135, side portions 137 a, 137 b, 137 c, and 137 d, and hook portions 139 a, 139 b, 139 c, and 139 d that are overhanging portions.

  As will be described later, the hooks 139a, 139b, 139c, and 139d are provided to fix the opener 171 and the SMIF pod 131 when the sample 151 in the SMIF pod 131 is introduced into the opener 171.

A door 141 is provided on the key portions 139a, 139b, 139c, and 139d via a gasket 145, and the door 141 is fixed to the key portions 139a and 139c by fixing pins 143a and 143b.
The gasket 145 prevents the atmosphere from passing between the container 133 and the door 141 when the door 141 is closed.
The gasket 145 may be fixed to the door 141 side or may be fixed to the container 133 side.

Lower holding portions 157 a and 157 b are provided on the door 141, and upper holding portions 153 a and 153 b are provided on the inner wall of the upper portion 135.
A sample 151 is provided as a sample inside the container 133. When the door is closed, the sample 151 is sandwiched between the upper holding portion 153a and the lower holding portion 157a, and is also inserted into the upper holding portion 153b and the lower holding portion 157b. It is sandwiched and fixed so as not to move in the SMIF pod 131 by the elastic force of the upper holding portions 153a and 153b.

Although not shown, there is another pair of the upper holding part and the lower holding part, and the three pairs of the upper holding part and the lower holding part are provided over the outer periphery of the sample 151 at intervals of approximately 120 degrees.
In such a case, only one of the three pairs can exist on the A1-A1 cross section of FIG. 16, but two pairs are drawn in the figure for convenience of explanation of the holding method. . The same applies to the other cross-sectional views in this specification.

  Furthermore, several pins (not shown) for sample positioning are provided on the door 141 so that the position of the sample 151 is not greatly shifted in the horizontal direction.

A structural material (that is, a container 133, a door 141, a gasket 145, an upper holding portion 153a, 153b, or the like) that is in contact with the space around the sample 151 so that the sample 151 is not chemically affected even if the sample 151 is held for a long period of time. The lower holding portions 157a and 157b) need to use a material with a small amount of gas emission.
For the atmospheric container 133, Bayon (registered trademark) or Valex (registered trademark) is used as a lightweight and transparent material that satisfies this need.

Similarly, an acrylonitrile / butadiene / styrene resin (ABS resin) is used for the atmospheric door 141 as a lightweight and strong material that satisfies this need.
The vacuum type container 133 and the door 141 are made of metal or glass because they need to have strength to withstand atmospheric pressure. Polyether ether ketone (PEEK) is used for the upper holding portions 153a and 153b and the lower holding portions 157a and 157b.
When most of the container housing is made of metal, it is desirable to provide a glass viewing window 135a on the upper portion 135 so that the sample 151 can be seen from the outside. When the upper part 135 itself is made of a transparent material, the observation window 135a is not particularly provided.

Next, the structure of the door 141 will be described.
FIG. 19 is a detailed view of the door 141.
As shown in FIG. 19, a disk-shaped rotating plate 147 is supported on a shaft 159 inside the door 141, and the rotating plate 147 can rotate about the shaft 159 in the C1 and C2 directions.

  Fixing pins 143a and 143b are provided on the door 141. When the rotating plate 147 is rotated in the direction C1 in FIG. Be drawn.

  On the other hand, when the rotating plate 147 is rotated in the C2 direction in FIG.

  The door 141 is provided with elongated holes 165a and 165b, and a part of the rotating plate 147 is exposed from the elongated holes 165a and 165b.

A portion of the rotating plate 147 exposed from the long holes 165a and 165b is provided with a driving pin hole (pod).
latch holes) 167a and 167b are provided.

  That is, by inserting a jig or the like into the drive pin holes 167a and 167b and rotating, the fixing pins 143a and 143b can be moved, the door 141 can be unlocked, and the door can be opened and closed.

  The size, arrangement, and rotatable range of the drive pin holes 167a and 167b are defined in FIGS. 2, 4 and 1 of Non-Patent Document 3.

  Since the SEMI standard does not define the fixing pins, the number, size, and arrangement of the fixing pins 143a and 143b are arbitrary, but in FIG. 19, two fixing pins are provided. There are also examples of four fixing pins.

  As shown in FIG. 19, the door 141 is provided with vent holes 161 a and 161 b into which filters 163 a and 163 b are fitted, so that the pressure of the outside air is the same as that in the container 133.

  The vacuum type SMIF pod is devised in terms of structure in order to make the inside of the pod have a lower vacuum than the atmospheric type SMIF pod. For example, it is necessary to maintain a high airtightness between the door and the container housing with a gasket or the like interposed therebetween. Therefore, no vent is provided.

Next, the opening operation of the door 141 by the opener 171 and the unloading of the sample 151 from the conventional SMIF pod 131 will be described.
20 to 22 are diagrams showing the opening operation of the door 141 by the opener 171 and the procedure for carrying out the sample 151 from the conventional SMIF pod 131. FIG.

  As shown in FIG. 20, the opener 171 has a box shape, and a port door 173 is provided on the upper portion 175.

  A frame-shaped gasket 176 is provided in the vicinity of the boundary between the upper portion 175 and the port door 173, and a frame-shaped gasket 181 is provided in the vicinity of the boundary between the upper portion 175 of the port door 173.

  The opener 171 is provided with latches 183a and 183b, and the SMIF pod 131 can be fixed by operating these latches 183a and 183b. The opener 171 is connected to the processing apparatus through a sample transfer system.

Further, the port door 173 is provided with a rotating portion 175a having two drive pins 179a and 179b, and the rotating portion 175a is supported by a shaft 177. The port door 173 can be moved up and down in the K1 and K2 directions.
As will be described in detail later, the rotating portion 175a and the drive pins 179a and 179b are used when opening and closing the door 141 of the SMIF pod 131.
Note that the inside of the opener 171 is also compatible with low vacuum.

  Next, the opening operation of the door 141 by the opener 171 and the procedure for carrying out the sample 151 from the conventional SMIF pod 131 will be described.

First, as shown in FIG. 20, the SMIF pod 131 is moved in the H1 direction of FIG. 20 by a robot arm or the like (not shown), and the hook portions 139a and 139c of the SMIF pod 131 are brought into close contact with the gasket 176 of the opener 171.
Further, the door 141 is brought into close contact with the gasket 181 of the port door 173.

  Since the key portions 139 a and 139 c are in close contact with the gasket 176 of the opener 171, it is possible to prevent outside air from entering the inside of the opener 171 and the container 133.

  At this time, the drive pins 179a and 179b are inserted into the drive pin holes 167a and 167b shown in FIG.

  Next, as shown in FIG. 21, the latches 183a and 183b are hung on the hook portions 139a and 139c, and the SMIF pod 131 is fixed to the opener 171.

  Next, as shown in FIG. 21, the rotating portion 175a rotates in the J1 direction, and accordingly, the rotating plate 147 of the door 141 rotates, and the fixing pins 143a and 143b are drawn into the door 141, and the lock is released. The

  Next, as shown in FIG. 22, the port door 173 is moved in the K1 direction by an actuator or the like (not shown), and the sample 151 is carried into the opener 171 together with the door 141.

  Thereafter, only the sample 151 is lifted and transferred by a transfer arm provided in the sample transfer system, and transferred to the processing apparatus.

  In addition, when receiving the sample 151 from the processing apparatus and storing it in the container 133, the procedure reverse to the above is taken.

Japanese Patent No. 2525284 K. Suzuki, “EPLtechnology development” (Proc. SPIE, 4754, 2002, p775-789 A. Yoshida, H. Kasahara, A. Higuchi, H. Nozue, A. Ando, and N. Shimazu, “Performance of thebeta-tool for low energy electron-beam proximity-projection lithography (LEEPL), Proc. SPIE, 5037 , 2003, p599-610 SEMIE19.4-0998E (Reapproved 0703) “200 mm Standard Mechanical Interface (SMIF)” SMI E103-0704 “Mechanical Specification for a 300 mm Single-Wafer Box System That Emulates aFOUP” “Handbook of Photomask Manufacturing Technology” ed. Syed Rizvi, CRC Press, New York, 2005 H. Sugimura, H. Eguchi, T. Yoshii, and A. Tamura, “200-mm EPL stencil mask fabrication by usingSOI substrate”, Proc. SPIE, 5130, 2003, p925-933

  However, in a conventional clean container such as the SMIF pod 131 or the FOUP, the sample 151 is held by several pairs of holding parts including the upper holding parts 153a and 153b and the lower holding parts 157a and 157b, but the upper holding part 153a. 153b and several pairs of holding parts including the lower holding parts 157a and 157b are not designed and manufactured so as to sufficiently absorb the external impact, so that the impact resistance of the container 133 is insufficient and the sample is being transported. When an impact was applied to the internal sample 151, the internal sample 151 might be damaged.

  The present invention has been made in view of such problems, and its purpose is to provide a clean container excellent in impact resistance while incorporating the results of the conventional local cleaning technology, and also in combination with an opener. Therefore, it is providing the sample transfer system excellent in impact resistance.

1st invention has a top part, a side part, and a key part provided in a bottom part, an outer container which made the opening between the key parts of a bottom face , provided inside the outer container, a sample, An inner container having a holding part for holding the first container, a first door provided in the inner container and openable / closable from the outside , the upper part of the outer container , the side part, and the key part between the inner container and the inner container And a shock absorbing material that absorbs vibration applied to the outer container , and is closer to the opening than the shock absorbing material closest to the opening between the key part of the outer container and the inner container. An impact-resistant clean container characterized in that a frame-shaped partition wall is provided to block between the outer container and the inner container .
The first door includes locking means for locking the first door and release means for releasing the locking.
The partition wall may be provided with an adsorption film that adsorbs particles.
The first door may be provided so as to exclude the space of the opening , and the bottom surface may be flush with the bottom surface of the outer container .
The outer container may further include a second door that can be opened and closed from the outside.
An opening / closing means for opening and closing the first door in conjunction with opening and closing of the second door may be provided between the first door and the second door.
The second door includes locking means for locking the second door and release means for releasing the locking.

Further, the second invention is a sample transfer system comprising a container and an opener, wherein the opener opens and closes a port door and a door that can be opened and closed from the outside of the impact-resistant clean container. A mechanism and means for placing the impact-resistant clean container on the port door and transporting the sample stored in the impact-resistant clean container to the inside of the opener. a sample transfer system, which comprises using the impact resistance clean container according to the invention.

  In the present invention, the impact-resistant clean container has a double structure having an inner container and an outer container, and a shock absorber provided between the inner container and the outer container absorbs the impact.

  ADVANTAGE OF THE INVENTION According to this invention, the clean container excellent in impact resistance can be provided, and the damage of the sample in conveyance can be prevented. In addition, local cleaning techniques can be relied upon.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail based on the drawings. FIG. 1 is a perspective view showing an impact-resistant clean container 1 according to the first embodiment, and FIG. 2 is a cross-sectional view taken along line A2-A2 of FIG.

  As shown in FIG. 1, the impact-resistant clean container 1 has a box-shaped appearance.

  As shown in FIGS. 1 and 2, the impact-resistant clean container 1 has a container 3, and the container 3 is composed of an upper part 5, side parts 7a, 7b, 7c, 7d, and hook parts 9a, 9b, 9c, 9d. ing. The side portions 7a and 7d and the hook portions 9a and 9d are not shown.

A door 17 is provided on the key portions 9a, 9b, 9c and 9d via a gasket 18, and the door 17 is fixed to the key portions 9a and 9c by fixing pins 19a and 19b.
The container 3 and the door 17 are in close contact with each other by a gasket 18, and the inside is kept at the same cleanliness as in the clean room.
The inside may be evacuated.

Buffer materials 21c and 21d are provided on the door 17, and buffer materials 21a and 21b are provided on the inner wall of the upper portion 5.
Lower holding parts 24a and 24b are provided on the upper surfaces of the cushioning materials 21c and 21d, and upper holding parts 23a and 23b are provided on the lower surfaces of the cushioning materials 21a and 21b.
Although not shown in the drawing, there is another pair of the upper holding portion and the lower holding portion, and the three pairs of the upper holding portion and the lower holding portion are provided at an interval of approximately 120 degrees over the outer periphery of the sample 151. In contrast, a cushioning material is provided.

  When the door 17 is closed, the sample 25 is sandwiched between the upper holding portion 23a and the lower holding portion 24a, and is also sandwiched between the upper holding portion 23b and the lower holding portion 24b, and the upper holding portions 23a and 23b have. It is fixed so as not to move in the impact resistant clean container 1 by an elastic force.

  A rotary plate 27 is pivotally supported on a shaft 29 inside the door 17, and the fixing pins 19 a and 19 b move as the rotary plate 27 rotates. In addition, since the structure of the door 17 is the same as that of the door 141, description is abbreviate | omitted.

  The material of the container 3 is the same as that of the SMIF pod 131.

  The upper portion 5 is provided with a glass viewing window 5a so that the sample 25 can be viewed from the outside.

  Here, buffer materials 21a, 21b are provided between the upper holding portions 23a, 23b and the container 3, and buffer materials 21c, 21d are provided between the lower holding portions 24a, 24b and the door 17, When an impact is applied to the container 3 and the door 17, the shock absorbing materials 21a, 21b, 21c, and 21d absorb the impact and prevent the impact from being transmitted to the sample 25.

The material of the buffer materials 21a, 21b, 21c, and 21d is, for example, an elastomer or plastic.
Here, the elastomer is a generic name consisting of rubber and a thermoplastic elastomer, and examples of the thermoplastic elastomer include a urethane thermoplastic elastomer.

Thus, according to the first embodiment, the impact-resistant clean container 1 absorbs shock between the container 3, the door 17, and the upper holders 23 a and 23 b and the lower holders 24 a and 24 b that hold the sample 25. Buffer materials 21a, 21b, 21c, and 21d are provided.
Accordingly, it is possible to prevent the sample 25 from being damaged.

Moreover, in 1st Embodiment, the change from the conventional clean container is slight. Therefore, the opener can be used with only slight operational changes without remodeling the conventional opener.
Furthermore, compared with the conventional container, since it is not necessary to add a large manufacturing cost, it is excellent in productivity.

  Next, a second embodiment will be described. FIG. 3 is a sectional view showing an impact-resistant clean container 30 according to the second embodiment, and FIG. 4 is a view taken in the direction of arrow B2 in FIG.

The impact-resistant clean container 30 according to the second embodiment has a double container and a buffer material provided between the containers.
In addition, the same number is attached | subjected to the element which performs the function similar to the impact-resistant clean container 1 which concerns on 1st Embodiment, and description is abbreviate | omitted.

As shown in FIGS. 3 and 4, the impact-resistant clean container 30 has an outer container 3a. The outer container 3a has an upper portion 31, side portions 33a, 33b, 33c, and 33d, and key portions 35a, 35b, 35c, and 35d. It is made up of.
The key portions 35a, 35b, 35c, and 35d have a rectangular opening 45.

A container 3 as an inner container is provided inside the outer container 3a.
The structure of the container 3 is the same as that of the SMIF pod 131.

  Cushioning materials 43a and 43b are provided between the upper part 31 of the outer container 3a and the upper part 5 of the container 3, and between the side parts 33a, 33b, 33c and 33d and the hook parts 9a, 9b, 9c and 9d. Are provided with cushioning materials 39a, 39b, 39c, 39d.

  Buffer members 41a, 41b, 41c, and 41d are provided between the key portions 35a, 35b, 35c, and 35d and the key portions 9a, 9b, 9c, and 9d.

  That is, when an impact is applied to the outer container 3a, the shock absorbing materials 39a, 39b, 39c, 39d, 41a, 41b, 41c, 41d, 43a, 43b absorb the impact and prevent the impact from being transmitted to the sample 25.

  The materials of the buffer materials 39a, 39b, 39c, 39d, 41a, 41b, 41c, 41d, 43a, 43b are the same as those of the buffer materials 21a, 21b, 21c, 21d of the first embodiment.

Next, the procedure for taking out the sample 25 from the impact resistant clean container 30 using the opener 51 will be described.
5 to 8 are diagrams showing a procedure when the sample 25 is taken out from the impact resistant clean container 30 using the opener 51. FIG.

First, the structure of the opener 51 will be described.
As shown in FIG. 5, the opener 51 has a box shape, and an upper door 55 is provided with a port door 57.
The port door 57 can be moved up and down by an actuator (not shown).

A frame-shaped gasket 59 is provided in the vicinity of the boundary of the upper portion 55 with the port door 57, and a frame-shaped gasket 61 is provided in the vicinity of the boundary of the port door 57 with the upper portion 55.
In addition, the inside of the opener 51 is maintained at the same cleanliness as in the clean room.

Further, the port door 57 is provided with a rotating portion 63, and the rotating portion 63 can rotate around a shaft 64.
The rotating part 63 is provided with drive pins 65a and 65b.

Next, a procedure for taking out the sample 25 from the impact resistant clean container 30 will be described.
First, as shown in FIG. 5, the impact-resistant clean container 30 is moved in the direction H2 in the drawing by a robot arm or the like (not shown).

Next, as shown in FIG. 6, the hooks 35 a and 35 c of the impact-resistant clean container 30 are in close contact with the gasket 59 of the opener 51.
Since the key portions 35 a and 35 c are in close contact with the gasket 59 of the opener 51, it is possible to prevent outside air from entering the inside of the opener 51 and the container 3.

Next, as shown in FIG. 6, the port door 57 rises in the I2 direction, and the gasket 61 and the door 17 are in close contact with each other as shown in FIG.
At this time, the drive pins 65a and 65b are inserted into the drive pin holes shown in FIG.

  Next, as shown in FIG. 7, the rotating portion 63 rotates in the J2 direction, and accordingly, the rotating plate 27 of the door 17 rotates, and the fixing pins 19a and 19b are drawn into the door 17 to release the lock. .

Next, as shown in FIG. 8, the port door 57 is moved in the I1 direction by an actuator (not shown) and the like, and the sample 25 is carried into the opener 51 together with the door 17.
In this way, the sample 25 can be taken out from the impact resistant clean container 30 without touching the outside air.

Thus, according to the second embodiment, the impact-resistant clean container 30 has a double structure including the container 3 and the outer container 3a, and absorbs an impact between the container 3 and the outer container 3a. Buffer materials 39a, 39b, 39c, 39d, 41a, 41b, 41c, 41d, 43a, 43b are provided.
Accordingly, the same effects as those of the first embodiment are obtained.
Furthermore, by using a double structure, it is possible to select a material suitable for the application for each of the outer container, the inner container, and the cushioning material.
For example, a material having a high buffering property and a small amount of gas release is limited as the buffer material, but more materials can be selected if the restriction of a small amount of gas release is removed.

Next, a third embodiment will be described.
FIG. 9 is a sectional view showing an impact-resistant clean container 30a according to the third embodiment, and FIG. 10 is a detailed view showing the vicinity of the partition wall 63 in FIG. In addition, the same number is attached | subjected to the element which fulfill | performs the function similar to the impact-resistant clean container 30 which concerns on 2nd Embodiment, and description is abbreviate | omitted.
The impact-resistant clean container 30a according to the third embodiment is the same as the impact-resistant clean container 30 according to the second embodiment between the key portions 35a and 35c of the outer container 3a and the key portions 9a and 9c of the container 3. A partition wall 63 is provided.

As shown in FIGS. 9 and 10, a frame-shaped partition wall 63 is provided between the key portions 9a and 9c and the key portions 35a and 35c.
By providing the partition wall 63, foreign substances such as particles generated from the buffer materials 41a and 41c can be prevented from entering the container 3 and the opener 51 when the sample 25 is taken out.

As shown in FIG. 10, an adsorption film 65 is provided on the inner wall of the partition wall 63, and foreign substances such as particles 67 that are in contact with the partition wall 63 are adsorbed by the adsorption film 65.
By providing the adsorption film 65, foreign matter such as particles 67 entering the opening 45 during transportation and adhering to the inner wall of the partition wall 63 enters the container 3 and the opener 51 when the sample 25 is taken out. Can be prevented.

As described above, according to the third embodiment, the impact-resistant clean container 30a has a double structure including the container 3 and the outer container 3a, and a buffer that absorbs the shock is provided between the container 3 and the outer container 3a. Materials 39a, 39b, 39c, 39d, 41a, 41b, 41c, 41d, 43a, 43b are provided.
Accordingly, the same effects as those of the second embodiment are obtained.

  Further, according to the third embodiment, since the frame-shaped partition wall 63 is provided between the key portions 9a and 9c and the key portions 35a and 35c, foreign matters such as particles generated from the buffer materials 41a and 41c. However, when taking out the sample 25, it can prevent entering into the container 3 and the opener 51. FIG.

Next, a fourth embodiment will be described.
FIG. 11 is a cross-sectional view showing an impact-resistant clean container 30b according to the fourth embodiment. In addition, the same number is attached | subjected to the element which fulfill | performs the function similar to the impact-resistant clean container 30 which concerns on 2nd Embodiment, and description is abbreviate | omitted.
The impact-resistant clean container 30b according to the fourth embodiment is the same as the impact-resistant clean container 30 according to the second embodiment except that the width of the door 17 is increased and the bottom surface of the door 17 and the bottom surface of the outer container are used. In this configuration, no step is generated between the portions.

  As shown in FIG. 11, the structure of the impact resistant clean container 30b according to the fourth embodiment is substantially the same as that of the impact resistant clean container 30, but the door 17a is connected to the key portions 35a, 35b, 35c, 35d. The width is thick so that there is no step between them. The key portions 35b and 35d are not shown.

  That is, the impact-resistant clean container 30b according to the fourth embodiment is the impact-resistant clean container according to the second embodiment, and the key portions 35a, 35b, and 35c in which the bottom surface of the door 17 is the bottom surface of the outer container 3a. , 35d, the same plane or slightly inside. Thus, the space of the opening 45 shown in FIG. 3 is eliminated. When the impact resistant clean container 30b is placed, the door 17a is not subjected to the entire load of the impact resistant clean container 30b.

As described above, according to the fourth embodiment, the impact-resistant clean container 30b has a double structure including the container 3 and the outer container 3a, and a buffer that absorbs shock is provided between the container 3 and the outer container 3a. Materials 39a, 39b, 39c, 39d, 41a, 41b, 41c, 41d, 43a, 43b are provided.
Accordingly, the same effects as those of the second embodiment are obtained.

  Further, according to the fourth embodiment, since the space of the opening 45 shown in FIG. 3 is excluded, there is a space area where the side surface of the outer container 3a that is in contact with the atmosphere when the opening 45 is present can be touched. It becomes smaller and the probability that dust will enter the space becomes smaller.

  Furthermore, according to the fourth embodiment, the vertical movement of the port door 173 of the opener 171 does not have to come out from the upper part 175 of the opener 171 as in the conventional SMIF pod 131. The conventional opener 171 can be used as it is.

Next, a fifth embodiment will be described.
FIG. 12 is a sectional view showing an impact-resistant clean container 30c according to the fifth embodiment.
In addition, the same number is attached | subjected to the element which fulfill | performs the function similar to the impact-resistant clean container 30 which concerns on 2nd Embodiment, and description is abbreviate | omitted.

  The impact-resistant clean container 30c according to the fifth embodiment is the impact-resistant clean container 30 according to the second embodiment except that the door 17b is further provided outside the door 17 to eliminate the space of the opening 45. It is.

As shown in FIG. 12, the outer container 3a is provided with a door 17b.
The door 17b is fixed to the bottom portion 9 by fixing pins 75a and 75b.
The structure of the door 17b is the same as that of the door 17, and a rotating plate 33b is pivotally supported on the shaft 35b inside the door 17b, and the fixing pins 75a and 75b move as the rotating plate 33b rotates. It has become.

  Cushioning materials 79 a and 79 b are provided between the door 17 and the door 17 b to prevent the impact applied to the door 17 b from being transmitted to the door 17.

Further, the rotating plate 33b and the rotating plate 27 are connected by the connecting tools 61a and 61b, and when one is rotated, the other is also rotated.
That is, by rotating the rotating plate 33b of the door 17b, the fixing pins 75a and 75b and the fixing pins 19a and 19b move, so that the door 17 and the door 17b can be opened and closed simultaneously.

Thus, according to the fifth embodiment, the impact-resistant clean container 30c has a double structure including the container 3 and the outer container 3a, and absorbs an impact between the container 3 and the outer container 3a. Buffer materials 39a, 39b, 39c, 39d, 41a, 41b, 41c, 41d, 43a, 43b are provided.
Accordingly, the same effects as those of the fourth embodiment are obtained.

  Further, according to the fifth embodiment, since the space of the opening 45 shown in FIG. 3 is excluded, there is a space area where the side surface of the outer container 3a that is in contact with the atmosphere when the opening 45 is present can be touched. It becomes smaller and the probability that dust will enter the space becomes smaller.

  Furthermore, according to the fifth embodiment, the vertical movement of the port door 173 of the opener 171 does not have to come out from the upper part 175 of the opener 171 as in the conventional SMIF pod 131. The conventional opener 171 can be used as it is.

  Further, according to the fifth embodiment, the shock absorbers 79a and 79b are provided between the door 17 and the door 17b, so that the impact from the outside is not easily transmitted to the sample 25 as compared with the fourth embodiment. .

  Next, a sixth embodiment will be described. FIG. 13 is a cross-sectional view showing an impact-resistant clean container 87 according to the sixth embodiment, and FIG. 14 is a view in the direction of arrow N in FIG.

  Unlike the impact-resistant clean container 1 according to the first embodiment, the impact-resistant clean container 87 according to the sixth embodiment is provided with a door 107 on the side portion 103 a of the container 99.

As shown in FIGS. 13 and 14, the impact-resistant clean container 87 includes an outer container 93, and the outer container 93 includes an upper portion 95, side portions 91 a, 91 b, 91 c, 91 d, and a bottom portion 97.
Note that the side portion 91a is an opening.

A container 99 as an inner container is provided inside the outer container 93, and the container 99 includes an upper part 101, side parts 103 a, 103 b, 103 c, 103 d, and a bottom part 105.
The side portion 103a is an opening.
A door 107 is provided on the side portion 103a so as to be openable and closable.

An inner frame 107a is provided inside the container 99, and a gasket 119a is provided on the surface of the inner frame 107a.
When the door 107 is closed, the door 107 is in close contact with the container 99 by the gasket 119a.

  Since the materials of the outer container 93, the container 99, and the door 107 are the same as those in the first embodiment, description thereof is omitted.

Buffer materials 109a and 109b are provided between the upper portion 95 and the upper portion 101, and buffer materials 111b, 111c and 111d are provided between the side portions 91b, 91c and 91d and the side portions 103b, 103c and 103d. Yes.
Between the bottom portion 97 and the bottom portion 105, cushioning materials 113a and 113b are provided.

Support portions 115 a and 115 b are provided on the bottom portion 105, and support portions 117 a and 117 b are provided on the inner wall of the upper portion 101.
A sample 25 is provided inside the container 99, and the sample 25 is sandwiched between the support portion 115a and the support portion 117a, and is sandwiched and fixed between the support portion 115b and the support portion 117b.

  That is, when an impact is applied to the outer container 93, the buffer materials 109a, 109b, 111b, 111c, 111d, 113a, and 113b absorb the impact and prevent the impact from being transmitted to the sample 25.

  The materials of the cushioning materials 109a, 109b, 111b, 111c, 111d, 113a, and 113b are the same as those of the cushioning materials 21a, 21b, 21c, and 21d according to the first embodiment, and thus the description thereof is omitted.

Further, a frame-shaped partition wall 119 is provided between the upper part 95 and the upper part 101, the side part 91 b and the side part 103 b, the side part 91 d and the side part 103 d, and the bottom part 97 and the bottom part 105.
Since the structure and effect of the partition wall 119 are the same as those of the partition wall 63 of the third embodiment, description thereof is omitted.

As described above, according to the sixth embodiment, the impact-resistant clean container 87 has a double structure including the container 99 and the outer container 93, and a shock absorbing buffer is provided between the container 99 and the outer container 93. Materials 109a, 109b, 111b, 111c, 111d, 113a, and 113b are provided.
Therefore, the same effects as those of the first embodiment are obtained.

  Next, the experimental results when actually performing a drop impact test using the impact resistant clean container 1 and the comparative example will be described.

Six samples were prepared, each numbered as Sample 1 to Sample 6, and three were used as a set for this test.
Since the test is a destructive test, a sample damaged in the test cannot be used again for the test, so the combination of samples in the set used for the test is not the same.
In the drop test, one end of the container or the sample was kept in contact with the floor surface, and the other end was lifted by 10 to 20 mm and then dropped freely, and the sample was maintained parallel to the floor surface. Two types of tests were carried out: a horizontal holding test in which the sample was lifted and dropped freely from a height of 10 to 50 mm. First, a sample was placed in the impact resistant clean container 1 and a drop test was performed. The result is shown in FIG.
The test results are evaluated in three stages: “◯” if the sample is not damaged, “△” if only part of the membrane is damaged, and “X” if part of the frame is damaged. It is.

  FIG. 23 shows that none of the samples is damaged by the one-side contact test or the horizontal holding test, and the impact-resistant clean container 1 absorbs the impact caused by dropping.

Next, as a first comparative example, a sample was housed in a conventional clean container (single atmospheric SMIF pod) not provided with a buffer material, and a drop test was performed. The results are shown in FIG.
From FIG. 24, it can be seen that in both the one-side contact test and the horizontal holding test, some samples were damaged, and the impact resistance was inferior to that of the impact-resistant clean container 1.

Next, as a second comparative example, a test was performed under the same conditions in a bare state without storing the sample in a container. The results are shown in FIG.
From FIG. 25, it can be seen that in both the one-side contact test and the horizontal holding test, the sample was damaged under all conditions, and the sample was easily damaged when dropped in an exposed state.

  As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

The perspective view which shows the impact-resistant clean container 1 A2-A2 sectional view of FIG. Sectional view showing impact resistant clean container 30 B2 direction arrow view of FIG. The figure which shows the procedure at the time of taking out the sample 25 from the impact-resistant clean container 1 using the opener 51. The figure which shows the procedure at the time of taking out the sample 25 from the impact-resistant clean container 1 using the opener 51. The figure which shows the procedure at the time of taking out the sample 25 from the impact-resistant clean container 1 using the opener 51. The figure which shows the procedure at the time of taking out the sample 25 from the impact-resistant clean container 1 using the opener 51. Sectional view showing impact resistant clean container 30a Detailed view showing the vicinity of the partition wall 63 in FIG. Sectional view showing impact resistant clean container 30b Sectional view showing impact resistant clean container 30c Sectional view showing impact resistant clean container 87 N direction arrow view of FIG. The figure which shows the structure of an EPL mask A perspective view showing the structure of the SMIF pod 131 A1-A1 sectional view of FIG. B1 direction arrow view of FIG. Detailed view of door 141 The figure which shows the opening procedure of the door 141 by the opener 171, and the carrying-out procedure of the sample 151 from the conventional SMIF pod 131 The figure which shows the opening procedure of the door 141 by the opener 171, and the carrying-out procedure of the sample 151 from the conventional SMIF pod 131 The figure which shows the opening procedure of the door 141 by the opener 171, and the carrying-out procedure of the sample 151 from the conventional SMIF pod 131 The figure which shows the result of storing the sample in the impact resistant clean container 1 and performing the drop test The figure which shows the result of having stored the sample in the conventional clean container (one piece of atmosphere SMIF pod) which does not provide the buffer material, and having done the drop test The figure which shows the result of having carried out the bare state drop test, without storing a sample in a container

Explanation of symbols

1 ………… Impact-resistant clean container 3 ………… Outer container 5a ……… Peeping window 7a ……… Side 9a ……… Lock 17 ……… Door 17a …… Door 17b …… Door 18… …… Gasket 19a …… Fixing pin 21a …… Cushioning material 23a …… Upper holding part 24a …… Lower holding part 25 ……… Sample 27 ……… Rotating plate 29 ……… Shaft 30 ……… Shock resistant clean Container 30a..Impact-resistant clean container 30b..Impact-resistant clean container 30c..Impact-resistant clean container 39a..Buffer material 40a .... Vent 41a .... Buffer material 51 .... Opener 53a .... Latch 55 ......... Upper part 59 ......... Gasket 61 ......... Gasket 63 ......... Partition wall 63a ...... Rotating part 65 ......... Adsorption film 65a ... Drive pin 67 ......... Particle 87 ......... Shock resistant clean container

Claims (8)

An outer container having an upper part, a side part, and a key part provided on the bottom part, and having an opening between the key parts on the bottom surface ;
An inner container provided inside the outer container and having a holding part for holding a sample;
A first door provided in the inner container and openable / closable from the outside;
A cushioning material provided between the upper part, the side part, and the key part of the outer container and the inner container and absorbing the vibration applied to the outer container;
And a frame-shaped partition wall is provided between the key part of the outer container and the inner container , closer to the opening part than the cushioning material closest to the opening part , closing the space between the outer container and the inner container. An impact-resistant clean container. The first door is
Locking means for locking the first door;
Release means for releasing the locking;
The impact-resistant clean container according to claim 1, wherein 2. The impact-resistant clean container according to claim 1, wherein the partition wall is provided with an adsorption film for adsorbing particles. The first door is provided so as to eliminate the space of the opening, the impact resistance clean container according to claim 1, wherein the bottom surface and wherein the bottom surface flush with the near Rukoto of the outer container. The impact-resistant clean container according to claim 1, wherein the outer container further includes a second door that can be opened and closed from the outside. 6. An opening / closing means for opening and closing the first door in conjunction with opening and closing of the second door is provided between the first door and the second door. The listed impact-resistant clean container. The second door is
Locking means for locking the second door;
Release means for releasing the locking;
The impact-resistant clean container according to claim 5 or 6, characterized by comprising: A sample transfer system comprising a container and an opener,
The opener is
A port door,
An opening and closing mechanism for opening and closing a door that can be opened and closed from the outside of the impact resistant clean container;
Means for placing the impact-resistant clean container on the port door and transporting the sample stored in the impact-resistant clean container into the opener;
Have
A sample transfer system using the impact-resistant clean container according to any one of claims 1 to 7 as the container.

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