JP4671624B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP4671624B2
JP4671624B2 JP2004155060A JP2004155060A JP4671624B2 JP 4671624 B2 JP4671624 B2 JP 4671624B2 JP 2004155060 A JP2004155060 A JP 2004155060A JP 2004155060 A JP2004155060 A JP 2004155060A JP 4671624 B2 JP4671624 B2 JP 4671624B2
Authority
JP
Japan
Prior art keywords
heat
heat shield
shield plate
transfer mechanism
gas transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004155060A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005337071A (ja
JP2005337071A5 (enExample
Inventor
剛志 樺澤
学 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2004155060A priority Critical patent/JP4671624B2/ja
Priority to PCT/JP2005/009148 priority patent/WO2005116448A1/ja
Publication of JP2005337071A publication Critical patent/JP2005337071A/ja
Publication of JP2005337071A5 publication Critical patent/JP2005337071A5/ja
Application granted granted Critical
Publication of JP4671624B2 publication Critical patent/JP4671624B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2004155060A 2004-05-25 2004-05-25 真空ポンプ Expired - Lifetime JP4671624B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004155060A JP4671624B2 (ja) 2004-05-25 2004-05-25 真空ポンプ
PCT/JP2005/009148 WO2005116448A1 (ja) 2004-05-25 2005-05-19 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004155060A JP4671624B2 (ja) 2004-05-25 2004-05-25 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2005337071A JP2005337071A (ja) 2005-12-08
JP2005337071A5 JP2005337071A5 (enExample) 2007-06-28
JP4671624B2 true JP4671624B2 (ja) 2011-04-20

Family

ID=35450953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004155060A Expired - Lifetime JP4671624B2 (ja) 2004-05-25 2004-05-25 真空ポンプ

Country Status (2)

Country Link
JP (1) JP4671624B2 (enExample)
WO (1) WO2005116448A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2472119B1 (en) * 2009-08-26 2016-10-12 Shimadzu Corporation Turbo-molecular pump and method of manufacturing rotor
JP5796948B2 (ja) * 2010-11-09 2015-10-21 エドワーズ株式会社 真空ポンプ
JP6069981B2 (ja) * 2012-09-10 2017-02-01 株式会社島津製作所 ターボ分子ポンプ
US9879684B2 (en) 2012-09-13 2018-01-30 Kla-Tencor Corporation Apparatus and method for shielding a controlled pressure environment
JP6942610B2 (ja) * 2017-07-14 2021-09-29 エドワーズ株式会社 真空ポンプ、該真空ポンプに適用される温度調節用制御装置、検査用治具、及び温度調節機能部の診断方法
JP7546410B2 (ja) * 2020-08-07 2024-09-06 エドワーズ株式会社 真空ポンプおよび真空ポンプ用回転翼

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732956Y2 (ja) * 1987-08-13 1995-07-31 セイコー精機株式会社 タ−ボ分子ポンプ
JPH0334699A (ja) * 1989-06-30 1991-02-14 Nec Corp 低周波水中超音波送受波器
JPH11247790A (ja) * 1998-03-04 1999-09-14 Shimadzu Corp 真空ポンプ
JP2000161286A (ja) * 1998-11-25 2000-06-13 Shimadzu Corp ターボ分子ポンプ
JP2001193686A (ja) * 2000-01-14 2001-07-17 Shimadzu Corp 真空ポンプ
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
WO2005116448A1 (ja) 2005-12-08
JP2005337071A (ja) 2005-12-08

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