JP4761810B2 - マイクロアクチュエータ - Google Patents

マイクロアクチュエータ Download PDF

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Publication number
JP4761810B2
JP4761810B2 JP2005118473A JP2005118473A JP4761810B2 JP 4761810 B2 JP4761810 B2 JP 4761810B2 JP 2005118473 A JP2005118473 A JP 2005118473A JP 2005118473 A JP2005118473 A JP 2005118473A JP 4761810 B2 JP4761810 B2 JP 4761810B2
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JP
Japan
Prior art keywords
comb
reinforcing rib
movable
comb electrode
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005118473A
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English (en)
Japanese (ja)
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JP2005341788A (ja
JP2005341788A5 (https=
Inventor
章 黒塚
由浩 虫鹿
修 梶野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2005118473A priority Critical patent/JP4761810B2/ja
Publication of JP2005341788A publication Critical patent/JP2005341788A/ja
Publication of JP2005341788A5 publication Critical patent/JP2005341788A5/ja
Application granted granted Critical
Publication of JP4761810B2 publication Critical patent/JP4761810B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2005118473A 2004-04-26 2005-04-15 マイクロアクチュエータ Expired - Fee Related JP4761810B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005118473A JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004129281 2004-04-26
JP2004129281 2004-04-26
JP2005118473A JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Publications (3)

Publication Number Publication Date
JP2005341788A JP2005341788A (ja) 2005-12-08
JP2005341788A5 JP2005341788A5 (https=) 2008-03-13
JP4761810B2 true JP4761810B2 (ja) 2011-08-31

Family

ID=35494726

Family Applications (1)

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JP2005118473A Expired - Fee Related JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Country Status (1)

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JP (1) JP4761810B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130079603A (ko) 2006-07-06 2013-07-10 가부시키가이샤 니콘 광학 디바이스, 노광 장치, 및 디바이스 제조 방법
JP5103876B2 (ja) * 2006-11-16 2012-12-19 株式会社デンソー ２次元光走査装置
JP5133814B2 (ja) 2008-08-13 2013-01-30 ラピスセミコンダクタ株式会社 可変容量素子
JP5696686B2 (ja) 2011-08-30 2015-04-08 株式会社豊田中央研究所 半導体装置
JP5988592B2 (ja) * 2012-01-19 2016-09-07 キヤノン株式会社 可動ミラー、波面補正デバイスおよび眼底検査装置
WO2016020716A1 (en) * 2014-08-04 2016-02-11 Ba-Tis Faez 3-dof mems piston-tube electrostatic microactuator
WO2019239558A1 (ja) * 2018-06-14 2019-12-19 オリンパス株式会社 光偏向器、および走査型レーザ顕微鏡
CN117270192B (zh) * 2023-11-22 2024-04-02 苏州亿波达微系统技术有限公司 一种mems微镜结构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465627A (en) * 1977-10-31 1979-05-26 Kuretake Kougiyou Kk Capillary rod appropriate as pen
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
JPH11136961A (ja) * 1997-10-24 1999-05-21 Citizen Watch Co Ltd 静電ウォブルモータ
JP2930946B1 (ja) * 1998-08-26 1999-08-09 勲 劔持 ゴルフ練習台
JP4072743B2 (ja) * 1998-11-13 2008-04-09 日本ビクター株式会社 光偏向器及びこれを用いた表示装置
JP4837839B2 (ja) * 2001-05-30 2011-12-14 三浦 秀巳 平行平板型静電アクチュエータ、ヘッドスライダ、ヘッド組立体及び磁気ディスク装置
JP3595515B2 (ja) * 2001-06-26 2004-12-02 三菱重工業株式会社 静電チャック
JP4409811B2 (ja) * 2001-08-20 2010-02-03 株式会社リコー 光走査装置、光書込装置、画像形成装置、振動ミラーチップ及び光走査モジュール

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Publication number Publication date
JP2005341788A (ja) 2005-12-08

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